AU8628198A - New oxime sulfonates and the use thereof as latent sulfonic acids - Google Patents
New oxime sulfonates and the use thereof as latent sulfonic acidsInfo
- Publication number
- AU8628198A AU8628198A AU86281/98A AU8628198A AU8628198A AU 8628198 A AU8628198 A AU 8628198A AU 86281/98 A AU86281/98 A AU 86281/98A AU 8628198 A AU8628198 A AU 8628198A AU 8628198 A AU8628198 A AU 8628198A
- Authority
- AU
- Australia
- Prior art keywords
- sulfonic acids
- oxime sulfonates
- new oxime
- latent sulfonic
- latent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- -1 oxime sulfonates Chemical class 0.000 title 1
- 150000003460 sulfonic acids Chemical class 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D207/00—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D207/02—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D207/44—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having three double bonds between ring members or between ring members and non-ring members
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/63—Esters of sulfonic acids
- C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
- C07C309/65—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a saturated carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/63—Esters of sulfonic acids
- C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
- C07C309/65—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a saturated carbon skeleton
- C07C309/66—Methanesulfonates
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/63—Esters of sulfonic acids
- C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
- C07C309/73—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton to carbon atoms of non-condensed six-membered aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C323/00—Thiols, sulfides, hydropolysulfides or polysulfides substituted by halogen, oxygen or nitrogen atoms, or by sulfur atoms not being part of thio groups
- C07C323/50—Thiols, sulfides, hydropolysulfides or polysulfides substituted by halogen, oxygen or nitrogen atoms, or by sulfur atoms not being part of thio groups containing thio groups and carboxyl groups bound to the same carbon skeleton
- C07C323/62—Thiols, sulfides, hydropolysulfides or polysulfides substituted by halogen, oxygen or nitrogen atoms, or by sulfur atoms not being part of thio groups containing thio groups and carboxyl groups bound to the same carbon skeleton having the sulfur atom of at least one of the thio groups bound to a carbon atom of a six-membered aromatic ring of the carbon skeleton
- C07C323/63—Thiols, sulfides, hydropolysulfides or polysulfides substituted by halogen, oxygen or nitrogen atoms, or by sulfur atoms not being part of thio groups containing thio groups and carboxyl groups bound to the same carbon skeleton having the sulfur atom of at least one of the thio groups bound to a carbon atom of a six-membered aromatic ring of the carbon skeleton the carbon skeleton being further substituted by nitrogen atoms, not being part of nitro or nitroso groups
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D213/00—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members
- C07D213/90—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having more than three double bonds between ring members or between ring members and non-ring members
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D333/00—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom
- C07D333/02—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings
- C07D333/04—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings not substituted on the ring sulphur atom
- C07D333/26—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings not substituted on the ring sulphur atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
- C07D333/42—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings not substituted on the ring sulphur atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms with nitro or nitroso radicals directly attached to ring carbon atoms
- C07D333/44—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom not condensed with other rings not substituted on the ring sulphur atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms with nitro or nitroso radicals directly attached to ring carbon atoms attached in position 5
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/117—Free radical
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/12—Nitrogen compound containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/122—Sulfur compound containing
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Materials For Photolithography (AREA)
- Heterocyclic Compounds Containing Sulfur Atoms (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Nitrogen And Oxygen As The Only Ring Hetero Atoms (AREA)
- Indole Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97810422 | 1997-07-01 | ||
| EP97810422 | 1997-07-01 | ||
| PCT/EP1998/003750 WO1999001429A1 (en) | 1997-07-01 | 1998-06-19 | New oxime sulfonates and the use thereof as latent sulfonic acids |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU8628198A true AU8628198A (en) | 1999-01-25 |
Family
ID=8230280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU86281/98A Abandoned AU8628198A (en) | 1997-07-01 | 1998-06-19 | New oxime sulfonates and the use thereof as latent sulfonic acids |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6004724A (https=) |
| EP (1) | EP0993445B1 (https=) |
| JP (1) | JP4541457B2 (https=) |
| KR (2) | KR100740017B1 (https=) |
| AU (1) | AU8628198A (https=) |
| DE (1) | DE69807489T2 (https=) |
| TW (1) | TW550439B (https=) |
| WO (1) | WO1999001429A1 (https=) |
Families Citing this family (123)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6315926B1 (en) * | 1997-01-15 | 2001-11-13 | Dsm N.V. | Radiation curable conductive coating dispersion, process for its preparation and coatings made of it |
| JP3853967B2 (ja) * | 1998-04-13 | 2006-12-06 | 富士写真フイルム株式会社 | 熱硬化性組成物およびこれを用いた平版印刷版用原版ならびにスルホン酸エステル化合物 |
| DE69904073T2 (de) * | 1998-10-29 | 2003-07-17 | Ciba Speciality Chemicals Holding Inc., Basel | Oximderivate und ihre verwendung als latente saüre |
| JP2000275864A (ja) * | 1999-01-22 | 2000-10-06 | Kodak Polychrome Graphics Japan Ltd | 印刷刷版作製方法 |
| AU4102100A (en) * | 1999-03-03 | 2000-09-21 | Ciba Specialty Chemicals Holding Inc. | Oxime derivatives and the use thereof as photoinitiators |
| SG78412A1 (en) * | 1999-03-31 | 2001-02-20 | Ciba Sc Holding Ag | Oxime derivatives and the use thereof as latent acids |
| NL1014545C2 (nl) * | 1999-03-31 | 2002-02-26 | Ciba Sc Holding Ag | Oxim-derivaten en de toepassing daarvan als latente zuren. |
| US6797451B2 (en) * | 1999-07-30 | 2004-09-28 | Hynix Semiconductor Inc. | Reflection-inhibiting resin used in process for forming photoresist pattern |
| JP2002202603A (ja) * | 2000-10-23 | 2002-07-19 | Jsr Corp | 感放射線性樹脂組成物 |
| DK1392675T3 (da) * | 2001-06-01 | 2005-04-04 | Ciba Sc Holding Ag | Substituerede oximderivater og anvendelsen deraf som latente syrer |
| US6824954B2 (en) * | 2001-08-23 | 2004-11-30 | Jsr Corporation | Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same |
| JP3849486B2 (ja) * | 2001-10-19 | 2006-11-22 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
| AU2003206787A1 (en) * | 2002-02-06 | 2003-09-02 | Ciba Specialty Chemicals Holding Inc. | Sulfonate derivatives and the use therof as latent acids |
| KR100698444B1 (ko) * | 2002-03-22 | 2007-03-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 화학 증폭 레지스트 재료용 광산 발생제, 및 이것을사용한 레지스트 재료 및 패턴 형성 방법 |
| TW200405128A (en) | 2002-05-01 | 2004-04-01 | Shinetsu Chemical Co | Novel sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process |
| US20030232129A1 (en) * | 2002-06-12 | 2003-12-18 | Farzad Parsapour | Method of manufacturing a color filter cathode ray tube (CRT) |
| JP3991213B2 (ja) * | 2002-08-09 | 2007-10-17 | 信越化学工業株式会社 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法 |
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| JP2004334060A (ja) * | 2003-05-12 | 2004-11-25 | Shin Etsu Chem Co Ltd | 化学増幅型レジスト用光酸発生剤及びそれを含有するレジスト材料並びにパターン形成方法 |
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| US7285368B2 (en) * | 2003-06-12 | 2007-10-23 | Shin-Etsu Chemical Co., Ltd. | Polymerizable ester having sulfonamide structure, polymer, resist composition and patterning process |
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| JP4359467B2 (ja) * | 2003-08-28 | 2009-11-04 | 信越化学工業株式会社 | 新規スルホニルジアゾメタン化合物、光酸発生剤、並びにそれを用いたレジスト材料及びパターン形成方法。 |
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| KR20070064596A (ko) * | 2004-08-11 | 2007-06-21 | 시바 스페셜티 케미칼스 홀딩 인크. | 아조 커플링 반응에 기초하는 시간-온도 인디케이터를기재에 인쇄하는 방법 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4540598A (en) * | 1983-08-17 | 1985-09-10 | Ciba-Geigy Corporation | Process for curing acid-curable finishes |
| EP0199672B1 (de) * | 1985-04-12 | 1988-06-01 | Ciba-Geigy Ag | Oximsulfonate mit reaktiven Gruppen |
| DE4014649A1 (de) * | 1990-05-08 | 1991-11-14 | Hoechst Ag | Neue mehrfunktionelle verbindungen mit (alpha)-diazo-ss-ketoester- und sulfonsaeureester-einheiten, verfahren zu ihrer herstellung und deren verwendung |
| US5198402A (en) * | 1991-10-18 | 1993-03-30 | Hitachi Chemical Company Ltd. | Aryl triflate compound, radiologically acid producing agent, radiologically acid producing agent system, and radiosensitive composition |
| EP0571330B1 (de) * | 1992-05-22 | 1999-04-07 | Ciba SC Holding AG | Hochauflösender I-Linien Photoresist mit höherer Empfindlichkeit |
| JP3830183B2 (ja) * | 1995-09-29 | 2006-10-04 | 東京応化工業株式会社 | オキシムスルホネート化合物及びレジスト用酸発生剤 |
| MY117352A (en) * | 1995-10-31 | 2004-06-30 | Ciba Sc Holding Ag | Oximesulfonic acid esters and the use thereof as latent sulfonic acids. |
| JP3875271B2 (ja) * | 1996-09-02 | 2007-01-31 | チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド | 高感度の高解像度i線ホトレジスト用のアルキルスルホニルオキシム類 |
-
1998
- 1998-06-02 TW TW087108592A patent/TW550439B/zh not_active IP Right Cessation
- 1998-06-19 WO PCT/EP1998/003750 patent/WO1999001429A1/en not_active Ceased
- 1998-06-19 KR KR1019997012590A patent/KR100740017B1/ko not_active Expired - Lifetime
- 1998-06-19 EP EP98937513A patent/EP0993445B1/en not_active Expired - Lifetime
- 1998-06-19 JP JP50624099A patent/JP4541457B2/ja not_active Expired - Lifetime
- 1998-06-19 AU AU86281/98A patent/AU8628198A/en not_active Abandoned
- 1998-06-19 KR KR1020067010506A patent/KR100746506B1/ko not_active Expired - Lifetime
- 1998-06-19 DE DE69807489T patent/DE69807489T2/de not_active Expired - Lifetime
- 1998-06-25 US US09/104,676 patent/US6004724A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0993445B1 (en) | 2002-08-28 |
| TW550439B (en) | 2003-09-01 |
| KR20010014409A (ko) | 2001-02-26 |
| KR100746506B1 (ko) | 2007-08-07 |
| KR20060064700A (ko) | 2006-06-13 |
| JP4541457B2 (ja) | 2010-09-08 |
| EP0993445A1 (en) | 2000-04-19 |
| US6004724A (en) | 1999-12-21 |
| JP2002508774A (ja) | 2002-03-19 |
| KR100740017B1 (ko) | 2007-07-18 |
| DE69807489T2 (de) | 2003-04-10 |
| WO1999001429A1 (en) | 1999-01-14 |
| DE69807489D1 (de) | 2002-10-02 |
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