ATE443874T1 - Magnetoresistiver winkelsensor mit mehreren erfassungselementen - Google Patents
Magnetoresistiver winkelsensor mit mehreren erfassungselementenInfo
- Publication number
- ATE443874T1 ATE443874T1 AT01945239T AT01945239T ATE443874T1 AT E443874 T1 ATE443874 T1 AT E443874T1 AT 01945239 T AT01945239 T AT 01945239T AT 01945239 T AT01945239 T AT 01945239T AT E443874 T1 ATE443874 T1 AT E443874T1
- Authority
- AT
- Austria
- Prior art keywords
- pdat
- hil
- bold
- sensing element
- magnetoresistic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00202484 | 2000-07-13 | ||
PCT/EP2001/006292 WO2002006845A1 (en) | 2000-07-13 | 2001-05-31 | Magnetoresistive angle sensor having several sensing elements |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE443874T1 true ATE443874T1 (de) | 2009-10-15 |
Family
ID=8171790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01945239T ATE443874T1 (de) | 2000-07-13 | 2001-05-31 | Magnetoresistiver winkelsensor mit mehreren erfassungselementen |
Country Status (9)
Country | Link |
---|---|
US (1) | US6633462B2 (de) |
EP (1) | EP1232400B1 (de) |
JP (1) | JP2004504713A (de) |
KR (1) | KR100918978B1 (de) |
CN (1) | CN1204411C (de) |
AT (1) | ATE443874T1 (de) |
DE (1) | DE60139980D1 (de) |
TW (1) | TWI241411B (de) |
WO (1) | WO2002006845A1 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3498737B2 (ja) * | 2001-01-24 | 2004-02-16 | ヤマハ株式会社 | 磁気センサの製造方法 |
US7331523B2 (en) | 2001-07-13 | 2008-02-19 | Hand Held Products, Inc. | Adaptive optical image reader |
US6931166B2 (en) * | 2001-10-25 | 2005-08-16 | The Johns Hopkins University | Optical sensor and method for detecting projectile impact location and velocity vector |
EP1527352A1 (de) * | 2002-07-26 | 2005-05-04 | Robert Bosch GmbH | Gmr-sensorelement und dessen verwendung |
CN101034730A (zh) * | 2002-10-18 | 2007-09-12 | 雅马哈株式会社 | 磁感应器的制作方法 |
JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
DE10255327A1 (de) * | 2002-11-27 | 2004-06-24 | Robert Bosch Gmbh | Magnetoresistives Sensorelement und Verfahren zur Reduktion des Winkelfehlers eines magnetoresistiven Sensorelements |
DE10308030B4 (de) * | 2003-02-24 | 2011-02-03 | Meas Deutschland Gmbh | Magnetoresistiver Sensor zur Bestimmung eines Winkels oder einer Position |
US20060127701A1 (en) * | 2003-06-11 | 2006-06-15 | Koninklijke Phillips Electronics N.C. | Method of manufacturing a device with a magnetic layer-structure |
JP4557134B2 (ja) * | 2004-03-12 | 2010-10-06 | ヤマハ株式会社 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
US7196875B2 (en) * | 2004-03-24 | 2007-03-27 | Honeywell International Inc. | Permalloy sensor having individual permalloy resist pattern runners with lengths perpendicular to a wafer level anisotropy |
DE102004019238B3 (de) * | 2004-04-16 | 2005-08-18 | Hl-Planar Technik Gmbh | Anordnung und Verfahren zur Bestimmung der Richtung magnetischer Felder sowie Verwendung der Anordnung und des Verfahrens |
RU2007115917A (ru) * | 2004-09-27 | 2008-11-10 | Конинклейке Филипс Электроникс Н.В. (Nl) | Компоновка датчика |
US7450353B2 (en) * | 2004-10-25 | 2008-11-11 | The United States of America as represented by the Secretary of Commerce, The National Institute of Standards & Technology | Zig-zag shape biased anisotropic magnetoresistive sensor |
US7112962B2 (en) * | 2004-11-18 | 2006-09-26 | Honeywell International Inc. | Angular position detection utilizing a plurality of rotary configured magnetic sensors |
JP2008525787A (ja) * | 2004-12-28 | 2008-07-17 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 調節可能な特性を有する磁気センサ |
DE102005009923B4 (de) * | 2005-03-04 | 2016-11-24 | Sensitec Gmbh | Magnetoresistiver Sensor zur Bestimmung einer Position des Sensors |
CN100334110C (zh) * | 2005-09-01 | 2007-08-29 | 中国人民解放军南京军区南京总医院 | 一种精子蛋白单克隆抗体及其制备方法和用途 |
JP4790448B2 (ja) * | 2006-03-03 | 2011-10-12 | 株式会社リコー | 磁気抵抗効果素子及びその形成方法 |
DE602007010852D1 (de) * | 2006-03-03 | 2011-01-13 | Ricoh Co Ltd | Element mit magnetoresistivem Effekt und Herstellungsverfahren dafür |
JP4833691B2 (ja) * | 2006-03-03 | 2011-12-07 | 株式会社リコー | 磁気センサ及びその製造方法 |
US7405554B2 (en) * | 2006-08-30 | 2008-07-29 | Sae Magnetics (H.K.) Ltd. | Vehicle wheel speed and acceleration sensor and method for calculating the same |
JP4991322B2 (ja) * | 2006-10-30 | 2012-08-01 | 日立オートモティブシステムズ株式会社 | Gmr素子を用いた変位センサ,gmr素子を用いた角度検出センサ及びそれらに用いる半導体装置 |
US7635974B2 (en) * | 2007-05-02 | 2009-12-22 | Magic Technologies, Inc. | Magnetic tunnel junction (MTJ) based magnetic field angle sensor |
DE102007021320A1 (de) * | 2007-05-07 | 2008-11-20 | Infineon Technologies Ag | Sensor zum Erfassen einer Magnetfeldrichtung, Magnetfeldrichtungserfassung, Verfahren zum Herstellen von Magnetfeldsensoren und Einschreibevorrichtung zur Herstellung vom Magnetfeldsensoren |
US20090115405A1 (en) * | 2007-11-01 | 2009-05-07 | Magic Technologies, Inc. | Magnetic field angular sensor with a full angle detection |
JP5170679B2 (ja) * | 2008-01-29 | 2013-03-27 | 日立金属株式会社 | 磁気センサおよび回転角度検出装置 |
FR2933202B1 (fr) * | 2008-06-27 | 2010-12-10 | Centre Nat Etd Spatiales | Dispositif et procede de mesure de champ magnetique |
HUE047316T2 (hu) | 2008-08-14 | 2020-04-28 | Genentech Inc | Eljárások szennyezés eltávolítására indigén fehérjekiszorításos ioncserés membrán kromatográfia alkalmazásával |
US8174260B2 (en) * | 2008-08-26 | 2012-05-08 | Infineon Technologies Ag | Integrated circuit with magnetic material magnetically coupled to magneto-resistive sensing element |
US8269486B2 (en) | 2008-11-12 | 2012-09-18 | Infineon Technologies Ag | Magnetic sensor system and method |
JP2011038855A (ja) | 2009-08-07 | 2011-02-24 | Tdk Corp | 磁気センサ |
JP5096442B2 (ja) * | 2009-11-17 | 2012-12-12 | 株式会社日立製作所 | 回転角計測装置,モータシステム及び電動パワーステアリング・システム |
US8564286B2 (en) | 2010-06-28 | 2013-10-22 | Infineon Technologies Ag | GMR sensors having reduced AMR effects |
JP5110134B2 (ja) | 2010-08-30 | 2012-12-26 | Tdk株式会社 | 回転磁界センサ |
JP5177197B2 (ja) | 2010-10-13 | 2013-04-03 | Tdk株式会社 | 回転磁界センサ |
JP5131339B2 (ja) * | 2010-11-17 | 2013-01-30 | Tdk株式会社 | 回転磁界センサ |
US8890266B2 (en) * | 2011-01-31 | 2014-11-18 | Everspin Technologies, Inc. | Fabrication process and layout for magnetic sensor arrays |
CN102297652B (zh) * | 2011-03-03 | 2012-12-05 | 江苏多维科技有限公司 | 一种独立封装的磁电阻角度传感器 |
JP5397496B2 (ja) * | 2011-05-30 | 2014-01-22 | 株式会社デンソー | 磁気センサ装置およびその製造方法 |
US8947082B2 (en) | 2011-10-21 | 2015-02-03 | University College Cork, National University Of Ireland | Dual-axis anisotropic magnetoresistive sensors |
EP2788780A1 (de) * | 2011-12-05 | 2014-10-15 | Advanced Microsensors Corporation | Magnetfeldsensor und verfahren |
JP5991031B2 (ja) * | 2012-06-01 | 2016-09-14 | 株式会社デンソー | 磁気センサ |
JP5365730B1 (ja) * | 2012-08-07 | 2013-12-11 | Tdk株式会社 | 回転磁界センサ |
JP6074988B2 (ja) * | 2012-09-28 | 2017-02-08 | アイシン精機株式会社 | 回転磁気検出回路および回転磁気センサ |
JP6143456B2 (ja) * | 2012-12-27 | 2017-06-07 | 東フロコーポレーション株式会社 | 流量センサ及び流量制御装置 |
CN103968918B (zh) * | 2013-01-25 | 2018-11-09 | 江苏多维科技有限公司 | 数字液位传感器 |
US9341684B2 (en) * | 2013-03-13 | 2016-05-17 | Plures Technologies, Inc. | Magnetic field sensing apparatus and methods |
US9377327B2 (en) * | 2013-06-28 | 2016-06-28 | Analog Devices Global | Magnetic field direction sensor |
JP2015045529A (ja) | 2013-08-27 | 2015-03-12 | Tdk株式会社 | 回転磁界センサ |
CN103768679B (zh) * | 2014-02-20 | 2016-08-24 | 江苏多维科技有限公司 | 精密注射器泵及其制造方法 |
JP6413326B2 (ja) * | 2014-05-01 | 2018-10-31 | 日立金属株式会社 | 磁気センサ及び電流検出構造 |
JP6237903B2 (ja) * | 2014-07-23 | 2017-11-29 | 株式会社村田製作所 | 磁気センサ |
US10996246B2 (en) * | 2014-10-10 | 2021-05-04 | Hitachi Metals, Ltd. | Current detection method, current detection device, signal correction method for current detection device, and signal correction device for current detection device |
JP6570634B2 (ja) * | 2014-11-24 | 2019-09-04 | ゼンジテック ゲゼルシャフト ミット ベシュレンクテル ハフツングSensitec GmbH | 少なくとも2つのブリッジを有する磁気抵抗ホイートストンブリッジ及び角度センサ |
JP6066134B2 (ja) | 2015-01-09 | 2017-01-25 | Tdk株式会社 | 磁気センサシステム |
JP6352195B2 (ja) | 2015-01-14 | 2018-07-04 | Tdk株式会社 | 磁気センサ |
CN105910528B (zh) | 2015-02-20 | 2019-09-20 | 亚德诺半导体集团 | 检测传感器误差 |
GB2538342B (en) | 2015-02-20 | 2019-10-16 | Sensitec Gmbh | Detecting sensor error |
JP2016166748A (ja) | 2015-03-09 | 2016-09-15 | Tdk株式会社 | 磁気センサ |
JP6191838B2 (ja) | 2015-03-09 | 2017-09-06 | Tdk株式会社 | 磁気センサ |
US9816838B2 (en) | 2015-08-24 | 2017-11-14 | Infineon Technologies Ag | Magnetoresistive angle sensor with linear sensor elements |
US10276787B2 (en) | 2016-02-11 | 2019-04-30 | Texas Instruments Incorporated | Integrated anisotropic magnetoresistive device |
US10859406B2 (en) * | 2017-01-31 | 2020-12-08 | Analog Devices Global | Magnetic sensor position measurement with phase compensation |
US10782154B2 (en) | 2017-06-26 | 2020-09-22 | Texas Instruments Incorporated | Tilted segmented anisotropic magneto-resistive angular sensor |
US10627459B2 (en) * | 2017-07-17 | 2020-04-21 | Texas Instruments Incorporated | Anisotropic magneto-resistive (AMR) angle sensor die comprising a plurality of AMR angle sensors |
US10365123B2 (en) * | 2017-07-21 | 2019-07-30 | Texas Instruments Incorporated | Anisotropic magneto-resistive (AMR) angle sensor |
US10670425B2 (en) * | 2018-03-30 | 2020-06-02 | Nxp B.V. | System for measuring angular position and method of stray field cancellation |
JP7106103B2 (ja) * | 2018-07-02 | 2022-07-26 | 国立大学法人東北大学 | 磁気センサ装置およびその製造方法 |
EP3667346B1 (de) * | 2018-12-11 | 2022-06-08 | Crocus Technology S.A. | Magnetische winkelsensorvorrichtung zum erfassen hoher magnetfelder mit niedrigem winkelfehler |
US11486742B2 (en) | 2019-08-16 | 2022-11-01 | Nxp B.V. | System with magnetic field shield structure |
CN111398879B (zh) * | 2020-03-09 | 2021-06-18 | 兰州大学 | 一种基于p-n结光致磁阻传感器的新方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4438715C1 (de) * | 1994-10-29 | 1996-05-30 | Inst Mikrostrukturtechnologie | Magnetfeldsensorchip |
JPH08242027A (ja) * | 1995-03-03 | 1996-09-17 | Mitsubishi Electric Corp | 磁気抵抗素子回路 |
DE19521617C1 (de) * | 1995-06-14 | 1997-03-13 | Imo Inst Fuer Mikrostrukturtec | Sensorchip zur Bestimmung eines Sinus- und eines Cosinuswertes sowie seine Verwendung zum Messen eines Winkels und einer Position |
DE19532674C1 (de) * | 1995-09-05 | 1996-11-07 | Inst Physikalische Hochtech Ev | Drehwinkelgeber unter Verwendung von Giant Magnetowiderstandsmaterialien |
DE19640695A1 (de) * | 1996-10-02 | 1998-04-09 | Bosch Gmbh Robert | Magnetoresistiver Sensor mit temperaturstabilem Nullpunkt |
EP0877228B1 (de) * | 1997-05-09 | 2003-08-06 | Tesa Sa | Magnetoresistiver Sensor für Dimensionsbestimmung |
US6097183A (en) * | 1998-04-14 | 2000-08-01 | Honeywell International Inc. | Position detection apparatus with correction for non-linear sensor regions |
DE19839450B4 (de) * | 1998-08-29 | 2004-03-11 | Institut für Mikrostrukturtechnologie und Optoelektronik (IMO) e.V. | Magnetoresistiver Sensorchip mit mindestens zwei als Halb- oder Vollbrücke ausgebildeten Meßelementen |
DE19839446A1 (de) * | 1998-08-29 | 2000-03-02 | Bosch Gmbh Robert | Anordnung zur Drehwinkelerfassung eines drehbaren Elements |
DE19849613A1 (de) * | 1998-10-28 | 2000-05-04 | Philips Corp Intellectual Pty | Anordnung zur Messung einer relativen linearen Position |
DE19852502A1 (de) * | 1998-11-13 | 2000-05-18 | Philips Corp Intellectual Pty | Verfahren zur Offset-Kalibrierung eines magnetoresistiven Winkelsensors |
-
2001
- 2001-05-24 US US09/864,130 patent/US6633462B2/en not_active Expired - Fee Related
- 2001-05-28 TW TW090112810A patent/TWI241411B/zh active
- 2001-05-31 DE DE60139980T patent/DE60139980D1/de not_active Expired - Lifetime
- 2001-05-31 CN CNB018027229A patent/CN1204411C/zh not_active Expired - Fee Related
- 2001-05-31 AT AT01945239T patent/ATE443874T1/de not_active IP Right Cessation
- 2001-05-31 EP EP01945239A patent/EP1232400B1/de not_active Expired - Lifetime
- 2001-05-31 WO PCT/EP2001/006292 patent/WO2002006845A1/en active Application Filing
- 2001-05-31 JP JP2002512701A patent/JP2004504713A/ja active Pending
-
2002
- 2002-03-12 KR KR1020027003250A patent/KR100918978B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20020006017A1 (en) | 2002-01-17 |
EP1232400A1 (de) | 2002-08-21 |
KR100918978B1 (ko) | 2009-09-25 |
KR20020060178A (ko) | 2002-07-16 |
DE60139980D1 (de) | 2009-11-05 |
US6633462B2 (en) | 2003-10-14 |
CN1204411C (zh) | 2005-06-01 |
EP1232400B1 (de) | 2009-09-23 |
WO2002006845A1 (en) | 2002-01-24 |
JP2004504713A (ja) | 2004-02-12 |
TWI241411B (en) | 2005-10-11 |
CN1388901A (zh) | 2003-01-01 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |