ATE210337T1 - Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl - Google Patents

Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl

Info

Publication number
ATE210337T1
ATE210337T1 AT96903119T AT96903119T ATE210337T1 AT E210337 T1 ATE210337 T1 AT E210337T1 AT 96903119 T AT96903119 T AT 96903119T AT 96903119 T AT96903119 T AT 96903119T AT E210337 T1 ATE210337 T1 AT E210337T1
Authority
AT
Austria
Prior art keywords
arc
plasma jet
cathode
macroparticles
ignition
Prior art date
Application number
AT96903119T
Other languages
German (de)
English (en)
Inventor
Xu Shi
David Ian Flynn
Beng Kang Tay
Hong Siang Tan
Original Assignee
Filplas Vacuum Technology Pte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Filplas Vacuum Technology Pte filed Critical Filplas Vacuum Technology Pte
Application granted granted Critical
Publication of ATE210337T1 publication Critical patent/ATE210337T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32633—Baffles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • ing And Chemical Polishing (AREA)
  • Discharge Heating (AREA)
  • Plasma Technology (AREA)
  • Sampling And Sample Adjustment (AREA)
AT96903119T 1995-02-20 1996-02-20 Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl ATE210337T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9503305.6A GB9503305D0 (en) 1995-02-20 1995-02-20 Filtered cathodic arc source
PCT/GB1996/000389 WO1996026531A2 (fr) 1995-02-20 1996-02-20 Source a arc cathodique filtre

Publications (1)

Publication Number Publication Date
ATE210337T1 true ATE210337T1 (de) 2001-12-15

Family

ID=10769900

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96903119T ATE210337T1 (de) 1995-02-20 1996-02-20 Vorrichtung und verfahren zu filtern von makropartikeln aus einem plasmastrahl

Country Status (8)

Country Link
US (2) US6031239A (fr)
EP (1) EP0811236B1 (fr)
AT (1) ATE210337T1 (fr)
AU (1) AU4726596A (fr)
DE (1) DE69617645D1 (fr)
GB (1) GB9503305D0 (fr)
SG (3) SG68680A1 (fr)
WO (1) WO1996026531A2 (fr)

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JP7390396B2 (ja) 2019-03-15 2023-12-01 ナノフィルム テクノロジーズ インターナショナル リミテッド 改良されたカソードアーク源
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Also Published As

Publication number Publication date
DE69617645D1 (de) 2002-01-17
GB9503305D0 (en) 1995-04-12
US6031239A (en) 2000-02-29
US6319369B1 (en) 2001-11-20
SG68680A1 (en) 2000-05-23
SG68678A1 (en) 2000-05-23
EP0811236A2 (fr) 1997-12-10
EP0811236B1 (fr) 2001-12-05
WO1996026531A3 (fr) 1996-12-12
WO1996026531A2 (fr) 1996-08-29
AU4726596A (en) 1996-09-11
SG68679A1 (en) 2000-05-23

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