ATE374432T1 - Teilchenstrahlvorrichtung mit gekippter säule und verfahren zur verwendung derselben - Google Patents
Teilchenstrahlvorrichtung mit gekippter säule und verfahren zur verwendung derselbenInfo
- Publication number
- ATE374432T1 ATE374432T1 AT99908113T AT99908113T ATE374432T1 AT E374432 T1 ATE374432 T1 AT E374432T1 AT 99908113 T AT99908113 T AT 99908113T AT 99908113 T AT99908113 T AT 99908113T AT E374432 T1 ATE374432 T1 AT E374432T1
- Authority
- AT
- Austria
- Prior art keywords
- axis
- particle beam
- work stage
- workpiece
- beam source
- Prior art date
Links
- 239000002245 particle Substances 0.000 title abstract 12
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3005—Observing the objects or the point of impact on the object
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
- H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
- H01J2237/2067—Surface alteration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3151—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31742—Etching microareas for repairing masks
- H01J2237/31744—Etching microareas for repairing masks introducing gas in vicinity of workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Sampling And Sample Adjustment (AREA)
- Drying Of Semiconductors (AREA)
- Steering Devices For Bicycles And Motorcycles (AREA)
- Support Of Aerials (AREA)
- Reciprocating Pumps (AREA)
- Machine Tool Units (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/022,065 US6039000A (en) | 1998-02-11 | 1998-02-11 | Focused particle beam systems and methods using a tilt column |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE374432T1 true ATE374432T1 (de) | 2007-10-15 |
Family
ID=21807650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99908113T ATE374432T1 (de) | 1998-02-11 | 1999-02-09 | Teilchenstrahlvorrichtung mit gekippter säule und verfahren zur verwendung derselben |
Country Status (8)
Country | Link |
---|---|
US (2) | US6039000A (de) |
EP (1) | EP1053562B1 (de) |
JP (1) | JP4754069B2 (de) |
KR (1) | KR100533783B1 (de) |
AT (1) | ATE374432T1 (de) |
CA (1) | CA2320149A1 (de) |
DE (1) | DE69937188T2 (de) |
WO (1) | WO1999041765A1 (de) |
Families Citing this family (59)
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---|---|---|---|---|
DE19802848B4 (de) * | 1998-01-26 | 2012-02-02 | Display Products Group,Inc. | Verfahren und Vorrichtung zum Testen eines Substrats |
JP3041600B2 (ja) * | 1998-05-19 | 2000-05-15 | セイコーインスツルメンツ株式会社 | 複合荷電粒子ビーム装置 |
JP3663056B2 (ja) * | 1998-07-23 | 2005-06-22 | 株式会社日立製作所 | 電子顕微鏡用試料加熱ホルダ及び試料観察方法 |
JP2000106121A (ja) * | 1998-07-29 | 2000-04-11 | Jeol Ltd | 電子顕微鏡あるいはその類似装置 |
US7094312B2 (en) * | 1999-07-22 | 2006-08-22 | Fsi Company | Focused particle beam systems and methods using a tilt column |
JP2001273861A (ja) * | 2000-03-28 | 2001-10-05 | Toshiba Corp | 荷電ビーム装置およびパターン傾斜観察方法 |
RU2164718C1 (ru) * | 2000-07-04 | 2001-03-27 | Общество с ограниченной ответственностью "Агентство маркетинга научных разработок" | Установка для формирования наноструктур на поверхности полупроводниковых пластин ионными пучками |
EP1332510B1 (de) * | 2000-09-20 | 2011-11-16 | Fei Company | Echtzeitüberwachung zur gleichzeitigen abbildung und belichtung in systemen mit geladenen teilchenstrahlen |
JP4178741B2 (ja) * | 2000-11-02 | 2008-11-12 | 株式会社日立製作所 | 荷電粒子線装置および試料作製装置 |
EP1209737B2 (de) * | 2000-11-06 | 2014-04-30 | Hitachi, Ltd. | Verfahren zur Herstellung von Proben |
JP4855598B2 (ja) * | 2001-07-05 | 2012-01-18 | 株式会社日立製作所 | 試料作製装置および試料作製方法 |
EP1436601B1 (de) * | 2001-05-23 | 2014-10-01 | Omniprobe, Inc. | Verfahren zur probentrennung und probenaushebung |
US6670610B2 (en) * | 2001-11-26 | 2003-12-30 | Applied Materials, Inc. | System and method for directing a miller |
US6797967B1 (en) * | 2002-02-25 | 2004-09-28 | Advanced Micro Devices, Inc. | Method and system for dose control during an ion implantation process |
US20050103272A1 (en) * | 2002-02-25 | 2005-05-19 | Leo Elektronenmikroskopie Gmbh | Material processing system and method |
US6822246B2 (en) * | 2002-03-27 | 2004-11-23 | Kla-Tencor Technologies Corporation | Ribbon electron beam for inspection system |
US6661009B1 (en) | 2002-05-31 | 2003-12-09 | Fei Company | Apparatus for tilting a beam system |
US6683304B1 (en) * | 2002-07-08 | 2004-01-27 | Chartered Semiconductor Manufacturing Limited | Method for a plan-view transmission electron microscopy sample preparation technique for via and contact characterization |
JP2006509999A (ja) * | 2002-08-02 | 2006-03-23 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | 顕微鏡の試料調製方法及び装置 |
DE10302794A1 (de) * | 2003-01-24 | 2004-07-29 | Nawotec Gmbh | Verfahren und Vorrichtung zur Herstellung von Korpuskularstrahlsystemen |
US7002152B2 (en) * | 2003-02-15 | 2006-02-21 | Bal-Tec Ag | Sample preparation for transmission electron microscopy |
EP1501115B1 (de) * | 2003-07-14 | 2009-07-01 | FEI Company | Zweistrahlsystem |
US9159527B2 (en) * | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
DE10351276A1 (de) * | 2003-10-31 | 2005-06-16 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät |
EP1630849B1 (de) * | 2004-08-27 | 2011-11-02 | Fei Company | Lokalisierte Plasmabehandlung |
JP5033314B2 (ja) * | 2004-09-29 | 2012-09-26 | 株式会社日立ハイテクノロジーズ | イオンビーム加工装置及び加工方法 |
JP4664041B2 (ja) * | 2004-10-27 | 2011-04-06 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置及び試料作製方法 |
JP4413746B2 (ja) | 2004-10-28 | 2010-02-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
DE102005002006A1 (de) * | 2005-01-15 | 2006-07-27 | Kuratorium Offis E.V. | Vorrichtung zur Herstellung von 3D-Strukturen |
JP2006252995A (ja) * | 2005-03-11 | 2006-09-21 | Jeol Ltd | 荷電粒子ビーム装置 |
JP4634288B2 (ja) * | 2005-11-22 | 2011-02-16 | 株式会社日立ハイテクノロジーズ | 集束イオンビーム加工方法及び荷電粒子ビーム装置 |
WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
