JP6636913B2 - イオン注入を使用した太陽電池エミッタ領域製造 - Google Patents
イオン注入を使用した太陽電池エミッタ領域製造 Download PDFInfo
- Publication number
- JP6636913B2 JP6636913B2 JP2016520002A JP2016520002A JP6636913B2 JP 6636913 B2 JP6636913 B2 JP 6636913B2 JP 2016520002 A JP2016520002 A JP 2016520002A JP 2016520002 A JP2016520002 A JP 2016520002A JP 6636913 B2 JP6636913 B2 JP 6636913B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon layer
- layer
- implanted
- region
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 57
- 238000005468 ion implantation Methods 0.000 title description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 167
- 229910052710 silicon Inorganic materials 0.000 claims description 167
- 239000010703 silicon Substances 0.000 claims description 167
- 238000000034 method Methods 0.000 claims description 122
- 239000000758 substrate Substances 0.000 claims description 104
- 238000002513 implantation Methods 0.000 claims description 101
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 100
- 229920005591 polysilicon Polymers 0.000 claims description 81
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 70
- 239000012535 impurity Substances 0.000 claims description 70
- 230000008569 process Effects 0.000 claims description 66
- 239000002019 doping agent Substances 0.000 claims description 59
- 125000004429 atom Chemical group 0.000 claims description 51
- 238000005530 etching Methods 0.000 claims description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 26
- 229910002804 graphite Inorganic materials 0.000 claims description 23
- 239000010439 graphite Substances 0.000 claims description 23
- 238000000137 annealing Methods 0.000 claims description 22
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 22
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 20
- 229910052698 phosphorus Inorganic materials 0.000 claims description 20
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 6
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 5
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 4
- 150000001721 carbon Chemical group 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 298
- 239000007943 implant Substances 0.000 description 56
- 241000894007 species Species 0.000 description 34
- 239000000463 material Substances 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 18
- 238000000151 deposition Methods 0.000 description 16
- 229910052785 arsenic Inorganic materials 0.000 description 14
- 229910052796 boron Inorganic materials 0.000 description 14
- 238000013459 approach Methods 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 238000000059 patterning Methods 0.000 description 11
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 10
- 238000010884 ion-beam technique Methods 0.000 description 10
- 238000007654 immersion Methods 0.000 description 9
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 230000000717 retained effect Effects 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 238000001994 activation Methods 0.000 description 3
- 239000006117 anti-reflective coating Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- LISDBLOKKWTHNH-UHFFFAOYSA-N 1,3,5-Trisilacyclohexan Natural products C1[SiH2]C[SiH2]C[SiH2]1 LISDBLOKKWTHNH-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- -1 nitrogen ions Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052990 silicon hydride Inorganic materials 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 241000047703 Nonion Species 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- KSBGKOHSBWCTOP-UHFFFAOYSA-N bis(silylmethyl)silane Chemical compound [SiH3]C[SiH2]C[SiH3] KSBGKOHSBWCTOP-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 229920003257 polycarbosilane Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- HVXTXDKAKJVHLF-UHFFFAOYSA-N silylmethylsilane Chemical compound [SiH3]C[SiH3] HVXTXDKAKJVHLF-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1872—Recrystallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
[項目1]
太陽電池の交互のN型及びP型エミッタ領域の製造方法であって、
基板上にシリコン層を形成するステップと、
第1のシャドーマスクを介して、複数の第1の導電型のドーパント不純物原子を上記シリコン層に注入して、複数の第1の注入領域を形成し、上記シリコン層の複数の非注入領域を生じさせるステップと、
第2のシャドーマスクを介して、複数の第2の反対の導電型のドーパント不純物原子を上記シリコン層の上記複数の非注入領域の一部に注入して、複数の第2の注入領域を形成し、上記シリコン層の残留する複数の非注入領域を生じさせるステップと、
上記シリコン層の残留する上記複数の非注入領域を選択的エッチングプロセスによって除去し、上記シリコン層の上記複数の第1の注入領域及び上記複数の第2の注入領域を保持するステップと、
上記シリコン層の上記複数の第1の注入領域及び上記複数の第2の注入領域をアニールし、複数のドープされた多結晶シリコンエミッタ領域を形成するステップと、を含む、方法。
[項目2]
上記シリコン層を形成するステップが、水素化アモルファスシリコン層を形成するステップを含む、項目1に記載の方法。
[項目3]
上記水素化アモルファスシリコン層を形成するステップが、プラズマ化学気相成長法(PECVD)を使用するステップを含む、項目2に記載の方法。
[項目4]
上記シリコン層の上記複数の残留非注入領域を上記選択的エッチングプロセスにより除去するステップが、水酸化物系ウェットエッチング液を使用して上記基板の複数の露出部をテクスチャ化するステップを含む、項目1に記載の方法。
[項目5]
上記シリコン層の上記複数の第1の注入領域及び上記複数の第2の注入領域をアニールするステップが、上記基板の複数の露出部への低量のP型ドーパント注入を実施するステップを含む、項目1に記載の方法。
[項目6]
上記シリコン層を形成するステップが、上記基板上に配設された薄い誘電体層上に上記シリコン層を形成するステップを含み、上記基板が単結晶シリコン基板である、項目1に記載の方法。
[項目7]
上記第1及び第2のシャドーマスクを介して注入する上記ステップが、第1及び第2のグラファイトシャドーマスクを介してそれぞれ注入するステップを含み、上記第1及び第2のグラファイトシャドーマスクが、順次、上記シリコン層に近接して位置付けされるが、上記シリコン層から離れている、項目1に記載の方法。
[項目8]
上記複数のドープされた多結晶シリコンエミッタ領域上に複数の導電性コンタクトを形成するステップを更に含む、項目1に記載の方法。
[項目9]
項目1に記載の方法に従って製造される太陽電池。
[項目10]
太陽電池のエミッタ領域を製造する方法であって、
基板上にシリコン層を形成するステップと、
上記シリコン層上にカルボシラン層を形成するステップと、
シャドーマスクを介して、複数のドーパント不純物原子を上記カルボシラン層及び上記シリコン層に注入し、複数の注入済みシリコン領域及び対応する上記カルボシラン層の複数の自己整合注入領域を形成し、上記シリコン層の複数の非注入領域及び対応する上記カルボシラン層の複数の非注入領域を生じさせるステップと、
上記シリコン層の上記複数の非注入領域及び上記カルボシラン層の上記複数の非注入領域を除去するステップであって、上記除去中、上記カルボシラン層の上記複数の注入領域が上記シリコン層の上記複数の注入領域を保護する、ステップと、
上記シリコン層の上記複数の注入領域をアニーリングし、複数のドープされた多結晶シリコンエミッタ領域を形成するステップと、を含む、方法。
[項目11]
上記アニーリング後に、上記カルボシラン層の上記複数の注入領域を除去するステップと、
上記複数のドープされた多結晶シリコンエミッタ領域上に複数の導電性コンタクトを形成するステップと、を更に含む、項目10に記載の方法。
[項目12]
上記カルボシラン層の上記複数の注入領域を貫通して、上記複数のドープされた多結晶シリコンエミッタ領域上に複数の導電性コンタクトを形成するステップを更に含む、項目10に記載の方法。
[項目13]
上記シリコン層を形成するステップが、水素化アモルファスシリコン層を形成するステップを有する、項目10に記載の方法。
[項目14]
上記水素化アモルファスシリコン層を形成するステップ及び上記カルボシラン層を形成するステップが、プラズマ化学気相成長法(PECVD)を使用するステップを含む、項目13に記載の方法。
[項目15]
上記シリコン層の上記複数の非注入領域及び上記カルボシラン層の上記複数の非注入領域を除去するステップが、水酸化物系ウェットエッチング液を使用して上記基板の複数の露出部をテクスチャ化するステップを含む、項目10に記載の方法。
[項目16]
上記シリコン層を形成するステップが、上記基板上に配設された薄い誘電体層上に上記シリコン層を形成するステップを含み、上記基板が単結晶シリコン基板である、項目10に記載の方法。
[項目17]
上記シャドーマスクを介して注入するステップが、グラファイトシャドーマスクを介して注入するステップを含み、上記グラファイトシャドーマスクが、上記シリコン層に近接して位置付けされるが、上記シリコン層から離れている項目10に記載の方法。
[項目18]
項目10に記載の方法に従って製造される太陽電池。
[項目19]
バックコンタクト型太陽電池であって、
受光面及び裏面を有する単結晶シリコン基板と、
上記単結晶シリコン基板の上記裏面上に配設される薄い誘電体層と、
上記薄い誘電体層上に配設される多結晶シリコンエミッタ領域であって、上記多結晶シリコンエミッタ領域に複数の不純物原子がドープされる、多結晶シリコンエミッタ領域と、
上記多結晶シリコンエミッタ領域上に配設され、上記多結晶シリコンエミッタ領域と整合されるカルボシラン層と、
上記カルボシラン層を貫通して上記多結晶シリコンエミッタ領域上に配設される導電性コンタクト構造と、を備える、バックコンタクト型太陽電池。
[項目20]
上記カルボシラン層にも上記複数の不純物原子がドープされる、項目19に記載のバックコンタクト型太陽電池。
Claims (11)
- 太陽電池の交互のN型及びP型エミッタ領域の製造方法であって、
基板上にシリコン層を形成するステップと、
第1のシャドーマスクを介して、複数のN型のドーパント不純物原子を前記シリコン層に注入して、複数の第1の注入領域を形成し、前記シリコン層の複数の非注入領域を生じさせるステップと、
前記複数の第1の注入領域に、窒素原子若しくはイオン、炭素原子若しくはイオン、又は酸素原子若しくはイオンを含む補助不純物種を注入し、前記N型のドーパント不純物原子のみの領域である下部と、前記N型のドーパント不純物原子及び前記補助不純物種の領域である上部とを有する、変更された複数の第1の注入領域を形成するステップと、
第2のシャドーマスクを介して、複数のP型のドーパント不純物原子を前記シリコン層の前記複数の非注入領域の一部に注入して、複数の第2の注入領域を形成し、前記シリコン層の残留する複数の非注入領域を生じさせるステップと、
前記シリコン層の残留する前記複数の非注入領域を選択的エッチングプロセスによって除去し、前記シリコン層の前記変更された複数の第1の注入領域及び前記複数の第2の注入領域を保持するステップと、
前記シリコン層の前記変更された複数の第1の注入領域及び前記複数の第2の注入領域をアニールし、複数のドープされた多結晶シリコンエミッタ領域を形成するステップと、
を含み、
前記シリコン層の残留する前記複数の非注入領域を除去するステップは、前記基板の複数の露出部をテクスチャ化するステップを含む、方法。 - 太陽電池のエミッタ領域を製造する方法であって、
基板上にシリコン層を形成するステップと、
前記シリコン層上にカルボシラン層を形成するステップと、
シャドーマスクを介して、複数のドーパント不純物原子を前記カルボシラン層及び前記シリコン層に注入し、複数の注入済みシリコン領域及び対応する前記カルボシラン層の複数の自己整合注入領域を形成し、前記シリコン層の複数の非注入領域及び対応する前記カルボシラン層の複数の非注入領域を生じさせるステップと、
前記シリコン層の前記複数の非注入領域及び前記カルボシラン層の前記複数の非注入領域を除去するステップであって、前記除去中、前記カルボシラン層の複数の注入領域が前記シリコン層の複数の注入領域を保護する、ステップと、
前記シリコン層の前記複数の注入領域をアニールし、複数のドープされた多結晶シリコンエミッタ領域を形成するステップと、
を含む、方法。 - 前記シリコン層を形成するステップが、水素化アモルファスシリコン層を形成するステップを有する、請求項1又は2に記載の方法。
- 前記水素化アモルファスシリコン層を形成するステップが、プラズマ化学気相成長法(PECVD)を使用するステップを含む、請求項3に記載の方法。
- 前記シリコン層の前記複数の非注入領域を除去するステップが、水酸化物系ウェットエッチング液を使用して前記基板の複数の露出部をテクスチャ化するステップを含む、請求項1から4のうちいずれか一項に記載の方法。
- 前記シリコン層の前記複数の注入領域をアニールするステップが、前記基板の複数の露出部へのリンドーパントドライブを実施するステップを含む、請求項1から5のうちいずれか一項に記載の方法。
- 前記シリコン層を形成するステップが、前記基板上に配設された薄い誘電体層上に前記シリコン層を形成するステップを含み、前記基板が単結晶シリコン基板である、請求項1から6のうちいずれか一項に記載の方法。
- シャドーマスクを介して注入するステップが、グラファイトシャドーマスクを介して注入するステップを含み、前記グラファイトシャドーマスクが、前記シリコン層に近接して位置付けされるが、前記シリコン層から離れている請求項1から7のうちいずれか一項に記載の方法。
- 太陽電池の交互のN型及びP型エミッタ領域の製造方法であって、
基板上にシリコン層を形成するステップと、
第1のシャドーマスクを介して、複数の第1の導電型のドーパント不純物原子を前記シリコン層に注入して、複数の第1の注入領域を形成し、前記シリコン層の複数の非注入領域を生じさせるステップと、
第2のシャドーマスクを介して、複数の第2の反対の導電型のドーパント不純物原子を前記シリコン層の前記複数の非注入領域の一部に注入して、複数の第2の注入領域を形成し、前記シリコン層の残留する複数の非注入領域を生じさせるステップと、
前記シリコン層の残留する前記複数の非注入領域を選択的エッチングプロセスによって除去し、前記シリコン層の前記複数の第1の注入領域及び前記複数の第2の注入領域を保持するステップと、
前記シリコン層の前記複数の第1の注入領域及び前記複数の第2の注入領域をアニールし、複数のドープされた多結晶シリコンエミッタ領域を形成するステップと、を含み、
前記シリコン層の前記複数の第1の注入領域及び前記複数の第2の注入領域をアニールするステップが、前記基板の複数の露出部へのリンドーパントドライブを実施するステップを含む、方法。 - バックコンタクト型太陽電池であって、
受光面及び裏面を有する単結晶シリコン基板と、
前記単結晶シリコン基板の前記裏面上に配設される薄い誘電体層と、
前記薄い誘電体層上に配設される、第1の導電型のドーパント不純物原子がドープされた第1の多結晶シリコンエミッタ領域と、第2の導電型のドーパント不純物原子がドープされた第2の多結晶シリコンエミッタ領域と、
前記第1の多結晶シリコンエミッタ領域及び前記第2の多結晶シリコンエミッタ領域上に配設され、前記第1の多結晶シリコンエミッタ領域及び前記第2の多結晶シリコンエミッタ領域と整合されるカルボシラン層と、
前記カルボシラン層上に配設され、前記第1の多結晶シリコンエミッタ領域と前記第2の多結晶シリコンエミッタ領域とを絶縁する絶縁層と、
前記カルボシラン層及び前記絶縁層を貫通して前記第1の多結晶シリコンエミッタ領域及び前記第2の多結晶シリコンエミッタ領域上に配設される導電性コンタクト構造と、
を備え、
前記カルボシラン層は、前記第1の多結晶シリコンエミッタ領域及び前記第2の多結晶シリコンエミッタ領域と、前記絶縁層との間の同一階層に配置される、バックコンタクト型太陽電池。 - 基板の表面に配設された薄い誘電体層と、
