BR112014023047A8 - método de fabricação de uma célula solar e célula solar fabricação - Google Patents

método de fabricação de uma célula solar e célula solar fabricação

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Publication number
BR112014023047A8
BR112014023047A8 BR112014023047A BR112014023047A BR112014023047A8 BR 112014023047 A8 BR112014023047 A8 BR 112014023047A8 BR 112014023047 A BR112014023047 A BR 112014023047A BR 112014023047 A BR112014023047 A BR 112014023047A BR 112014023047 A8 BR112014023047 A8 BR 112014023047A8
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BR
Brazil
Prior art keywords
solar cell
manufacturing
broadband
semiconductor substrate
semiconductor
Prior art date
Application number
BR112014023047A
Other languages
English (en)
Other versions
BR112014023047B1 (pt
Inventor
d smith David
M Bunea Marius
J Cousins Peter
M Swanson Richard
dennis Tim
Shen Yu-Chen
Original Assignee
Sunpower Corp
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Publication date
Application filed by Sunpower Corp filed Critical Sunpower Corp
Publication of BR112014023047A8 publication Critical patent/BR112014023047A8/pt
Publication of BR112014023047B1 publication Critical patent/BR112014023047B1/pt

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
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    • H01L31/0745Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
    • H01L31/0747Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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    • H01L31/0224Electrodes
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    • H01L31/02Details
    • H01L31/0224Electrodes
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    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
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    • H01L31/0682Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
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    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/546Polycrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
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    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
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  • Recrystallisation Techniques (AREA)

Abstract

método de fabricação de uma célula solar e célula solar fabricada. células solares tendo regiões emissoras compostas de material semicondutor de ampla banda larga são descritas. em um exemplo, um método inclui a formação, em uma ferramenta do processo tendo uma atmosfera controlada, uma camada dielétrica fina em uma superfície de um substrato semicondutor da célula solar. o substrato semicondutor tem uma banda larga. sem a remoção da substrato semicondutor da atmosfera controlada da ferramenta do processo, uma camada semicondutora é formada na camada dielétrica fina. a camada semicondutora tem uma banda larga de aproximadamente 0.2 elétrons volts (ev) acima da banda larga do substrato semicondutor.
BR112014023047-1A 2012-03-23 2012-12-19 Método de fabricação de uma célula solar e célula solar fabricada BR112014023047B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/429,138 2012-03-23
US13/429,138 US9054255B2 (en) 2012-03-23 2012-03-23 Solar cell having an emitter region with wide bandgap semiconductor material
PCT/US2012/070711 WO2013141917A1 (en) 2012-03-23 2012-12-19 Solar cell having an emitter region with wide bandgap semiconductor material

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Publication Number Publication Date
BR112014023047A8 true BR112014023047A8 (pt) 2021-03-16
BR112014023047B1 BR112014023047B1 (pt) 2023-01-10

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US (6) US9054255B2 (pt)
EP (1) EP2828897B1 (pt)
JP (3) JP6178400B2 (pt)
KR (3) KR102100909B1 (pt)
CN (1) CN104396024B (pt)
BR (1) BR112014023047B1 (pt)
MX (1) MX338942B (pt)
MY (2) MY194039A (pt)
PH (1) PH12014502088A1 (pt)
SG (1) SG11201405888PA (pt)
TW (1) TWI575764B (pt)
WO (1) WO2013141917A1 (pt)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9054255B2 (en) * 2012-03-23 2015-06-09 Sunpower Corporation Solar cell having an emitter region with wide bandgap semiconductor material
EP4092757A1 (en) 2013-04-03 2022-11-23 Lg Electronics Inc. Method for fabricating a solar cell
US9401450B2 (en) * 2013-12-09 2016-07-26 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US9224783B2 (en) * 2013-12-23 2015-12-29 Intermolecular, Inc. Plasma densification of dielectrics for improved dielectric loss tangent
KR101614190B1 (ko) * 2013-12-24 2016-04-20 엘지전자 주식회사 태양전지 및 이의 제조 방법
KR102173644B1 (ko) * 2014-01-29 2020-11-03 엘지전자 주식회사 태양 전지 및 이의 제조 방법
JP2015156418A (ja) * 2014-02-20 2015-08-27 株式会社ニューフレアテクノロジー 気相成長方法
US11811360B2 (en) 2014-03-28 2023-11-07 Maxeon Solar Pte. Ltd. High voltage solar modules
US9337369B2 (en) * 2014-03-28 2016-05-10 Sunpower Corporation Solar cells with tunnel dielectrics
JP6350858B2 (ja) * 2014-05-26 2018-07-04 パナソニックIpマネジメント株式会社 太陽電池の製造方法及び太陽電池
US9825191B2 (en) * 2014-06-27 2017-11-21 Sunpower Corporation Passivation of light-receiving surfaces of solar cells with high energy gap (EG) materials
US20160072000A1 (en) * 2014-09-05 2016-03-10 David D. Smith Front contact heterojunction process
US9837576B2 (en) * 2014-09-19 2017-12-05 Sunpower Corporation Solar cell emitter region fabrication with differentiated P-type and N-type architectures and incorporating dotted diffusion
KR102219804B1 (ko) 2014-11-04 2021-02-24 엘지전자 주식회사 태양 전지 및 그의 제조 방법
EP3026713B1 (en) 2014-11-28 2019-03-27 LG Electronics Inc. Solar cell and method for manufacturing the same
US9520507B2 (en) 2014-12-22 2016-12-13 Sunpower Corporation Solar cells with improved lifetime, passivation and/or efficiency
US10566483B2 (en) * 2015-03-17 2020-02-18 Lg Electronics Inc. Solar cell
US9559245B2 (en) 2015-03-23 2017-01-31 Sunpower Corporation Blister-free polycrystalline silicon for solar cells
US20160284913A1 (en) * 2015-03-27 2016-09-29 Staffan WESTERBERG Solar cell emitter region fabrication using substrate-level ion implantation
US9525083B2 (en) * 2015-03-27 2016-12-20 Sunpower Corporation Solar cell emitter region fabrication with differentiated P-type and N-type architectures and incorporating a multi-purpose passivation and contact layer
JP2016192499A (ja) * 2015-03-31 2016-11-10 学校法人明治大学 太陽電池及び太陽電池の製造方法
US10854767B2 (en) * 2015-03-31 2020-12-01 Kaneka Corporation Solar cell and method for manufacturing same
KR102272433B1 (ko) * 2015-06-30 2021-07-05 엘지전자 주식회사 태양 전지 및 이의 제조 방법
WO2017018379A1 (ja) * 2015-07-24 2017-02-02 京セラ株式会社 太陽電池素子および太陽電池モジュール
US20170098722A1 (en) * 2015-10-01 2017-04-06 Lg Electronics Inc. Solar cell
US10217878B2 (en) * 2016-04-01 2019-02-26 Sunpower Corporation Tri-layer semiconductor stacks for patterning features on solar cells
USD822890S1 (en) 2016-09-07 2018-07-10 Felxtronics Ap, Llc Lighting apparatus
CN110140223B (zh) * 2016-12-12 2022-08-12 洛桑联邦理工学院 硅异质结太阳能电池以及制造方法
CN106531816B (zh) * 2016-12-30 2019-02-05 中国科学院微电子研究所 一种背结背接触太阳能电池
EP3566249B1 (en) 2017-01-05 2023-11-29 Brilliant Light Power, Inc. Extreme and deep ultraviolet photovoltaic cell
US10775030B2 (en) 2017-05-05 2020-09-15 Flex Ltd. Light fixture device including rotatable light modules
USD877964S1 (en) 2017-08-09 2020-03-10 Flex Ltd. Lighting module
USD846793S1 (en) 2017-08-09 2019-04-23 Flex Ltd. Lighting module locking mechanism
USD862777S1 (en) 2017-08-09 2019-10-08 Flex Ltd. Lighting module wide distribution lens
USD872319S1 (en) 2017-08-09 2020-01-07 Flex Ltd. Lighting module LED light board
USD833061S1 (en) 2017-08-09 2018-11-06 Flex Ltd. Lighting module locking endcap
USD832494S1 (en) 2017-08-09 2018-10-30 Flex Ltd. Lighting module heatsink
USD832495S1 (en) 2017-08-18 2018-10-30 Flex Ltd. Lighting module locking mechanism
USD862778S1 (en) 2017-08-22 2019-10-08 Flex Ltd Lighting module lens
USD888323S1 (en) 2017-09-07 2020-06-23 Flex Ltd Lighting module wire guard
CN110634971A (zh) * 2018-05-31 2019-12-31 福建金石能源有限公司 一种背接触异质结太阳能电池及其制造方法
CN111063761A (zh) * 2018-10-17 2020-04-24 晶澳太阳能有限公司 一种太阳能电池的制备工艺
KR102102823B1 (ko) * 2018-10-30 2020-04-22 성균관대학교산학협력단 표면 구조를 이용한 선택적 에미터의 형성 방법 및 표면 구조를 이용한 선택적 에미터를 포함한 태양전지
US20230006086A1 (en) * 2019-11-20 2023-01-05 Zhejiang Jinko Solar Co., Ltd. Partial tunneling oxide layer passivation contact structure of photovoltaic cell and photovoltaic module
TWI718803B (zh) * 2019-12-09 2021-02-11 財團法人工業技術研究院 電極結構與太陽電池結構
US11824126B2 (en) 2019-12-10 2023-11-21 Maxeon Solar Pte. Ltd. Aligned metallization for solar cells
CN112071951B (zh) * 2020-08-31 2022-06-14 晶澳(扬州)太阳能科技有限公司 一种太阳能电池的制备方法和太阳能电池
US11843071B2 (en) 2021-08-04 2023-12-12 Shanghai Jinko Green Energy Enterprise Management Co., Ltd. Solar cell, manufacturing method thereof, and photovoltaic module
CN115528121A (zh) * 2021-08-04 2022-12-27 上海晶科绿能企业管理有限公司 太阳能电池及光伏组件
CN115312633B (zh) * 2022-10-11 2023-02-17 金阳(泉州)新能源科技有限公司 一种无掩膜层联合钝化背接触电池及其制备方法

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2687427B2 (ja) * 1988-05-17 1997-12-08 ソニー株式会社 半導体装置の製造方法
TW237562B (pt) * 1990-11-09 1995-01-01 Semiconductor Energy Res Co Ltd
JP2003298078A (ja) 2002-03-29 2003-10-17 Ebara Corp 光起電力素子
WO2005093856A1 (ja) * 2004-03-26 2005-10-06 Kaneka Corporation 薄膜光電変換装置の製造方法
US20060130891A1 (en) 2004-10-29 2006-06-22 Carlson David E Back-contact photovoltaic cells
US9508886B2 (en) 2007-10-06 2016-11-29 Solexel, Inc. Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam
US8637340B2 (en) 2004-11-30 2014-01-28 Solexel, Inc. Patterning of silicon oxide layers using pulsed laser ablation
US20130164883A1 (en) 2007-10-06 2013-06-27 Solexel, Inc. Laser annealing applications in high-efficiency solar cells
US20120225515A1 (en) 2004-11-30 2012-09-06 Solexel, Inc. Laser doping techniques for high-efficiency crystalline semiconductor solar cells
EP1763086A1 (en) 2005-09-09 2007-03-14 Interuniversitair Micro-Elektronica Centrum Photovoltaic cell with thick silicon oxide and silicon nitride passivation and fabrication method
US7375378B2 (en) 2005-05-12 2008-05-20 General Electric Company Surface passivated photovoltaic devices
US7468485B1 (en) * 2005-08-11 2008-12-23 Sunpower Corporation Back side contact solar cell with doped polysilicon regions
US7737357B2 (en) * 2006-05-04 2010-06-15 Sunpower Corporation Solar cell having doped semiconductor heterojunction contacts
US7786376B2 (en) 2006-08-22 2010-08-31 Solexel, Inc. High efficiency solar cells and manufacturing methods
US20100304521A1 (en) 2006-10-09 2010-12-02 Solexel, Inc. Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells
KR101362890B1 (ko) * 2007-08-28 2014-02-17 주성엔지니어링(주) 마이크로 웨이브를 이용하는 박막태양전지의 제조방법 및이를 위한 박막 증착 장치
US7851380B2 (en) * 2007-09-26 2010-12-14 Eastman Kodak Company Process for atomic layer deposition
US9455362B2 (en) 2007-10-06 2016-09-27 Solexel, Inc. Laser irradiation aluminum doping for monocrystalline silicon substrates
US20090173373A1 (en) * 2008-01-07 2009-07-09 Wladyslaw Walukiewicz Group III-Nitride Solar Cell with Graded Compositions
WO2009094578A2 (en) 2008-01-24 2009-07-30 Applied Materials, Inc. Improved hit solar cell structure
KR20100131524A (ko) * 2008-04-09 2010-12-15 어플라이드 머티어리얼스, 인코포레이티드 태양전지용의 니트라이드화된 배리어 층
US7851698B2 (en) * 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
TW201013961A (en) 2008-07-16 2010-04-01 Applied Materials Inc Hybrid heterojunction solar cell fabrication using a metal layer mask
MY159405A (en) 2009-05-29 2016-12-30 Solexel Inc Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing
CN102044579B (zh) * 2009-09-07 2013-12-18 Lg电子株式会社 太阳能电池
KR20110062598A (ko) * 2009-12-03 2011-06-10 삼성전자주식회사 적층막 제조방법, 이를 이용한 태양전지의 제조방법
US20130233378A1 (en) 2009-12-09 2013-09-12 Solexel, Inc. High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using semiconductor wafers
WO2011084531A2 (en) 2009-12-15 2011-07-14 Solexel, Inc. Mobile vacuum carriers for thin wafer processing
EP2339648A1 (en) * 2009-12-23 2011-06-29 Applied Materials, Inc. Enhanced passivation layer for wafer based solar cells, method and system for manufacturing thereof
US8686283B2 (en) 2010-05-04 2014-04-01 Silevo, Inc. Solar cell with oxide tunneling junctions
US8932724B2 (en) 2010-06-07 2015-01-13 General Atomics Reflective coating, pigment, colored composition, and process of producing a reflective pigment
US9214576B2 (en) * 2010-06-09 2015-12-15 Solarcity Corporation Transparent conducting oxide for photovoltaic devices
JP2012054424A (ja) 2010-09-01 2012-03-15 Koji Tomita 太陽電池及びその製造方法
JP2012060080A (ja) * 2010-09-13 2012-03-22 Ulvac Japan Ltd 結晶太陽電池及びその製造方法
WO2012132615A1 (ja) 2011-03-25 2012-10-04 三洋電機株式会社 光電変換装置及びその製造方法
US8802486B2 (en) * 2011-04-25 2014-08-12 Sunpower Corporation Method of forming emitters for a back-contact solar cell
US20130130430A1 (en) 2011-05-20 2013-05-23 Solexel, Inc. Spatially selective laser annealing applications in high-efficiency solar cells
US20130228221A1 (en) 2011-08-05 2013-09-05 Solexel, Inc. Manufacturing methods and structures for large-area thin-film solar cells and other semiconductor devices
US20130213469A1 (en) 2011-08-05 2013-08-22 Solexel, Inc. High efficiency solar cell structures and manufacturing methods
US9018517B2 (en) * 2011-11-07 2015-04-28 International Business Machines Corporation Silicon heterojunction photovoltaic device with wide band gap emitter
US8597970B2 (en) 2011-12-21 2013-12-03 Sunpower Corporation Hybrid polysilicon heterojunction back contact cell
US8679889B2 (en) 2011-12-21 2014-03-25 Sunpower Corporation Hybrid polysilicon heterojunction back contact cell
TWI685984B (zh) 2011-12-21 2020-02-21 美商太陽電子公司 混合式多晶矽異質接面背接觸電池
KR101654548B1 (ko) 2011-12-26 2016-09-06 솔렉셀, 인크. 태양 전지에서 향상된 광 포획을 위한 시스템 및 방법
US9054255B2 (en) * 2012-03-23 2015-06-09 Sunpower Corporation Solar cell having an emitter region with wide bandgap semiconductor material

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