AU2001291271A1 - Micromechanical resonator device - Google Patents

Micromechanical resonator device

Info

Publication number
AU2001291271A1
AU2001291271A1 AU2001291271A AU9127101A AU2001291271A1 AU 2001291271 A1 AU2001291271 A1 AU 2001291271A1 AU 2001291271 A AU2001291271 A AU 2001291271A AU 9127101 A AU9127101 A AU 9127101A AU 2001291271 A1 AU2001291271 A1 AU 2001291271A1
Authority
AU
Australia
Prior art keywords
resonator device
micromechanical resonator
micromechanical
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001291271A
Inventor
Wan-Thai Hsu
Clark T.-C. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
University of Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Michigan filed Critical University of Michigan
Publication of AU2001291271A1 publication Critical patent/AU2001291271A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/013—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H9/02362—Folded-flexure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
AU2001291271A 2000-08-24 2001-08-24 Micromechanical resonator device Abandoned AU2001291271A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US22750700P 2000-08-24 2000-08-24
US22750300P 2000-08-24 2000-08-24
US60227503 2000-08-24
US60227507 2000-08-24
PCT/US2001/041873 WO2002017481A2 (en) 2000-08-24 2001-08-24 Micromechanical resonator device

Publications (1)

Publication Number Publication Date
AU2001291271A1 true AU2001291271A1 (en) 2002-03-04

Family

ID=26921493

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001291271A Abandoned AU2001291271A1 (en) 2000-08-24 2001-08-24 Micromechanical resonator device

Country Status (3)

Country Link
US (1) US6739190B2 (en)
AU (1) AU2001291271A1 (en)
WO (1) WO2002017481A2 (en)

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FI20040162A0 (en) * 2004-02-03 2004-02-03 Nokia Oyj Stabilization of reference oscillator frequency
CN101103515B (en) * 2005-01-07 2010-10-13 波士顿大学托管委员会 Nanomechanical oscillator
US20110068834A1 (en) * 2005-01-07 2011-03-24 Trustees Of Boston University Electro-mechanical oscillating devices and associated methods
US7406761B2 (en) * 2005-03-21 2008-08-05 Honeywell International Inc. Method of manufacturing vibrating micromechanical structures
US7407826B2 (en) * 2005-03-21 2008-08-05 Honeywell International Inc. Vacuum packaged single crystal silicon device
EP1938110A1 (en) * 2005-10-18 2008-07-02 Kistler Holding AG Sensor
EP1974465B1 (en) * 2005-12-23 2015-04-15 Nxp B.V. A mems resonator, a method of manufacturing thereof, and a mems oscillator
US8129801B2 (en) * 2006-01-06 2012-03-06 Honeywell International Inc. Discrete stress isolator attachment structures for MEMS sensor packages
WO2008036830A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit filter
WO2008036845A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit bank and switch
JP2008211420A (en) * 2007-02-26 2008-09-11 Seiko Instruments Inc Oscillator
US7591201B1 (en) 2007-03-09 2009-09-22 Silicon Clocks, Inc. MEMS structure having a compensated resonating member
US7639104B1 (en) * 2007-03-09 2009-12-29 Silicon Clocks, Inc. Method for temperature compensation in MEMS resonators with isolated regions of distinct material
US7514853B1 (en) * 2007-05-10 2009-04-07 Silicon Clocks, Inc. MEMS structure having a stress inverter temperature-compensated resonating member
US7956517B1 (en) * 2007-05-10 2011-06-07 Silicon Laboratories MEMS structure having a stress inverter temperature-compensated resonator member
WO2009048468A1 (en) 2007-10-11 2009-04-16 Sand 9, Inc. Signal amplification by hierarchal resonating structures
US20090160581A1 (en) * 2007-12-21 2009-06-25 Paul Merritt Hagelin Temperature Stable MEMS Resonator
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8044737B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8044736B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US20090315644A1 (en) * 2008-06-19 2009-12-24 Honeywell International Inc. High-q disk nano resonator device and method of fabricating the same
US8111108B2 (en) * 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US7999635B1 (en) 2008-07-29 2011-08-16 Silicon Laboratories Inc. Out-of plane MEMS resonator with static out-of-plane deflection
US7944124B1 (en) * 2008-08-29 2011-05-17 Silicon Laboratories Inc. MEMS structure having a stress-inducer temperature-compensated resonator member
US7888843B2 (en) * 2008-09-10 2011-02-15 Georgia Tech Research Corporation Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
US20100155883A1 (en) * 2008-10-31 2010-06-24 Trustees Of Boston University Integrated mems and ic systems and related methods
WO2010077311A1 (en) * 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
JP5848131B2 (en) 2008-12-17 2016-01-27 アナログ デバイシス， インコーポレイテッド Equipment provided with mechanical resonance structure
US7939990B2 (en) * 2009-01-30 2011-05-10 Integrated Device Technology, Inc. Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
US8395456B2 (en) * 2009-02-04 2013-03-12 Sand 9, Inc. Variable phase amplifier circuit and method of use
US8456250B2 (en) * 2009-02-04 2013-06-04 Sand 9, Inc. Methods and apparatus for tuning devices having resonators
WO2010090731A2 (en) * 2009-02-04 2010-08-12 Sand9, Inc. Methods and apparatus for tuning devices having mechanical resonators
WO2010110918A1 (en) * 2009-03-26 2010-09-30 Sand9, Inc. Mechanical resonating structures and methods
WO2010114602A1 (en) 2009-03-31 2010-10-07 Sand9, Inc. Integration of piezoelectric materials with substrates
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8174170B1 (en) 2009-05-13 2012-05-08 Sand 9, Inc. Methods and apparatus for mechanical resonating structures
JP2012531097A (en) * 2009-06-19 2012-12-06 ジョージア・テック・リサーチ・コーポレイション Method of forming a micromechanical resonator having a high density trench array providing passive temperature compensation
US8106724B1 (en) 2009-07-23 2012-01-31 Integrated Device Technologies, Inc. Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor
US8664836B1 (en) 2009-09-18 2014-03-04 Sand 9, Inc. Passivated micromechanical resonators and related methods
US8604888B2 (en) * 2009-12-23 2013-12-10 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8228127B2 (en) * 2009-12-23 2012-07-24 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8704604B2 (en) 2009-12-23 2014-04-22 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2011133682A1 (en) 2010-04-20 2011-10-27 Guiti Zolfagharkhani Microelectromechanical gyroscopes and related apparatus and methods
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US8686802B1 (en) 2011-01-16 2014-04-01 Micrel, Incorporated Bias voltage tuning of MEMS resonator operation point
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US9299910B1 (en) 2012-05-17 2016-03-29 Analog Devices, Inc. Resonator anchors and related apparatus and methods
US9954513B1 (en) 2012-12-21 2018-04-24 Analog Devices, Inc. Methods and apparatus for anchoring resonators
US9634227B1 (en) 2013-03-06 2017-04-25 Analog Devices, Inc. Suppression of spurious modes of vibration for resonators and related apparatus and methods
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
US10425084B2 (en) * 2017-10-03 2019-09-24 Murata Manufacturing Co., Ltd. Oven controlled MEMS oscillator and system and method for calibrating the same
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5976994A (en) * 1997-06-13 1999-11-02 Regents Of The University Of Michigan Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
US6424074B2 (en) * 1999-01-14 2002-07-23 The Regents Of The University Of Michigan Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device

Also Published As

Publication number Publication date
US20020069701A1 (en) 2002-06-13
WO2002017481A2 (en) 2002-02-28
WO2002017481A3 (en) 2002-06-06
US6739190B2 (en) 2004-05-25

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