前記薄い誘電体層上に配設された、第1の導電型のドーパント不純物原子がドープされた第1の注入領域と、第2の導電型のドーパント不純物原子がドープされた第2の注入領域とを有するシリコン層と、
前記シリコン層の前記第1の注入領域及び前記第2の注入領域上に配設されたカルボシラン層であって、前記カルボシラン層は前記シリコン層の前記第1の注入領域及び前記第2の注入領域と整合され、および、前記シリコン層の前記第1の注入領域及び前記第2の注入領域とは別個であり且つ区別され、
前記カルボシラン層上に配置され、前記第1の注入領域と前記第2の注入領域とを絶縁する絶縁層と、
前記シリコン層の前記第1の注入領域及び前記第2の注入領域上に前記カルボシラン層及び前記絶縁層を貫通して配設された導電性コンタクト構造と、を備え、
前記カルボシラン層は、前記第1の注入領域及び前記第2の注入領域と、前記絶縁層との間の同一階層に配置される、
太陽電池。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361913614P | 2013-12-09 | 2013-12-09 | |
US61/913,614 | 2013-12-09 | ||
US14/562,159 US9401450B2 (en) | 2013-12-09 | 2014-12-05 | Solar cell emitter region fabrication using ion implantation |
US14/562,159 | 2014-12-05 | ||
PCT/US2014/069169 WO2015088992A1 (en) | 2013-12-09 | 2014-12-08 | Solar cell emitter region fabrication using ion implantation |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019229344A Division JP7028853B2 (ja) | 2013-12-09 | 2019-12-19 | イオン注入を使用した太陽電池エミッタ領域製造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017504950A JP2017504950A (ja) | 2017-02-09 |
JP6636913B2 true JP6636913B2 (ja) | 2020-01-29 |
Family
ID=53272043
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016520002A Active JP6636913B2 (ja) | 2013-12-09 | 2014-12-08 | イオン注入を使用した太陽電池エミッタ領域製造 |
JP2019229344A Active JP7028853B2 (ja) | 2013-12-09 | 2019-12-19 | イオン注入を使用した太陽電池エミッタ領域製造 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019229344A Active JP7028853B2 (ja) | 2013-12-09 | 2019-12-19 | イオン注入を使用した太陽電池エミッタ領域製造 |
Country Status (14)
Country | Link |
---|---|
US (2) | US9401450B2 (ja) |
EP (1) | EP3080847B1 (ja) |
JP (2) | JP6636913B2 (ja) |
KR (1) | KR102407023B1 (ja) |
CN (1) | CN105659395B (ja) |
AU (1) | AU2014364086B2 (ja) |
BR (1) | BR112016013216B1 (ja) |
MX (1) | MX2016006973A (ja) |
MY (1) | MY192488A (ja) |
PH (1) | PH12016501052A1 (ja) |
SA (1) | SA516371270B1 (ja) |
TW (1) | TWI655676B (ja) |
WO (1) | WO2015088992A1 (ja) |
ZA (1) | ZA201603437B (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7851698B2 (en) * | 2008-06-12 | 2010-12-14 | Sunpower Corporation | Trench process and structure for backside contact solar cells with polysilicon doped regions |
US20220209037A1 (en) * | 2008-06-12 | 2022-06-30 | Sunpower Corporation | Trench process and structure for backside contact solar cells with polysilicon doped regions |
US9401450B2 (en) * | 2013-12-09 | 2016-07-26 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
US9577134B2 (en) * | 2013-12-09 | 2017-02-21 | Sunpower Corporation | Solar cell emitter region fabrication using self-aligned implant and cap |
US9627558B2 (en) * | 2014-04-09 | 2017-04-18 | Arizona Board Of Regents On Behalf Of Arizona State University | Methods and apparatuses for manufacturing self-aligned integrated back contact heterojunction solar cells |
US9263625B2 (en) * | 2014-06-30 | 2016-02-16 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
US9520507B2 (en) | 2014-12-22 | 2016-12-13 | Sunpower Corporation | Solar cells with improved lifetime, passivation and/or efficiency |
US20160284913A1 (en) * | 2015-03-27 | 2016-09-29 | Staffan WESTERBERG | Solar cell emitter region fabrication using substrate-level ion implantation |
KR102272433B1 (ko) * | 2015-06-30 | 2021-07-05 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
NL2015534B1 (en) * | 2015-09-30 | 2017-05-10 | Tempress Ip B V | Method of manufacturing a solar cell. |
JP2018073969A (ja) * | 2016-10-28 | 2018-05-10 | 株式会社アルバック | 太陽電池の製造方法 |
US10749052B2 (en) | 2017-02-14 | 2020-08-18 | Alliance For Sustainable Energy, Llc | Methods of forming interdigitated back contact solar cells |
US10801593B2 (en) | 2017-04-26 | 2020-10-13 | Paratech, Incorporated | Strut extender mechanism |
CN108831953B (zh) * | 2017-05-04 | 2021-04-27 | 上海凯世通半导体股份有限公司 | 太阳能电池的制作方法 |
US10714652B2 (en) * | 2017-06-21 | 2020-07-14 | Alliance For Sustainable Energy, Llc | Methods of forming interdigitated back contact layers |
JP2019110185A (ja) * | 2017-12-18 | 2019-07-04 | 株式会社アルバック | 太陽電池の製造方法 |
CN110010451A (zh) * | 2018-01-05 | 2019-07-12 | 上海凯世通半导体股份有限公司 | 掺杂方法 |
CN110010719B (zh) * | 2018-01-05 | 2021-02-19 | 上海凯世通半导体股份有限公司 | 掺杂方法 |
CN110098279A (zh) * | 2018-01-30 | 2019-08-06 | 上海凯世通半导体股份有限公司 | 太阳能电池的制作方法 |
EP3624204B1 (en) * | 2018-09-13 | 2023-04-26 | IMEC vzw | Selective deposition for interdigitated patterns in solar cells |
CN109509813A (zh) * | 2018-11-26 | 2019-03-22 | 东方日升(常州)新能源有限公司 | 一种无掩膜的p型全背电极接触晶硅太阳电池的制备方法 |
CN109671790A (zh) * | 2018-12-25 | 2019-04-23 | 浙江晶科能源有限公司 | 一种n型双面太阳能电池及其制备方法 |
US11267699B2 (en) | 2019-02-21 | 2022-03-08 | Invensense, Inc. | Modification to rough polysilicon using ion implantation and silicide |
US11329087B2 (en) | 2020-03-25 | 2022-05-10 | Globalfoundries U.S. Inc. | Photodetectors with adjacent anode-cathode pairs |
CN115667431A (zh) | 2020-05-27 | 2023-01-31 | 株式会社理光 | 白色油墨、非白色油墨、油墨组、印刷组、印刷方法及印刷装置 |
CN113871494B (zh) * | 2020-06-30 | 2024-03-15 | 泰州隆基乐叶光伏科技有限公司 | 一种太阳能电池及其制作方法 |
CN111816727A (zh) * | 2020-07-14 | 2020-10-23 | 普乐新能源科技(徐州)有限公司 | 一种基于lpcvd的高效掺杂非晶硅技术的交叉指式背接触异质结太阳电池 |
CN111739984A (zh) * | 2020-08-10 | 2020-10-02 | 浙江晶科能源有限公司 | 太阳能电池及其制作方法 |
EP4195299A1 (en) * | 2021-12-13 | 2023-06-14 | International Solar Energy Research Center Konstanz E.V. | Interdigitated back contact solar cell and method for producing an interdigitated back contact solar cell |
CN114883424B (zh) * | 2022-05-25 | 2023-11-21 | 中国科学院电工研究所 | 一种基于丝网印刷制备全背接触晶硅异质结太阳电池结构的方法 |
CN117410385B (zh) * | 2023-12-14 | 2024-02-27 | 金阳(泉州)新能源科技有限公司 | 一种去除部分掩膜层的联合钝化背接触电池的制备方法 |
Family Cites Families (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2695852A (en) | 1952-02-15 | 1954-11-30 | Bell Telephone Labor Inc | Fabrication of semiconductors for signal translating devices |
US3736425A (en) | 1972-03-27 | 1973-05-29 | Implama Ag Z U G | Screen for ion implantation |
US3790412A (en) | 1972-04-07 | 1974-02-05 | Bell Telephone Labor Inc | Method of reducing the effects of particle impingement on shadow masks |
US4086102A (en) | 1976-12-13 | 1978-04-25 | King William J | Inexpensive solar cell and method therefor |
US4448797A (en) | 1981-02-04 | 1984-05-15 | Xerox Corporation | Masking techniques in chemical vapor deposition |
US4381956A (en) | 1981-04-06 | 1983-05-03 | Motorola, Inc. | Self-aligned buried channel fabrication process |
DE3176643D1 (en) | 1981-10-30 | 1988-03-10 | Ibm Deutschland | Shadow projecting mask for ion implantation and lithography by ion beam radiation |
US4557037A (en) | 1984-10-31 | 1985-12-10 | Mobil Solar Energy Corporation | Method of fabricating solar cells |
US5907766A (en) | 1996-10-21 | 1999-05-25 | Electric Power Research Institute, Inc. | Method of making a solar cell having improved anti-reflection passivation layer |
US6087274A (en) | 1998-03-03 | 2000-07-11 | The United States Of America As Represented By The Secretary Of The Navy | Nanoscale X-Y-Z translation of nanochannel glass replica-based masks for making complex structures during patterning |
US6335534B1 (en) | 1998-04-17 | 2002-01-01 | Kabushiki Kaisha Toshiba | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes |
US6417078B1 (en) | 2000-05-03 | 2002-07-09 | Ibis Technology Corporation | Implantation process using sub-stoichiometric, oxygen doses at different energies |
JP2002203806A (ja) | 2000-10-31 | 2002-07-19 | Toshiba Corp | 半導体装置の製造方法、ステンシルマスク及びその製造方法 |
JP3785452B2 (ja) * | 2001-09-06 | 2006-06-14 | 独立行政法人産業技術総合研究所 | 芳香族ポリカルボシランを含む層間絶縁膜及びこれを用いた半導体装置 |
JP2004091821A (ja) * | 2002-08-29 | 2004-03-25 | Kyocera Corp | 薄膜デバイス用製造装置および薄膜デバイスの製造方法 |
JP2004193350A (ja) | 2002-12-11 | 2004-07-08 | Sharp Corp | 太陽電池セルおよびその製造方法 |
JP3790215B2 (ja) | 2002-12-26 | 2006-06-28 | 株式会社東芝 | 半導体装置の製造方法及び半導体製造装置 |
KR100598035B1 (ko) | 2004-02-24 | 2006-07-07 | 삼성전자주식회사 | 전하 전송 이미지 소자의 제조 방법 |
US7531216B2 (en) | 2004-07-28 | 2009-05-12 | Advantech Global, Ltd | Two-layer shadow mask with small dimension apertures and method of making and using same |
JP2006114576A (ja) | 2004-10-13 | 2006-04-27 | Ishikawajima Harima Heavy Ind Co Ltd | 多結晶シリコン太陽電池の製造方法 |
JP2007281156A (ja) | 2006-04-06 | 2007-10-25 | Japan Advanced Institute Of Science & Technology Hokuriku | 裏面電極型半導体へテロ接合太陽電池ならびにその製造方法と製造装置 |
US20080072953A1 (en) | 2006-09-27 | 2008-03-27 | Thinsilicon Corp. | Back contact device for photovoltaic cells and method of manufacturing a back contact device |
US7638438B2 (en) | 2006-12-12 | 2009-12-29 | Palo Alto Research Center Incorporated | Solar cell fabrication using extrusion mask |
JP2009035780A (ja) * | 2007-08-02 | 2009-02-19 | Sfc:Kk | 水素化アモルファスシリコンの製造方法及び製膜装置 |
WO2009029900A1 (en) | 2007-08-31 | 2009-03-05 | Applied Materials, Inc. | Improved methods of emitter formation in solar cells |
US7820460B2 (en) | 2007-09-07 | 2010-10-26 | Varian Semiconductor Equipment Associates, Inc. | Patterned assembly for manufacturing a solar cell and a method thereof |
US8987039B2 (en) * | 2007-10-12 | 2015-03-24 | Air Products And Chemicals, Inc. | Antireflective coatings for photovoltaic applications |
US7727866B2 (en) | 2008-03-05 | 2010-06-01 | Varian Semiconductor Equipment Associates, Inc. | Use of chained implants in solar cells |
US20090227061A1 (en) | 2008-03-05 | 2009-09-10 | Nicholas Bateman | Establishing a high phosphorus concentration in solar cells |
US8461032B2 (en) | 2008-03-05 | 2013-06-11 | Varian Semiconductor Equipment Associates, Inc. | Use of dopants with different diffusivities for solar cell manufacture |
JPWO2009123032A1 (ja) * | 2008-04-02 | 2011-07-28 | Jsr株式会社 | 含ケイ素重合体を含む組成物およびその硬化物 |
TW200945596A (en) * | 2008-04-16 | 2009-11-01 | Mosel Vitelic Inc | A method for making a solar cell with a selective emitter |
US7851698B2 (en) * | 2008-06-12 | 2010-12-14 | Sunpower Corporation | Trench process and structure for backside contact solar cells with polysilicon doped regions |
US7816239B2 (en) | 2008-11-20 | 2010-10-19 | Varian Semiconductor Equipment Associates, Inc. | Technique for manufacturing a solar cell |
KR101161807B1 (ko) * | 2009-08-21 | 2012-07-03 | 주식회사 효성 | 플라즈마 도핑과 확산을 이용한 후면접합 태양전지의 제조방법 및 그 태양전지 |
US8465909B2 (en) * | 2009-11-04 | 2013-06-18 | Varian Semiconductor Equipment Associates, Inc. | Self-aligned masking for solar cell manufacture |
KR20110071375A (ko) * | 2009-12-21 | 2011-06-29 | 현대중공업 주식회사 | 후면전계형 이종접합 태양전지 및 그 제조방법 |
TW201133571A (en) * | 2010-03-04 | 2011-10-01 | Varian Semiconductor Equipment | Aligning successive implants with a soft mask |
US8790957B2 (en) * | 2010-03-04 | 2014-07-29 | Sunpower Corporation | Method of fabricating a back-contact solar cell and device thereof |
US8912082B2 (en) * | 2010-03-25 | 2014-12-16 | Varian Semiconductor Equipment Associates, Inc. | Implant alignment through a mask |
US20110139231A1 (en) * | 2010-08-25 | 2011-06-16 | Daniel Meier | Back junction solar cell with selective front surface field |
US20120060904A1 (en) * | 2010-09-13 | 2012-03-15 | Smith David D | Fabrication Of Solar Cells With Silicon Nano-Particles |
US20120073650A1 (en) * | 2010-09-24 | 2012-03-29 | David Smith | Method of fabricating an emitter region of a solar cell |
KR20130135261A (ko) | 2010-11-03 | 2013-12-10 | 어플라이드 머티어리얼스, 인코포레이티드 | 실리콘 카바이드 및 실리콘 카보나이트라이드 막들을 증착하기 위한 장치 및 방법들 |
US8802486B2 (en) * | 2011-04-25 | 2014-08-12 | Sunpower Corporation | Method of forming emitters for a back-contact solar cell |
US8658458B2 (en) * | 2011-06-15 | 2014-02-25 | Varian Semiconductor Equipment Associates, Inc. | Patterned doping for polysilicon emitter solar cells |
WO2013039881A2 (en) | 2011-09-13 | 2013-03-21 | Applied Materials, Inc. | Carbosilane precursors for low temperature film deposition |
TW201319299A (zh) | 2011-09-13 | 2013-05-16 | Applied Materials Inc | 用於低溫電漿輔助沉積的活化矽前驅物 |
US9190548B2 (en) * | 2011-10-11 | 2015-11-17 | Varian Semiconductor Equipment Associates, Inc. | Method of creating two dimensional doping patterns in solar cells |
US9054255B2 (en) * | 2012-03-23 | 2015-06-09 | Sunpower Corporation | Solar cell having an emitter region with wide bandgap semiconductor material |
JP2013239476A (ja) | 2012-05-11 | 2013-11-28 | Mitsubishi Electric Corp | 光起電力装置およびその製造方法、光起電力モジュール |
US9401450B2 (en) * | 2013-12-09 | 2016-07-26 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
US9263625B2 (en) | 2014-06-30 | 2016-02-16 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
-
2014
- 2014-12-05 US US14/562,159 patent/US9401450B2/en active Active
- 2014-12-08 CN CN201480056579.1A patent/CN105659395B/zh active Active
- 2014-12-08 EP EP14869894.7A patent/EP3080847B1/en active Active
- 2014-12-08 AU AU2014364086A patent/AU2014364086B2/en active Active
- 2014-12-08 KR KR1020167014749A patent/KR102407023B1/ko active IP Right Grant
- 2014-12-08 MX MX2016006973A patent/MX2016006973A/es active IP Right Grant
- 2014-12-08 JP JP2016520002A patent/JP6636913B2/ja active Active
- 2014-12-08 WO PCT/US2014/069169 patent/WO2015088992A1/en active Application Filing
- 2014-12-08 BR BR112016013216-5A patent/BR112016013216B1/pt active IP Right Grant
- 2014-12-08 MY MYPI2016000904A patent/MY192488A/en unknown
- 2014-12-09 TW TW103142921A patent/TWI655676B/zh active
-
2016
- 2016-05-19 ZA ZA2016/03437A patent/ZA201603437B/en unknown
- 2016-06-02 PH PH12016501052A patent/PH12016501052A1/en unknown
- 2016-06-06 SA SA516371270A patent/SA516371270B1/ar unknown
- 2016-06-29 US US15/197,616 patent/US9716205B2/en active Active
-
2019
- 2019-12-19 JP JP2019229344A patent/JP7028853B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR102407023B1 (ko) | 2022-06-10 |
US20160315214A1 (en) | 2016-10-27 |
JP7028853B2 (ja) | 2022-03-02 |
WO2015088992A1 (en) | 2015-06-18 |
TW201528344A (zh) | 2015-07-16 |
EP3080847B1 (en) | 2019-04-10 |
TWI655676B (zh) | 2019-04-01 |
MX2016006973A (es) | 2016-09-27 |
AU2014364086B2 (en) | 2019-06-20 |
ZA201603437B (en) | 2018-11-28 |
US20150162483A1 (en) | 2015-06-11 |
AU2014364086A1 (en) | 2016-03-24 |
CN105659395A (zh) | 2016-06-08 |
MY192488A (en) | 2022-08-23 |
BR112016013216B1 (pt) | 2022-06-14 |
SA516371270B1 (ar) | 2021-01-14 |
JP2017504950A (ja) | 2017-02-09 |
PH12016501052B1 (en) | 2016-08-15 |
JP2020092269A (ja) | 2020-06-11 |
KR20160096084A (ko) | 2016-08-12 |
US9401450B2 (en) | 2016-07-26 |
BR112016013216A2 (ja) | 2017-08-08 |
PH12016501052A1 (en) | 2016-08-15 |
EP3080847A1 (en) | 2016-10-19 |
US9716205B2 (en) | 2017-07-25 |
EP3080847A4 (en) | 2016-10-19 |
CN105659395B (zh) | 2018-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6636913B2 (ja) | イオン注入を使用した太陽電池エミッタ領域製造 | |
AU2020277220B2 (en) | Solar cell emitter region fabrication using ion implantation | |
US20120322199A1 (en) | Patterned doping for polysilicon emitter solar cells | |
TWI647863B (zh) | 使用自對準植入體及覆蓋體之太陽能電池射極區之製備 | |
TW201603296A (zh) | 具無溝槽射極區之太陽能電池 | |
WO2017106213A1 (en) | Solar cell fabrication using laser patterning of ion-implanted etch-resistant layers and the resulting solar cells |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160610 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171124 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181002 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190205 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190507 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190703 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190730 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191011 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191119 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191219 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6636913 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |