ATE556986T1 - Verfahren und vorrichtung für verbessertes nanospektroskopisches scannen - Google Patents

Verfahren und vorrichtung für verbessertes nanospektroskopisches scannen

Info

Publication number
ATE556986T1
ATE556986T1 AT04749786T AT04749786T ATE556986T1 AT E556986 T1 ATE556986 T1 AT E556986T1 AT 04749786 T AT04749786 T AT 04749786T AT 04749786 T AT04749786 T AT 04749786T AT E556986 T1 ATE556986 T1 AT E556986T1
Authority
AT
Austria
Prior art keywords
nanolens
sample
substrate
gap
prps
Prior art date
Application number
AT04749786T
Other languages
English (en)
Inventor
Vladimir Poponin
Original Assignee
Vp Holding Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vp Holding Llc filed Critical Vp Holding Llc
Application granted granted Critical
Publication of ATE556986T1 publication Critical patent/ATE556986T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
AT04749786T 2003-04-04 2004-04-05 Verfahren und vorrichtung für verbessertes nanospektroskopisches scannen ATE556986T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46070203P 2003-04-04 2003-04-04
PCT/US2004/010544 WO2004090505A2 (en) 2003-04-04 2004-04-05 Method and apparatus for enhanced nano-spectroscopic scanning

Publications (1)

Publication Number Publication Date
ATE556986T1 true ATE556986T1 (de) 2012-05-15

Family

ID=33159798

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04749786T ATE556986T1 (de) 2003-04-04 2004-04-05 Verfahren und vorrichtung für verbessertes nanospektroskopisches scannen

Country Status (10)

Country Link
EP (1) EP1616157B1 (de)
JP (2) JP4727573B2 (de)
KR (1) KR101108022B1 (de)
CN (1) CN100476379C (de)
AT (1) ATE556986T1 (de)
AU (2) AU2004227413B2 (de)
CA (1) CA2521016C (de)
HK (1) HK1085265A1 (de)
RU (1) RU2334958C2 (de)
WO (1) WO2004090505A2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7151598B2 (en) * 2003-04-04 2006-12-19 Vladimir Poponin Method and apparatus for enhanced nano-spectroscopic scanning
RU2361193C2 (ru) 2004-05-19 2009-07-10 Вп Холдинг, Ллс Оптический датчик с многослойной плазмонной структурой для усовершенствованного обнаружения химических групп посредством sers
WO2006089000A2 (en) 2005-02-15 2006-08-24 The University Of Akron High contrast tip-enhanced raman spectroscopy
GB0510362D0 (en) 2005-05-20 2005-06-29 Univ Greenwich Device for detecting mycotoxins
US7233396B1 (en) 2006-04-17 2007-06-19 Alphasniffer Llc Polarization based interferometric detector
JP2008089321A (ja) * 2006-09-29 2008-04-17 Fujifilm Corp バイオセンサ検出装置
GB2455492B (en) 2007-10-08 2011-11-23 Univ Greenwich Apparatus and method for detection and measurement of target compounds such as food toxins
JP5270280B2 (ja) * 2008-09-19 2013-08-21 独立行政法人科学技術振興機構 近接場光学顕微鏡の信号光測定システム
CN102483350B (zh) * 2009-06-03 2014-10-29 皇家飞利浦电子股份有限公司 太赫兹频率范围天线
EP2454619A4 (de) 2009-07-17 2016-01-06 Hewlett Packard Development Co Nicht periodische gitterreflektoren mit fokussierungsstärke und verfahren zu ihrer herstellung
WO2012037780A1 (zh) * 2010-09-21 2012-03-29 中国科学院理化技术研究所 激光微纳加工系统及方法
JP5870497B2 (ja) * 2011-03-18 2016-03-01 セイコーエプソン株式会社 測定装置及び測定方法
US20140226195A1 (en) * 2011-04-14 2014-08-14 Boehringer Ingelheim International Gmbh Method of modifying radiation characteristic of an excited emitter
JP2014013160A (ja) * 2012-07-04 2014-01-23 Hitachi Ltd 走査プローブ顕微鏡
JP6622723B2 (ja) 2015-01-30 2019-12-18 国立研究開発法人科学技術振興機構 多焦点分光計測装置、及び多焦点分光計測装置用光学系
US10175295B2 (en) * 2015-06-25 2019-01-08 Fei Company Optical nanoprobing of integrated circuits
EP3408628B1 (de) * 2016-01-29 2021-05-05 Hewlett-Packard Development Company, L.P. Fokuseinstellung für analytnachweisverpackung
CN109273380B (zh) * 2017-07-17 2022-02-15 上海微电子装备（集团）股份有限公司 扫描对准装置及其扫描方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479024A (en) 1994-08-11 1995-12-26 The Regents Of The University Of California Method and apparatus for performing near-field optical microscopy
US6002471A (en) * 1996-11-04 1999-12-14 California Institute Of Technology High resolution scanning raman microscope
US5749024A (en) * 1997-04-28 1998-05-05 Xerox Corporation Printing system for automatically delivering transparencies and regular sheets in proper order with different output modules
US7267948B2 (en) * 1997-11-26 2007-09-11 Ut-Battelle, Llc SERS diagnostic platforms, methods and systems microarrays, biosensors and biochips
JP3439645B2 (ja) * 1998-02-20 2003-08-25 シャープ株式会社 フォトン走査トンネル顕微鏡用ピックアップ
US6441359B1 (en) * 1998-10-20 2002-08-27 The Board Of Trustees Of The Leland Stanford Junior University Near field optical scanning system employing microfabricated solid immersion lens
JP2001165852A (ja) * 1999-12-10 2001-06-22 Japan Science & Technology Corp Ｓｐｒセンサーおよびその製造方法
JP4327993B2 (ja) * 2000-05-29 2009-09-09 日本分光株式会社 プローブ開口作製装置、及びそれを用いた近接場光学顕微鏡
JP3520335B2 (ja) * 2001-01-10 2004-04-19 独立行政法人産業技術総合研究所 近接場光検出方法およびその装置
US6850323B2 (en) * 2001-02-05 2005-02-01 California Institute Of Technology Locally enhanced raman spectroscopy with an atomic force microscope

Also Published As

Publication number Publication date
HK1085265A1 (en) 2006-08-18
AU2010214699A1 (en) 2010-09-16
EP1616157A4 (de) 2011-04-27
RU2334958C2 (ru) 2008-09-27
CA2521016A1 (en) 2004-10-21
RU2005133864A (ru) 2007-05-20
JP2010230687A (ja) 2010-10-14
KR20060002931A (ko) 2006-01-09
KR101108022B1 (ko) 2012-01-30
WO2004090505A3 (en) 2005-02-24
WO2004090505A2 (en) 2004-10-21
JP2006526779A (ja) 2006-11-24
AU2004227413A1 (en) 2004-10-21
JP4727573B2 (ja) 2011-07-20
CN1768253A (zh) 2006-05-03
EP1616157B1 (de) 2012-05-09
EP1616157A2 (de) 2006-01-18
CA2521016C (en) 2012-09-18
AU2004227413B2 (en) 2010-05-27
CN100476379C (zh) 2009-04-08

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