AU2001233228A1 - Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same - Google Patents
Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe sameInfo
- Publication number
- AU2001233228A1 AU2001233228A1 AU2001233228A AU3322801A AU2001233228A1 AU 2001233228 A1 AU2001233228 A1 AU 2001233228A1 AU 2001233228 A AU2001233228 A AU 2001233228A AU 3322801 A AU3322801 A AU 3322801A AU 2001233228 A1 AU2001233228 A1 AU 2001233228A1
- Authority
- AU
- Australia
- Prior art keywords
- fabricatingthe
- mems
- electro
- micro
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09497270 | 2000-02-01 | ||
US09/497,270 US20020071169A1 (en) | 2000-02-01 | 2000-02-01 | Micro-electro-mechanical-system (MEMS) mirror device |
PCT/US2001/003357 WO2001056919A2 (fr) | 2000-02-01 | 2001-02-01 | Dispositif miroir mems (systemes mecaniques micro-electriques) et procedes de fabrication correspondants |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001233228A1 true AU2001233228A1 (en) | 2001-08-14 |
Family
ID=23976147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001233228A Abandoned AU2001233228A1 (en) | 2000-02-01 | 2001-02-01 | Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same |
Country Status (3)
Country | Link |
---|---|
US (2) | US20020071169A1 (fr) |
AU (1) | AU2001233228A1 (fr) |
WO (1) | WO2001056919A2 (fr) |
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-
2000
- 2000-02-01 US US09/497,270 patent/US20020071169A1/en not_active Abandoned
-
2001
- 2001-02-01 AU AU2001233228A patent/AU2001233228A1/en not_active Abandoned
- 2001-02-01 WO PCT/US2001/003357 patent/WO2001056919A2/fr active Application Filing
- 2001-08-14 US US09/929,900 patent/US6563106B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2001056919A3 (fr) | 2002-03-28 |
US6563106B1 (en) | 2003-05-13 |
US20020071169A1 (en) | 2002-06-13 |
WO2001056919A2 (fr) | 2001-08-09 |
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