ATE273403T1 - Verfahren und vorrichtung zur herstellung von substraten mit dünnen filmen - Google Patents

Verfahren und vorrichtung zur herstellung von substraten mit dünnen filmen

Info

Publication number
ATE273403T1
ATE273403T1 AT97908528T AT97908528T ATE273403T1 AT E273403 T1 ATE273403 T1 AT E273403T1 AT 97908528 T AT97908528 T AT 97908528T AT 97908528 T AT97908528 T AT 97908528T AT E273403 T1 ATE273403 T1 AT E273403T1
Authority
AT
Austria
Prior art keywords
film
film forming
substrate
chamber
substrates
Prior art date
Application number
AT97908528T
Other languages
German (de)
English (en)
Inventor
Fumiyasu Nomura
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Application granted granted Critical
Publication of ATE273403T1 publication Critical patent/ATE273403T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
AT97908528T 1996-04-01 1997-03-27 Verfahren und vorrichtung zur herstellung von substraten mit dünnen filmen ATE273403T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7884096 1996-04-01
PCT/JP1997/001054 WO1997037051A1 (fr) 1996-04-01 1997-03-27 Procede de fabrication d'un substrat a couche mince et dispositif de fabrication

Publications (1)

Publication Number Publication Date
ATE273403T1 true ATE273403T1 (de) 2004-08-15

Family

ID=13673031

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97908528T ATE273403T1 (de) 1996-04-01 1997-03-27 Verfahren und vorrichtung zur herstellung von substraten mit dünnen filmen

Country Status (7)

Country Link
US (1) US5993614A (enExample)
EP (1) EP0834596B1 (enExample)
KR (1) KR19990022135A (enExample)
AT (1) ATE273403T1 (enExample)
DE (1) DE69730185T2 (enExample)
TW (1) TW320687B (enExample)
WO (1) WO1997037051A1 (enExample)

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JP3370806B2 (ja) * 1994-11-25 2003-01-27 株式会社半導体エネルギー研究所 Ｍｉｓ型半導体装置の作製方法
US6742066B2 (en) * 1999-05-17 2004-05-25 Hewlett-Packard Development Company, L.P. System and method for controlling remote console functionality assist logic
US6275744B1 (en) * 1997-08-01 2001-08-14 Kokusai Electric Co., Ltd. Substrate feed control
US6556189B1 (en) * 1998-04-24 2003-04-29 Nissha Printing Co., Ltd. Touch panel device
JP4345158B2 (ja) * 1999-10-15 2009-10-14 ソニー株式会社 光学部品の製造装置及び製造方法
KR100323991B1 (ko) * 1999-11-16 2002-02-16 이경희 박막 제조 방법 및 제조 장치
TW490714B (en) 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US6881269B2 (en) * 2000-08-17 2005-04-19 Novartis Ag Lens plasma coating system
CN1216302C (zh) * 2001-02-27 2005-08-24 精工爱普生株式会社 多层膜截止滤波器及其制造方法
JP2002363733A (ja) * 2001-06-04 2002-12-18 Nippon Sheet Glass Co Ltd 被膜の形成方法
JP4120546B2 (ja) * 2002-10-04 2008-07-16 株式会社Ｉｈｉ 薄膜形成方法及び装置並びに太陽電池の製造方法及び装置並びに太陽電池
US20040121146A1 (en) * 2002-12-20 2004-06-24 Xiao-Ming He Composite barrier films and method
JP4476073B2 (ja) * 2004-04-08 2010-06-09 東北パイオニア株式会社 有機ｅｌ素子の製造方法及び製造装置
JP2006058473A (ja) * 2004-08-18 2006-03-02 Oyokoden Lab Co Ltd 誘電体多層膜フィルタ及びその製造方法
WO2006024031A2 (en) 2004-08-23 2006-03-02 Hewlett-Packard Development Company, L.P. Method and apparatus for redirection of video data
KR101017187B1 (ko) * 2004-08-31 2011-02-25 엘지디스플레이 주식회사 스토커 시스템
US20060181266A1 (en) * 2005-02-14 2006-08-17 Panelvision Technology, A California Corporation Flat panel display inspection system
JP4462197B2 (ja) * 2006-01-23 2010-05-12 ソニー株式会社 光学ローパスフィルタ
DE102006057386A1 (de) * 2006-12-04 2008-06-05 Uhde Gmbh Verfahren zum Beschichten von Substraten
US8318245B2 (en) 2007-02-23 2012-11-27 Essilor International (Compagnie Generale D'optique) Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties
FR2913116B1 (fr) * 2007-02-23 2009-08-28 Essilor Int Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees
JP2008033341A (ja) * 2007-08-21 2008-02-14 Seiko Epson Corp 多層膜カットフィルターの製造方法
WO2009086494A2 (en) * 2007-12-27 2009-07-09 Exatec, Llc Multi-pass vacuum coating systems
JP5153410B2 (ja) * 2008-03-31 2013-02-27 Ｈｏｙａ株式会社 レンズ成膜方法、蒸着装置及びレンズの製造方法
TWI383207B (zh) 2008-12-25 2013-01-21 Chunghwa Picture Tubes Ltd 背光模組之電路板固定結構
CN101988186B (zh) * 2009-08-04 2013-08-21 鸿富锦精密工业（深圳）有限公司 工件真空溅镀方法及装置
JP2013104127A (ja) * 2011-11-16 2013-05-30 Mitsubishi Heavy Ind Ltd 真空蒸着装置
CN103403584B (zh) * 2011-11-21 2016-10-19 旭硝子株式会社 带光学多层膜的玻璃构件和近红外线截止滤光片玻璃
JP6243898B2 (ja) 2012-04-19 2017-12-06 インテヴァック インコーポレイテッド 太陽電池製造のための２重マスク装置
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates
SG11201406893XA (en) 2012-04-26 2014-11-27 Intevac Inc System architecture for vacuum processing
KR101336225B1 (ko) * 2012-05-30 2013-12-03 주식회사 선익시스템 기판의 이송속도 조절을 통해 고 증착효율을 갖는 인라인 증착 시스템
CN106688088B (zh) 2014-08-05 2020-01-10 因特瓦克公司 注入掩膜及对齐
EA034967B1 (ru) * 2018-05-04 2020-04-13 Общество С Ограниченной Ответственностью "Изовак Технологии" Технологическая линия для формирования тонкопленочных покрытий в вакууме (варианты)
TWI774936B (zh) * 2019-03-08 2022-08-21 台灣愛司帝科技股份有限公司 承載結構及承載設備
DE102020003578A1 (de) 2020-05-20 2021-11-25 Schneider Gmbh & Co. Kg Beschichtungsanlage, Spannring und Magazin für Brillengläser und Verfahren zum Beschichten von Brillengläsern

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JPS62260059A (ja) * 1986-05-02 1987-11-12 Seiko Epson Corp スパツタ装置
US4859493A (en) * 1987-03-31 1989-08-22 Lemelson Jerome H Methods of forming synthetic diamond coatings on particles using microwaves
JPS644472A (en) * 1987-06-25 1989-01-09 Toshiba Corp Sputtering device
JPH0335216A (ja) * 1989-06-30 1991-02-15 Matsushita Electric Ind Co Ltd 連続式スパッタ装置およびカラー液晶用基板の製造方法
JPH03193873A (ja) * 1989-12-21 1991-08-23 Shinku Kikai Kogyo Kk 連続真空薄膜形成方法および装置
DE4111384C2 (de) * 1991-04-09 1999-11-04 Leybold Ag Vorrichtung zur Beschichtung von Substraten
US5815396A (en) * 1991-08-12 1998-09-29 Hitachi, Ltd. Vacuum processing device and film forming device and method using same
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JPH07278801A (ja) * 1994-04-13 1995-10-24 Idemitsu Material Kk 真空成膜装置

Also Published As

Publication number Publication date
WO1997037051A1 (fr) 1997-10-09
EP0834596A4 (en) 2003-03-26
DE69730185T2 (de) 2005-08-18
EP0834596B1 (en) 2004-08-11
DE69730185D1 (de) 2004-09-16
TW320687B (enExample) 1997-11-21
US5993614A (en) 1999-11-30
EP0834596A1 (en) 1998-04-08
KR19990022135A (ko) 1999-03-25

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Legal Events

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