ATE346752T1 - Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium - Google Patents

Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium

Info

Publication number
ATE346752T1
ATE346752T1 AT03733741T AT03733741T ATE346752T1 AT E346752 T1 ATE346752 T1 AT E346752T1 AT 03733741 T AT03733741 T AT 03733741T AT 03733741 T AT03733741 T AT 03733741T AT E346752 T1 ATE346752 T1 AT E346752T1
Authority
AT
Austria
Prior art keywords
molding tool
oxide film
group
layer
producing
Prior art date
Application number
AT03733741T
Other languages
English (en)
Inventor
Torbjoern Ling
Lars Montelius
Matthias Keil
Marc Beck
Original Assignee
Obducat Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE0201917A external-priority patent/SE523095C2/sv
Application filed by Obducat Ab filed Critical Obducat Ab
Application granted granted Critical
Publication of ATE346752T1 publication Critical patent/ATE346752T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0017—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor for the production of embossing, cutting or similar devices; for the production of casting means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Magnetic Record Carriers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Adhesives Or Adhesive Processes (AREA)
AT03733741T 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium ATE346752T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0201917A SE523095C2 (sv) 2002-06-20 2002-06-20 Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium
US40693102P 2002-08-30 2002-08-30

Publications (1)

Publication Number Publication Date
ATE346752T1 true ATE346752T1 (de) 2006-12-15

Family

ID=30002440

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03733741T ATE346752T1 (de) 2002-06-20 2003-06-16 Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium

Country Status (8)

Country Link
US (1) US7687007B2 (de)
EP (1) EP1513688B1 (de)
JP (1) JP3892460B2 (de)
CN (1) CN100341712C (de)
AT (1) ATE346752T1 (de)
AU (1) AU2003239022A1 (de)
DE (1) DE60310070T2 (de)
WO (1) WO2004000567A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE519573C2 (sv) * 2001-07-05 2003-03-11 Obducat Ab Stamp med antividhäftningsskikt samt sätt att framställa och sätt att reparera en sådan stamp
KR101257881B1 (ko) * 2004-05-28 2013-04-24 오브듀캇 아베 임프린트 공정용 금속 몰드
EP1600811A1 (de) 2004-05-28 2005-11-30 Obducat AB Modifizierte Metallformen für Imprint-Verfahren
JP4458958B2 (ja) * 2004-07-01 2010-04-28 独立行政法人理化学研究所 微細パターン形成方法および微細パターン形成装置
JP4584754B2 (ja) * 2005-04-06 2010-11-24 株式会社日立産機システム ナノプリント金型、その製造方法及びこの金型を用いたナノプリント装置並びにナノプリント方法
KR101366505B1 (ko) * 2005-06-10 2014-02-24 오브듀캇 아베 고리형 올레핀 공중합체를 포함하는 임프린트 스탬프
US7854873B2 (en) 2005-06-10 2010-12-21 Obducat Ab Imprint stamp comprising cyclic olefin copolymer
KR101301321B1 (ko) * 2005-07-28 2013-08-29 듀폰-미쯔이 플루오로케미칼 가부시끼가이샤 플루오로중합체 필름을 갖는 적층체 및 필름-형성플루오로중합체
US7690910B2 (en) * 2006-02-01 2010-04-06 Canon Kabushiki Kaisha Mold for imprint, process for producing minute structure using the mold, and process for producing the mold
EP1830422A3 (de) * 2006-03-03 2012-03-07 Semiconductor Energy Laboratory Co., Ltd. Lichtemittierende Vorrichtung und elektronische Vorrichtung
JP4973089B2 (ja) * 2006-09-25 2012-07-11 凸版印刷株式会社 熱インプリント用モールド
KR100790899B1 (ko) * 2006-12-01 2008-01-03 삼성전자주식회사 얼라인 마크가 형성된 템플릿 및 그 제조 방법
JP5456465B2 (ja) * 2007-06-04 2014-03-26 丸善石油化学株式会社 微細加工品およびその製造方法
JP5211597B2 (ja) * 2007-09-13 2013-06-12 株式会社リコー 断熱構造を有するスタンパの製造方法
JPWO2009148138A1 (ja) * 2008-06-05 2011-11-04 旭硝子株式会社 ナノインプリント用モールド、その製造方法および表面に微細凹凸構造を有する樹脂成形体ならびにワイヤグリッド型偏光子の製造方法
EP2199854B1 (de) 2008-12-19 2015-12-16 Obducat AB Hybridpolymerform für nanoimprintverfahren und verfahren zu seiner herstellung
EP2199855B1 (de) * 2008-12-19 2016-07-20 Obducat Verfahren und Prozesse zur Modifizierung von Polymermaterialoberflächeninteraktionen
JP2010173237A (ja) * 2009-01-30 2010-08-12 Konica Minolta Opto Inc 成形型の製造方法及び成形型
JP5693941B2 (ja) 2010-03-31 2015-04-01 株式会社東芝 テンプレートの表面処理方法及び装置並びにパターン形成方法
MX346337B (es) 2010-04-28 2017-03-14 Kimberly Clark Co Dispositivo médico con nanopatrón con interacción celular mejorada.
KR20120062255A (ko) 2010-12-06 2012-06-14 한국전자통신연구원 인쇄용 원판 및 그 복사판
TW201231242A (en) * 2011-01-25 2012-08-01 Hon Hai Prec Ind Co Ltd Method of injection molding an optical element
EP3995172B1 (de) 2011-10-27 2024-08-21 Sorrento Therapeutics, Inc. Implantierbare vorrichtungen zur freisetzung bioaktiver wirkstoffe
US11131021B2 (en) * 2013-06-20 2021-09-28 Ev Group E. Thallner Gmbh Mould with a mould pattern, and device and method for producing same
TR201615225T1 (tr) 2014-04-29 2017-08-21 Ford Otomotiv Sanayi As Supap zamanlama si̇stemi̇
CN108931884A (zh) * 2017-05-27 2018-12-04 蓝思科技（长沙）有限公司 压印膜及压印装置
US10497564B1 (en) * 2017-07-17 2019-12-03 Northrop Grumman Systems Corporation Nano-imprinting using high-pressure crystal phase transformations
DE102019209700A1 (de) * 2019-07-02 2021-01-07 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Verfahren zum herstellen eines formwerkzeugs und formwerkzeug zum herstellen eines optischen elements
CN117175353B (zh) * 2023-08-21 2025-02-25 安徽格恩半导体有限公司 一种半导体蓝光激光器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4120995A (en) * 1977-10-18 1978-10-17 International Business Machines Corporation Process for bonding a durable low surface energy coating
JPH0818336B2 (ja) 1991-02-06 1996-02-28 松下電器産業株式会社 成形用部材およびその製造方法
US5512131A (en) * 1993-10-04 1996-04-30 President And Fellows Of Harvard College Formation of microstamped patterns on surfaces and derivative articles
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
US6309580B1 (en) * 1995-11-15 2001-10-30 Regents Of The University Of Minnesota Release surfaces, particularly for use in nanoimprint lithography
US6794027B1 (en) * 1998-08-24 2004-09-21 Daikin Industries, Ltd. Thin coating film comprising fluorine-containing polymer and method of forming same
EP0989595A3 (de) * 1998-09-18 2001-09-19 Ims-Ionen Mikrofabrikations Systeme Gmbh Vorrichtung zur Bearbeitung von Substratoberflächen
ATE332517T1 (de) 2000-01-21 2006-07-15 Obducat Ab Form zur nanobedruckung
SE515962C2 (sv) 2000-03-15 2001-11-05 Obducat Ab Anordning för överföring av mönster till objekt
US6380101B1 (en) * 2000-04-18 2002-04-30 International Business Machines Corporation Method of forming patterned indium zinc oxide and indium tin oxide films via microcontact printing and uses thereof
US6532657B1 (en) * 2001-09-21 2003-03-18 General Electric Co., Pre-service oxidation of gas turbine disks and seals
JP4255307B2 (ja) 2003-04-25 2009-04-15 セイコークロック株式会社 時刻データ供給装置及び時刻データ供給方法
DE10326815A1 (de) * 2003-06-13 2004-12-30 Institut für Neue Materialien Gemeinnützige GmbH Antiadhäsive Hochtemperaturschichten
DE10326769B3 (de) * 2003-06-13 2004-11-11 Esk Ceramics Gmbh & Co. Kg Dauerhafte BN-Formtrennschichten für das Druckgießen von Nichteisenmetallen
US20060097423A1 (en) * 2004-10-12 2006-05-11 General Magnaplate Corporation Light weight spray tooling
JP4262267B2 (ja) * 2005-09-06 2009-05-13 キヤノン株式会社 モールド、インプリント装置及びデバイスの製造方法
US20070186589A1 (en) * 2006-02-10 2007-08-16 Ether Precision, Inc. Mold for press-molding glass elements

Also Published As

Publication number Publication date
CN1662383A (zh) 2005-08-31
DE60310070D1 (de) 2007-01-11
AU2003239022A1 (en) 2004-01-06
US20050287820A1 (en) 2005-12-29
US7687007B2 (en) 2010-03-30
JP2006512213A (ja) 2006-04-13
JP3892460B2 (ja) 2007-03-14
CN100341712C (zh) 2007-10-10
DE60310070T2 (de) 2007-05-31
WO2004000567A1 (en) 2003-12-31
EP1513688B1 (de) 2006-11-29
EP1513688A1 (de) 2005-03-16

Similar Documents

Publication Publication Date Title
ATE346752T1 (de) Formwerkzeug, verfahren zur herstellung eines formwerkzeugs und durch verwendung des formwerkzeugs gebildetes speichermedium
DE50102858D1 (de) Prägewerkzeug, verfahren zur strukturierung einer oberfläche eines werkstücks und verwendung einer anodisch oxidierten oberflächenschicht
ATE448507T1 (de) Verfahren zur herstellung eines stempel für mikro/nano imprint-lithographie
JP2001284798A5 (de)
EP1016637A3 (de) Verfahren zur Herstellung eines mikrostrukturierten SiO2/TiO2-Schichtsystems
DE50200587D1 (de) Verfahren zur Herstellung eines gehärteten Blechprofils
ATE472461T1 (de) Verfahren und vorrichtung zur herstellung eines bauteils, insbesondere eines hybridbaudteils für einen quertr ger eines fahrzeugs sowie bauteil und verwendung eines bauteils
EP1097758A3 (de) Verfahren zur Herstellung eines grossflächigen Blechteiles, insbesondere eines Karosseriebauteiles für ein Fahrzeug
ATE358874T1 (de) Verfahren zur herstellung einer rohmatrize für ein optisches speichermedium
ATE508457T1 (de) Zweilage dvd-platte, sowie verfahren und gerät zu deren herstellung
DE60324222D1 (de) Verfahren zur Herstellung strukturierter Schichten
DE60206012D1 (de) Verfahren zur Herstellung einer T-förmigen Elektrode
DE50009945D1 (de) Verfahren zur herstellung von im nanometerbereich oberflächendekorierten substraten
DE602004008396D1 (de) Strukturierte Trennschicht und Verfahren zu deren Herstellung
EP2206678A3 (de) Verfahren zur Herstellung von Körpern mit mikro- und/oder nanostrukturierten Oberflächen und von mikro- und/oder nanogross durchbrochenen Folien
DE59604779D1 (de) Verfahren und vorrichtung zur herstellung von zweischichtigen, lichtleitenden mikrostrukturen durch abformtechnik
DE502006005620D1 (de) Verfahren zur herstellung eines kartenförmigen datenträgers mit einem beschriftungsbereich
ATE316589T1 (de) Verfahren zur bildung einer ausnehmung in der oberfläche eines werkstücks, insbesondere zur herstellung von mikroformen
EP1364984A4 (de) Harzverbundmaterial und verfahren zu seiner herstellung
ATE490095T1 (de) Prägeform zum prägen von reliefstrukturen und verfahren zu deren herstellung
EP1149677A3 (de) Verfahren und Vorrichtung zur Herstellung einer Doppelsluhhaut
KR20050065955A (ko) 나노 임프린트 리쏘그라피를 이용한 메탈 리프트오프 공정
SE0201917L (sv) Sätt att framställa formverktyg för ett reliefmönster i nanoskala, formverktyg och lagringsmedium
ATE420755T1 (de) Verfahren zur herstellung einer abformungsmatrize,sowie abformungsmatrize
CN2770963Y (zh) 具立体图案的金属板结构及其成型模具

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1513688

Country of ref document: EP

REN Ceased due to non-payment of the annual fee