BR112013031584B1 - processo para remoção reativa de camadas de carbono de um substrato, e seu uso - Google Patents

processo para remoção reativa de camadas de carbono de um substrato, e seu uso Download PDF

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Publication number
BR112013031584B1
BR112013031584B1 BR112013031584-9A BR112013031584A BR112013031584B1 BR 112013031584 B1 BR112013031584 B1 BR 112013031584B1 BR 112013031584 A BR112013031584 A BR 112013031584A BR 112013031584 B1 BR112013031584 B1 BR 112013031584B1
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BR
Brazil
Prior art keywords
substrate
gas
reactive
layers
layer
Prior art date
Application number
BR112013031584-9A
Other languages
English (en)
Portuguese (pt)
Other versions
BR112013031584A8 (pt
BR112013031584A2 (pt
Inventor
Jürgen Ramm
Beno Widrig
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of BR112013031584A2 publication Critical patent/BR112013031584A2/pt
Publication of BR112013031584A8 publication Critical patent/BR112013031584A8/pt
Publication of BR112013031584B1 publication Critical patent/BR112013031584B1/pt

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • ing And Chemical Polishing (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
BR112013031584-9A 2011-06-07 2012-05-31 processo para remoção reativa de camadas de carbono de um substrato, e seu uso BR112013031584B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011105645A DE102011105645A1 (de) 2011-06-07 2011-06-07 Entschichtungsverfahren für harte Kohlenstoffschichten
DE102011105645.2 2011-06-07
PCT/EP2012/002305 WO2012167886A1 (de) 2011-06-07 2012-05-31 Entschichtungsverfahren für harte kohlenstoffschichten

Publications (3)

Publication Number Publication Date
BR112013031584A2 BR112013031584A2 (pt) 2016-12-13
BR112013031584A8 BR112013031584A8 (pt) 2018-02-06
BR112013031584B1 true BR112013031584B1 (pt) 2020-11-03

Family

ID=47220581

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112013031584-9A BR112013031584B1 (pt) 2011-06-07 2012-05-31 processo para remoção reativa de camadas de carbono de um substrato, e seu uso

Country Status (11)

Country Link
EP (1) EP2718481B1 (https=)
JP (1) JP5933701B2 (https=)
KR (2) KR20140019018A (https=)
CN (1) CN103717788B (https=)
BR (1) BR112013031584B1 (https=)
CA (1) CA2846434C (https=)
DE (1) DE102011105645A1 (https=)
PH (1) PH12014500059A1 (https=)
RU (1) RU2606899C2 (https=)
SG (1) SG2014001168A (https=)
WO (1) WO2012167886A1 (https=)

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* Cited by examiner, † Cited by third party
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CN106796863B (zh) * 2015-04-08 2018-08-07 新明和工业株式会社 通过离子照射进行的包覆件的除膜方法及除膜装置
JP2018525528A (ja) * 2015-08-18 2018-09-06 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップＴａｔａ Ｓｔｅｅｌ Ｎｅｄｅｒｌａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｂｖ 金属ストリップの洗浄及びコーティングのための方法及び装置
RU2632702C1 (ru) * 2016-10-28 2017-10-09 Арчил Важаевич Цискарашвили Антиадгезивное антибактериальное покрытие для ортопедических имплантатов из титана и нержавеющей стали
US10347463B2 (en) * 2016-12-09 2019-07-09 Fei Company Enhanced charged particle beam processes for carbon removal
CN108987255A (zh) * 2018-06-19 2018-12-11 广东先导先进材料股份有限公司 类金刚石膜表面处理工艺
CN108754520A (zh) * 2018-06-29 2018-11-06 四川大学 硬质合金表面涂层去除方法和设备
CN114207178B (zh) * 2019-07-31 2024-06-04 欧瑞康表面处理解决方案股份公司普费菲孔 涂覆于基材上的梯级无氢碳基硬材料层
JP7422540B2 (ja) * 2019-12-26 2024-01-26 東京エレクトロン株式会社 成膜方法および成膜装置
CN111871973A (zh) * 2020-07-30 2020-11-03 成都光明光电股份有限公司 Dlc膜的脱膜方法及脱膜机
CN114645281B (zh) * 2022-04-06 2023-11-24 岭南师范学院 一种褪除金属工件表面碳膜的方法
CN115954269B (zh) * 2022-12-20 2024-08-16 西安理工大学 实现离子轰击和电子轰击辅助转换的氧等离子体刻蚀方法

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Also Published As

Publication number Publication date
KR20160017662A (ko) 2016-02-16
KR20140019018A (ko) 2014-02-13
CA2846434A1 (en) 2013-12-13
SG2014001168A (en) 2014-05-29
WO2012167886A1 (de) 2012-12-13
BR112013031584A8 (pt) 2018-02-06
EP2718481A1 (de) 2014-04-16
EP2718481B1 (de) 2017-04-05
CA2846434C (en) 2019-01-15
RU2606899C2 (ru) 2017-01-10
PH12014500059A1 (en) 2014-03-24
RU2013158315A (ru) 2015-07-20
CN103717788A (zh) 2014-04-09
CN103717788B (zh) 2016-06-29
JP2014525982A (ja) 2014-10-02
WO2012167886A8 (de) 2014-01-23
DE102011105645A1 (de) 2012-12-13
BR112013031584A2 (pt) 2016-12-13
KR101784638B1 (ko) 2017-10-11
JP5933701B2 (ja) 2016-06-15

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Legal Events

Date Code Title Description
B25D Requested change of name of applicant approved

Owner name: OERLIKON SURFACE SOLUTIONS AG, TRUEBBACH (CH)

B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B25D Requested change of name of applicant approved

Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH)

B25G Requested change of headquarter approved

Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH)

B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 31/05/2012, OBSERVADAS AS CONDICOES LEGAIS.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE A 13A ANUIDADE.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2830 DE 01-04-2025 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.