ATE505814T1 - Abschirmung gegen hohe spannung - Google Patents

Abschirmung gegen hohe spannung

Info

Publication number
ATE505814T1
ATE505814T1 AT99939434T AT99939434T ATE505814T1 AT E505814 T1 ATE505814 T1 AT E505814T1 AT 99939434 T AT99939434 T AT 99939434T AT 99939434 T AT99939434 T AT 99939434T AT E505814 T1 ATE505814 T1 AT E505814T1
Authority
AT
Austria
Prior art keywords
guard ring
area
semiconductor
conductive
metal
Prior art date
Application number
AT99939434T
Other languages
English (en)
Inventor
David Miles
Richard Goldman
Original Assignee
Infineon Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag filed Critical Infineon Technologies Ag
Application granted granted Critical
Publication of ATE505814T1 publication Critical patent/ATE505814T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Cable Accessories (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Insulated Conductors (AREA)
AT99939434T 1998-09-03 1999-08-02 Abschirmung gegen hohe spannung ATE505814T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9819248A GB2341272B (en) 1998-09-03 1998-09-03 High voltage shield
PCT/EP1999/005555 WO2000014801A1 (de) 1998-09-03 1999-08-02 High voltage shield

Publications (1)

Publication Number Publication Date
ATE505814T1 true ATE505814T1 (de) 2011-04-15

Family

ID=10838308

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99939434T ATE505814T1 (de) 1998-09-03 1999-08-02 Abschirmung gegen hohe spannung

Country Status (12)

Country Link
US (2) US6384463B1 (de)
EP (1) EP1114459B1 (de)
JP (1) JP4695261B2 (de)
KR (1) KR100649808B1 (de)
CN (1) CN1197154C (de)
AT (1) ATE505814T1 (de)
AU (1) AU5373099A (de)
CA (1) CA2342904A1 (de)
DE (1) DE69943351D1 (de)
GB (1) GB2341272B (de)
TW (1) TW418424B (de)
WO (1) WO2000014801A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2187397A (en) * 1996-03-22 1997-10-10 Telefonaktiebolaget Lm Ericsson (Publ) Semiconductor device shielded by an array of electrically conducting pins and a method to manufacture such a device
CN1230046C (zh) 1999-10-01 2005-11-30 精工爱普生株式会社 布线基板、半导体装置及其制造、检测和安装方法
JP4424830B2 (ja) * 2000-06-30 2010-03-03 Ｏｋｉセミコンダクタ株式会社 半導体装置
SE522123C2 (sv) * 2001-04-10 2004-01-13 Volvo Lastvagnar Ab Metod för rekonditionering av ett friktionspar i en färdbroms samt fordon innefattande en anordning för rekonditionering av ett friktionspar i en färdbroms anordnad i nämnda fordon
US6552597B1 (en) * 2001-11-02 2003-04-22 Power Integrations, Inc. Integrated circuit with closely coupled high voltage output and offline transistor pair
JP3813562B2 (ja) 2002-03-15 2006-08-23 富士通株式会社 半導体装置及びその製造方法
JP4519411B2 (ja) * 2003-04-01 2010-08-04 ルネサスエレクトロニクス株式会社 半導体装置
JP4619705B2 (ja) * 2004-01-15 2011-01-26 株式会社東芝 半導体装置
US7541652B1 (en) * 2004-05-05 2009-06-02 Xilinx, Inc. Substrate coupled noise isolation for integrated circuits
US8624346B2 (en) * 2005-10-11 2014-01-07 Taiwan Semiconductor Manufacturing Company, Ltd. Exclusion zone for stress-sensitive circuit design
US7608913B2 (en) * 2006-02-23 2009-10-27 Freescale Semiconductor, Inc. Noise isolation between circuit blocks in an integrated circuit chip
CN100459145C (zh) * 2006-12-15 2009-02-04 东南大学 高压功率集成电路隔离结构
US7646078B2 (en) * 2007-01-17 2010-01-12 Taiwan Semiconductor Manufacturing Company, Ltd. Die saw crack stopper
US7952167B2 (en) * 2007-04-27 2011-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Scribe line layout design
US8125052B2 (en) * 2007-05-14 2012-02-28 Taiwan Semiconductor Manufacturing Co., Ltd. Seal ring structure with improved cracking protection
US8643147B2 (en) * 2007-11-01 2014-02-04 Taiwan Semiconductor Manufacturing Company, Ltd. Seal ring structure with improved cracking protection and reduced problems
US8334582B2 (en) * 2008-06-26 2012-12-18 Taiwan Semiconductor Manufacturing Company, Ltd. Protective seal ring for preventing die-saw induced stress
US7906836B2 (en) * 2008-11-14 2011-03-15 Taiwan Semiconductor Manufacturing Company, Ltd. Heat spreader structures in scribe lines
JP5535490B2 (ja) * 2009-01-30 2014-07-02 住友電工デバイス・イノベーション株式会社 半導体装置
US8368180B2 (en) * 2009-02-18 2013-02-05 Taiwan Semiconductor Manufacturing Company, Ltd. Scribe line metal structure
CN102456671A (zh) * 2010-10-25 2012-05-16 上海华虹Nec电子有限公司 射频单芯片系统中的屏蔽环结构
US8957496B2 (en) * 2013-04-17 2015-02-17 Freescale Semiconductor, Inc. Integrated circuit chip with discontinuous guard ring
US9377502B2 (en) * 2013-12-19 2016-06-28 Infineon Technologies Ag Testing of semiconductor devices and devices, and designs thereof
US11056449B2 (en) * 2016-12-30 2021-07-06 Intel Corporation Guard ring structures and their methods of fabrication

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3558366A (en) * 1968-09-17 1971-01-26 Bell Telephone Labor Inc Metal shielding for ion implanted semiconductor device
JPS52104061A (en) * 1976-02-27 1977-09-01 Hitachi Ltd Plastic seal type semiconductor integrated circuit unit
US4364078A (en) * 1978-08-15 1982-12-14 Synertek Edge barrier of polysilicon and metal for integrated circuit chips
DE3132791A1 (de) 1981-08-19 1983-03-03 Siemens AG, 1000 Berlin und 8000 München Hochspannungsgleichrichter
EP0160941A3 (de) * 1984-05-07 1987-03-25 General Electric Company Hochspannungsverbindungssystem für eine integrierte Halbleiterschaltung
JPS6252934U (de) * 1985-09-24 1987-04-02
US4825278A (en) * 1985-10-17 1989-04-25 American Telephone And Telegraph Company At&T Bell Laboratories Radiation hardened semiconductor devices
US4959708A (en) 1988-08-26 1990-09-25 Delco Electronics Corporation MOS integrated circuit with vertical shield
FR2652449A1 (fr) 1989-09-22 1991-03-29 Sgs Thomson Microelectronics Dispositif de protection electrostatique pour broche de circuit integre.
FR2656156A1 (fr) * 1989-12-16 1991-06-21 Sgs Thomson Microelectronics Circuit integre entierement protege des rayons ultra-violets.
JP2656416B2 (ja) 1991-12-16 1997-09-24 三菱電機株式会社 半導体装置および半導体装置の製造方法、並びに半導体装置に用いられる複合基板および複合基板の製造方法
JPH05304154A (ja) 1992-04-28 1993-11-16 Nec Corp 半導体装置
DE4308624A1 (de) 1993-03-18 1994-09-22 Abb Management Ag MOS-gesteuertes Leistungshalbleiterbauelement
US5381031A (en) 1993-12-22 1995-01-10 At&T Corp. Semiconductor device with reduced high voltage termination area and high breakdown voltage
GB2286286B (en) * 1993-12-31 1998-05-27 Hyundai Electronics Ind Improvements in or relating to the fabrication of semiconductor devices
DE69410251T2 (de) * 1994-06-20 1998-10-01 Sgs Thomson Microelectronics Integrierte Anordnung mit einer Abgrenzungsstruktur für das elektrische Oberflächenfeld und Herstellungsverfahren
US5629552A (en) * 1995-01-17 1997-05-13 Ixys Corporation Stable high voltage semiconductor device structure
KR100196524B1 (ko) 1994-11-08 1999-06-15 김영환 반도체 칩 보호용 고전압 차단 장치
JP2998662B2 (ja) * 1996-11-15 2000-01-11 日本電気株式会社 半導体装置

Also Published As

Publication number Publication date
GB2341272B (en) 2003-08-20
AU5373099A (en) 2000-03-27
JP2002524877A (ja) 2002-08-06
WO2000014801A1 (de) 2000-03-16
CN1197154C (zh) 2005-04-13
JP4695261B2 (ja) 2011-06-08
CN1325545A (zh) 2001-12-05
US20010038138A1 (en) 2001-11-08
EP1114459A1 (de) 2001-07-11
GB9819248D0 (en) 1998-10-28
TW418424B (en) 2001-01-11
DE69943351D1 (de) 2011-05-26
EP1114459B1 (de) 2011-04-13
US6492219B2 (en) 2002-12-10
KR100649808B1 (ko) 2006-11-24
US6384463B1 (en) 2002-05-07
GB2341272A (en) 2000-03-08
CA2342904A1 (en) 2000-03-16
KR20010074942A (ko) 2001-08-09

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties