ATE364184T1 - Presselement und vorrichtung für ein elektronisches bauelement - Google Patents
Presselement und vorrichtung für ein elektronisches bauelementInfo
- Publication number
- ATE364184T1 ATE364184T1 AT02783760T AT02783760T ATE364184T1 AT E364184 T1 ATE364184 T1 AT E364184T1 AT 02783760 T AT02783760 T AT 02783760T AT 02783760 T AT02783760 T AT 02783760T AT E364184 T1 ATE364184 T1 AT E364184T1
- Authority
- AT
- Austria
- Prior art keywords
- pusher
- electronic component
- pressing element
- pressing
- biases
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Manipulator (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2002/012687 WO2004051292A1 (ja) | 2002-12-04 | 2002-12-04 | 押圧部材および電子部品ハンドリング装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE364184T1 true ATE364184T1 (de) | 2007-06-15 |
Family
ID=32448996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02783760T ATE364184T1 (de) | 2002-12-04 | 2002-12-04 | Presselement und vorrichtung für ein elektronisches bauelement |
Country Status (10)
Country | Link |
---|---|
US (2) | US7309981B2 (de) |
EP (1) | EP1574865B1 (de) |
JP (1) | JP4146839B2 (de) |
CN (1) | CN100403043C (de) |
AT (1) | ATE364184T1 (de) |
AU (1) | AU2002349395A1 (de) |
DE (1) | DE60220553T2 (de) |
MY (1) | MY135539A (de) |
TW (1) | TWI277745B (de) |
WO (1) | WO2004051292A1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100403043C (zh) * | 2002-12-04 | 2008-07-16 | 株式会社爱德万测试 | 按压部件和电子部件处理装置 |
JP2006237295A (ja) * | 2005-02-25 | 2006-09-07 | Arufakusu Kk | 半導体レーザの特性検査方法及びその装置 |
SG131792A1 (en) * | 2005-10-21 | 2007-05-28 | Daytona Control Co Ltd | Pusher of ic chip handler |
US7214072B1 (en) | 2005-10-31 | 2007-05-08 | Daytona Control Co., Ltd. | Pusher of IC chip handler |
JP4881316B2 (ja) * | 2005-11-09 | 2012-02-22 | 株式会社アドバンテスト | 電子部品試験装置、及び、電子部品試験装置のコンタクトアームの最適押付条件設定方法 |
DE112006000019T5 (de) * | 2006-02-13 | 2008-07-24 | Advantest Corp. | Kontaktstößel, Kontaktarm und Prüfgerät für elektronische Bauelemente |
JP2008014847A (ja) * | 2006-07-07 | 2008-01-24 | Matsushita Electric Ind Co Ltd | ハンドラとこのハンドラを使用した半導体デバイスの検査方法 |
WO2008102581A1 (ja) | 2007-02-23 | 2008-08-28 | Advantest Corporation | 電子部品押圧装置および電子部品試験装置 |
US7965091B2 (en) * | 2007-04-30 | 2011-06-21 | Electro Scientific Industries, Inc. | Test plate for electronic handler |
WO2009101706A1 (ja) * | 2008-02-15 | 2009-08-20 | Advantest Corporation | マッチプレートベース部および本体部、電子部品ハンドリング装置、ならびにマッチプレート本体部およびテスト部ユニットの交換治具および交換方法 |
DE102009045291A1 (de) * | 2009-10-02 | 2011-04-07 | Ers Electronic Gmbh | Vorrichtung zur Konditionierung von Halbleiterchips und Testverfahren unter Verwendung der Vorrichtung |
DE202010006062U1 (de) * | 2010-04-23 | 2010-07-22 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten |
TW201423899A (zh) * | 2012-12-14 | 2014-06-16 | Hon Tech Inc | 電子元件壓取機構及其應用之測試設備 |
US10281518B2 (en) * | 2014-02-25 | 2019-05-07 | Formfactor Beaverton, Inc. | Systems and methods for on-wafer dynamic testing of electronic devices |
JP5796104B1 (ja) * | 2014-05-07 | 2015-10-21 | 株式会社 Synax | 電子部品測定用のコンタクトモジュール |
KR102200697B1 (ko) * | 2015-01-12 | 2021-01-12 | (주)테크윙 | 테스트핸들러용 가압장치 |
TWI551873B (zh) * | 2015-03-13 | 2016-10-01 | Hon Tech Inc | Electronic components operating equipment |
TW201715241A (zh) * | 2015-10-23 | 2017-05-01 | Hon Tech Inc | 電子元件作業裝置及其應用之測試分類設備 |
TWI580979B (zh) * | 2016-06-24 | 2017-05-01 | Electronic components crimping device and its application test classification equipment | |
TWI588501B (zh) * | 2016-06-24 | 2017-06-21 | Temperature control device of electronic components testing and classification machine and its application temperature control method | |
TWI593980B (zh) * | 2016-07-29 | 2017-08-01 | Electronic components operating device and its application test classification equipment | |
USD834075S1 (en) | 2016-08-05 | 2018-11-20 | Ebara Corporation | Pressing member for substrate polishing apparatus |
TWI623754B (zh) * | 2017-01-26 | 2018-05-11 | Electronic component testing device and test classification device thereof | |
TWI628446B (zh) * | 2017-07-07 | 2018-07-01 | 鴻勁精密股份有限公司 | Electronic component test picking and sorting equipment |
JP2019113471A (ja) * | 2017-12-26 | 2019-07-11 | セイコーエプソン株式会社 | 電子部品搬送装置及び電子部品検査装置 |
JP7281250B2 (ja) | 2018-05-11 | 2023-05-25 | 株式会社アドバンテスト | 試験用キャリア |
JP7316798B2 (ja) | 2019-01-30 | 2023-07-28 | 株式会社アドバンテスト | 電子部品ハンドリング装置及び電子部品試験装置 |
CN110794277B (zh) * | 2018-07-26 | 2022-06-03 | 株式会社爱德万测试 | 电子部件处理装置及电子部件测试装置 |
TWI708952B (zh) * | 2019-05-06 | 2020-11-01 | 美商第一檢測有限公司 | 檢測設備 |
TWI709520B (zh) * | 2019-12-12 | 2020-11-11 | 鴻勁精密股份有限公司 | 輸送裝置之貼接機構及其應用之測試設備 |
US11143699B2 (en) * | 2020-02-19 | 2021-10-12 | UI Green Micro & Nano Technologies Co Ltd | Integrated circuit testing apparatus and method |
TWI744840B (zh) * | 2020-03-25 | 2021-11-01 | 鴻勁精密股份有限公司 | 預冷器以及其應用之測試分類設備 |
TW202141662A (zh) * | 2020-04-16 | 2021-11-01 | 力成科技股份有限公司 | 拾取及接觸裝置 |
TWI741693B (zh) * | 2020-07-24 | 2021-10-01 | 鴻勁精密股份有限公司 | 接合機構及其應用之作業設備 |
TWI769664B (zh) * | 2021-01-15 | 2022-07-01 | 鴻勁精密股份有限公司 | 測試裝置及其應用之測試設備 |
KR102463826B1 (ko) * | 2021-03-18 | 2022-11-04 | ㈜킴스옵텍 | 접촉 특성 개선 구조의 반도체 패키지 검사 지그 |
CN114264929A (zh) * | 2021-11-17 | 2022-04-01 | 杭州长川科技股份有限公司 | Ic测试装置 |
TWI815469B (zh) * | 2022-05-23 | 2023-09-11 | 鴻勁精密股份有限公司 | 接合治具、接合機構及作業機 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19756900A1 (de) * | 1996-12-26 | 1998-07-02 | Advantest Corp | Testvorrichtung für Halbleiterbauelemente |
US6069483A (en) * | 1997-12-16 | 2000-05-30 | Intel Corporation | Pickup chuck for multichip modules |
US6057700A (en) * | 1998-05-06 | 2000-05-02 | Lucent Technologies, Inc. | Pressure controlled alignment fixture |
JPH11329646A (ja) * | 1998-05-15 | 1999-11-30 | Jsr Corp | 検査装置 |
JPH11329648A (ja) * | 1998-05-19 | 1999-11-30 | Molex Inc | Icデバイスソケット |
JP4299383B2 (ja) * | 1998-06-25 | 2009-07-22 | 株式会社アドバンテスト | Ic試験装置 |
US6369595B1 (en) * | 1999-01-21 | 2002-04-09 | Micron Technology, Inc. | CSP BGA test socket with insert and method |
JP4327335B2 (ja) * | 2000-06-23 | 2009-09-09 | 株式会社アドバンテスト | コンタクトアームおよびこれを用いた電子部品試験装置 |
JP4480253B2 (ja) * | 2000-10-27 | 2010-06-16 | 株式会社アドバンテスト | 電子部品試験用押圧装置、電子部品試験装置およびその制御方法 |
CN100403043C (zh) * | 2002-12-04 | 2008-07-16 | 株式会社爱德万测试 | 按压部件和电子部件处理装置 |
-
2002
- 2002-12-04 CN CNB028301498A patent/CN100403043C/zh not_active Expired - Fee Related
- 2002-12-04 DE DE60220553T patent/DE60220553T2/de not_active Expired - Fee Related
- 2002-12-04 EP EP02783760A patent/EP1574865B1/de not_active Expired - Lifetime
- 2002-12-04 AU AU2002349395A patent/AU2002349395A1/en not_active Abandoned
- 2002-12-04 AT AT02783760T patent/ATE364184T1/de not_active IP Right Cessation
- 2002-12-04 JP JP2004556801A patent/JP4146839B2/ja not_active Expired - Fee Related
- 2002-12-04 WO PCT/JP2002/012687 patent/WO2004051292A1/ja active IP Right Grant
-
2003
- 2003-11-28 TW TW092133536A patent/TWI277745B/zh not_active IP Right Cessation
- 2003-12-04 MY MYPI20034643A patent/MY135539A/en unknown
-
2005
- 2005-06-02 US US11/142,663 patent/US7309981B2/en not_active Expired - Fee Related
-
2007
- 2007-10-31 US US11/979,088 patent/US7511473B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
MY135539A (en) | 2008-05-30 |
TWI277745B (en) | 2007-04-01 |
US20050275398A1 (en) | 2005-12-15 |
US7511473B2 (en) | 2009-03-31 |
JP4146839B2 (ja) | 2008-09-10 |
DE60220553D1 (de) | 2007-07-19 |
TW200409925A (en) | 2004-06-16 |
JPWO2004051292A1 (ja) | 2006-04-06 |
CN100403043C (zh) | 2008-07-16 |
EP1574865B1 (de) | 2007-06-06 |
EP1574865A1 (de) | 2005-09-14 |
CN1720460A (zh) | 2006-01-11 |
AU2002349395A1 (en) | 2004-06-23 |
DE60220553T2 (de) | 2008-01-31 |
US20080122433A1 (en) | 2008-05-29 |
EP1574865A4 (de) | 2006-02-15 |
WO2004051292A1 (ja) | 2004-06-17 |
US7309981B2 (en) | 2007-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |