IT201600132144A1 - Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano - Google Patents

Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano

Info

Publication number
IT201600132144A1
IT201600132144A1 IT102016000132144A IT201600132144A IT201600132144A1 IT 201600132144 A1 IT201600132144 A1 IT 201600132144A1 IT 102016000132144 A IT102016000132144 A IT 102016000132144A IT 201600132144 A IT201600132144 A IT 201600132144A IT 201600132144 A1 IT201600132144 A1 IT 201600132144A1
Authority
IT
Italy
Prior art keywords
electro
micro
plan
mobile
actuator device
Prior art date
Application number
IT102016000132144A
Other languages
English (en)
Inventor
Domenico Giusti
Anna Alessandri
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102016000132144A priority Critical patent/IT201600132144A1/it
Priority to EP17177446.6A priority patent/EP3343653B1/en
Priority to CN201710501989.8A priority patent/CN108249388B/zh
Priority to CN201720762834.5U priority patent/CN207891042U/zh
Priority to US15/638,195 priority patent/US10770643B2/en
Publication of IT201600132144A1 publication Critical patent/IT201600132144A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/38—Multiple capacitors, e.g. ganged
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezo-electric relays
    • H01H2057/006—Micromechanical piezoelectric relay
IT102016000132144A 2016-12-29 2016-12-29 Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano IT201600132144A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT102016000132144A IT201600132144A1 (it) 2016-12-29 2016-12-29 Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
EP17177446.6A EP3343653B1 (en) 2016-12-29 2017-06-22 Piezoelectric micro-electro-mechanical actuator device, movable in the plane
CN201710501989.8A CN108249388B (zh) 2016-12-29 2017-06-27 可在平面中移动的压电式微机电致动器设备
CN201720762834.5U CN207891042U (zh) 2016-12-29 2017-06-27 压电型微机电致动器设备
US15/638,195 US10770643B2 (en) 2016-12-29 2017-06-29 Piezoelectric micro-electro-mechanical actuator device, movable in the plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000132144A IT201600132144A1 (it) 2016-12-29 2016-12-29 Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano

Publications (1)

Publication Number Publication Date
IT201600132144A1 true IT201600132144A1 (it) 2018-06-29

Family

ID=58609916

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102016000132144A IT201600132144A1 (it) 2016-12-29 2016-12-29 Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano

Country Status (4)

Country Link
US (1) US10770643B2 (it)
EP (1) EP3343653B1 (it)
CN (2) CN108249388B (it)
IT (1) IT201600132144A1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201600132144A1 (it) * 2016-12-29 2018-06-29 St Microelectronics Srl Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
IT201800002364A1 (it) 2018-02-02 2019-08-02 St Microelectronics Srl Dispositivo micro-manipolatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
US11696507B2 (en) 2018-12-14 2023-07-04 Stmicroelectronics S.R.L. Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof
IT202000010264A1 (it) * 2020-05-07 2021-11-07 St Microelectronics Srl Attuatore piezoelettrico avente un sensore di deformazione e relativo procedimento di fabbricazione

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050146248A1 (en) * 2003-11-20 2005-07-07 Moler Jeffery B. Integral thermal compensation for an electro-mechanical actuator
US20070024715A1 (en) * 2004-06-07 2007-02-01 Taku Hirasawa Actuator and micromotion mechanism having such actuator and camera module having such micromotion mechanism
US20140265731A1 (en) * 2010-05-28 2014-09-18 Airbus Helicopters Deutschland GmbH Force generator for mounting on a structure

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US5046773A (en) 1990-01-02 1991-09-10 Hewlett-Packard Company Micro-gripper assembly
JPH0890478A (ja) 1994-09-29 1996-04-09 Shimadzu Corp マイクログリップ
DE19523229A1 (de) 1995-06-27 1997-01-02 Riad Dipl Ing Salim Mikrogreifer für die Mikromontage
DE10107402A1 (de) 2001-02-14 2002-08-29 Ruben Keoschkerjan Piezoelektrischer paralleler Mikrogreifer
US7876026B2 (en) * 2008-08-21 2011-01-25 The United States Of America As Represented By The Secretary Of The Army Large force and displacement piezoelectric MEMS lateral actuation
FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
CA2750918A1 (en) 2009-02-17 2010-08-26 Yu Sun Device for grasping and active release of micro and nano objects
EP2317532A1 (en) * 2009-10-28 2011-05-04 Nxp B.V. Piezoelectric MEMS Device
JP5916577B2 (ja) * 2012-09-26 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
CN104647347B (zh) 2014-09-26 2016-08-24 浙江大学 基于柔性铰链放大的压电微夹钳
FR3030474B1 (fr) * 2014-12-23 2022-01-21 Commissariat Energie Atomique Dispositif de transformation d'un mouvement hors plan en un mouvement dans le plan et/ou inversement
CN110726498B (zh) * 2015-04-30 2021-12-31 意法半导体股份有限公司 用于检测诸如冲击、加速度、旋转力等平面内的力的集成压电传感器
CN105058366B (zh) 2015-08-20 2017-03-22 宁波大学 一种四自由度压电微夹钳
US10062832B2 (en) * 2015-11-30 2018-08-28 Sabic Global Technologies, B.V. Methods and systems for making piezoelectric cantilever actuators
IT201600132144A1 (it) * 2016-12-29 2018-06-29 St Microelectronics Srl Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
IT201800002364A1 (it) 2018-02-02 2019-08-02 St Microelectronics Srl Dispositivo micro-manipolatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050146248A1 (en) * 2003-11-20 2005-07-07 Moler Jeffery B. Integral thermal compensation for an electro-mechanical actuator
US20070024715A1 (en) * 2004-06-07 2007-02-01 Taku Hirasawa Actuator and micromotion mechanism having such actuator and camera module having such micromotion mechanism
US20140265731A1 (en) * 2010-05-28 2014-09-18 Airbus Helicopters Deutschland GmbH Force generator for mounting on a structure

Also Published As

Publication number Publication date
CN108249388B (zh) 2023-08-11
US10770643B2 (en) 2020-09-08
EP3343653A1 (en) 2018-07-04
US20180190895A1 (en) 2018-07-05
CN207891042U (zh) 2018-09-21
CN108249388A (zh) 2018-07-06
EP3343653B1 (en) 2020-07-29

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