ATE334235T1 - Verfahren zum plasmareinigen von mit einer organischen substanz beschichteten materialoberflächen und vorrichtung dafür - Google Patents
Verfahren zum plasmareinigen von mit einer organischen substanz beschichteten materialoberflächen und vorrichtung dafürInfo
- Publication number
- ATE334235T1 ATE334235T1 AT03720624T AT03720624T ATE334235T1 AT E334235 T1 ATE334235 T1 AT E334235T1 AT 03720624 T AT03720624 T AT 03720624T AT 03720624 T AT03720624 T AT 03720624T AT E334235 T1 ATE334235 T1 AT E334235T1
- Authority
- AT
- Austria
- Prior art keywords
- organic substance
- cleaning material
- plasma cleaning
- device therefor
- surfaces coated
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32348—Dielectric barrier discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0202057A FR2836158B1 (fr) | 2002-02-19 | 2002-02-19 | Procede de nettoyage par plasma de la surface d'un materiau enduit d'une substance organique, et installation de mise en oeuvre |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE334235T1 true ATE334235T1 (de) | 2006-08-15 |
Family
ID=27636289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03720624T ATE334235T1 (de) | 2002-02-19 | 2003-02-19 | Verfahren zum plasmareinigen von mit einer organischen substanz beschichteten materialoberflächen und vorrichtung dafür |
Country Status (18)
Country | Link |
---|---|
US (3) | US7674339B2 (de) |
EP (1) | EP1481112B1 (de) |
JP (2) | JP4942913B2 (de) |
KR (1) | KR100939381B1 (de) |
CN (1) | CN1997773B (de) |
AT (1) | ATE334235T1 (de) |
AU (1) | AU2003224204B2 (de) |
BR (1) | BR0307769B8 (de) |
CA (1) | CA2476510C (de) |
DE (1) | DE60307062T2 (de) |
ES (1) | ES2268352T3 (de) |
FR (1) | FR2836158B1 (de) |
MX (1) | MXPA04007977A (de) |
PL (1) | PL203153B1 (de) |
PT (1) | PT1481112E (de) |
RU (1) | RU2318916C2 (de) |
WO (1) | WO2003071004A2 (de) |
ZA (1) | ZA200406182B (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2836158B1 (fr) * | 2002-02-19 | 2005-01-07 | Usinor | Procede de nettoyage par plasma de la surface d'un materiau enduit d'une substance organique, et installation de mise en oeuvre |
US7086407B2 (en) * | 2004-01-09 | 2006-08-08 | Ozone International Llc | Cleaning and sanitizing system |
FR2869820B1 (fr) | 2004-05-06 | 2007-06-22 | Pechiney Capsules Soc Par Acti | Procede de fabrication de capsules decorees a resistance mecanique amelioree |
US7275982B1 (en) | 2006-05-12 | 2007-10-02 | Ozone International, Llc | Ozone-based conveyor cleaning system |
SK287455B6 (sk) * | 2006-06-08 | 2010-10-07 | Fakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Ho | Zariadenie a spôsob čistenia, leptania, aktivácie a následné úpravy povrchu skla, povrchu skla pokrytého kysličníkmi kovov a povrchu iných materiálov pokrytých SiO2 |
JP4963923B2 (ja) * | 2006-10-06 | 2012-06-27 | 日本碍子株式会社 | 表面改質装置 |
SK51082006A3 (sk) * | 2006-12-05 | 2008-07-07 | Fakulta Matematiky, Fyziky A Informatiky Univerzitfakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Hoy Komensk�Ho | Zariadenie a spôsob úpravy povrchov kovov a metaloZariadenie a spôsob úpravy povrchov kovov a metaloidov, oxidov kovov a oxidov metaloidov a nitridovidov, oxidov kovov a oxidov metaloidov a nitridovkovov a nitridov metaloidovkovov a nitridov metaloidov |
DE102007033701A1 (de) * | 2007-07-14 | 2009-01-22 | Xtreme Technologies Gmbh | Verfahren und Anordnung zur Reinigung von optischen Oberflächen in plasmabasierten Strahlungsquellen |
DE102007037984A1 (de) | 2007-08-10 | 2009-02-12 | Leibniz-Institut für Plasmaforschung und Technologie e.V. | Verfahren zur Textilreinigung und Desinfektion mittels Plasma und Plasmaschleuse |
EP2034296B1 (de) * | 2007-09-07 | 2012-09-26 | Imec | Quantifizierung von hydrophoben und hydrophilen Materialeigenschaften |
US20090277342A1 (en) * | 2008-05-08 | 2009-11-12 | Jetton John P | Ozone treating system and method |
CA3085086C (en) | 2011-12-06 | 2023-08-08 | Delta Faucet Company | Ozone distribution in a faucet |
JP6053918B2 (ja) | 2012-05-25 | 2016-12-27 | シロー インダストリーズ インコーポレイテッド | 溶接ノッチを有するシート金属ピースおよびそれを形成する方法 |
MX353799B (es) | 2012-06-29 | 2018-01-30 | Shiloh Ind Inc | Ensamble y método de plantilla soldada. |
EP2925483B1 (de) | 2012-11-30 | 2020-04-08 | Shiloh Industries, Inc. | Verfahren zur herstellung einer schweisskerbe in einem blechteil |
CN105050760B (zh) | 2013-03-14 | 2018-12-11 | 夏伊洛工业公司 | 焊接板组件及其制造方法 |
JP6413345B2 (ja) * | 2014-05-23 | 2018-10-31 | 株式会社リコー | プラズマ処理装置、およびそれを有する画像形成装置 |
WO2017112795A1 (en) | 2015-12-21 | 2017-06-29 | Delta Faucet Company | Fluid delivery system including a disinfectant device |
CN115971169B (zh) * | 2023-02-24 | 2023-07-07 | 深圳市方瑞科技有限公司 | 一种滚筒式真空等离子清洗机及其工作方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01134932A (ja) * | 1987-11-19 | 1989-05-26 | Oki Electric Ind Co Ltd | 基板清浄化方法及び基板清浄化装置 |
JP2811820B2 (ja) * | 1989-10-30 | 1998-10-15 | 株式会社ブリヂストン | シート状物の連続表面処理方法及び装置 |
US4980196A (en) * | 1990-02-14 | 1990-12-25 | E. I. Du Pont De Nemours And Company | Method of coating steel substrate using low temperature plasma processes and priming |
DE4308632B4 (de) * | 1993-03-18 | 2007-10-04 | Applied Materials Gmbh & Co. Kg | Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien |
US5938854A (en) * | 1993-05-28 | 1999-08-17 | The University Of Tennessee Research Corporation | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure |
DE4332866C2 (de) * | 1993-09-27 | 1997-12-18 | Fraunhofer Ges Forschung | Direkte Oberflächenbehandlung mit Barrierenentladung |
DE69430754T2 (de) * | 1993-10-04 | 2003-01-02 | 3M Innovative Properties Co | Verfahren zur Herstellung einer Acrylatbeschichtung |
US5803976A (en) * | 1993-11-09 | 1998-09-08 | Imperial Chemical Industries Plc | Vacuum web coating |
DE19503718A1 (de) * | 1995-02-04 | 1996-08-08 | Leybold Ag | UV-Strahler |
US6712019B2 (en) * | 1996-02-08 | 2004-03-30 | Canon Kabushiki Kaisha | Film forming apparatus having electrically insulated element that introduces power of 20-450MHz |
US5968377A (en) * | 1996-05-24 | 1999-10-19 | Sekisui Chemical Co., Ltd. | Treatment method in glow-discharge plasma and apparatus thereof |
JPH1033976A (ja) * | 1996-05-24 | 1998-02-10 | Sekisui Chem Co Ltd | 放電プラズマ処理方法及びその装置 |
JPH108277A (ja) * | 1996-06-18 | 1998-01-13 | Mitsubishi Heavy Ind Ltd | 鋼板脱脂装置 |
US6083355A (en) * | 1997-07-14 | 2000-07-04 | The University Of Tennessee Research Corporation | Electrodes for plasma treater systems |
JPH11158670A (ja) * | 1997-11-28 | 1999-06-15 | Mitsubishi Shindoh Co Ltd | 金属基材の製造方法とコロナ放電脱脂処理方法および脱脂金属基材の製造装置 |
JP4287936B2 (ja) * | 1999-02-01 | 2009-07-01 | 中外炉工業株式会社 | 真空成膜装置 |
JP2000011960A (ja) | 1998-06-18 | 2000-01-14 | Hooya Shot Kk | 誘電体バリア放電ランプを用いた表面処理装置及び方法 |
US6387602B1 (en) * | 2000-02-15 | 2002-05-14 | Silicon Valley Group, Inc. | Apparatus and method of cleaning reticles for use in a lithography tool |
US6440864B1 (en) * | 2000-06-30 | 2002-08-27 | Applied Materials Inc. | Substrate cleaning process |
JP3906653B2 (ja) * | 2000-07-18 | 2007-04-18 | ソニー株式会社 | 画像表示装置及びその製造方法 |
EP1337281B1 (de) * | 2000-11-29 | 2006-03-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und vorrichtung zur oberflächenbehandlung von objekten |
FR2836158B1 (fr) * | 2002-02-19 | 2005-01-07 | Usinor | Procede de nettoyage par plasma de la surface d'un materiau enduit d'une substance organique, et installation de mise en oeuvre |
-
2002
- 2002-02-19 FR FR0202057A patent/FR2836158B1/fr not_active Expired - Fee Related
-
2003
- 2003-02-19 JP JP2003569892A patent/JP4942913B2/ja not_active Expired - Lifetime
- 2003-02-19 RU RU2004127923/02A patent/RU2318916C2/ru not_active IP Right Cessation
- 2003-02-19 AT AT03720624T patent/ATE334235T1/de active
- 2003-02-19 BR BRPI0307769-1A patent/BR0307769B8/pt not_active IP Right Cessation
- 2003-02-19 KR KR1020047012864A patent/KR100939381B1/ko active IP Right Grant
- 2003-02-19 PT PT03720624T patent/PT1481112E/pt unknown
- 2003-02-19 CN CN038041561A patent/CN1997773B/zh not_active Expired - Fee Related
- 2003-02-19 WO PCT/FR2003/000542 patent/WO2003071004A2/fr active IP Right Grant
- 2003-02-19 DE DE60307062T patent/DE60307062T2/de not_active Expired - Lifetime
- 2003-02-19 ES ES03720624T patent/ES2268352T3/es not_active Expired - Lifetime
- 2003-02-19 EP EP03720624A patent/EP1481112B1/de not_active Expired - Lifetime
- 2003-02-19 PL PL370516A patent/PL203153B1/pl unknown
- 2003-02-19 AU AU2003224204A patent/AU2003224204B2/en not_active Ceased
- 2003-02-19 US US10/504,596 patent/US7674339B2/en active Active
- 2003-02-19 CA CA2476510A patent/CA2476510C/fr not_active Expired - Fee Related
- 2003-02-19 MX MXPA04007977A patent/MXPA04007977A/es active IP Right Grant
-
2004
- 2004-08-03 ZA ZA200406182A patent/ZA200406182B/en unknown
-
2009
- 2009-12-04 US US12/631,220 patent/US8591660B2/en not_active Expired - Lifetime
- 2009-12-04 US US12/631,193 patent/US8877003B2/en active Active
-
2010
- 2010-05-26 JP JP2010121010A patent/JP2010248633A/ja not_active Withdrawn
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Legal Events
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UEP | Publication of translation of european patent specification |
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