ATE528796T1 - Elektrische verbindungsstruktur und verfahren zu ihrer bildung - Google Patents
Elektrische verbindungsstruktur und verfahren zu ihrer bildungInfo
- Publication number
- ATE528796T1 ATE528796T1 AT08718206T AT08718206T ATE528796T1 AT E528796 T1 ATE528796 T1 AT E528796T1 AT 08718206 T AT08718206 T AT 08718206T AT 08718206 T AT08718206 T AT 08718206T AT E528796 T1 ATE528796 T1 AT E528796T1
- Authority
- AT
- Austria
- Prior art keywords
- solder
- conductive pad
- electrically conductive
- electrically
- forming
- Prior art date
Links
Classifications
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- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/012—Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
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- H10W74/01—Manufacture or treatment
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
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- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
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- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- H05K2201/0379—Stacked conductors
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- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7438—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support with parts of the auxiliary support remaining in the finished device
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Wire Bonding (AREA)
- Combinations Of Printed Boards (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/733,840 US7786001B2 (en) | 2007-04-11 | 2007-04-11 | Electrical interconnect structure and method |
| PCT/EP2008/053527 WO2008125440A1 (en) | 2007-04-11 | 2008-03-26 | Electrical interconnect structure and method of forming the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE528796T1 true ATE528796T1 (de) | 2011-10-15 |
Family
ID=39554841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT08718206T ATE528796T1 (de) | 2007-04-11 | 2008-03-26 | Elektrische verbindungsstruktur und verfahren zu ihrer bildung |
Country Status (8)
| Country | Link |
|---|---|
| US (4) | US7786001B2 (de) |
| EP (1) | EP2156465B1 (de) |
| JP (1) | JP5186550B2 (de) |
| KR (1) | KR20090103886A (de) |
| CN (1) | CN101652847B (de) |
| AT (1) | ATE528796T1 (de) |
| TW (1) | TWI459505B (de) |
| WO (1) | WO2008125440A1 (de) |
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| JP4239310B2 (ja) * | 1998-09-01 | 2009-03-18 | ソニー株式会社 | 半導体装置の製造方法 |
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| US7786001B2 (en) * | 2007-04-11 | 2010-08-31 | International Business Machines Corporation | Electrical interconnect structure and method |
| US7868457B2 (en) * | 2007-09-14 | 2011-01-11 | International Business Machines Corporation | Thermo-compression bonded electrical interconnect structure and method |
| US8043893B2 (en) | 2007-09-14 | 2011-10-25 | International Business Machines Corporation | Thermo-compression bonded electrical interconnect structure and method |
| JP5045688B2 (ja) * | 2009-01-29 | 2012-10-10 | 日立金属株式会社 | 半導体装置 |
| JP5214554B2 (ja) * | 2009-07-30 | 2013-06-19 | ラピスセミコンダクタ株式会社 | 半導体チップ内蔵パッケージ及びその製造方法、並びに、パッケージ・オン・パッケージ型半導体装置及びその製造方法 |
| US8728873B2 (en) * | 2010-09-10 | 2014-05-20 | Infineon Technologies Ag | Methods for filling a contact hole in a chip package arrangement and chip package arrangements |
| US8969176B2 (en) * | 2010-12-03 | 2015-03-03 | Raytheon Company | Laminated transferable interconnect for microelectronic package |
| US8936967B2 (en) * | 2011-03-23 | 2015-01-20 | Intel Corporation | Solder in cavity interconnection structures |
| JP2013074169A (ja) * | 2011-09-28 | 2013-04-22 | Kyocera Corp | 薄膜配線基板 |
| US9978656B2 (en) * | 2011-11-22 | 2018-05-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms for forming fine-pitch copper bump structures |
| US9128289B2 (en) * | 2012-12-28 | 2015-09-08 | Pixtronix, Inc. | Display apparatus incorporating high-aspect ratio electrical interconnects |
| US8497579B1 (en) * | 2012-02-16 | 2013-07-30 | Chipbond Technology Corporation | Semiconductor packaging method and structure thereof |
| US8809123B2 (en) * | 2012-06-05 | 2014-08-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Three dimensional integrated circuit structures and hybrid bonding methods for semiconductor wafers |
| US9082754B2 (en) | 2012-08-03 | 2015-07-14 | International Business Machines Corporation | Metal cored solder decal structure and process |
| US20140071142A1 (en) * | 2012-09-13 | 2014-03-13 | Pixtronix, Inc. | Display apparatus incorporating vertically oriented electrical interconnects |
| TWI468086B (zh) * | 2012-11-07 | 2015-01-01 | 環旭電子股份有限公司 | 電子裝置、系統級封裝模組及系統級封裝模組的製造方法 |
| US10020275B2 (en) * | 2013-12-26 | 2018-07-10 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductive packaging device and manufacturing method thereof |
| JP6303535B2 (ja) * | 2014-01-27 | 2018-04-04 | 富士通株式会社 | 電子部品の製造方法及び電子装置の製造方法 |
| US10170444B2 (en) | 2015-06-30 | 2019-01-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packages for semiconductor devices, packaged semiconductor devices, and methods of packaging semiconductor devices |
| US9953908B2 (en) * | 2015-10-30 | 2018-04-24 | International Business Machines Corporation | Method for forming solder bumps using sacrificial layer |
| US9793232B1 (en) * | 2016-01-05 | 2017-10-17 | International Business Machines Corporation | All intermetallic compound with stand off feature and method to make |
| KR102420126B1 (ko) * | 2016-02-01 | 2022-07-12 | 삼성전자주식회사 | 반도체 소자 |
| US10177099B2 (en) * | 2016-04-07 | 2019-01-08 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure, package on package structure and packaging method |
| US10297575B2 (en) * | 2016-05-06 | 2019-05-21 | Amkor Technology, Inc. | Semiconductor device utilizing an adhesive to attach an upper package to a lower die |
| CN109121319A (zh) * | 2018-08-21 | 2019-01-01 | 北京无线电测量研究所 | 微波子阵三维堆叠的焊球塌陷控制方法、设备和存储介质 |
| JP7251951B2 (ja) * | 2018-11-13 | 2023-04-04 | 新光電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
| CN112885802A (zh) * | 2019-11-29 | 2021-06-01 | 长鑫存储技术有限公司 | 半导体结构及其制造方法 |
| US12107065B2 (en) | 2020-07-17 | 2024-10-01 | International Business Machines Corporation | Uniform chip gaps via injection-molded solder pillars |
| US20250014975A1 (en) * | 2023-07-06 | 2025-01-09 | Amkor Technology Singapore Holding Pte. Ltd. | Electronic devices and methods of manufacturing electronic devices |
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| US5244143A (en) * | 1992-04-16 | 1993-09-14 | International Business Machines Corporation | Apparatus and method for injection molding solder and applications thereof |
| US6025258A (en) * | 1994-01-20 | 2000-02-15 | Fujitsu Limited | Method for fabricating solder bumps by forming solder balls with a solder ball forming member |
| JP2581456B2 (ja) * | 1994-06-27 | 1997-02-12 | 日本電気株式会社 | 部品の接続構造及びその製造方法 |
| US5736074A (en) | 1995-06-30 | 1998-04-07 | Micro Fab Technologies, Inc. | Manufacture of coated spheres |
| US5872051A (en) * | 1995-08-02 | 1999-02-16 | International Business Machines Corporation | Process for transferring material to semiconductor chip conductive pads using a transfer substrate |
| TW335544B (en) * | 1996-03-18 | 1998-07-01 | Olin Corp | Improved solder joint reliability |
| US5775569A (en) * | 1996-10-31 | 1998-07-07 | Ibm Corporation | Method for building interconnect structures by injection molded solder and structures built |
| US6121689A (en) * | 1997-07-21 | 2000-09-19 | Miguel Albert Capote | Semiconductor flip-chip package and method for the fabrication thereof |
| US20020106832A1 (en) * | 1996-11-26 | 2002-08-08 | Gregory B. Hotchkiss | Method and apparatus for attaching solder members to a substrate |
| US6335571B1 (en) * | 1997-07-21 | 2002-01-01 | Miguel Albert Capote | Semiconductor flip-chip package and method for the fabrication thereof |
| JP3420917B2 (ja) | 1997-09-08 | 2003-06-30 | 富士通株式会社 | 半導体装置 |
| US5956606A (en) * | 1997-10-31 | 1999-09-21 | Motorola, Inc. | Method for bumping and packaging semiconductor die |
| US6105852A (en) * | 1998-02-05 | 2000-08-22 | International Business Machines Corporation | Etched glass solder bump transfer for flip chip integrated circuit devices |
| JP3230487B2 (ja) * | 1998-04-20 | 2001-11-19 | 住友金属工業株式会社 | 三次元パッケージおよびその製造方法 |
| US6158644A (en) * | 1998-04-30 | 2000-12-12 | International Business Machines Corporation | Method for enhancing fatigue life of ball grid arrays |
| US6426564B1 (en) * | 1999-02-24 | 2002-07-30 | Micron Technology, Inc. | Recessed tape and method for forming a BGA assembly |
| US6458622B1 (en) * | 1999-07-06 | 2002-10-01 | Motorola, Inc. | Stress compensation composition and semiconductor component formed using the stress compensation composition |
| US6664621B2 (en) * | 2000-05-08 | 2003-12-16 | Tessera, Inc. | Semiconductor chip package with interconnect structure |
| TWI248384B (en) * | 2000-06-12 | 2006-02-01 | Hitachi Ltd | Electronic device |
| US7242099B2 (en) * | 2001-03-05 | 2007-07-10 | Megica Corporation | Chip package with multiple chips connected by bumps |
| US7053491B2 (en) * | 2002-02-04 | 2006-05-30 | Intel Corporation | Electronic assembly having composite electronic contacts for attaching a package substrate to a printed circuit board |
| JP2003258029A (ja) * | 2002-02-27 | 2003-09-12 | Matsushita Electric Ind Co Ltd | 電子部品実装方法および電子部品実装構造 |
| US7087458B2 (en) * | 2002-10-30 | 2006-08-08 | Advanpack Solutions Pte. Ltd. | Method for fabricating a flip chip package with pillar bump and no flow underfill |
| US6919420B2 (en) * | 2002-12-05 | 2005-07-19 | International Business Machines Corporation | Acid-cleavable acetal and ketal based epoxy oligomers |
| JP2004356138A (ja) * | 2003-05-27 | 2004-12-16 | Sharp Corp | 配線基板の積層構造 |
| TWM244577U (en) * | 2003-08-14 | 2004-09-21 | Via Tech Inc | Bump transfer fixture |
| US7786001B2 (en) * | 2007-04-11 | 2010-08-31 | International Business Machines Corporation | Electrical interconnect structure and method |
| US7868457B2 (en) * | 2007-09-14 | 2011-01-11 | International Business Machines Corporation | Thermo-compression bonded electrical interconnect structure and method |
-
2007
- 2007-04-11 US US11/733,840 patent/US7786001B2/en not_active Expired - Fee Related
-
2008
- 2008-03-26 JP JP2010502479A patent/JP5186550B2/ja not_active Expired - Fee Related
- 2008-03-26 WO PCT/EP2008/053527 patent/WO2008125440A1/en not_active Ceased
- 2008-03-26 EP EP08718206A patent/EP2156465B1/de not_active Not-in-force
- 2008-03-26 AT AT08718206T patent/ATE528796T1/de not_active IP Right Cessation
- 2008-03-26 CN CN200880011580.7A patent/CN101652847B/zh not_active Expired - Fee Related
- 2008-03-26 KR KR1020097012988A patent/KR20090103886A/ko not_active Abandoned
- 2008-04-03 TW TW097112303A patent/TWI459505B/zh not_active IP Right Cessation
-
2010
- 2010-05-26 US US12/787,485 patent/US8476773B2/en not_active Expired - Fee Related
- 2010-05-26 US US12/787,503 patent/US8242010B2/en not_active Expired - Fee Related
- 2010-05-26 US US12/787,527 patent/US8541299B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101652847A (zh) | 2010-02-17 |
| KR20090103886A (ko) | 2009-10-01 |
| US20100230475A1 (en) | 2010-09-16 |
| US8476773B2 (en) | 2013-07-02 |
| US20080251281A1 (en) | 2008-10-16 |
| EP2156465A1 (de) | 2010-02-24 |
| JP2010525558A (ja) | 2010-07-22 |
| WO2008125440A1 (en) | 2008-10-23 |
| TWI459505B (zh) | 2014-11-01 |
| US8541299B2 (en) | 2013-09-24 |
| US20100230474A1 (en) | 2010-09-16 |
| JP5186550B2 (ja) | 2013-04-17 |
| US8242010B2 (en) | 2012-08-14 |
| TW200849470A (en) | 2008-12-16 |
| US20100230143A1 (en) | 2010-09-16 |
| US7786001B2 (en) | 2010-08-31 |
| CN101652847B (zh) | 2011-11-02 |
| EP2156465B1 (de) | 2011-10-12 |
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| Date | Code | Title | Description |
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| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |