AT513190B9 - Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs - Google Patents
Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs Download PDFInfo
- Publication number
- AT513190B9 AT513190B9 ATA877/2012A AT8772012A AT513190B9 AT 513190 B9 AT513190 B9 AT 513190B9 AT 8772012 A AT8772012 A AT 8772012A AT 513190 B9 AT513190 B9 AT 513190B9
- Authority
- AT
- Austria
- Prior art keywords
- electrode
- segments
- substrate
- electrode segments
- energy source
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 238000000576 coating method Methods 0.000 title claims abstract description 30
- 230000008569 process Effects 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 5
- 230000003213 activating effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 17
- 239000010410 layer Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 230000011218 segmentation Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 7
- 229910052593 corundum Inorganic materials 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 239000010431 corundum Substances 0.000 description 3
- 230000001066 destructive effect Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000011093 chipboard Substances 0.000 description 2
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- 239000011094 fiberboard Substances 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000000123 paper Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 229920002522 Wood fibre Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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- 239000012141 concentrate Substances 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
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- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000011439 engineered stone Substances 0.000 description 1
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- 238000001125 extrusion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- 239000011435 rock Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
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- 238000003856 thermoforming Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000002025 wood fiber Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/06—Platens or press rams
- B30B15/062—Press plates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (18)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA877/2012A AT513190B9 (de) | 2012-08-08 | 2012-08-08 | Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs |
| CA2881069A CA2881069C (en) | 2012-08-08 | 2013-08-06 | Apparatus and method for the plasma coating of a substrate, in particular a press platen |
| NZ704253A NZ704253A (en) | 2012-08-08 | 2013-08-06 | Apparatus and method for the plasma coating of a substrate, in particular a press platen |
| RU2015107784A RU2615743C2 (ru) | 2012-08-08 | 2013-08-06 | Устройство и способ для плазменного нанесения покрытия на подложку, в частности, на прессовальный лист |
| CN201380042267.0A CN104755653B (zh) | 2012-08-08 | 2013-08-06 | 用于对压板进行等离子体涂覆的装置的应用及相应方法 |
| AU2013302202A AU2013302202B2 (en) | 2012-08-08 | 2013-08-06 | Apparatus and method for the plasma coating of a substrate, in particular a press platen |
| PCT/AT2013/050152 WO2014022872A2 (de) | 2012-08-08 | 2013-08-06 | Vorrichtung und verfahren zur plasmabeschichtung eines substrats, insbesondere eines pressblechs |
| US14/420,194 US9530624B2 (en) | 2012-08-08 | 2013-08-06 | Method for the plasma coating of a substrate, in particular a press platen |
| MYPI2015700347A MY176134A (en) | 2012-08-08 | 2013-08-06 | Apparatus and method for the plasma coating of a substrate, in particular a press platen |
| IN1149DEN2015 IN2015DN01149A (enExample) | 2012-08-08 | 2013-08-06 | |
| JP2015525690A JP6140286B2 (ja) | 2012-08-08 | 2013-08-06 | 基板、特にプレス板をプラズマコーティングする装置及び方法 |
| PL13791714.2T PL2882885T3 (pl) | 2012-08-08 | 2013-08-06 | Sposób powlekania plazmowego blachy naciskowej |
| BR112015002657A BR112015002657A8 (pt) | 2012-08-08 | 2013-08-06 | aparelho e método para o revestimento por plasma de um substrato, em particular de uma placa de prensa |
| KR1020157006106A KR101742744B1 (ko) | 2012-08-08 | 2013-08-06 | 기판, 특히 프레스 플래튼의 플라즈마 코팅을 위한 장치 및 방법 |
| ES13791714.2T ES2587929T3 (es) | 2012-08-08 | 2013-08-06 | Procedimiento para el recubrimiento por plasma de una chapa de prensado |
| DK13791714.2T DK2882885T3 (en) | 2012-08-08 | 2013-08-06 | Method for Plating a Press Plate |
| EP13791714.2A EP2882885B8 (de) | 2012-08-08 | 2013-08-06 | Verfahren zum plasmabeschichten eines pressblechs |
| CL2015000301A CL2015000301A1 (es) | 2012-08-08 | 2015-02-06 | Uso de un dispositivo para el recubrimiento por plasma de una chapa de prensado, que comprende una cámara de vacío y un electrodo que durante el funcionamiento está orientado esencialmente en paralelo a la chapa de prensado y frente a su lado a recubrir, y que está segmentado y cada uno de sus segmentos presenta una conexión propia para una fuente de energía eléctrica; procedimientos. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA877/2012A AT513190B9 (de) | 2012-08-08 | 2012-08-08 | Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| AT513190A1 AT513190A1 (de) | 2014-02-15 |
| AT513190B1 AT513190B1 (de) | 2014-03-15 |
| AT513190B9 true AT513190B9 (de) | 2014-05-15 |
Family
ID=49584535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ATA877/2012A AT513190B9 (de) | 2012-08-08 | 2012-08-08 | Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US9530624B2 (enExample) |
| EP (1) | EP2882885B8 (enExample) |
| JP (1) | JP6140286B2 (enExample) |
| KR (1) | KR101742744B1 (enExample) |
| CN (1) | CN104755653B (enExample) |
| AT (1) | AT513190B9 (enExample) |
| AU (1) | AU2013302202B2 (enExample) |
| BR (1) | BR112015002657A8 (enExample) |
| CA (1) | CA2881069C (enExample) |
| CL (1) | CL2015000301A1 (enExample) |
| DK (1) | DK2882885T3 (enExample) |
| ES (1) | ES2587929T3 (enExample) |
| IN (1) | IN2015DN01149A (enExample) |
| MY (1) | MY176134A (enExample) |
| NZ (1) | NZ704253A (enExample) |
| PL (1) | PL2882885T3 (enExample) |
| RU (1) | RU2615743C2 (enExample) |
| WO (1) | WO2014022872A2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017025389A (ja) * | 2015-07-24 | 2017-02-02 | 株式会社ユーテック | プラズマｃｖｄ装置及び成膜方法 |
| US11251019B2 (en) * | 2016-12-15 | 2022-02-15 | Toyota Jidosha Kabushiki Kaisha | Plasma device |
| CN107283551B (zh) * | 2017-08-21 | 2018-07-24 | 阜南盛原木业有限公司 | 一种具有良好防霉防虫性能的胶合板 |
| JP6863199B2 (ja) * | 2017-09-25 | 2021-04-21 | トヨタ自動車株式会社 | プラズマ処理装置 |
| CN109055917B (zh) * | 2018-09-07 | 2020-09-08 | 信阳师范学院 | 一种单室双面镀膜等离子体化学气相沉积系统 |
| DE102019127659A1 (de) * | 2019-10-15 | 2021-04-15 | Hueck Rheinische Gmbh | Presswerkzeug und Verfahren zum Herstellen eines Presswerkzeugs |
| US11884426B2 (en) | 2020-07-08 | 2024-01-30 | Hamilton Sundstrand Corporation | Compression apparatus and methods of making and using the same |
Citations (6)
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| GB2181460A (en) * | 1985-10-07 | 1987-04-23 | Epsilon Ltd Partnership | Apparatus and method for chemical vapor deposition using an axially symmetric gas flow |
| US5156820A (en) * | 1989-05-15 | 1992-10-20 | Rapro Technology, Inc. | Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| US5273588A (en) * | 1992-06-15 | 1993-12-28 | Materials Research Corporation | Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means |
| DE19757141A1 (de) * | 1997-12-20 | 1999-06-24 | Philips Patentverwaltung | Array aus Diamant/wasserstoffhaltigen Elektroden |
| US20020159216A1 (en) * | 2001-03-30 | 2002-10-31 | Lam Research Corporation | Vacuum plasma processor and method of operating same |
| EP1417090B1 (de) * | 2001-08-14 | 2005-10-12 | Hueck Engraving GmbH | Verfahren zur bearbeitung und herstellung einer oberfläche mit einem glanzgrad |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US3984043A (en) * | 1972-07-10 | 1976-10-05 | United Technologies Corporation | Method for bonding composite materials |
| US4885074A (en) | 1987-02-24 | 1989-12-05 | International Business Machines Corporation | Plasma reactor having segmented electrodes |
| RU2176681C2 (ru) * | 1989-11-22 | 2001-12-10 | Волков Валерий Венедиктович | Способ получения покрытий в вакууме, устройство для получения покрытий в вакууме, способ изготовления устройства для получения покрытий в вакууме |
| JP2901317B2 (ja) * | 1990-07-02 | 1999-06-07 | 株式会社日立製作所 | スパッタ装置及びそれを用いた成膜方法 |
| US5244375A (en) | 1991-12-19 | 1993-09-14 | Formica Technology, Inc. | Plasma ion nitrided stainless steel press plates and applications for same |
| DE4202425C2 (de) | 1992-01-29 | 1997-07-17 | Leybold Ag | Verfahren und Vorrichtung zum Beschichten eines Substrats, insbesondere mit elektrisch nichtleitenden Schichten |
| DE4443608C1 (de) * | 1994-12-07 | 1996-03-21 | Siemens Ag | Plasmareaktor und Verfahren zu dessen Betrieb |
| US6190514B1 (en) | 1997-12-30 | 2001-02-20 | Premark Rwp Holdings, Inc. | Method for high scan sputter coating to produce coated, abrasion resistant press plates with reduced built-in thermal stress |
| JP3595853B2 (ja) * | 1999-03-18 | 2004-12-02 | 日本エー・エス・エム株式会社 | プラズマｃｖｄ成膜装置 |
| AU2001245938A1 (en) * | 2000-03-28 | 2001-10-08 | Tokyo Electron Limited | Method and apparatus for controlling power delivered to a multiple segment electrode |
| US20020155957A1 (en) * | 2001-02-14 | 2002-10-24 | Danly, James C. | Sintered anti-friction bearing surface |
| US7217471B2 (en) * | 2002-05-17 | 2007-05-15 | 3M Innovative Properties Company | Membrane electrode assembly with compression control gasket |
| DE10337117A1 (de) * | 2003-08-11 | 2005-03-17 | Dieffenbacher Gmbh + Co. Kg | Verfahren und Ein- oder Mehretagenpresse zur Herstellung von Holzwerkstoffplatten, insbesondere OSB-Platten |
| TWI283651B (en) * | 2004-04-23 | 2007-07-11 | Bobst Sa | Device for transferring a foil matter from outside to inside of a machine |
| RU2285742C2 (ru) * | 2004-07-27 | 2006-10-20 | Евгений Владимирович Берлин | Способ нанесения металлического покрытия на диэлектрическую подложку и устройство для его осуществления |
| ATE497437T1 (de) * | 2004-10-22 | 2011-02-15 | Dow Global Technologies Inc | Verbundrohre und herstellungsverfahren dafür |
| JP4704088B2 (ja) * | 2005-03-31 | 2011-06-15 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| US20070042131A1 (en) * | 2005-08-22 | 2007-02-22 | Applied Materials, Inc., A Delaware Corporation | Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films |
| WO2007034409A1 (en) * | 2005-09-22 | 2007-03-29 | Koninklijke Philips Electronics N.V. | Two-dimensional adaptive accelerometer based on dielectrophoresis |
| JP5590893B2 (ja) * | 2007-02-08 | 2014-09-17 | ハンツマン・アドヴァンスト・マテリアルズ・（スイッツランド）・ゲーエムベーハー | 熱硬化性組成物 |
| KR101297711B1 (ko) * | 2007-02-09 | 2013-08-20 | 한국과학기술원 | 플라즈마 처리장치 및 플라즈마 처리방법 |
| JP4707693B2 (ja) | 2007-05-01 | 2011-06-22 | 株式会社アルバック | スパッタリング装置及びスパッタリング方法 |
| JP5429771B2 (ja) | 2008-05-26 | 2014-02-26 | 株式会社アルバック | スパッタリング方法 |
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| JP5496073B2 (ja) * | 2010-12-21 | 2014-05-21 | 三菱電機株式会社 | 微結晶半導体薄膜製造装置および微結晶半導体薄膜製造方法 |
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-
2012
- 2012-08-08 AT ATA877/2012A patent/AT513190B9/de not_active IP Right Cessation
-
2013
- 2013-08-06 MY MYPI2015700347A patent/MY176134A/en unknown
- 2013-08-06 US US14/420,194 patent/US9530624B2/en not_active Expired - Fee Related
- 2013-08-06 CA CA2881069A patent/CA2881069C/en not_active Expired - Fee Related
- 2013-08-06 PL PL13791714.2T patent/PL2882885T3/pl unknown
- 2013-08-06 BR BR112015002657A patent/BR112015002657A8/pt not_active IP Right Cessation
- 2013-08-06 EP EP13791714.2A patent/EP2882885B8/de not_active Not-in-force
- 2013-08-06 JP JP2015525690A patent/JP6140286B2/ja not_active Expired - Fee Related
- 2013-08-06 RU RU2015107784A patent/RU2615743C2/ru not_active IP Right Cessation
- 2013-08-06 KR KR1020157006106A patent/KR101742744B1/ko not_active Expired - Fee Related
- 2013-08-06 IN IN1149DEN2015 patent/IN2015DN01149A/en unknown
- 2013-08-06 WO PCT/AT2013/050152 patent/WO2014022872A2/de not_active Ceased
- 2013-08-06 DK DK13791714.2T patent/DK2882885T3/en active
- 2013-08-06 AU AU2013302202A patent/AU2013302202B2/en not_active Ceased
- 2013-08-06 ES ES13791714.2T patent/ES2587929T3/es active Active
- 2013-08-06 CN CN201380042267.0A patent/CN104755653B/zh not_active Expired - Fee Related
- 2013-08-06 NZ NZ704253A patent/NZ704253A/en not_active IP Right Cessation
-
2015
- 2015-02-06 CL CL2015000301A patent/CL2015000301A1/es unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2181460A (en) * | 1985-10-07 | 1987-04-23 | Epsilon Ltd Partnership | Apparatus and method for chemical vapor deposition using an axially symmetric gas flow |
| US5156820A (en) * | 1989-05-15 | 1992-10-20 | Rapro Technology, Inc. | Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| US5273588A (en) * | 1992-06-15 | 1993-12-28 | Materials Research Corporation | Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means |
| DE19757141A1 (de) * | 1997-12-20 | 1999-06-24 | Philips Patentverwaltung | Array aus Diamant/wasserstoffhaltigen Elektroden |
| US20020159216A1 (en) * | 2001-03-30 | 2002-10-31 | Lam Research Corporation | Vacuum plasma processor and method of operating same |
| EP1417090B1 (de) * | 2001-08-14 | 2005-10-12 | Hueck Engraving GmbH | Verfahren zur bearbeitung und herstellung einer oberfläche mit einem glanzgrad |
Also Published As
| Publication number | Publication date |
|---|---|
| MY176134A (en) | 2020-07-24 |
| KR101742744B1 (ko) | 2017-06-01 |
| BR112015002657A8 (pt) | 2019-07-30 |
| KR20150042817A (ko) | 2015-04-21 |
| WO2014022872A2 (de) | 2014-02-13 |
| EP2882885A2 (de) | 2015-06-17 |
| AU2013302202A1 (en) | 2015-02-26 |
| DK2882885T3 (en) | 2016-09-05 |
| BR112015002657A2 (pt) | 2017-07-04 |
| RU2015107784A (ru) | 2016-09-27 |
| AT513190A1 (de) | 2014-02-15 |
| PL2882885T3 (pl) | 2016-11-30 |
| JP2015531820A (ja) | 2015-11-05 |
| IN2015DN01149A (enExample) | 2015-06-26 |
| RU2615743C2 (ru) | 2017-04-11 |
| NZ704253A (en) | 2016-08-26 |
| US9530624B2 (en) | 2016-12-27 |
| EP2882885B8 (de) | 2016-08-31 |
| US20150255254A1 (en) | 2015-09-10 |
| CN104755653B (zh) | 2017-09-19 |
| WO2014022872A3 (de) | 2014-05-15 |
| AT513190B1 (de) | 2014-03-15 |
| ES2587929T3 (es) | 2016-10-27 |
| EP2882885B1 (de) | 2016-05-25 |
| AU2013302202B2 (en) | 2015-12-03 |
| CN104755653A (zh) | 2015-07-01 |
| JP6140286B2 (ja) | 2017-05-31 |
| CA2881069A1 (en) | 2014-02-13 |
| CL2015000301A1 (es) | 2015-09-21 |
| CA2881069C (en) | 2017-11-07 |
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