JP5916577B2 - ミラー駆動装置及びその駆動方法 - Google Patents

ミラー駆動装置及びその駆動方法 Download PDF

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Publication number
JP5916577B2
JP5916577B2 JP2012212238A JP2012212238A JP5916577B2 JP 5916577 B2 JP5916577 B2 JP 5916577B2 JP 2012212238 A JP2012212238 A JP 2012212238A JP 2012212238 A JP2012212238 A JP 2012212238A JP 5916577 B2 JP5916577 B2 JP 5916577B2
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JP
Japan
Prior art keywords
mirror
piezoelectric actuator
piezoelectric
stress
driving device
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JP2012212238A
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English (en)
Japanese (ja)
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JP2014066876A (ja
JP2014066876A5 (enExample
Inventor
崇幸 直野
崇幸 直野
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Fujifilm Corp
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Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2012212238A priority Critical patent/JP5916577B2/ja
Priority to PCT/JP2013/074648 priority patent/WO2014050586A1/ja
Priority to EP13841383.6A priority patent/EP2902836B1/en
Publication of JP2014066876A publication Critical patent/JP2014066876A/ja
Publication of JP2014066876A5 publication Critical patent/JP2014066876A5/ja
Priority to US14/668,429 priority patent/US10048489B2/en
Application granted granted Critical
Publication of JP5916577B2 publication Critical patent/JP5916577B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2012212238A 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法 Active JP5916577B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012212238A JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法
PCT/JP2013/074648 WO2014050586A1 (ja) 2012-09-26 2013-09-12 ミラー駆動装置及びその駆動方法
EP13841383.6A EP2902836B1 (en) 2012-09-26 2013-09-12 Mirror driving device and driving method for same
US14/668,429 US10048489B2 (en) 2012-09-26 2015-03-25 Mirror driving device and driving method for same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012212238A JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法

Publications (3)

Publication Number Publication Date
JP2014066876A JP2014066876A (ja) 2014-04-17
JP2014066876A5 JP2014066876A5 (enExample) 2015-02-19
JP5916577B2 true JP5916577B2 (ja) 2016-05-11

Family

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Family Applications (1)

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JP2012212238A Active JP5916577B2 (ja) 2012-09-26 2012-09-26 ミラー駆動装置及びその駆動方法

Country Status (4)

Country Link
US (1) US10048489B2 (enExample)
EP (1) EP2902836B1 (enExample)
JP (1) JP5916577B2 (enExample)
WO (1) WO2014050586A1 (enExample)

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US10739460B2 (en) 2010-08-11 2020-08-11 Apple Inc. Time-of-flight detector with single-axis scan
JP5654158B1 (ja) * 2014-05-07 2015-01-14 株式会社トライフォース・マネジメント 可動反射素子および二次元走査装置
US9624100B2 (en) * 2014-06-12 2017-04-18 Apple Inc. Micro pick up array pivot mount with integrated strain sensing elements
DE102014217799B4 (de) * 2014-09-05 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Piezoelektrischer Positionssensor für piezoelektrisch angetriebene resonante Mikrospiegel
US9705432B2 (en) * 2014-09-30 2017-07-11 Apple Inc. Micro pick up array pivot mount design for strain amplification
JP6606865B2 (ja) * 2015-05-29 2019-11-20 ミツミ電機株式会社 光走査装置及びその製造方法、光走査制御装置
JP6498047B2 (ja) 2015-06-09 2019-04-10 株式会社トライフォース・マネジメント 可動反射装置およびこれを利用した反射面駆動システム
CN104977104B (zh) * 2015-07-13 2017-04-12 大连理工大学 一种压电式小量程大量程比的测力装置
US10298913B2 (en) * 2016-08-18 2019-05-21 Apple Inc. Standalone depth camera
IT201600132144A1 (it) * 2016-12-29 2018-06-29 St Microelectronics Srl Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
JP6354892B2 (ja) * 2017-05-18 2018-07-11 株式会社リコー 位置検出装置と映像機器
EP3460981B1 (en) * 2017-07-26 2022-03-30 Tri-Force Management Corporation Power generation element
DE102017220813A1 (de) * 2017-11-22 2019-05-23 Robert Bosch Gmbh Laserprojektionsvorrichtung
JP6985602B2 (ja) * 2018-01-29 2021-12-22 ミツミ電機株式会社 光走査装置及び光走査装置の製造方法
IT201800002364A1 (it) 2018-02-02 2019-08-02 St Microelectronics Srl Dispositivo micro-manipolatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
DE102018215528A1 (de) * 2018-09-12 2020-03-12 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US11221478B2 (en) * 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
DE102019210033A1 (de) * 2019-07-05 2021-01-07 Robert Bosch Gmbh Halbleiterbauelement
US11175492B2 (en) 2019-08-12 2021-11-16 Microsoft Technology Licensing, Llc Substrate for scanning mirror system
US11750779B2 (en) 2019-08-20 2023-09-05 Ricoh Company, Ltd. Light deflector, optical scanning system, image projection device, image forming apparatus, and lidar device
CN112752209B (zh) * 2019-10-31 2022-03-25 华为技术有限公司 一种压电式mems传感器以及相关设备
CN111289155B (zh) * 2020-02-26 2021-07-13 西安交通大学 基于电磁激励压阻检测的面内振动硅微谐振式压力传感器
WO2021200417A1 (ja) * 2020-03-30 2021-10-07 パナソニックＩｐマネジメント株式会社 アクチュエータ、および光学反射素子
US20220026537A1 (en) * 2020-07-22 2022-01-27 Beijing Voyager Technology Co., Ltd. Systems and methods for sensing rotation angles of a micro mirror in an optical sensing system
CN115695956A (zh) * 2021-07-30 2023-02-03 宁波舜宇光电信息有限公司 转动机构及其摄像模组
CN115390237B (zh) * 2022-08-25 2024-08-06 中国工程物理研究院激光聚变研究中心 一种等离子体电极变形镜
CN119533756B (zh) * 2024-11-18 2025-10-21 中电科芯片技术(集团)有限公司 一种低温漂mems谐振压力传感器敏感芯片及其制备方法

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JP2008039810A (ja) * 2006-08-01 2008-02-21 Matsushita Electric Ind Co Ltd 光学反射素子
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JP5400636B2 (ja) 2010-01-20 2014-01-29 スタンレー電気株式会社 光偏向器及びこれを用いた光学装置
JP5293668B2 (ja) * 2010-03-30 2013-09-18 パナソニック株式会社 光学反射素子
JP5592192B2 (ja) * 2010-08-11 2014-09-17 富士フイルム株式会社 圧電体膜とその製造方法、圧電素子および液体吐出装置

Also Published As

Publication number Publication date
EP2902836A4 (en) 2016-05-04
US10048489B2 (en) 2018-08-14
EP2902836B1 (en) 2021-10-27
EP2902836A1 (en) 2015-08-05
US20150198801A1 (en) 2015-07-16
WO2014050586A1 (ja) 2014-04-03
JP2014066876A (ja) 2014-04-17

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