AT521925A3 - Substratkassette - Google Patents

Substratkassette Download PDF

Info

Publication number
AT521925A3
AT521925A3 ATA51079/2019A AT510792019A AT521925A3 AT 521925 A3 AT521925 A3 AT 521925A3 AT 510792019 A AT510792019 A AT 510792019A AT 521925 A3 AT521925 A3 AT 521925A3
Authority
AT
Austria
Prior art keywords
substrate cassette
substrate
housing
cassette
edition
Prior art date
Application number
ATA51079/2019A
Other languages
English (en)
Other versions
AT521925A2 (de
AT521925B1 (de
Original Assignee
Suss Microtec Lithography Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suss Microtec Lithography Gmbh filed Critical Suss Microtec Lithography Gmbh
Publication of AT521925A2 publication Critical patent/AT521925A2/de
Publication of AT521925A3 publication Critical patent/AT521925A3/de
Application granted granted Critical
Publication of AT521925B1 publication Critical patent/AT521925B1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/14—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Stackable Containers (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Liquid Crystal (AREA)

Abstract

Eine Substratkassette (10) zur Aufnahme mehrerer übereinandergestapelter Substrate (32), insbesondere Wafer, hat ein Gehäuse (12), das eine erste Seite (14) und eine zur ersten Seite (14) parallele zweite Seite (16) umfasst, wobei wenigstens eine längliche erste Auflage (20) für ein Substrat (32) innerhalb des Gehäuses (12) zwischen den Seiten (14, 16) vorgesehen ist, die zumindest abschnittsweise von der ersten Seite (14) beabstandet ist, wobei die erste Seite (14) der wenigstens einen ersten Auflage (20) am nächsten liegt.
ATA51079/2019A 2018-12-12 2019-12-09 Substratkassette AT521925B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2022185A NL2022185B1 (nl) 2018-12-12 2018-12-12 Substratkassette

Publications (3)

Publication Number Publication Date
AT521925A2 AT521925A2 (de) 2020-06-15
AT521925A3 true AT521925A3 (de) 2021-11-15
AT521925B1 AT521925B1 (de) 2022-08-15

Family

ID=66166491

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA51079/2019A AT521925B1 (de) 2018-12-12 2019-12-09 Substratkassette

Country Status (9)

Country Link
US (1) US11049746B2 (de)
JP (1) JP7680182B2 (de)
KR (1) KR102726712B1 (de)
CN (1) CN111312635B (de)
AT (1) AT521925B1 (de)
DE (1) DE102019133136A1 (de)
NL (1) NL2022185B1 (de)
SG (1) SG10201911994SA (de)
TW (1) TWI824075B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021256788A1 (ko) 2020-06-16 2021-12-23 주식회사 엘지에너지솔루션 배터리 팩, 이를 포함하는 전자 디바이스 및 자동차

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000332097A (ja) * 1999-05-17 2000-11-30 Fujitsu Ltd ウェーハ収納キャリア及びウェーハ搬送装置及びウェーハ搬送方法
US20030052039A1 (en) * 2001-09-18 2003-03-20 Cu Ruben S. Wafer Boat
US20030122146A1 (en) * 2001-12-27 2003-07-03 Toshihiko Iijima Wafer cassette
US20050148455A1 (en) * 2004-01-06 2005-07-07 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide articles and methods
CN201086933Y (zh) * 2007-08-08 2008-07-16 义柏科技（深圳）有限公司 8英寸晶圆片架
US20090194456A1 (en) * 2006-07-07 2009-08-06 Entegris, Inc. Wafer cassette
US20120189408A1 (en) * 2005-07-08 2012-07-26 Crossing Automation, Inc. Method and apparatus for wafer support
US20130082015A1 (en) * 2011-09-29 2013-04-04 Semiconductor Manufacturing International Corporation Elastic retention wheels and wafer adapter containing the same wheels
US20140356107A1 (en) * 2005-07-08 2014-12-04 Brooks Automation, Inc. Workpiece Structures and Apparatus for Accessing Same
US20150083640A1 (en) * 2008-01-13 2015-03-26 Entegris, Inc. Methods and apparatus for large diameter wafer handling
WO2017035256A1 (en) * 2015-08-25 2017-03-02 Entegris, Inc. Interlocking modular substrate support columns

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Publication number Priority date Publication date Assignee Title
DE69526126T2 (de) * 1995-10-13 2002-11-07 Empak Inc., Chanhassen 300 mm behälter mit mikroumgebung und seitentür und erdungsleitung
JPH09306980A (ja) * 1996-05-17 1997-11-28 Asahi Glass Co Ltd 縦型ウエハボート
US6341703B1 (en) * 1998-04-06 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd Wafer cassette having dividers of different length or color
JP2000007148A (ja) * 1998-06-19 2000-01-11 Advanced Display Inc ガラス基板カセット
KR20000025959A (ko) * 1998-10-16 2000-05-06 윤종용 웨이퍼 캐리어
US6209555B1 (en) * 1999-04-27 2001-04-03 Imtec Acculine, Inc. Substrate cassette for ultrasonic cleaning
JP2004273686A (ja) 2003-03-07 2004-09-30 Yodogawa Hu-Tech Kk 大型基板用カセット
US7181132B2 (en) * 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
WO2009038244A2 (en) * 2007-09-21 2009-03-26 Visionsemicon.Co.Ltd Magazine for depositing substrates
US20090175707A1 (en) * 2008-01-03 2009-07-09 Bonora Anthony C Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
WO2009107254A1 (ja) 2008-02-27 2009-09-03 ミライアル株式会社 裏面支持構造付きウエハ収納容器
CN201309690Y (zh) 2008-09-24 2009-09-16 中勤实业股份有限公司 基板卡匣调整结构
JP2011211160A (ja) 2010-03-11 2011-10-20 Index:Kk ビーム材及び構造材並びにガラス基板支持ビーム及び基板カセット
CN103828033B (zh) * 2011-08-12 2016-11-16 恩特格里公司 晶片载具
JP6104695B2 (ja) * 2013-04-30 2017-03-29 ミライアル株式会社 非対称溝形状ウェーハカセット
US20140326686A1 (en) * 2013-05-06 2014-11-06 Shenzhen China Star Optoelectronics Technology Co., Ltd. Substrate cartridge
WO2016046985A1 (ja) * 2014-09-26 2016-03-31 ミライアル株式会社 基板収納容器
US9881826B2 (en) * 2014-10-24 2018-01-30 Lam Research Corporation Buffer station with single exit-flow direction
US10566226B2 (en) * 2014-11-11 2020-02-18 Applied Materials, Inc. Multi-cassette carrying case
DE102015111144A1 (de) * 2015-07-09 2017-01-12 Hanwha Q.CELLS GmbH Vorrichtung zur paarweisen Aufnahme von Substraten
KR101937725B1 (ko) * 2015-12-14 2019-01-14 주식회사 씨에이치솔루션 버퍼카세트 및 이를 이용한 기판 처리 장치

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000332097A (ja) * 1999-05-17 2000-11-30 Fujitsu Ltd ウェーハ収納キャリア及びウェーハ搬送装置及びウェーハ搬送方法
US20030052039A1 (en) * 2001-09-18 2003-03-20 Cu Ruben S. Wafer Boat
US20030122146A1 (en) * 2001-12-27 2003-07-03 Toshihiko Iijima Wafer cassette
US20050148455A1 (en) * 2004-01-06 2005-07-07 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide articles and methods
US20120189408A1 (en) * 2005-07-08 2012-07-26 Crossing Automation, Inc. Method and apparatus for wafer support
US20140356107A1 (en) * 2005-07-08 2014-12-04 Brooks Automation, Inc. Workpiece Structures and Apparatus for Accessing Same
US20090194456A1 (en) * 2006-07-07 2009-08-06 Entegris, Inc. Wafer cassette
CN201086933Y (zh) * 2007-08-08 2008-07-16 义柏科技（深圳）有限公司 8英寸晶圆片架
US20150083640A1 (en) * 2008-01-13 2015-03-26 Entegris, Inc. Methods and apparatus for large diameter wafer handling
US20130082015A1 (en) * 2011-09-29 2013-04-04 Semiconductor Manufacturing International Corporation Elastic retention wheels and wafer adapter containing the same wheels
WO2017035256A1 (en) * 2015-08-25 2017-03-02 Entegris, Inc. Interlocking modular substrate support columns

Also Published As

Publication number Publication date
AT521925A2 (de) 2020-06-15
US11049746B2 (en) 2021-06-29
KR102726712B1 (ko) 2024-11-06
JP2020167374A (ja) 2020-10-08
CN111312635A (zh) 2020-06-19
JP7680182B2 (ja) 2025-05-20
CN111312635B (zh) 2024-04-26
KR20200073140A (ko) 2020-06-23
TWI824075B (zh) 2023-12-01
TW202027203A (zh) 2020-07-16
US20200194282A1 (en) 2020-06-18
SG10201911994SA (en) 2020-07-29
DE102019133136A1 (de) 2020-06-18
NL2022185B1 (nl) 2020-07-02
AT521925B1 (de) 2022-08-15

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