ATE359604T1 - Elektrostatisch gesteuerter tunneleffekt- transistor - Google Patents
Elektrostatisch gesteuerter tunneleffekt- transistorInfo
- Publication number
- ATE359604T1 ATE359604T1 AT00928255T AT00928255T ATE359604T1 AT E359604 T1 ATE359604 T1 AT E359604T1 AT 00928255 T AT00928255 T AT 00928255T AT 00928255 T AT00928255 T AT 00928255T AT E359604 T1 ATE359604 T1 AT E359604T1
- Authority
- AT
- Austria
- Prior art keywords
- island
- transistor
- source
- drain
- gate
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000005421 electrostatic potential Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000005641 tunneling Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/936—Specified use of nanostructure for electronic or optoelectronic application in a transistor or 3-terminal device
- Y10S977/937—Single electron transistor
Landscapes
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Control Of Eletrric Generators (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/296,858 US6198113B1 (en) | 1999-04-22 | 1999-04-22 | Electrostatically operated tunneling transistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE359604T1 true ATE359604T1 (de) | 2007-05-15 |
Family
ID=23143870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT00928255T ATE359604T1 (de) | 1999-04-22 | 2000-04-21 | Elektrostatisch gesteuerter tunneleffekt- transistor |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6198113B1 (de) |
| EP (1) | EP1173896B1 (de) |
| JP (2) | JP4109830B2 (de) |
| KR (1) | KR100721632B1 (de) |
| CN (1) | CN1168156C (de) |
| AT (1) | ATE359604T1 (de) |
| AU (1) | AU4651600A (de) |
| DE (1) | DE60034328T2 (de) |
| TW (1) | TW454352B (de) |
| WO (1) | WO2000065669A1 (de) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2818439B1 (fr) * | 2000-12-18 | 2003-09-26 | Commissariat Energie Atomique | Procede de fabrication d'un ilot de matiere confine entre des electrodes, et applications aux transistors |
| US6566680B1 (en) * | 2001-01-30 | 2003-05-20 | Advanced Micro Devices, Inc. | Semiconductor-on-insulator (SOI) tunneling junction transistor |
| KR100444270B1 (ko) * | 2002-07-06 | 2004-08-12 | 재단법인서울대학교산학협력재단 | 음 미분 전도도를 갖는 반도체 소자의 제조 방법 |
| US6833556B2 (en) | 2002-08-12 | 2004-12-21 | Acorn Technologies, Inc. | Insulated gate field effect transistor having passivated schottky barriers to the channel |
| US7084423B2 (en) | 2002-08-12 | 2006-08-01 | Acorn Technologies, Inc. | Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions |
| US7902029B2 (en) * | 2002-08-12 | 2011-03-08 | Acorn Technologies, Inc. | Process for fabricating a self-aligned deposited source/drain insulated gate field-effect transistor |
| KR100470832B1 (ko) * | 2002-08-12 | 2005-03-10 | 한국전자통신연구원 | 두께가 얇은 soi층을 이용한 쇼트키 장벽 관통트랜지스터 및 그 제조방법 |
| US7176483B2 (en) * | 2002-08-12 | 2007-02-13 | Acorn Technologies, Inc. | Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions |
| KR100558287B1 (ko) * | 2002-12-10 | 2006-03-10 | 한국전자통신연구원 | 단전자 소자, 그 제조 방법 및 단전자 소자와 mos트랜지스터를 동시에 형성하는 제조방법 |
| US6844566B2 (en) * | 2003-05-30 | 2005-01-18 | Texas Instruments Incorporated | Suspended gate single-electron device |
| US7026642B2 (en) * | 2003-08-27 | 2006-04-11 | Micron Technology, Inc. | Vertical tunneling transistor |
| KR101539669B1 (ko) * | 2008-12-16 | 2015-07-27 | 삼성전자주식회사 | 코어-쉘 타입 구조물 형성방법 및 이를 이용한 트랜지스터 제조방법 |
| EP2239781A1 (de) | 2009-04-06 | 2010-10-13 | University College Cork-National University of Ireland, Cork | Transistor mit variabler Tunnelbarriere |
| KR20190045396A (ko) * | 2009-09-16 | 2019-05-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터 |
| KR102054650B1 (ko) | 2009-09-24 | 2019-12-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
| US8178400B2 (en) * | 2009-09-28 | 2012-05-15 | International Business Machines Corporation | Replacement spacer for tunnel FETs |
| US8258031B2 (en) | 2010-06-15 | 2012-09-04 | International Business Machines Corporation | Fabrication of a vertical heterojunction tunnel-FET |
| US8648426B2 (en) * | 2010-12-17 | 2014-02-11 | Seagate Technology Llc | Tunneling transistors |
| CN102664153B (zh) * | 2012-05-08 | 2016-04-06 | 肖德元 | 一种超导场效应晶体管、其制作方法及应用方法 |
| US8889541B1 (en) * | 2013-05-07 | 2014-11-18 | International Business Machines Corporation | Reduced short channel effect of III-V field effect transistor via oxidizing aluminum-rich underlayer |
| US9620611B1 (en) | 2016-06-17 | 2017-04-11 | Acorn Technology, Inc. | MIS contact structure with metal oxide conductor |
| US10170627B2 (en) | 2016-11-18 | 2019-01-01 | Acorn Technologies, Inc. | Nanowire transistor with source and drain induced by electrical contacts with negative schottky barrier height |
| CN111502725B (zh) * | 2020-04-20 | 2021-09-28 | 中交第三航务工程局有限公司 | 一种海底掘进隧道的人工岛式中间井结构 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3116427A (en) | 1960-07-05 | 1963-12-31 | Gen Electric | Electron tunnel emission device utilizing an insulator between two conductors eitheror both of which may be superconductive |
| JPH0673375B2 (ja) | 1984-03-19 | 1994-09-14 | 富士通株式会社 | 半導体装置の製造方法 |
| US4751563A (en) | 1984-11-05 | 1988-06-14 | International Business Machines, Corp. | Microminiaturized electrical interconnection device and its method of fabrication |
| EP0185104B1 (de) | 1984-12-18 | 1989-04-05 | International Business Machines Corporation | Tunnel-Transistor für tiefe Temperaturen |
| US4631352A (en) | 1985-12-17 | 1986-12-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | High band gap II-VI and III-V tunneling junctions for silicon multijunction solar cells |
| US5834793A (en) | 1985-12-27 | 1998-11-10 | Kabushiki Kaisha Toshiba | Semiconductor devices |
| JPH0666467B2 (ja) * | 1985-12-27 | 1994-08-24 | 株式会社東芝 | 半導体装置 |
| US4837604A (en) | 1986-04-18 | 1989-06-06 | Hypres, Inc. | Femtosecond three-terminal switch and vertical tunnel junction |
| US5596206A (en) * | 1987-03-13 | 1997-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Superconducting device |
| DE69107262D1 (de) | 1990-03-20 | 1995-03-23 | Fujitsu Ltd | Elektronische anordnung mit stromkanal aus dielektrischem material. |
| US5019530A (en) | 1990-04-20 | 1991-05-28 | International Business Machines Corporation | Method of making metal-insulator-metal junction structures with adjustable barrier heights |
| US5401980A (en) | 1991-09-04 | 1995-03-28 | International Business Machines Corporation | 2D/1D junction device as a Coulomb blockade gate |
| JP3156307B2 (ja) | 1991-10-15 | 2001-04-16 | 株式会社日立製作所 | 一電子トンネルトランジスタ及びその集積回路 |
| DE69202554T2 (de) | 1991-12-25 | 1995-10-19 | Nippon Electric Co | Tunneltransistor und dessen Herstellungsverfahren. |
| US5677637A (en) | 1992-03-25 | 1997-10-14 | Hitachi, Ltd. | Logic device using single electron coulomb blockade techniques |
| US5475341A (en) | 1992-06-01 | 1995-12-12 | Yale University | Sub-nanoscale electronic systems and devices |
| JPH0637319A (ja) * | 1992-07-13 | 1994-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Soi型電界効果半導体装置 |
| JPH0697435A (ja) * | 1992-09-11 | 1994-04-08 | Hitachi Ltd | Mos型半導体装置 |
| JP2586795B2 (ja) * | 1993-08-13 | 1997-03-05 | 日本電気株式会社 | 単一電子帯電効果を利用した記憶回路とその製造方法 |
| JP3436779B2 (ja) * | 1993-09-22 | 2003-08-18 | 株式会社東芝 | 単一電子トンネリング素子 |
| JP3635683B2 (ja) | 1993-10-28 | 2005-04-06 | ソニー株式会社 | 電界効果トランジスタ |
| JPH07211948A (ja) * | 1994-01-12 | 1995-08-11 | Fuji Electric Co Ltd | 微小トンネル接合超伝導トランジスタ |
| US5646559A (en) | 1994-03-15 | 1997-07-08 | Kabushiki Kaisha Toshiba | Single-electron tunnelling logic device |
| DE4409863C1 (de) | 1994-03-22 | 1995-05-04 | Siemens Ag | Verfahren zur Herstellung eines Einzelelektronen-Bauelementes |
| US5604154A (en) | 1994-10-27 | 1997-02-18 | Nippon Telegraph And Telephone Corporation | Method of manufacturing coulamb blockade element using thermal oxidation |
| JP3149718B2 (ja) | 1995-02-03 | 2001-03-26 | 松下電器産業株式会社 | 単電子トランジスタ |
| US5754077A (en) | 1995-03-16 | 1998-05-19 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit having plural functional blocks, wherein one of the blocks comprises a small tunnel junction device and another block comprises a FET |
| US5731598A (en) | 1995-06-23 | 1998-03-24 | Matsushita Electric Industrial Co. Ltd. | Single electron tunnel device and method for fabricating the same |
| US5844279A (en) * | 1995-09-14 | 1998-12-01 | Kabushiki Kaisha Toshiba | Single-electron semiconductor device |
| JP3402905B2 (ja) * | 1996-03-04 | 2003-05-06 | 株式会社東芝 | 半導体素子 |
| KR0170472B1 (ko) | 1995-12-21 | 1999-02-01 | 정선종 | 주사관통현미경의 저전압진공증착을 이용한 상온작동 단일전자트랜지스터의 제조방법 |
| US5608321A (en) * | 1995-12-28 | 1997-03-04 | The United States Of America As Represented By The Secretary Of The Navy | Method and apparatus for detecting target species having quadropolar muclei by stochastic nuclear quadrupole resonance |
| JP3361442B2 (ja) | 1996-04-05 | 2003-01-07 | 松下電器産業株式会社 | 量子効果素子の製造方法、半導体装置及び半導体装置の製造方法 |
| US5972744A (en) | 1996-04-05 | 1999-10-26 | Matsushita Electric Industrial Co., Ltd. | Quantum effect device, method of manufacturing the same |
| JP3258241B2 (ja) * | 1996-09-30 | 2002-02-18 | 株式会社東芝 | 単一電子制御磁気抵抗素子 |
-
1999
- 1999-04-22 US US09/296,858 patent/US6198113B1/en not_active Expired - Lifetime
-
2000
- 2000-04-21 WO PCT/US2000/010688 patent/WO2000065669A1/en not_active Ceased
- 2000-04-21 JP JP2000614517A patent/JP4109830B2/ja not_active Expired - Fee Related
- 2000-04-21 EP EP00928255A patent/EP1173896B1/de not_active Expired - Lifetime
- 2000-04-21 DE DE60034328T patent/DE60034328T2/de not_active Expired - Lifetime
- 2000-04-21 CN CNB008065098A patent/CN1168156C/zh not_active Expired - Fee Related
- 2000-04-21 KR KR1020017013496A patent/KR100721632B1/ko not_active Expired - Fee Related
- 2000-04-21 AT AT00928255T patent/ATE359604T1/de not_active IP Right Cessation
- 2000-04-21 AU AU46516/00A patent/AU4651600A/en not_active Abandoned
- 2000-06-08 TW TW089107692A patent/TW454352B/zh not_active IP Right Cessation
-
2007
- 2007-04-17 JP JP2007107995A patent/JP4717855B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1168156C (zh) | 2004-09-22 |
| JP2002543596A (ja) | 2002-12-17 |
| TW454352B (en) | 2001-09-11 |
| EP1173896B1 (de) | 2007-04-11 |
| CN1347571A (zh) | 2002-05-01 |
| US6198113B1 (en) | 2001-03-06 |
| JP4717855B2 (ja) | 2011-07-06 |
| JP2007281489A (ja) | 2007-10-25 |
| DE60034328D1 (de) | 2007-05-24 |
| EP1173896A1 (de) | 2002-01-23 |
| KR100721632B1 (ko) | 2007-05-23 |
| WO2000065669A1 (en) | 2000-11-02 |
| JP4109830B2 (ja) | 2008-07-02 |
| AU4651600A (en) | 2000-11-10 |
| KR20020005710A (ko) | 2002-01-17 |
| DE60034328T2 (de) | 2007-12-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |