FR2888400B1 - Procede de prelevement de couche - Google Patents

Procede de prelevement de couche

Info

Publication number
FR2888400B1
FR2888400B1 FR0507300A FR0507300A FR2888400B1 FR 2888400 B1 FR2888400 B1 FR 2888400B1 FR 0507300 A FR0507300 A FR 0507300A FR 0507300 A FR0507300 A FR 0507300A FR 2888400 B1 FR2888400 B1 FR 2888400B1
Authority
FR
France
Prior art keywords
wafer
face
implanted
layer
taking method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0507300A
Other languages
English (en)
Other versions
FR2888400A1 (fr
Inventor
Cecile Aulnette
Ian Cayrefourcq
Carlos Mazure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0507300A priority Critical patent/FR2888400B1/fr
Priority to US11/221,045 priority patent/US7572714B2/en
Priority to KR1020087001682A priority patent/KR101015158B1/ko
Priority to JP2008520025A priority patent/JP4943426B2/ja
Priority to AT06809161T priority patent/ATE528793T1/de
Priority to EP06809161A priority patent/EP1911085B1/fr
Priority to PCT/IB2006/003071 priority patent/WO2007017763A2/fr
Priority to CNA2006800244508A priority patent/CN101213651A/zh
Priority to TW095124731A priority patent/TWI311776B/zh
Publication of FR2888400A1 publication Critical patent/FR2888400A1/fr
Application granted granted Critical
Publication of FR2888400B1 publication Critical patent/FR2888400B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Micromachines (AREA)
  • Electroluminescent Light Sources (AREA)
FR0507300A 2005-07-08 2005-07-08 Procede de prelevement de couche Active FR2888400B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0507300A FR2888400B1 (fr) 2005-07-08 2005-07-08 Procede de prelevement de couche
US11/221,045 US7572714B2 (en) 2005-07-08 2005-09-06 Film taking-off method
JP2008520025A JP4943426B2 (ja) 2005-07-08 2006-07-06 被膜の生成方法
AT06809161T ATE528793T1 (de) 2005-07-08 2006-07-06 Verfahren zur herstellung eines films
KR1020087001682A KR101015158B1 (ko) 2005-07-08 2006-07-06 필름의 제조 방법
EP06809161A EP1911085B1 (fr) 2005-07-08 2006-07-06 Procede servant a produire une couche
PCT/IB2006/003071 WO2007017763A2 (fr) 2005-07-08 2006-07-06 Procede servant a produire une couche
CNA2006800244508A CN101213651A (zh) 2005-07-08 2006-07-06 薄膜制造方法
TW095124731A TWI311776B (en) 2005-07-08 2006-07-07 Method of production of a film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0507300A FR2888400B1 (fr) 2005-07-08 2005-07-08 Procede de prelevement de couche

Publications (2)

Publication Number Publication Date
FR2888400A1 FR2888400A1 (fr) 2007-01-12
FR2888400B1 true FR2888400B1 (fr) 2007-10-19

Family

ID=36127344

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0507300A Active FR2888400B1 (fr) 2005-07-08 2005-07-08 Procede de prelevement de couche

Country Status (6)

Country Link
US (1) US7572714B2 (fr)
JP (1) JP4943426B2 (fr)
CN (1) CN101213651A (fr)
AT (1) ATE528793T1 (fr)
FR (1) FR2888400B1 (fr)
TW (1) TWI311776B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8252663B2 (en) 2009-06-18 2012-08-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method of transferring a thin layer onto a target substrate having a coefficient of thermal expansion different from that of the thin layer

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2773261B1 (fr) 1997-12-30 2000-01-28 Commissariat Energie Atomique Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions
FR2880184B1 (fr) * 2004-12-28 2007-03-30 Commissariat Energie Atomique Procede de detourage d'une structure obtenue par assemblage de deux plaques
KR100731055B1 (ko) * 2005-11-08 2007-06-22 동부일렉트로닉스 주식회사 반도체소자의 제조방법
FR2893446B1 (fr) * 2005-11-16 2008-02-15 Soitec Silicon Insulator Techn TRAITEMENT DE COUCHE DE SiGe POUR GRAVURE SELECTIVE
FR2917232B1 (fr) 2007-06-06 2009-10-09 Soitec Silicon On Insulator Procede de fabrication d'une structure pour epitaxie sans zone d'exclusion.
EP2015354A1 (fr) * 2007-07-11 2009-01-14 S.O.I.Tec Silicon on Insulator Technologies Procédé pour le recyclage d'un substrat, procédé de fabrication de tranches stratifiées et substrat donneur recyclé approprié
WO2009007003A1 (fr) * 2007-07-11 2009-01-15 S.O.I. Tec Silicon On Insulator Technologies Procédé pour recycler un substrat, procédé de fabrication de tranches stratifiées et substrat donneur recyclé approprié
WO2011003366A1 (fr) * 2009-07-10 2011-01-13 上海新傲科技股份有限公司 Procédé permettant de former un substrat doté d’une couche enterrée isolante
FR2953988B1 (fr) * 2009-12-11 2012-02-10 S O I Tec Silicon On Insulator Tech Procede de detourage d'un substrat chanfreine.
PL2928700T3 (pl) 2012-12-07 2019-02-28 Aixtron Se Sposób i aparatura do przenoszenia powłok z jednego substratu na inny
US20180033609A1 (en) * 2016-07-28 2018-02-01 QMAT, Inc. Removal of non-cleaved/non-transferred material from donor substrate
FR3063176A1 (fr) * 2017-02-17 2018-08-24 Soitec Masquage d'une zone au bord d'un substrat donneur lors d'une etape d'implantation ionique
TWI665718B (zh) * 2018-04-03 2019-07-11 環球晶圓股份有限公司 磊晶基板
JP7164777B2 (ja) * 2018-11-13 2022-11-02 東京エレクトロン株式会社 ウェハ上の欠陥、金属粒子汚染及び膜成長を抑制するシステム及び方法
FR3091620B1 (fr) * 2019-01-07 2021-01-29 Commissariat Energie Atomique Procédé de transfert de couche avec réduction localisée d’une capacité à initier une fracture
CN111834200A (zh) * 2020-09-16 2020-10-27 南京晶驱集成电路有限公司 一种半导体结构及其制造方法
FR3135819B1 (fr) * 2022-05-18 2024-04-26 Commissariat Energie Atomique Procédé de transfert d'une couche depuis un substrat source vers un substrat destination

Family Cites Families (24)

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Publication number Priority date Publication date Assignee Title
DE3410524A1 (de) 1984-03-22 1985-10-03 Vdo Schindling Druckschalter
CA2246087A1 (fr) * 1998-08-28 2000-02-28 Northern Telecom Limited Methode de decoupe d'une galette de semiconducteurs
JP3943782B2 (ja) 1999-11-29 2007-07-11 信越半導体株式会社 剥離ウエーハの再生処理方法及び再生処理された剥離ウエーハ
JP4846915B2 (ja) * 2000-03-29 2011-12-28 信越半導体株式会社 貼り合わせウェーハの製造方法
JP2002075917A (ja) 2000-08-25 2002-03-15 Canon Inc 試料の分離装置及び分離方法
FR2823596B1 (fr) * 2001-04-13 2004-08-20 Commissariat Energie Atomique Substrat ou structure demontable et procede de realisation
JP2002313757A (ja) 2001-04-17 2002-10-25 Hitachi Ltd 半導体集積回路装置の製造方法
US6855436B2 (en) * 2003-05-30 2005-02-15 International Business Machines Corporation Formation of silicon-germanium-on-insulator (SGOI) by an integral high temperature SIMOX-Ge interdiffusion anneal
JP2002353081A (ja) 2001-05-25 2002-12-06 Canon Inc 板部材の分離装置及び分離方法
US6995430B2 (en) * 2002-06-07 2006-02-07 Amberwave Systems Corporation Strained-semiconductor-on-insulator device structures
US7018910B2 (en) 2002-07-09 2006-03-28 S.O.I.Tec Silicon On Insulator Technologies S.A. Transfer of a thin layer from a wafer comprising a buffer layer
FR2842349B1 (fr) 2002-07-09 2005-02-18 Transfert d'une couche mince a partir d'une plaquette comprenant une couche tampon
US6841457B2 (en) * 2002-07-16 2005-01-11 International Business Machines Corporation Use of hydrogen implantation to improve material properties of silicon-germanium-on-insulator material made by thermal diffusion
FR2842651B1 (fr) * 2002-07-17 2005-07-08 Procede de lissage du contour d'une couche utile de materiau reportee sur un substrat support
JP4147578B2 (ja) * 2002-07-30 2008-09-10 信越半導体株式会社 Ｓｏｉウエーハの製造方法
AU2003270040A1 (en) * 2002-08-29 2004-03-19 Massachusetts Institute Of Technology Fabrication method for a monocrystalline semiconductor layer on a substrate
FR2852445B1 (fr) 2003-03-14 2005-05-20 Soitec Silicon On Insulator Procede de realisation de substrats ou composants sur substrats avec transfert de couche utile, pour la microelectronique, l'optoelectronique ou l'optique
US7122095B2 (en) * 2003-03-14 2006-10-17 S.O.I.Tec Silicon On Insulator Technologies S.A. Methods for forming an assembly for transfer of a useful layer
JP4415588B2 (ja) * 2003-08-28 2010-02-17 株式会社Ｓｕｍｃｏ 剥離ウェーハの再生処理方法
US6831350B1 (en) * 2003-10-02 2004-12-14 Freescale Semiconductor, Inc. Semiconductor structure with different lattice constant materials and method for forming the same
FR2860842B1 (fr) * 2003-10-14 2007-11-02 Tracit Technologies Procede de preparation et d'assemblage de substrats
DE10355728B4 (de) * 2003-11-28 2006-04-13 X-Fab Semiconductor Foundries Ag Verbinden von Halbleiterscheiben gleichen Durchmessers zum Erhalt einer gebondeten Scheibenanordnung
JP4714423B2 (ja) * 2004-01-06 2011-06-29 Ｏｋｉセミコンダクタ株式会社 半導体ウエハとその製造方法
CN1922732B (zh) * 2004-02-25 2010-06-09 S.O.I.Tec绝缘体上硅技术公司 光电检测装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8252663B2 (en) 2009-06-18 2012-08-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method of transferring a thin layer onto a target substrate having a coefficient of thermal expansion different from that of the thin layer

Also Published As

Publication number Publication date
TW200721263A (en) 2007-06-01
FR2888400A1 (fr) 2007-01-12
ATE528793T1 (de) 2011-10-15
JP4943426B2 (ja) 2012-05-30
US20070023867A1 (en) 2007-02-01
CN101213651A (zh) 2008-07-02
US7572714B2 (en) 2009-08-11
JP2009500839A (ja) 2009-01-08
TWI311776B (en) 2009-07-01

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