ATE504083T1 - Verfahren zum recycling eines substrats, herstellungsverfahren für einen beschichteten wafer und dazu passendes recyceltes donorsubstrat - Google Patents

Verfahren zum recycling eines substrats, herstellungsverfahren für einen beschichteten wafer und dazu passendes recyceltes donorsubstrat

Info

Publication number
ATE504083T1
ATE504083T1 AT08290490T AT08290490T ATE504083T1 AT E504083 T1 ATE504083 T1 AT E504083T1 AT 08290490 T AT08290490 T AT 08290490T AT 08290490 T AT08290490 T AT 08290490T AT E504083 T1 ATE504083 T1 AT E504083T1
Authority
AT
Austria
Prior art keywords
substrate
region
recycling
recycled
matching
Prior art date
Application number
AT08290490T
Other languages
German (de)
English (en)
Inventor
Cecile Aulnette
Khalid Radouane
Original Assignee
S O I Tec Silicon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S O I Tec Silicon filed Critical S O I Tec Silicon
Application granted granted Critical
Publication of ATE504083T1 publication Critical patent/ATE504083T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/16—Preparing bulk and homogeneous wafers by reclaiming or re-processing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24488—Differential nonuniformity at margin

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Recrystallisation Techniques (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AT08290490T 2007-07-11 2008-05-28 Verfahren zum recycling eines substrats, herstellungsverfahren für einen beschichteten wafer und dazu passendes recyceltes donorsubstrat ATE504083T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07290869A EP2015354A1 (en) 2007-07-11 2007-07-11 Method for recycling a substrate, laminated wafer fabricating method and suitable recycled donor substrate

Publications (1)

Publication Number Publication Date
ATE504083T1 true ATE504083T1 (de) 2011-04-15

Family

ID=38896813

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08290490T ATE504083T1 (de) 2007-07-11 2008-05-28 Verfahren zum recycling eines substrats, herstellungsverfahren für einen beschichteten wafer und dazu passendes recyceltes donorsubstrat

Country Status (7)

Country Link
US (1) US8324075B2 (https=)
EP (2) EP2015354A1 (https=)
JP (1) JP5099859B2 (https=)
KR (1) KR101487371B1 (https=)
CN (1) CN101689530B (https=)
AT (1) ATE504083T1 (https=)
DE (1) DE602008005817D1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8871109B2 (en) 2009-04-28 2014-10-28 Gtat Corporation Method for preparing a donor surface for reuse
FR2999801B1 (fr) * 2012-12-14 2014-12-26 Soitec Silicon On Insulator Procede de fabrication d'une structure
US20140268273A1 (en) * 2013-03-15 2014-09-18 Pixtronix, Inc. Integrated elevated aperture layer and display apparatus
US8946054B2 (en) 2013-04-19 2015-02-03 International Business Machines Corporation Crack control for substrate separation
US10535685B2 (en) 2013-12-02 2020-01-14 The Regents Of The University Of Michigan Fabrication of thin-film electronic devices with non-destructive wafer reuse
CN104119815B (zh) * 2014-08-04 2015-08-19 博洛尼家居用品(北京)股份有限公司 一种双面胶带
FR3048548B1 (fr) * 2016-03-02 2018-03-02 Soitec Procede de determination d'une energie convenable d'implantation dans un substrat donneur et procede de fabrication d'une structure de type semi-conducteur sur isolant
US20180033609A1 (en) * 2016-07-28 2018-02-01 QMAT, Inc. Removal of non-cleaved/non-transferred material from donor substrate
FR3063176A1 (fr) * 2017-02-17 2018-08-24 Soitec Masquage d'une zone au bord d'un substrat donneur lors d'une etape d'implantation ionique
FR3074608B1 (fr) * 2017-12-05 2019-12-06 Soitec Procede de preparation d'un residu de substrat donneur, substrat obtenu a l'issu de ce procede, et utilisation d'un tel susbtrat
KR102287395B1 (ko) * 2019-02-28 2021-08-06 김용석 플렉시블 전자 소자의 제조방법 및 그로부터 제조된 플렉시블 전자 소자
KR102523640B1 (ko) 2022-01-28 2023-04-19 주식회사 이노와이어리스 이동통신 단말 시험용 실드 박스

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668045A (en) * 1994-11-30 1997-09-16 Sibond, L.L.C. Process for stripping outer edge of BESOI wafers
JP3932369B2 (ja) 1998-04-09 2007-06-20 信越半導体株式会社 剥離ウエーハを再利用する方法および再利用に供されるシリコンウエーハ
US6664169B1 (en) * 1999-06-08 2003-12-16 Canon Kabushiki Kaisha Process for producing semiconductor member, process for producing solar cell, and anodizing apparatus
JP3472197B2 (ja) * 1999-06-08 2003-12-02 キヤノン株式会社 半導体基材及び太陽電池の製造方法
KR100730806B1 (ko) * 1999-10-14 2007-06-20 신에쯔 한도타이 가부시키가이샤 Ｓｏｉ웨이퍼의 제조방법 및 ｓｏｉ 웨이퍼
JP3943782B2 (ja) 1999-11-29 2007-07-11 信越半導体株式会社 剥離ウエーハの再生処理方法及び再生処理された剥離ウエーハ
TWI233154B (en) 2002-12-06 2005-05-21 Soitec Silicon On Insulator Method for recycling a substrate
FR2892228B1 (fr) * 2005-10-18 2008-01-25 Soitec Silicon On Insulator Procede de recyclage d'une plaquette donneuse epitaxiee
FR2852445B1 (fr) * 2003-03-14 2005-05-20 Soitec Silicon On Insulator Procede de realisation de substrats ou composants sur substrats avec transfert de couche utile, pour la microelectronique, l'optoelectronique ou l'optique
US7402520B2 (en) 2004-11-26 2008-07-22 Applied Materials, Inc. Edge removal of silicon-on-insulator transfer wafer
FR2888400B1 (fr) * 2005-07-08 2007-10-19 Soitec Silicon On Insulator Procede de prelevement de couche
EP1777735A3 (fr) * 2005-10-18 2009-08-19 S.O.I.Tec Silicon on Insulator Technologies Procédé de recyclage d'une plaquette donneuse épitaxiée
JP4715470B2 (ja) * 2005-11-28 2011-07-06 株式会社Sumco 剥離ウェーハの再生加工方法及びこの方法により再生加工された剥離ウェーハ

Also Published As

Publication number Publication date
KR101487371B1 (ko) 2015-01-29
US8324075B2 (en) 2012-12-04
CN101689530A (zh) 2010-03-31
DE602008005817D1 (de) 2011-05-12
EP2037495A1 (en) 2009-03-18
CN101689530B (zh) 2013-05-22
JP5099859B2 (ja) 2012-12-19
JP2010532928A (ja) 2010-10-14
EP2015354A1 (en) 2009-01-14
KR20100044142A (ko) 2010-04-29
EP2037495B1 (en) 2011-03-30
US20100181653A1 (en) 2010-07-22

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