BR0207202A - Rejuvenescência de produtos de metal refratário - Google Patents

Rejuvenescência de produtos de metal refratário

Info

Publication number
BR0207202A
BR0207202A BR0207202-5A BR0207202A BR0207202A BR 0207202 A BR0207202 A BR 0207202A BR 0207202 A BR0207202 A BR 0207202A BR 0207202 A BR0207202 A BR 0207202A
Authority
BR
Brazil
Prior art keywords
refractory metal
metal products
dust
refractory
plate
Prior art date
Application number
BR0207202-5A
Other languages
English (en)
Inventor
Paul Aimone
Prabhat Kumar
Peter R Jepson
Henning Uhlenhut
Howard V Goldberg
Original Assignee
Starck H C Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Starck H C Inc filed Critical Starck H C Inc
Publication of BR0207202A publication Critical patent/BR0207202A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3491—Manufacturing of targets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • B22F2007/068—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts repairing articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Catalysts (AREA)
  • Arc-Extinguishing Devices That Are Switches (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

"REJUVENESCêNCIA DE PRODUTOS DE METAL REFRATáRIO". Produtos de metal refratário (12), tais como tântalo, sobre placas de reforço posteriores de metal condutor não-refratário (14), por exemplo, cobre, podem ser rejuvenescidos depois do consumo do metal em zonas selecionadas por preenchimento com pó (28) de zonas (18) e alta energia de aquecimento (30) a alta velocidade de varredura para sinterizar o pó adicionado, sem fusão completa do preenchimento de pó, estabelecendo assim uma microestrutura consistente com o equilíbrio do produto reivindicado e evitando a separação da placa posterior de reforço de cobre (14) e a placa de bombardeamento iónico de tântalo (12). O método de rejuvenescência pode ser aplicado a produtos de metal não-refratários que estejam sujeitos a erosão não-uniforme, ataque químico, lascamento ou outra perda de metal. A forma de tais produtos de metal refratário pode ser como placa, haste, cilindro, bloco ou outras formas à parte de alvos de borbardeamento iónico. O processo pode ser aplicado, por exemplo, a discos ou alvos de raio x (placa de molibdênio sobre substrato de carbono).
BR0207202-5A 2001-02-14 2002-02-14 Rejuvenescência de produtos de metal refratário BR0207202A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26874201P 2001-02-14 2001-02-14
PCT/US2002/004306 WO2002064287A2 (en) 2001-02-14 2002-02-14 Rejuvenation of refractory metal products

Publications (1)

Publication Number Publication Date
BR0207202A true BR0207202A (pt) 2004-01-27

Family

ID=23024267

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0207202-5A BR0207202A (pt) 2001-02-14 2002-02-14 Rejuvenescência de produtos de metal refratário

Country Status (25)

Country Link
US (1) US20020112955A1 (pt)
EP (1) EP1362132B1 (pt)
JP (1) JP2004523653A (pt)
CN (1) CN1221684C (pt)
AT (1) ATE325906T1 (pt)
AU (1) AU2002250075B2 (pt)
BG (1) BG64959B1 (pt)
BR (1) BR0207202A (pt)
CA (1) CA2437713A1 (pt)
CZ (1) CZ20032186A3 (pt)
DE (1) DE60211309T2 (pt)
DK (1) DK1362132T3 (pt)
ES (1) ES2261656T3 (pt)
HK (1) HK1062902A1 (pt)
HU (1) HUP0400730A2 (pt)
IS (1) IS6911A (pt)
MX (1) MXPA03007293A (pt)
NO (1) NO20033567D0 (pt)
NZ (1) NZ527503A (pt)
PL (1) PL363521A1 (pt)
PT (1) PT1362132E (pt)
RU (1) RU2304633C2 (pt)
SK (1) SK10062003A3 (pt)
WO (1) WO2002064287A2 (pt)
ZA (1) ZA200306259B (pt)

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Publication number Priority date Publication date Assignee Title
US7175802B2 (en) * 2001-09-17 2007-02-13 Heraeus, Inc. Refurbishing spent sputtering targets
EP2278045A1 (en) * 2002-01-24 2011-01-26 H.C. Starck Inc. methods for rejuvenating tantalum sputtering targets and rejuvenated tantalum sputtering targets
US20040016635A1 (en) * 2002-07-19 2004-01-29 Ford Robert B. Monolithic sputtering target assembly
US20040065546A1 (en) * 2002-10-04 2004-04-08 Michaluk Christopher A. Method to recover spent components of a sputter target
US7504008B2 (en) * 2004-03-12 2009-03-17 Applied Materials, Inc. Refurbishment of sputtering targets
US20060021870A1 (en) * 2004-07-27 2006-02-02 Applied Materials, Inc. Profile detection and refurbishment of deposition targets
US20060081459A1 (en) * 2004-10-18 2006-04-20 Applied Materials, Inc. In-situ monitoring of target erosion
CN101368262B (zh) 2005-05-05 2012-06-06 H.C.施塔克有限公司 向表面施加涂层的方法
EP1880035B1 (en) 2005-05-05 2021-01-20 Höganäs Germany GmbH Method for coating a substrate surface and coated product
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber
KR101065427B1 (ko) * 2005-11-07 2011-09-19 도시바 마테리알 가부시키가이샤 스퍼터링 타겟 및 그 제조 방법
DE102005055255A1 (de) * 2005-11-19 2007-05-31 Applied Materials Gmbh & Co. Kg Verfahren zum Herstellen eines Targets
US8647484B2 (en) 2005-11-25 2014-02-11 Applied Materials, Inc. Target for sputtering chamber
US20080078268A1 (en) * 2006-10-03 2008-04-03 H.C. Starck Inc. Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof
US20080145688A1 (en) 2006-12-13 2008-06-19 H.C. Starck Inc. Method of joining tantalum clade steel structures
US8197894B2 (en) 2007-05-04 2012-06-12 H.C. Starck Gmbh Methods of forming sputtering targets
US8968536B2 (en) 2007-06-18 2015-03-03 Applied Materials, Inc. Sputtering target having increased life and sputtering uniformity
JP2010536134A (ja) * 2007-08-08 2010-11-25 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 材料をｘ線源のアノードの表面に適用するための方法及び装置、並びに、アノード及びｘ線源
US8699667B2 (en) * 2007-10-02 2014-04-15 General Electric Company Apparatus for x-ray generation and method of making same
US7901552B2 (en) 2007-10-05 2011-03-08 Applied Materials, Inc. Sputtering target with grooves and intersecting channels
US8246903B2 (en) 2008-09-09 2012-08-21 H.C. Starck Inc. Dynamic dehydriding of refractory metal powders
US8043655B2 (en) * 2008-10-06 2011-10-25 H.C. Starck, Inc. Low-energy method of manufacturing bulk metallic structures with submicron grain sizes
FR2953747B1 (fr) * 2009-12-14 2012-03-23 Snecma Procede de reparation d'une aube en titane par rechargement laser et compression hip moderee
DE102010004241A1 (de) * 2010-01-08 2011-07-14 H.C. Starck GmbH, 38642 Verfahren zur Herstellung von Funktionsschichten auf der Oberfläche von Werkstücken, eine so hergestellte Funktionsschicht und ein Werkstück
US9120183B2 (en) 2011-09-29 2015-09-01 H.C. Starck Inc. Methods of manufacturing large-area sputtering targets
JP6532219B2 (ja) * 2013-11-25 2019-06-19 株式会社フルヤ金属 スパッタリングターゲットの再生方法及び再生スパッタリングターゲット
AT14301U1 (de) * 2014-07-09 2015-07-15 Plansee Se Verfahren zur Herstellung eines Bauteils
CN104439239B (zh) * 2014-11-06 2017-05-03 金堆城钼业股份有限公司 一种重复利用中频感应烧结炉钨钼废发热体的方法
DE102015008921A1 (de) * 2015-07-15 2017-01-19 Evobeam GmbH Verfahren zur additiven Herstellung von Bauteilen
US10844475B2 (en) * 2015-12-28 2020-11-24 Jx Nippon Mining & Metals Corporation Method for manufacturing sputtering target
CN105618753A (zh) * 2016-03-03 2016-06-01 中研智能装备有限公司 一种轧辊等离子3d打印再制造设备及再制造方法
DE102016121951A1 (de) * 2016-11-15 2018-05-17 Cl Schutzrechtsverwaltungs Gmbh Vorrichtung zur additiven Herstellung dreidimensionaler Objekte
JP6650141B1 (ja) * 2019-01-10 2020-02-19 株式会社ティー・オール 使用済み成膜用ターゲットの充填式再生方法
JP2022523357A (ja) * 2019-02-22 2022-04-22 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン 物理的気相成長（ｐｖｄ）用ターゲットの製造方法
CN110523987B (zh) * 2019-09-27 2021-02-05 华中科技大学 一种用于致密材料制备的激光烧结同步压制增材制造系统
CN111940745B (zh) * 2019-12-30 2024-01-19 宁夏东方钽业股份有限公司 大松装冶金级钽粉的制造方法
CN112522698B (zh) * 2020-11-26 2023-04-25 江苏科技大学 一种超声振动辅助激光熔覆钨钽铌合金装置及方法

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JP3827725B2 (ja) * 1995-05-18 2006-09-27 旭硝子セラミックス株式会社 スパッタリング用ターゲットの製造方法
DE19626732B4 (de) * 1996-07-03 2009-01-29 W.C. Heraeus Gmbh Vorrichtung und Verfahren zum Herstellen und Recyclen von Sputtertargets
US6348113B1 (en) * 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
DE19925330A1 (de) * 1999-06-02 2000-12-07 Leybold Materials Gmbh Verfahren zur Herstellung oder zum Recyceln von Sputtertargets

Also Published As

Publication number Publication date
US20020112955A1 (en) 2002-08-22
BG108059A (en) 2005-04-30
IS6911A (is) 2003-08-13
NZ527503A (en) 2004-07-30
DE60211309T2 (de) 2007-05-24
EP1362132A2 (en) 2003-11-19
CZ20032186A3 (cs) 2004-02-18
CA2437713A1 (en) 2002-08-22
PL363521A1 (en) 2004-11-29
ATE325906T1 (de) 2006-06-15
HUP0400730A2 (en) 2004-08-30
CN1491294A (zh) 2004-04-21
MXPA03007293A (es) 2005-09-08
PT1362132E (pt) 2006-09-29
HK1062902A1 (en) 2004-12-03
ZA200306259B (en) 2004-08-13
SK10062003A3 (sk) 2004-03-02
BG64959B1 (bg) 2006-10-31
EP1362132B1 (en) 2006-05-10
WO2002064287A3 (en) 2002-10-10
WO2002064287A2 (en) 2002-08-22
NO20033567L (no) 2003-08-12
DE60211309D1 (de) 2006-06-14
RU2304633C2 (ru) 2007-08-20
NO20033567D0 (no) 2003-08-12
EP1362132A4 (en) 2004-07-28
CN1221684C (zh) 2005-10-05
DK1362132T3 (da) 2006-09-11
JP2004523653A (ja) 2004-08-05
AU2002250075B2 (en) 2007-03-29
ES2261656T3 (es) 2006-11-16
RU2003127947A (ru) 2005-04-10

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Legal Events

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B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

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B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 DA RPI 2055 DE 25/05/2010.