AU2001213568A1 - Pad designs and structures for a versatile materials processing apparatus - Google Patents

Pad designs and structures for a versatile materials processing apparatus

Info

Publication number
AU2001213568A1
AU2001213568A1 AU2001213568A AU1356801A AU2001213568A1 AU 2001213568 A1 AU2001213568 A1 AU 2001213568A1 AU 2001213568 A AU2001213568 A AU 2001213568A AU 1356801 A AU1356801 A AU 1356801A AU 2001213568 A1 AU2001213568 A1 AU 2001213568A1
Authority
AU
Australia
Prior art keywords
structures
processing apparatus
materials processing
pad designs
versatile materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001213568A
Other languages
English (en)
Inventor
Bulent Basol
Homayoun Talieh
Cyprian Uzoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM Nutool Inc
Original Assignee
ASM Nutool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Nutool Inc filed Critical ASM Nutool Inc
Publication of AU2001213568A1 publication Critical patent/AU2001213568A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B23H5/06—Electrochemical machining combined with mechanical working, e.g. grinding or honing
    • B23H5/08—Electrolytic grinding
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/14—Electrodes, e.g. composition, counter electrode for pad-plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/04—Electroplating with moving electrodes
    • C25D5/06—Brush or pad plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AU2001213568A 2000-02-23 2000-11-01 Pad designs and structures for a versatile materials processing apparatus Abandoned AU2001213568A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/511,278 US6413388B1 (en) 2000-02-23 2000-02-23 Pad designs and structures for a versatile materials processing apparatus
US09511278 2000-02-23
PCT/US2000/030031 WO2001063018A1 (en) 2000-02-23 2000-11-01 Pad designs and structures for a versatile materials processing apparatus

Publications (1)

Publication Number Publication Date
AU2001213568A1 true AU2001213568A1 (en) 2001-09-03

Family

ID=24034209

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001213568A Abandoned AU2001213568A1 (en) 2000-02-23 2000-11-01 Pad designs and structures for a versatile materials processing apparatus

Country Status (8)

Country Link
US (3) US6413388B1 (ko)
EP (1) EP1259661A4 (ko)
JP (1) JP2003524079A (ko)
KR (1) KR100755098B1 (ko)
CN (1) CN1220798C (ko)
AU (1) AU2001213568A1 (ko)
TW (1) TW593780B (ko)
WO (1) WO2001063018A1 (ko)

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TW593780B (en) 2004-06-21
EP1259661A4 (en) 2003-06-04
US20020130034A1 (en) 2002-09-19
US6413403B1 (en) 2002-07-02
WO2001063018A1 (en) 2001-08-30
US7378004B2 (en) 2008-05-27
KR20020091095A (ko) 2002-12-05
KR100755098B1 (ko) 2007-09-04
JP2003524079A (ja) 2003-08-12
EP1259661A1 (en) 2002-11-27
US6413388B1 (en) 2002-07-02
CN1434882A (zh) 2003-08-06

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