ATE158134T1 - Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter - Google Patents

Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter

Info

Publication number
ATE158134T1
ATE158134T1 AT95119294T AT95119294T ATE158134T1 AT E158134 T1 ATE158134 T1 AT E158134T1 AT 95119294 T AT95119294 T AT 95119294T AT 95119294 T AT95119294 T AT 95119294T AT E158134 T1 ATE158134 T1 AT E158134T1
Authority
AT
Austria
Prior art keywords
plasma parameters
reactor
plasma
radio frequency
digital signals
Prior art date
Application number
AT95119294T
Other languages
English (en)
Inventor
Michael Dr Klick
Original Assignee
Adolf Slaby Inst Forschungsges
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adolf Slaby Inst Forschungsges filed Critical Adolf Slaby Inst Forschungsges
Application granted granted Critical
Publication of ATE158134T1 publication Critical patent/ATE158134T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
AT95119294T 1994-12-21 1995-12-07 Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter ATE158134T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4445762A DE4445762A1 (de) 1994-12-21 1994-12-21 Verfahren und Vorrichtung zum Bestimmen absoluter Plasmaparameter

Publications (1)

Publication Number Publication Date
ATE158134T1 true ATE158134T1 (de) 1997-09-15

Family

ID=6536566

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95119294T ATE158134T1 (de) 1994-12-21 1995-12-07 Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter

Country Status (6)

Country Link
US (2) US5705931A (de)
EP (1) EP0719077B1 (de)
JP (1) JP2872954B2 (de)
AT (1) ATE158134T1 (de)
DE (2) DE4445762A1 (de)
ES (1) ES2109045T3 (de)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0179281B1 (ko) * 1996-02-28 1999-10-01 문정환 챔버를 갖는 베이퍼-에치 장치의 에치-종말점 측정방법
US6046594A (en) * 1997-02-11 2000-04-04 Advanced Energy Voorhees, Inc. Method and apparatus for monitoring parameters of an RF powered load in the presence of harmonics
DE19722272A1 (de) * 1997-05-28 1998-12-03 Leybold Systems Gmbh Vorrichtung zur Erzeugung von Plasma
JPH1183907A (ja) * 1997-09-03 1999-03-26 Mitsubishi Electric Corp 高周波電流の測定方法
US6043607A (en) * 1997-12-16 2000-03-28 Applied Materials, Inc. Apparatus for exciting a plasma in a semiconductor wafer processing system using a complex RF waveform
GB9803932D0 (en) * 1998-02-26 1998-04-22 Matra Bae Dynamics Uk Ltd Apparatus for the investigation of surface chemistry
US6151532A (en) * 1998-03-03 2000-11-21 Lam Research Corporation Method and apparatus for predicting plasma-process surface profiles
JP3497091B2 (ja) * 1998-07-23 2004-02-16 名古屋大学長 プラズマ生成用高周波パワーの制御方法、およびプラズマ発生装置
JP3497092B2 (ja) * 1998-07-23 2004-02-16 名古屋大学長 プラズマ密度情報測定方法、および測定に用いられるプローブ、並びにプラズマ密度情報測定装置
KR100448529B1 (ko) * 1999-03-17 2004-09-13 가부시키가이샤 히타치세이사쿠쇼 이온전류밀도 측정방법 및 측정장치 및 반도체디바이스제조방법
DE19927063B4 (de) * 1999-06-15 2005-03-10 Christof Luecking Verfahren zur Bestimmung der elektrischen Eigenschaften von hochfrequenzangeregten Gasentladungen durch Berechnung mit einer inversen Matrix, die durch einmalige Kalibrierung bestimmt wird
DE19961104A1 (de) * 1999-12-17 2001-07-05 Infineon Technologies Ag Verfahren und Vorrichtung zur Überwachung von Ätzkammern
US6653852B1 (en) * 2000-03-31 2003-11-25 Lam Research Corporation Wafer integrated plasma probe assembly array
US6852277B2 (en) * 2000-10-02 2005-02-08 Ethicon, Inc. Sterilization system employing a switching module adapted to pulsate the low frequency power applied to a plasma
US6841124B2 (en) * 2000-10-02 2005-01-11 Ethicon, Inc. Sterilization system with a plasma generator controlled by a digital signal processor
US6447719B1 (en) * 2000-10-02 2002-09-10 Johnson & Johnson Power system for sterilization systems employing low frequency plasma
US20040262146A1 (en) * 2000-10-02 2004-12-30 Platt Robert C. Sterilization system plasma generation control
WO2002054835A2 (en) * 2001-01-08 2002-07-11 Tokyo Electron Limited Addition of power at selected harmonics of plasma processor drive frequency
KR100751610B1 (ko) * 2001-10-24 2007-08-22 동경 엘렉트론 주식회사 벽막(壁膜)감시용 방법 및 장치
US6608446B1 (en) * 2002-02-25 2003-08-19 Eni Technology, Inc. Method and apparatus for radio frequency (RF) metrology
US20030209518A1 (en) * 2002-05-08 2003-11-13 Taiwan Semiconductor Manufacturing Co., Ltd. Method of detecting abnormal chamber conditions in etcher
US6894474B2 (en) * 2002-06-07 2005-05-17 Applied Materials, Inc. Non-intrusive plasma probe
US6707255B2 (en) 2002-07-10 2004-03-16 Eni Technology, Inc. Multirate processing for metrology of plasma RF source
US6812044B2 (en) * 2002-12-19 2004-11-02 Taiwan Semiconductor Manufacturing Co., Ltd Advanced control for plasma process
AT502984B8 (de) * 2003-09-15 2008-10-15 Qasar Technologieentwicklung Gmbh Verfahren und einrichtung zur erzeugung von alfven-wellen
US7288942B2 (en) * 2003-10-02 2007-10-30 Naoyuki Sato Plasma potential measuring method and apparatus, and plasma potential measuring probe
US20060043063A1 (en) * 2004-09-02 2006-03-02 Mahoney Leonard J Electrically floating diagnostic plasma probe with ion property sensors
KR20070098860A (ko) * 2005-01-11 2007-10-05 이노베이션 엔지니어링, 엘엘씨 로드로 전달된 알에프 파워를 검출하는 방법 및 로드의복소 임피던스
US20060171848A1 (en) * 2005-01-31 2006-08-03 Advanced Energy Industries, Inc. Diagnostic plasma sensors for endpoint and end-of-life detection
US7319316B2 (en) * 2005-06-29 2008-01-15 Lam Research Corporation Apparatus for measuring a set of electrical characteristics in a plasma
US7479207B2 (en) * 2006-03-15 2009-01-20 Lam Research Corporation Adjustable height PIF probe
JP4878187B2 (ja) * 2006-03-20 2012-02-15 東京エレクトロン株式会社 基板処理装置、堆積物モニタ装置、及び堆積物モニタ方法
DE102006014106B3 (de) * 2006-03-24 2007-08-30 RUHR-UNIVERSITäT BOCHUM Vorrichtung und Verfahren zur Messung der Dichte eines Plasmas
US7829468B2 (en) * 2006-06-07 2010-11-09 Lam Research Corporation Method and apparatus to detect fault conditions of plasma processing reactor
WO2008065635A2 (en) 2006-11-27 2008-06-05 Dublin City University A plasma system and measurement method
EP2114112B1 (de) 2008-04-29 2015-09-23 Plasmetrex GmbH Vorrichtung für industrielle Plasmaprozesse
GB2459858A (en) * 2008-05-07 2009-11-11 Univ Dublin City System for analysing plasma
US7970562B2 (en) * 2008-05-07 2011-06-28 Advanced Energy Industries, Inc. System, method, and apparatus for monitoring power
DE102009038563B4 (de) * 2009-08-22 2013-06-06 Reinhausen Plasma Gmbh Vorrichtung und Verfahren zur Überwachung eines Plasmastrahls
US8190366B2 (en) * 2010-10-01 2012-05-29 The United States Of America, As Represented By The Secretary Of The Navy LC resonance probe for determining local plasma density
DE102010055799B3 (de) * 2010-10-06 2016-10-06 RUHR-UNIVERSITäT BOCHUM Vorrichtung und Verwendung der Vorrichtung zur Messung der Dichte und/oder der Elektronentemperatur und/oder der Stoßfrequenz eines Plasmas
RU2515539C1 (ru) * 2012-12-14 2014-05-10 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Нижегородский Государственный Университет Им. Н.И. Лобачевского" Способ модификации ионосферной плазмы
US11432732B2 (en) 2016-06-28 2022-09-06 Chiscan Holdings, Llc System and method of measuring millimeter wave of cold atmospheric pressure plasma
US11166762B2 (en) * 2016-06-28 2021-11-09 Chiscan Holdings, L.L.C. Non-thermal plasma generator for detection and treatment of maladies
CN106851953B (zh) * 2017-02-22 2018-12-21 大连理工大学 一种凸凹探针及其等离子体诊断方法
DE102018115389B3 (de) 2018-06-26 2019-08-14 RUHR-UNIVERSITäT BOCHUM Sonde zur Messung von Plasmaparametern
JP2020136144A (ja) * 2019-02-22 2020-08-31 株式会社アルバック プラズマ状態測定装置、および、成膜装置
CN113648051B (zh) * 2021-08-13 2022-08-02 卡本(深圳)医疗器械有限公司 一种基于emc-emi的自适应射频信号数据处理设备
CN117545157B (zh) * 2024-01-09 2024-03-12 西南交通大学 一种用于测量等离子体电势和电场的诊断方法及系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475063A (en) * 1981-06-22 1984-10-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Hollow cathode apparatus
US5053343A (en) * 1985-02-15 1991-10-01 Environmental Technologies Group, Inc. Selective ionization of gas constituents using electrolytic reactions
GB2211244A (en) * 1987-10-16 1989-06-28 Ford Motor Co I.c. engine combustion chamber ionisation sensor
US5274306A (en) * 1990-08-31 1993-12-28 Kaufman & Robinson, Inc. Capacitively coupled radiofrequency plasma source
US5394092A (en) * 1991-02-28 1995-02-28 Valco Instruments Co., Inc. System for identifying and quantifying selected constituents of gas samples using selective photoionization
CA2113463C (en) * 1991-07-19 2003-07-01 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Gas detection device and method
US5175472A (en) * 1991-12-30 1992-12-29 Comdel, Inc. Power monitor of RF plasma
JP3292531B2 (ja) * 1993-01-15 2002-06-17 忠弘 大見 高周波励起プラズマの計測装置
JPH07169590A (ja) * 1993-09-16 1995-07-04 Fujitsu Ltd 電子密度の測定方法及びその装置及び電子密度の制御装置及びプラズマ処理装置
US5576629A (en) * 1994-10-24 1996-11-19 Fourth State Technology, Inc. Plasma monitoring and control method and system
US5565737A (en) * 1995-06-07 1996-10-15 Eni - A Division Of Astec America, Inc. Aliasing sampler for plasma probe detection

Also Published As

Publication number Publication date
DE69500694T2 (de) 1998-03-26
EP0719077B1 (de) 1997-09-10
JP2872954B2 (ja) 1999-03-24
EP0719077A1 (de) 1996-06-26
JPH08222396A (ja) 1996-08-30
DE69500694D1 (de) 1997-10-16
ES2109045T3 (es) 1998-01-01
DE4445762A1 (de) 1996-06-27
US5861752A (en) 1999-01-19
US5705931A (en) 1998-01-06

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
EEWE Authorization for restitution
UEP Publication of translation of european patent specification
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