BR112013000116A2 - mecanismo de transporte de substrato contatando um único lado de um substrato de tela flexível para deposição de filme fino de rolo para rolo - Google Patents

mecanismo de transporte de substrato contatando um único lado de um substrato de tela flexível para deposição de filme fino de rolo para rolo

Info

Publication number
BR112013000116A2
BR112013000116A2 BR112013000116A BR112013000116A BR112013000116A2 BR 112013000116 A2 BR112013000116 A2 BR 112013000116A2 BR 112013000116 A BR112013000116 A BR 112013000116A BR 112013000116 A BR112013000116 A BR 112013000116A BR 112013000116 A2 BR112013000116 A2 BR 112013000116A2
Authority
BR
Brazil
Prior art keywords
substrate
roll
thin film
transport mechanism
contacting
Prior art date
Application number
BR112013000116A
Other languages
English (en)
Inventor
Eric R Dickey
Original Assignee
Lotus Applied Technology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lotus Applied Technology Llc filed Critical Lotus Applied Technology Llc
Publication of BR112013000116A2 publication Critical patent/BR112013000116A2/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
    • C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
    • C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology

Abstract

mecanismo de transporte de substrato contatando um único lado de um substrato de tela flexível para deposição de filme fino de rolo para rolo. sistemas (100, 200, 300, 400) e métodos para deposição de um filme fino em um substrato flexível (106, 206,306,406) envolve a orientação do substrato flexível ao longo de um percurso de transporte em espiral para trás e para frente entre primeira e segunda zonas de precursor espaçadas (110,112, 210,212, 310 ,312, 410, 412), de modo que o substrato transite através das primeira e segunda zonas de precursor múltiplas vezes e cada vez através de uma zona de isolamento intermediária (116, 216, 316, 416) sem contatar mecanicamente uma superfície externa (182, 382) do substrato com um mecanismo de transporte de substrato (166, 168, 170, 266, 270, 274, 276, 366, 370, 466, 470) inibindo, dessa forma, os danos mecânicos ao filme fino depositado na superfície externa, que pode aperfeiçoar o desempenho de camada protetora do filme fino.
BR112013000116A 2010-07-23 2011-07-22 mecanismo de transporte de substrato contatando um único lado de um substrato de tela flexível para deposição de filme fino de rolo para rolo BR112013000116A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36692710P 2010-07-23 2010-07-23
PCT/US2011/045049 WO2012012744A2 (en) 2010-07-23 2011-07-22 Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition

Publications (1)

Publication Number Publication Date
BR112013000116A2 true BR112013000116A2 (pt) 2016-05-24

Family

ID=45493837

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112013000116A BR112013000116A2 (pt) 2010-07-23 2011-07-22 mecanismo de transporte de substrato contatando um único lado de um substrato de tela flexível para deposição de filme fino de rolo para rolo

Country Status (8)

Country Link
US (1) US9297076B2 (pt)
EP (1) EP2596146B1 (pt)
JP (1) JP5828895B2 (pt)
KR (1) KR101791033B1 (pt)
CN (1) CN103119198B (pt)
BR (1) BR112013000116A2 (pt)
ES (1) ES2617956T3 (pt)
WO (1) WO2012012744A2 (pt)

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Also Published As

Publication number Publication date
US20120021128A1 (en) 2012-01-26
US9297076B2 (en) 2016-03-29
CN103119198B (zh) 2015-08-19
ES2617956T3 (es) 2017-06-20
WO2012012744A2 (en) 2012-01-26
EP2596146B1 (en) 2017-02-22
JP2013535575A (ja) 2013-09-12
KR20130043163A (ko) 2013-04-29
EP2596146A2 (en) 2013-05-29
KR101791033B1 (ko) 2017-10-27
WO2012012744A3 (en) 2012-04-12
CN103119198A (zh) 2013-05-22
JP5828895B2 (ja) 2015-12-09
EP2596146A4 (en) 2016-06-22

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Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2524 DE 21-05-2019 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.