ATE526689T1 - Piezoelektrisches material - Google Patents

Piezoelektrisches material

Info

Publication number
ATE526689T1
ATE526689T1 AT09723179T AT09723179T ATE526689T1 AT E526689 T1 ATE526689 T1 AT E526689T1 AT 09723179 T AT09723179 T AT 09723179T AT 09723179 T AT09723179 T AT 09723179T AT E526689 T1 ATE526689 T1 AT E526689T1
Authority
AT
Austria
Prior art keywords
value
less
element selected
piezoelectric material
piezoelectric
Prior art date
Application number
AT09723179T
Other languages
German (de)
English (en)
Inventor
Jumpei Hayashi
Zuyi Zhang
Toshihiro Ifuku
Satoshi Wada
Keisuke Yamato
Nobuhiro Kumada
Masaki Azuma
Hiroshi Funakubo
Takashi Iijima
Soichiro Okamura
Original Assignee
Univ Yamanashi
Univ Kyoto
Univ Tokyo Sci Educ Found
Nat Inst Of Advanced Ind Scien
Tokyo Inst Tech
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Yamanashi, Univ Kyoto, Univ Tokyo Sci Educ Found, Nat Inst Of Advanced Ind Scien, Tokyo Inst Tech, Canon Kk filed Critical Univ Yamanashi
Application granted granted Critical
Publication of ATE526689T1 publication Critical patent/ATE526689T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00—Compounds of titanium
    • C01G23/003—Titanates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00—Compounds of titanium
    • C01G23/003—Titanates
    • C01G23/006—Alkaline earth titanates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G29/00—Compounds of bismuth
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/475—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on bismuth titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • C04B35/497—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides
    • C04B35/499—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides containing also titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/547—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on sulfides or selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/30—Three-dimensional structures
    • C01P2002/34—Three-dimensional structures perovskite-type (ABO3)
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/76—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by a space-group or by other symmetry indications
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/42—Magnetic properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215—Barium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
    • C04B2235/3255—Niobates or tantalates, e.g. silver niobate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Compositions Of Oxide Ceramics (AREA)
AT09723179T 2008-03-19 2009-03-18 Piezoelektrisches material ATE526689T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008072321 2008-03-19
PCT/JP2009/056021 WO2009116683A1 (en) 2008-03-19 2009-03-18 Piezoelectric material

Publications (1)

Publication Number Publication Date
ATE526689T1 true ATE526689T1 (de) 2011-10-15

Family

ID=40568579

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09723179T ATE526689T1 (de) 2008-03-19 2009-03-18 Piezoelektrisches material

Country Status (6)

Country Link
US (1) US8034250B2 (enExample)
EP (1) EP2255397B1 (enExample)
JP (1) JP5355148B2 (enExample)
CN (1) CN101971381B (enExample)
AT (1) ATE526689T1 (enExample)
WO (1) WO2009116683A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5219921B2 (ja) 2008-05-28 2013-06-26 キヤノン株式会社 金属酸化物、圧電材料および圧電素子
US8518290B2 (en) 2008-07-30 2013-08-27 Canon Kabushiki Kaisha Piezoelectric material
US8529785B2 (en) * 2008-07-30 2013-09-10 Canon Kabushiki Kaisha Metal oxide
JP2010143788A (ja) 2008-12-18 2010-07-01 Canon Inc 酸窒化物圧電材料及びその製造方法
US8299688B2 (en) * 2009-03-12 2012-10-30 Canon Kabushiki Kaisha Piezoelectric material, method of manufacturing the same, and piezoelectric device
DE102009035425A1 (de) * 2009-07-31 2011-02-17 Epcos Ag Piezoelektrische Keramikzusammensetzung, Verfahren zur Herstellung der Zusammensetzung und elektrisches Bauelement, umfassend die Zusammensetzung
JP5734688B2 (ja) 2010-02-10 2015-06-17 キヤノン株式会社 配向性酸化物セラミックスの製造方法、配向性酸化物セラミックス、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP5832091B2 (ja) 2010-03-02 2015-12-16 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッドおよび超音波モータ
JP2011187790A (ja) 2010-03-10 2011-09-22 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置、および圧電素子
JP5932216B2 (ja) 2010-12-22 2016-06-08 キヤノン株式会社 圧電セラミックス、その製造方法、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、光学デバイスおよび電子機器
KR101654681B1 (ko) 2011-10-20 2016-09-07 캐논 가부시끼가이샤 먼지 제거 디바이스 및 촬상 디바이스
CN102557619B (zh) * 2011-12-28 2013-05-22 山东女子学院 一种高取向Ca0.4Sr0.6Bi4Ti4O15模板晶粒膜的制备方法
KR101429034B1 (ko) * 2012-01-27 2014-08-11 티디케이가부시기가이샤 유전체 자기 조성물 및 전자 부품
US9022531B2 (en) 2012-02-28 2015-05-05 Canon Kabushiki Kaisha Piezoelectric element, liquid discharge head and liquid discharge apparatus
JP5998543B2 (ja) * 2012-03-13 2016-09-28 株式会社リコー 電気−機械変換素子、液滴吐出ヘッド及び液滴吐出装置
JP2013197522A (ja) * 2012-03-22 2013-09-30 Ricoh Co Ltd 圧電体薄膜素子とその製造方法、該圧電体薄膜素子を用いた液滴吐出ヘッドおよびインクジェット記録装置
US9412931B2 (en) 2012-03-30 2016-08-09 Canon Kabushiki Kaisha Piezoelectric ceramics, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device
JP6260982B2 (ja) * 2013-03-11 2018-01-17 国立研究開発法人産業技術総合研究所 粒子配向セラミックス
JP5761540B2 (ja) * 2013-06-28 2015-08-12 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
JP5754660B2 (ja) * 2013-06-28 2015-07-29 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
CN105793197B (zh) * 2013-11-29 2018-10-23 石原产业株式会社 黑色细粒近红外反射材料、其制造方法及其应用
JP6347086B2 (ja) * 2014-02-18 2018-06-27 アドバンストマテリアルテクノロジーズ株式会社 強誘電体セラミックス
US10256393B2 (en) 2014-02-25 2019-04-09 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
US10424722B2 (en) * 2015-11-27 2019-09-24 Canon Kabushiki Kaisha Piezoelectric element, piezoelectric actuator, and electronic apparatus
JP6627647B2 (ja) * 2016-05-24 2020-01-08 Tdk株式会社 積層膜、電子デバイス基板、電子デバイス及び積層膜の製造方法
US10727395B2 (en) 2016-06-28 2020-07-28 Canon Kabushiki Kaisha Piezoeletric material, piezoelectric element, liquid discharge head, liquid discharge apparatus, vibration wave motor, optical instrument, vibration apparatus, dust removing apparatus, imaging apparatus and electronic device
CN108409319B (zh) * 2018-03-06 2021-03-26 同济大学 高储能密度及充放电性能的无铅陶瓷材料及其制备方法
CN109503153A (zh) * 2018-12-14 2019-03-22 陕西科技大学 一种高储能性能介质陶瓷、制备方法及其应用
CN111533554B (zh) * 2020-04-30 2022-03-11 福建火炬电子科技股份有限公司 一种高压陶瓷脉冲电容器、介质材料及其制备方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164349A (en) * 1990-06-29 1992-11-17 Ube Industries Ltd. Electromagnetic effect material
EP0581481B1 (en) 1992-07-31 1997-04-23 Toyota Jidosha Kabushiki Kaisha Bismuth layer compound
US20020036282A1 (en) * 1998-10-19 2002-03-28 Yet-Ming Chiang Electromechanical actuators
US6231779B1 (en) * 1997-10-20 2001-05-15 Massachusetts Institute Of Technology Piezoelectric actuators and method of making same
CN1258557A (zh) * 1998-12-25 2000-07-05 中国科学院大连化学物理研究所 一种钙钛矿型含Bi系列混合导体透氧膜制备及应用
JP2003531809A (ja) * 2000-05-04 2003-10-28 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 置換型チタン酸バリウムおよびチタン酸バリウムストロンチウム強誘電性組成物
TWI290907B (en) * 2000-10-17 2007-12-11 Sharp Kk Oxide material, method for preparing oxide thin film and element using said material
JP3482394B2 (ja) * 2000-11-20 2003-12-22 松下電器産業株式会社 圧電磁器組成物
EP1340731B1 (en) * 2000-11-21 2009-01-07 TDK Corporation Piezoelectric ceramic
TWI228493B (en) * 2002-12-18 2005-03-01 Showa Denko Kk Barium titanate and electronic parts using the same
CN100335415C (zh) * 2003-02-28 2007-09-05 新加坡纳米材料科技有限公司 一种制备各种晶态钙钛矿类化合物粉体的方法
JP4423872B2 (ja) 2003-03-28 2010-03-03 Ｔｄｋ株式会社 圧電セラミックスおよびその製造方法
EP1690843A1 (en) 2003-12-04 2006-08-16 TDK Corporation Piezoelectric ceramic and piezoelectric device
GB0421120D0 (en) * 2004-09-22 2004-10-27 Goodrich Control Sys Ltd Piezoelectric materials
JP4736021B2 (ja) * 2004-12-28 2011-07-27 独立行政法人産業技術総合研究所 圧電素子
US7567022B2 (en) * 2005-10-20 2009-07-28 Canon Kabushiki Kaisha Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus
JP4905645B2 (ja) * 2006-02-03 2012-03-28 セイコーエプソン株式会社 圧電材料およびその製造方法、並びに液体噴射ヘッド
JP5245107B2 (ja) * 2006-05-09 2013-07-24 キヤノン株式会社 圧電素子、圧電アクチュエータ、インクジェット式記録ヘッド
JP5300184B2 (ja) * 2006-07-18 2013-09-25 キヤノン株式会社 圧電体、圧電体素子、圧電体素子を用いた液体吐出ヘッド及び液体吐出装置
US7525239B2 (en) * 2006-09-15 2009-04-28 Canon Kabushiki Kaisha Piezoelectric element, and liquid jet head and ultrasonic motor using the piezoelectric element
JP5538670B2 (ja) * 2006-09-15 2014-07-02 キヤノン株式会社 圧電体素子、これを用いた液体吐出ヘッド及び超音波モーター
CN101033132B (zh) * 2007-02-13 2010-10-13 电子科技大学 中温烧结高温稳定型陶瓷电容器介质材料
JP5219921B2 (ja) * 2008-05-28 2013-06-26 キヤノン株式会社 金属酸化物、圧電材料および圧電素子
US8518290B2 (en) * 2008-07-30 2013-08-27 Canon Kabushiki Kaisha Piezoelectric material
US8529785B2 (en) * 2008-07-30 2013-09-10 Canon Kabushiki Kaisha Metal oxide
JP5414433B2 (ja) * 2008-09-30 2014-02-12 キヤノン株式会社 強誘電セラミック材料
JP2010143788A (ja) * 2008-12-18 2010-07-01 Canon Inc 酸窒化物圧電材料及びその製造方法
JP2010143789A (ja) * 2008-12-18 2010-07-01 Canon Inc 圧電体材料

Also Published As

Publication number Publication date
EP2255397A1 (en) 2010-12-01
US20110012050A1 (en) 2011-01-20
EP2255397B1 (en) 2011-09-28
CN101971381B (zh) 2015-10-14
JP2009256186A (ja) 2009-11-05
US8034250B2 (en) 2011-10-11
WO2009116683A1 (en) 2009-09-24
CN101971381A (zh) 2011-02-09
JP5355148B2 (ja) 2013-11-27

Similar Documents

Publication Publication Date Title
ATE526689T1 (de) Piezoelektrisches material
JP2009256186A5 (enExample)
JP2014066876A5 (enExample)
Hao et al. A comprehensive review on the progress of lead zirconate-based antiferroelectric materials
WO2013137421A3 (en) Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device
EP2187462A3 (en) Piezoelectric/electrostrictive ceramics composition, piezoelectric/electrostrictive ceramics sintered body, pieroelectric/electrostrictive element, manufacturing method of piezoelectric/electrostrictive ceramics composition, and manufacturing method of piezoelectric/electrostrictive element
EP2045846A3 (en) Piezoelectric/electrostrictive ceramic composition and piezoelectric/electrostrictive device
IN2014DN00272A (enExample)
JP2013014470A5 (ja) 圧電セラミックス及び積層圧電セラミックス部品
JP2019508220A5 (enExample)
EP2351720A3 (en) Ceramic sheet, method for producing the same, and method for producing crystallographically-oriented ceramic
MX2012013895A (es) Composiciones pesticidas.
WO2016069321A3 (en) Electroactive materials
EP2050726A3 (en) Piezoelectric/electrostrictive ceramic composition and piezoelectric/electrostrictive device
WO2009072369A1 (ja) 圧電磁器組成物
JP2015528789A5 (enExample)
MY172327A (en) Solder alloy, solder ball, chip solder, solder paste and solder joint
EP2006263A4 (en) CERAMIC POWDER AND MANUFACTURING METHOD THEREFOR
EP1965450A3 (en) Piezoelectric/electrostrictive porcelain composition and piezoelectric/electrostrictive element
ATE528259T1 (de) Kristallisierter im-18-festkörper und herstellungsverfahren dafür
EP2006927A3 (en) Piezoelectric material
EP2999035A3 (en) Active material, nonaqueous electrolyte battery, and battery pack
WO2014160218A3 (en) Pigments of simultaneously substituted pyrochlore and related structures
ATE537113T1 (de) Kristallisierter im-17-festkörper und herstellungsverfahren dafür
WO2013156638A8 (es) Material itq-49, su procedimiento de obtención y su uso

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties