JP2014066876A5 - - Google Patents

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Publication number
JP2014066876A5
JP2014066876A5 JP2012212238A JP2012212238A JP2014066876A5 JP 2014066876 A5 JP2014066876 A5 JP 2014066876A5 JP 2012212238 A JP2012212238 A JP 2012212238A JP 2012212238 A JP2012212238 A JP 2012212238A JP 2014066876 A5 JP2014066876 A5 JP 2014066876A5
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JP
Japan
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pzt
donor ions
piezoelectric material
piezoelectric
perovskite
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JP2012212238A
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English (en)
Japanese (ja)
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JP2014066876A (ja
JP5916577B2 (ja
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Priority to JP2012212238A priority Critical patent/JP5916577B2/ja
Priority claimed from JP2012212238A external-priority patent/JP5916577B2/ja
Priority to PCT/JP2013/074648 priority patent/WO2014050586A1/ja
Priority to EP13841383.6A priority patent/EP2902836B1/en
Publication of JP2014066876A publication Critical patent/JP2014066876A/ja
Publication of JP2014066876A5 publication Critical patent/JP2014066876A5/ja
Priority to US14/668,429 priority patent/US10048489B2/en
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Publication of JP5916577B2 publication Critical patent/JP5916577B2/ja
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JP2012212238A 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法 Active JP5916577B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012212238A JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法
PCT/JP2013/074648 WO2014050586A1 (ja) 2012-09-26 2013-09-12 ミラー駆動装置及びその駆動方法
EP13841383.6A EP2902836B1 (en) 2012-09-26 2013-09-12 Mirror driving device and driving method for same
US14/668,429 US10048489B2 (en) 2012-09-26 2015-03-25 Mirror driving device and driving method for same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012212238A JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2014066876A JP2014066876A (ja) 2014-04-17
JP2014066876A5 true JP2014066876A5 (enExample) 2015-02-19
JP5916577B2 JP5916577B2 (ja) 2016-05-11

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JP2012212238A Active JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法

Country Status (4)

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US (1) US10048489B2 (enExample)
EP (1) EP2902836B1 (enExample)
JP (1) JP5916577B2 (enExample)
WO (1) WO2014050586A1 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10739460B2 (en) 2010-08-11 2020-08-11 Apple Inc. Time-of-flight detector with single-axis scan
JP5654158B1 (ja) * 2014-05-07 2015-01-14 株式会社トライフォース・マネジメント 可動反射素子および二次元走査装置
US9624100B2 (en) 2014-06-12 2017-04-18 Apple Inc. Micro pick up array pivot mount with integrated strain sensing elements
DE102014217799B4 (de) * 2014-09-05 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Piezoelektrischer Positionssensor für piezoelektrisch angetriebene resonante Mikrospiegel
US9705432B2 (en) * 2014-09-30 2017-07-11 Apple Inc. Micro pick up array pivot mount design for strain amplification
JP6606865B2 (ja) * 2015-05-29 2019-11-20 ミツミ電機株式会社 光走査装置及びその製造方法、光走査制御装置
JP6498047B2 (ja) 2015-06-09 2019-04-10 株式会社トライフォース・マネジメント 可動反射装置およびこれを利用した反射面駆動システム
CN104977104B (zh) * 2015-07-13 2017-04-12 大连理工大学 一种压电式小量程大量程比的测力装置
US10298913B2 (en) * 2016-08-18 2019-05-21 Apple Inc. Standalone depth camera
IT201600132144A1 (it) * 2016-12-29 2018-06-29 St Microelectronics Srl Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
JP6354892B2 (ja) * 2017-05-18 2018-07-11 株式会社リコー 位置検出装置と映像機器
US11205977B2 (en) * 2017-07-26 2021-12-21 Tri-Force Management Corporation Power generating element
DE102017220813A1 (de) 2017-11-22 2019-05-23 Robert Bosch Gmbh Laserprojektionsvorrichtung
JP6985602B2 (ja) * 2018-01-29 2021-12-22 ミツミ電機株式会社 光走査装置及び光走査装置の製造方法
IT201800002364A1 (it) 2018-02-02 2019-08-02 St Microelectronics Srl Dispositivo micro-manipolatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
DE102018215528A1 (de) * 2018-09-12 2020-03-12 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US11221478B2 (en) * 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
DE102019210032A1 (de) * 2019-07-05 2021-01-07 Robert Bosch Gmbh Halbleiterbauelement
US11175492B2 (en) 2019-08-12 2021-11-16 Microsoft Technology Licensing, Llc Substrate for scanning mirror system
US11750779B2 (en) 2019-08-20 2023-09-05 Ricoh Company, Ltd. Light deflector, optical scanning system, image projection device, image forming apparatus, and lidar device
CN112752209B (zh) * 2019-10-31 2022-03-25 华为技术有限公司 一种压电式mems传感器以及相关设备
CN111289155B (zh) * 2020-02-26 2021-07-13 西安交通大学 基于电磁激励压阻检测的面内振动硅微谐振式压力传感器
JP7620822B2 (ja) * 2020-03-30 2025-01-24 パナソニックＩｐマネジメント株式会社 アクチュエータ、および光学反射素子
US20220026537A1 (en) * 2020-07-22 2022-01-27 Beijing Voyager Technology Co., Ltd. Systems and methods for sensing rotation angles of a micro mirror in an optical sensing system
CN115695956A (zh) * 2021-07-30 2023-02-03 宁波舜宇光电信息有限公司 转动机构及其摄像模组
CN115390237B (zh) * 2022-08-25 2024-08-06 中国工程物理研究院激光聚变研究中心 一种等离子体电极变形镜
CN119533756B (zh) * 2024-11-18 2025-10-21 中电科芯片技术(集团)有限公司 一种低温漂mems谐振压力传感器敏感芯片及其制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008039810A (ja) * 2006-08-01 2008-02-21 Matsushita Electric Ind Co Ltd 光学反射素子
JP4926596B2 (ja) 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
DE102007058239B4 (de) * 2007-12-04 2021-04-29 Robert Bosch Gmbh Mikrospiegelvorrichtung
JP2009258210A (ja) * 2008-04-14 2009-11-05 Panasonic Corp 光学反射素子
US8043313B2 (en) * 2008-07-03 2011-10-25 Hotspur Technologies, Inc Apparatus and methods for treating obstructions within body lumens
CN102405432B (zh) * 2009-05-11 2014-04-23 松下电器产业株式会社 光学反射元件
JP2011095523A (ja) * 2009-10-30 2011-05-12 Panasonic Corp 光学反射素子
JP5400636B2 (ja) 2010-01-20 2014-01-29 スタンレー電気株式会社 光偏向器及びこれを用いた光学装置
JP5293668B2 (ja) * 2010-03-30 2013-09-18 パナソニック株式会社 光学反射素子
JP5592192B2 (ja) * 2010-08-11 2014-09-17 富士フイルム株式会社 圧電体膜とその製造方法、圧電素子および液体吐出装置

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