CN104152844A - 一种在真空中搭载衬底的方式 - Google Patents
一种在真空中搭载衬底的方式 Download PDFInfo
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- CN104152844A CN104152844A CN201410391437.2A CN201410391437A CN104152844A CN 104152844 A CN104152844 A CN 104152844A CN 201410391437 A CN201410391437 A CN 201410391437A CN 104152844 A CN104152844 A CN 104152844A
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CN201410391437.2A CN104152844A (zh) | 2014-08-11 | 2014-08-11 | 一种在真空中搭载衬底的方式 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109371382A (zh) * | 2018-12-05 | 2019-02-22 | 电子科技大学 | 一种化学气相沉积法装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1083544A (zh) * | 1992-06-12 | 1994-03-09 | 明尼苏达州采矿制造公司 | 在基带上制多层膜的设备和方法 |
US20040201027A1 (en) * | 2003-04-11 | 2004-10-14 | Eastman Kodak Company | Apparatus and method for encapsulating an OLED formed on a flexible substrate |
US20070281089A1 (en) * | 2006-06-05 | 2007-12-06 | General Electric Company | Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
CN101406108A (zh) * | 2006-03-26 | 2009-04-08 | 罗特斯应用技术公司 | 原子层沉积系统以及用于涂覆柔性衬底的方法 |
CN103119198A (zh) * | 2010-07-23 | 2013-05-22 | 莲花应用技术有限责任公司 | 接触用于辊到辊薄膜沉积的柔性网片基材单侧的基材传送机构 |
CN103305806A (zh) * | 2013-06-28 | 2013-09-18 | 重庆墨希科技有限公司 | 一种高温下连续生长石墨烯的装置 |
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- 2014-08-11 CN CN201410391437.2A patent/CN104152844A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1083544A (zh) * | 1992-06-12 | 1994-03-09 | 明尼苏达州采矿制造公司 | 在基带上制多层膜的设备和方法 |
US20040201027A1 (en) * | 2003-04-11 | 2004-10-14 | Eastman Kodak Company | Apparatus and method for encapsulating an OLED formed on a flexible substrate |
CN101406108A (zh) * | 2006-03-26 | 2009-04-08 | 罗特斯应用技术公司 | 原子层沉积系统以及用于涂覆柔性衬底的方法 |
US20070281089A1 (en) * | 2006-06-05 | 2007-12-06 | General Electric Company | Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
CN103119198A (zh) * | 2010-07-23 | 2013-05-22 | 莲花应用技术有限责任公司 | 接触用于辊到辊薄膜沉积的柔性网片基材单侧的基材传送机构 |
CN103305806A (zh) * | 2013-06-28 | 2013-09-18 | 重庆墨希科技有限公司 | 一种高温下连续生长石墨烯的装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109371382A (zh) * | 2018-12-05 | 2019-02-22 | 电子科技大学 | 一种化学气相沉积法装置 |
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Owner name: CHANGZHOU GUOCHENG NEW MATERIAL TECHNOLOGY CO., LT Free format text: FORMER OWNER: JIANGNAN GRAPHENE RESEARCH INSTITUTE Effective date: 20150908 |
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Effective date of registration: 20150908 Address after: West Taihu science and Technology Industrial Park Road, Wujin District 213000 auspicious clouds in Jiangsu province Changzhou City No. 6 Applicant after: Changzhou into a new Mstar Technology Ltd Address before: 213149 Jiangnan graphite Institute, No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Applicant before: JiangNan Graphene Research Institute |
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Application publication date: 20141119 |