BE890887A - Procede permettant de former une liaison par fil - Google Patents

Procede permettant de former une liaison par fil

Info

Publication number
BE890887A
BE890887A BE0/206365A BE206365A BE890887A BE 890887 A BE890887 A BE 890887A BE 0/206365 A BE0/206365 A BE 0/206365A BE 206365 A BE206365 A BE 206365A BE 890887 A BE890887 A BE 890887A
Authority
BE
Belgium
Prior art keywords
forming
wire link
link
wire
Prior art date
Application number
BE0/206365A
Other languages
English (en)
French (fr)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of BE890887A publication Critical patent/BE890887A/fr

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
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    • H01L2224/45001Core members of the connector
    • H01L2224/4501Shape
    • H01L2224/45012Cross-sectional shape
    • H01L2224/45015Cross-sectional shape being circular
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    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
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    • H01L2924/30105Capacitance
BE0/206365A 1980-10-29 1981-10-27 Procede permettant de former une liaison par fil BE890887A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8005922A NL8005922A (nl) 1980-10-29 1980-10-29 Werkwijze voor het vormen van een draadverbinding.

Publications (1)

Publication Number Publication Date
BE890887A true BE890887A (fr) 1982-04-27

Family

ID=19836074

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/206365A BE890887A (fr) 1980-10-29 1981-10-27 Procede permettant de former une liaison par fil

Country Status (18)

Country Link
JP (1) JPS5916409B2 (de)
KR (1) KR890000585B1 (de)
AU (1) AU546818B2 (de)
BE (1) BE890887A (de)
BR (1) BR8106902A (de)
CA (1) CA1178664A (de)
CH (1) CH654142A5 (de)
DD (1) DD205294A5 (de)
DE (1) DE3141842A1 (de)
ES (1) ES506580A0 (de)
FR (1) FR2493044B1 (de)
GB (1) GB2086297B (de)
HK (1) HK40885A (de)
IT (1) IT1139570B (de)
MY (1) MY8500623A (de)
NL (1) NL8005922A (de)
PL (1) PL133893B1 (de)
SG (1) SG21984G (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4476365A (en) * 1982-10-08 1984-10-09 Fairchild Camera & Instrument Corp. Cover gas control of bonding ball formation
US4549059A (en) * 1982-11-24 1985-10-22 Nec Corporation Wire bonder with controlled atmosphere
US4476366A (en) * 1983-02-01 1984-10-09 Fairchild Camera & Instrument Corp. Controlled bonding wire ball formation
US4594493A (en) * 1983-07-25 1986-06-10 Fairchild Camera & Instrument Corp. Method and apparatus for forming ball bonds
FR2555813B1 (fr) * 1983-09-28 1986-06-20 Hitachi Ltd Dispositif a semi-conducteurs et procede de fabrication d'un tel dispositif
US4705204A (en) * 1985-03-01 1987-11-10 Mitsubishi Denki Kabushiki Kaisha Method of ball forming for wire bonding
US5031821A (en) * 1988-08-19 1991-07-16 Hitachi, Ltd. Semiconductor integrated circuit device, method for producing or assembling same, and producing or assembling apparatus for use in the method
US5628922A (en) * 1995-07-14 1997-05-13 Motorola, Inc. Electrical flame-off wand
DE29608277U1 (de) * 1996-04-30 1996-09-19 F&K Delvotec Bondtechnik Gmbh Vorrichtung zum Ball-Bonden
JP2003163235A (ja) * 2001-11-29 2003-06-06 Shinkawa Ltd ワイヤボンディング装置
TWI229022B (en) * 2002-06-20 2005-03-11 Esec Trading Sa Device with electrodes for the formation of a ball at the end of a wire
WO2014054305A1 (ja) * 2012-10-05 2014-04-10 株式会社新川 酸化防止ガス吹き出しユニット

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH568656A5 (en) * 1974-03-20 1975-10-31 Transistor Ag Welding of contact blobs to semiconductor lead wires - uses electric DC light arc of preset current strength for melting lead wire end
NL7406783A (nl) * 1974-05-21 1975-11-25 Philips Nv Werkwijze voor het aanbrengen van een draad- verbinding aan een halfgeleiderinrichting.
GB1536872A (en) * 1975-05-15 1978-12-20 Welding Inst Electrical inter-connection method and apparatus
GB1468974A (en) * 1975-05-23 1977-03-30 Ferranti Ltd Manufacture of semiconductor devices
GB1600021A (en) * 1977-07-26 1981-10-14 Welding Inst Electrical inter-connection method and apparatus

Also Published As

Publication number Publication date
IT8124731A0 (it) 1981-10-27
PL133893B1 (en) 1985-07-31
JPS5916409B2 (ja) 1984-04-16
MY8500623A (en) 1985-12-31
GB2086297B (en) 1983-12-21
BR8106902A (pt) 1982-07-13
ES8301390A1 (es) 1982-11-16
CH654142A5 (de) 1986-01-31
HK40885A (en) 1985-05-31
AU546818B2 (en) 1985-09-19
NL8005922A (nl) 1982-05-17
DE3141842C2 (de) 1990-09-20
KR890000585B1 (ko) 1989-03-21
AU7689381A (en) 1982-05-06
DE3141842A1 (de) 1982-10-21
GB2086297A (en) 1982-05-12
CA1178664A (en) 1984-11-27
FR2493044A1 (fr) 1982-04-30
PL233586A1 (de) 1982-05-10
DD205294A5 (de) 1983-12-21
ES506580A0 (es) 1982-11-16
IT1139570B (it) 1986-09-24
SG21984G (en) 1985-01-04
KR830008394A (ko) 1983-11-18
FR2493044B1 (fr) 1986-03-28
JPS57102036A (en) 1982-06-24

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Owner name: N.V. PHILIPS GLOEILAMPENFABRIEKEN

Effective date: 19871031