ATE360896T1 - Herstellung von integrierten abstimmbaren/umschaltbaren passiven mikro- und millimeterwellenmodulen - Google Patents

Herstellung von integrierten abstimmbaren/umschaltbaren passiven mikro- und millimeterwellenmodulen

Info

Publication number
ATE360896T1
ATE360896T1 AT02076528T AT02076528T ATE360896T1 AT E360896 T1 ATE360896 T1 AT E360896T1 AT 02076528 T AT02076528 T AT 02076528T AT 02076528 T AT02076528 T AT 02076528T AT E360896 T1 ATE360896 T1 AT E360896T1
Authority
AT
Austria
Prior art keywords
interconnect
millimeter wave
manufacturing integrated
wave modules
integrated tunable
Prior art date
Application number
AT02076528T
Other languages
English (en)
Inventor
Hendrikus Tilmans
Eric Beyne
Henri Jansen
Raedt Walter De
Original Assignee
Imec Inter Uni Micro Electr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr filed Critical Imec Inter Uni Micro Electr
Application granted granted Critical
Publication of ATE360896T1 publication Critical patent/ATE360896T1/de

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0006—Interconnects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Waveguides (AREA)
  • Networks Using Active Elements (AREA)
AT02076528T 2001-04-19 2002-04-18 Herstellung von integrierten abstimmbaren/umschaltbaren passiven mikro- und millimeterwellenmodulen ATE360896T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US28555701P 2001-04-19 2001-04-19

Publications (1)

Publication Number Publication Date
ATE360896T1 true ATE360896T1 (de) 2007-05-15

Family

ID=23094757

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02076528T ATE360896T1 (de) 2001-04-19 2002-04-18 Herstellung von integrierten abstimmbaren/umschaltbaren passiven mikro- und millimeterwellenmodulen

Country Status (4)

Country Link
US (3) US6876056B2 (de)
EP (1) EP1251577B1 (de)
AT (1) ATE360896T1 (de)
DE (1) DE60219712T2 (de)

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US7368311B2 (en) 2008-05-06
EP1251577B1 (de) 2007-04-25
US7835157B2 (en) 2010-11-16
EP1251577A3 (de) 2004-02-18
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US20080157897A1 (en) 2008-07-03
US20050003606A1 (en) 2005-01-06

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