ATE298013T1 - Sprudelvorrichtung mit zwei fritten - Google Patents
Sprudelvorrichtung mit zwei frittenInfo
- Publication number
- ATE298013T1 ATE298013T1 AT00307081T AT00307081T ATE298013T1 AT E298013 T1 ATE298013 T1 AT E298013T1 AT 00307081 T AT00307081 T AT 00307081T AT 00307081 T AT00307081 T AT 00307081T AT E298013 T1 ATE298013 T1 AT E298013T1
- Authority
- AT
- Austria
- Prior art keywords
- bubbler
- carrier gas
- source material
- saturated
- inlet
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Mechanical Control Devices (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Materials For Medical Uses (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37827499A | 1999-08-20 | 1999-08-20 | |
US09/472,403 US6444038B1 (en) | 1999-12-27 | 1999-12-27 | Dual fritted bubbler |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE298013T1 true ATE298013T1 (de) | 2005-07-15 |
Family
ID=27008140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00307081T ATE298013T1 (de) | 1999-08-20 | 2000-08-18 | Sprudelvorrichtung mit zwei fritten |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1079001B1 (de) |
JP (1) | JP2001115263A (de) |
KR (1) | KR20010050136A (de) |
CN (1) | CN1160482C (de) |
AT (1) | ATE298013T1 (de) |
DE (1) | DE60020781T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI118805B (fi) * | 2000-05-15 | 2008-03-31 | Asm Int | Menetelmä ja kokoonpano kaasufaasireaktantin syöttämiseksi reaktiokammioon |
US7186385B2 (en) | 2002-07-17 | 2007-03-06 | Applied Materials, Inc. | Apparatus for providing gas to a processing chamber |
JP4352783B2 (ja) | 2002-08-23 | 2009-10-28 | 東京エレクトロン株式会社 | ガス供給系及び処理システム |
JP4571787B2 (ja) * | 2003-07-08 | 2010-10-27 | 東ソー・ファインケム株式会社 | 固体有機金属化合物用充填容器およびその充填方法 |
JP4585182B2 (ja) * | 2003-07-11 | 2010-11-24 | 東ソー・ファインケム株式会社 | トリメチルインジウムの充填方法および充填容器 |
US20060037540A1 (en) * | 2004-08-20 | 2006-02-23 | Rohm And Haas Electronic Materials Llc | Delivery system |
US7722720B2 (en) * | 2004-12-08 | 2010-05-25 | Rohm And Haas Electronic Materials Llc | Delivery device |
US7967911B2 (en) * | 2006-04-11 | 2011-06-28 | Applied Materials, Inc. | Apparatus and methods for chemical vapor deposition |
US9109287B2 (en) | 2006-10-19 | 2015-08-18 | Air Products And Chemicals, Inc. | Solid source container with inlet plenum |
US7775508B2 (en) | 2006-10-31 | 2010-08-17 | Applied Materials, Inc. | Ampoule for liquid draw and vapor draw with a continuous level sensor |
GB2444143B (en) * | 2006-11-27 | 2009-10-28 | Sumitomo Chemical Co | Apparatus of supplying organometallic compound |
JP5257197B2 (ja) * | 2008-03-31 | 2013-08-07 | 住友化学株式会社 | 有機金属化合物供給装置 |
US8146896B2 (en) | 2008-10-31 | 2012-04-03 | Applied Materials, Inc. | Chemical precursor ampoule for vapor deposition processes |
TW201040306A (en) | 2009-03-11 | 2010-11-16 | Air Liquide | Bubbling supply system for stable precursor supply |
WO2012106149A2 (en) * | 2011-02-04 | 2012-08-09 | Entegris, Inc. | Porous metal membrane of sintered powders and metal fibers |
JP5728772B2 (ja) | 2011-05-31 | 2015-06-03 | 株式会社ブイ・テクノロジー | 原料ガス発生装置 |
KR101389011B1 (ko) * | 2012-03-28 | 2014-04-24 | 주식회사 유니텍스 | 소스 컨테이너 및 기상 증착용 반응로 |
KR101885808B1 (ko) | 2018-02-01 | 2018-08-06 | 김동섭 | 로링기용 금형세팅 장치 및 이를 포함하는 로링기 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4506815A (en) * | 1982-12-09 | 1985-03-26 | Thiokol Corporation | Bubbler cylinder and dip tube device |
FR2569207B1 (fr) * | 1984-08-14 | 1986-11-14 | Mellet Robert | Procede et dispositif d'obtention d'un courant gazeux contenant un compose a l'etat de vapeur, utilisable notamment pour introduire ce compose dans un reacteur d'epitaxie |
GB2223509B (en) * | 1988-10-04 | 1992-08-05 | Stc Plc | Vapour phase processing |
KR960010901A (ko) * | 1994-09-30 | 1996-04-20 | 김광호 | 고체 유기화합물 전용 버블러 장치 |
FR2727322B1 (fr) * | 1994-11-30 | 1996-12-27 | Kodak Pathe | Procede pour la sublimation d'un materiau solide et dispositif pour la mise en oeuvre du procede |
-
2000
- 2000-08-18 EP EP00307081A patent/EP1079001B1/de not_active Expired - Lifetime
- 2000-08-18 CN CNB001292927A patent/CN1160482C/zh not_active Expired - Fee Related
- 2000-08-18 AT AT00307081T patent/ATE298013T1/de not_active IP Right Cessation
- 2000-08-18 DE DE60020781T patent/DE60020781T2/de not_active Expired - Fee Related
- 2000-08-19 KR KR1020000048131A patent/KR20010050136A/ko not_active Application Discontinuation
- 2000-08-21 JP JP2000249813A patent/JP2001115263A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE60020781T2 (de) | 2006-05-11 |
KR20010050136A (ko) | 2001-06-15 |
EP1079001A1 (de) | 2001-02-28 |
CN1160482C (zh) | 2004-08-04 |
JP2001115263A (ja) | 2001-04-24 |
EP1079001B1 (de) | 2005-06-15 |
DE60020781D1 (de) | 2005-07-21 |
CN1300876A (zh) | 2001-06-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE298013T1 (de) | Sprudelvorrichtung mit zwei fritten | |
CA2110647A1 (en) | Vapour Generator for Chemical Vapour Deposition Systems | |
US6548112B1 (en) | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber | |
US4509456A (en) | Apparatus for guiding gas for LP CVD processes in a tube reactor | |
US6537353B2 (en) | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | |
WO2007062242A3 (en) | High stability and high capacity precursor vapor generation for thin film deposition | |
EP0849375A3 (de) | Vorrichtung zum Verdampfen von Flüssigkeiten und Gaseinspritzeinrichtung | |
TW340138B (en) | Apparatus for low pressure chemical vapor deposition the invention relates to an apparatus for low pressure chemical vapor deposition | |
KR20020042724A (ko) | 리간드 교환 저항성의 유기 금속 전구체 용액을 사용하는화학적 증착 공정에서 나온 유출물의 저감 방법 및 장치 | |
TW352457B (en) | Chemical vapor phase growth apparatus (3) | |
US20030116019A1 (en) | High flow rate bubbler system and method | |
KR20020068537A (ko) | 액체 원료 기화방법 및 그에 사용되는 장치 | |
KR960039122A (ko) | 사이클론 증착기 | |
WO2004007793A3 (en) | Method and apparatus for providing gas to a processing chamber | |
JP2001509648A (ja) | 流体分配システム及び方法 | |
AU2002339382A1 (en) | Container and method for dispensing transdermal dosage forms | |
KR960010901A (ko) | 고체 유기화합물 전용 버블러 장치 | |
CN107452653A (zh) | 具有集成蒸气浓度传感器的蒸气歧管 | |
KR960701235A (ko) | 화학적 증착(cvd) 반응기에 반응제를 증기 형태로 공급하는 방법 및 장치(apparatus and method for delivering reagents in vapor form to a cvd reactor) | |
CN101905126B (zh) | 有助于增进气体与汽化材料接触的方法和装置 | |
JP2796975B2 (ja) | 液体原料気化装置 | |
TW411491B (en) | Vacuum processing method and apparatus | |
DE3671484D1 (de) | Sprudelzylindervorrichtung. | |
JPS5351187A (en) | Gas phase chemical evaporation apparatus | |
US6471919B2 (en) | Apparatus for removing impurities from effluent waste gas streams |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |