AU4589897A - Multi-oxidizer slurry for chemical mechanical polishing - Google Patents

Multi-oxidizer slurry for chemical mechanical polishing

Info

Publication number
AU4589897A
AU4589897A AU45898/97A AU4589897A AU4589897A AU 4589897 A AU4589897 A AU 4589897A AU 45898/97 A AU45898/97 A AU 45898/97A AU 4589897 A AU4589897 A AU 4589897A AU 4589897 A AU4589897 A AU 4589897A
Authority
AU
Australia
Prior art keywords
mechanical polishing
chemical mechanical
oxidizer slurry
oxidizer
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU45898/97A
Other languages
English (en)
Inventor
Vlasta Brusic Kaufman
Shumin Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cabot Corp
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/718,937 external-priority patent/US5783489A/en
Priority claimed from US08/800,562 external-priority patent/US6033596A/en
Application filed by Cabot Corp filed Critical Cabot Corp
Publication of AU4589897A publication Critical patent/AU4589897A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AU45898/97A 1996-09-24 1997-09-23 Multi-oxidizer slurry for chemical mechanical polishing Abandoned AU4589897A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US08718937 1996-09-24
US08/718,937 US5783489A (en) 1996-09-24 1996-09-24 Multi-oxidizer slurry for chemical mechanical polishing
US08/800,562 US6033596A (en) 1996-09-24 1997-02-18 Multi-oxidizer slurry for chemical mechanical polishing
US08800562 1997-02-18
US08890778 1997-07-11
US08/890,778 US6039891A (en) 1996-09-24 1997-07-11 Multi-oxidizer precursor for chemical mechanical polishing
PCT/US1997/017018 WO1998013536A1 (fr) 1996-09-24 1997-09-23 Pate de polissage chimiomecanique contenant des oxydants multiples

Publications (1)

Publication Number Publication Date
AU4589897A true AU4589897A (en) 1998-04-17

Family

ID=27418986

Family Applications (1)

Application Number Title Priority Date Filing Date
AU45898/97A Abandoned AU4589897A (en) 1996-09-24 1997-09-23 Multi-oxidizer slurry for chemical mechanical polishing

Country Status (9)

Country Link
US (2) US6039891A (fr)
EP (1) EP0831136A3 (fr)
JP (1) JPH10226784A (fr)
CN (1) CN1238812A (fr)
AU (1) AU4589897A (fr)
ID (1) ID18410A (fr)
IL (1) IL121813A0 (fr)
TW (1) TW438880B (fr)
WO (1) WO1998013536A1 (fr)

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CN102452036B (zh) * 2010-10-29 2016-08-24 安集微电子（上海）有限公司 一种钨化学机械抛光方法
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Also Published As

Publication number Publication date
EP0831136A3 (fr) 1998-10-21
EP0831136A2 (fr) 1998-03-25
ID18410A (id) 1998-04-09
JPH10226784A (ja) 1998-08-25
CN1238812A (zh) 1999-12-15
IL121813A0 (en) 1998-02-22
TW438880B (en) 2001-06-07
US6316366B1 (en) 2001-11-13
US6039891A (en) 2000-03-21
WO1998013536A1 (fr) 1998-04-02

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