JP4533306B2 (ja) * | 2005-12-06 | 2010-09-01 | 株式会社日立ハイテクノロジーズ | 半導体ウェハ検査方法及び欠陥レビュー装置 |
JP4801996B2 (ja) * | 2006-01-05 | 2011-10-26 | 株式会社ニューフレアテクノロジー | 試料移動機構及び荷電粒子ビーム描画装置 |
JP4307470B2 (ja) * | 2006-08-08 | 2009-08-05 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料加工方法及び半導体検査装置 |
JP5266236B2 (ja) | 2006-10-20 | 2013-08-21 | エフ・イ−・アイ・カンパニー | サンプル抽出および取り扱いのための方法および装置 |
JP5959139B2 (ja) | 2006-10-20 | 2016-08-02 | エフ・イ−・アイ・カンパニー | S/temのサンプルを分析する方法 |
EP1916695B1 (de) | 2006-10-25 | 2018-12-05 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Ladungsträgerstrahlgerät und Verfahren zum Betrieb desselben |
JP5117764B2 (ja) | 2007-05-22 | 2013-01-16 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム加工装置 |
JP5410975B2 (ja) * | 2007-08-08 | 2014-02-05 | 株式会社日立ハイテクサイエンス | 複合集束イオンビーム装置及びそれを用いた加工観察方法 |
JPWO2009020150A1 (ja) * | 2007-08-08 | 2010-11-04 | エスアイアイ・ナノテクノロジー株式会社 | 複合集束イオンビーム装置及びそれを用いた加工観察方法、加工方法 |
JP4834704B2 (ja) * | 2008-09-01 | 2011-12-14 | 株式会社日立製作所 | 試料作製方法 |
JP2011233249A (ja) * | 2010-04-23 | 2011-11-17 | Tokyo Institute Of Technology | イオンビーム照射位置決め装置 |
EP2749863A3 (de) | 2012-12-31 | 2016-05-04 | Fei Company | Verfahren zur Vorbereitung von Proben für Bildgebung |
US8859963B2 (en) | 2011-06-03 | 2014-10-14 | Fei Company | Methods for preparing thin samples for TEM imaging |
US8912490B2 (en) | 2011-06-03 | 2014-12-16 | Fei Company | Method for preparing samples for imaging |
US9733164B2 (en) | 2012-06-11 | 2017-08-15 | Fei Company | Lamella creation method and device using fixed-angle beam and rotating sample stage |
US10465293B2 (en) * | 2012-08-31 | 2019-11-05 | Fei Company | Dose-based end-pointing for low-kV FIB milling TEM sample preparation |
US9237655B1 (en) | 2013-03-15 | 2016-01-12 | Lockheed Martin Corporation | Material deposition on circuit card assemblies |
GB201308436D0 (en) * | 2013-05-10 | 2013-06-19 | Oxford Instr Nanotechnology Tools Ltd | Metrology for preparation of thin samples |
TWI664658B (zh) * | 2014-06-30 | 2019-07-01 | 日商日立高新技術科學股份有限公司 | 自動試料製作裝置 |
US10446369B1 (en) * | 2017-06-14 | 2019-10-15 | National Technology & Engineering Solutions Of Sandia, Llc | Systems and methods for interferometric end point detection for a focused ion beam fabrication tool |
US11440151B2 (en) | 2019-06-07 | 2022-09-13 | Applied Materials Israel Ltd. | Milling a multi-layered object |
US10971618B2 (en) | 2019-08-02 | 2021-04-06 | Applied Materials Israel Ltd. | Generating milled structural elements with a flat upper surface |
WO2021030475A1 (en) | 2019-08-12 | 2021-02-18 | MEO Engineering Company, Inc. | Method and apparatus for precursor gas injection |
US11276557B2 (en) | 2019-09-17 | 2022-03-15 | Applied Materials Israel Ltd. | Forming a vertical surface |
CN112041671B (zh) * | 2020-07-24 | 2023-10-20 | 长江存储科技有限责任公司 | 制备和分析薄膜的方法 |
CN113984821B (zh) * | 2021-12-29 | 2022-03-11 | 中国科学院地质与地球物理研究所 | 纳米结构三维成像系统与方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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US4128765A (en) * | 1976-10-29 | 1978-12-05 | Joseph Franks | Ion beam machining techniques and apparatus |
US4465934A (en) * | 1981-01-23 | 1984-08-14 | Veeco Instruments Inc. | Parallel charged particle beam exposure system |
JPH084090B2 (ja) * | 1986-08-27 | 1996-01-17 | 株式会社日立製作所 | Ic配線の切断方法及び装置 |
JPH0235725A (ja) * | 1988-07-26 | 1990-02-06 | Matsushita Electric Ind Co Ltd | ドライエッチング方法およびドライエッチング装置 |
JP2779414B2 (ja) * | 1988-12-01 | 1998-07-23 | セイコーインスツルメンツ株式会社 | ミクロ断面の加工・観察方法 |
KR910016054A (ko) * | 1990-02-23 | 1991-09-30 | 미다 가쓰시게 | 마이크로 전자 장치용 표면 처리 장치 및 그 방법 |
JPH0463433A (ja) * | 1990-07-02 | 1992-02-28 | Mitsubishi Electric Corp | 半導体素子の配線装置およびそれを用いた配線方法 |
JP2886649B2 (ja) * | 1990-09-27 | 1999-04-26 | 株式会社日立製作所 | イオンビーム加工方法及びその装置 |
JP3113674B2 (ja) * | 1990-11-21 | 2000-12-04 | 株式会社日立製作所 | 荷電ビーム処理方法およびその装置 |
JPH0629251A (ja) * | 1992-07-13 | 1994-02-04 | Matsushita Electron Corp | 中性粒子ビームエッチング装置 |
JPH0778737A (ja) * | 1993-09-08 | 1995-03-20 | Fujitsu Ltd | 荷電粒子ビーム露光方法及び荷電粒子ビーム露光装置 |
US5576542A (en) * | 1993-12-08 | 1996-11-19 | Kabushiki Kaisha Toshiba | Substrate cross-section observing apparatus |
US5770123A (en) * | 1994-09-22 | 1998-06-23 | Ebara Corporation | Method and apparatus for energy beam machining |
DE29507225U1 (de) * | 1995-04-29 | 1995-07-13 | Gruenewald Wolfgang Dr Rer Nat | Ionenstrahlpräparationsvorrichtung für die Elektronenmikroskopie |
US5541411A (en) * | 1995-07-06 | 1996-07-30 | Fei Company | Image-to-image registration focused ion beam system |
JPH09115861A (ja) * | 1995-10-20 | 1997-05-02 | Hitachi Ltd | 試料を加工する装置 |
US6029251A (en) * | 1996-12-31 | 2000-02-22 | Opti Inc. | Method and apparatus for temperature sensing |
-
1998
- 1998-02-11 US US09/022,065 patent/US6039000A/en not_active Expired - Lifetime
-
1999
- 1999-02-09 EP EP99908113A patent/EP1053562B1/de not_active Expired - Lifetime
- 1999-02-09 JP JP2000531858A patent/JP4754069B2/ja not_active Expired - Lifetime
- 1999-02-09 CA CA002320149A patent/CA2320149A1/en not_active Abandoned
- 1999-02-09 DE DE69937188T patent/DE69937188T2/de not_active Expired - Lifetime
- 1999-02-09 WO PCT/US1999/002867 patent/WO1999041765A1/en active IP Right Grant
- 1999-02-09 AT AT99908113T patent/ATE374432T1/de not_active IP Right Cessation
- 1999-02-09 KR KR10-2000-7008819A patent/KR100533783B1/ko active IP Right Grant
- 1999-07-22 US US09/359,534 patent/US6497194B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1053562B1 (de) | 2007-09-26 |
KR100533783B1 (ko) | 2005-12-07 |
DE69937188D1 (de) | 2007-11-08 |
DE69937188T2 (de) | 2008-06-26 |
JP2002503870A (ja) | 2002-02-05 |
EP1053562A1 (de) | 2000-11-22 |
US6039000A (en) | 2000-03-21 |
US6497194B1 (en) | 2002-12-24 |
CA2320149A1 (en) | 1999-08-19 |
WO1999041765A1 (en) | 1999-08-19 |
JP4754069B2 (ja) | 2011-08-24 |
KR20010040911A (ko) | 2001-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |