AT324606B - Verfahren und vorrichtung zum abscheiden eines lichtdurchlässigen elektrisch leitenden metalloxydfilms auf einer werkstückfläche - Google Patents

Verfahren und vorrichtung zum abscheiden eines lichtdurchlässigen elektrisch leitenden metalloxydfilms auf einer werkstückfläche

Info

Publication number
AT324606B
AT324606B AT92172A AT92172A AT324606B AT 324606 B AT324606 B AT 324606B AT 92172 A AT92172 A AT 92172A AT 92172 A AT92172 A AT 92172A AT 324606 B AT324606 B AT 324606B
Authority
AT
Austria
Prior art keywords
oxyd
workpiece
depositing
film
electrically conductive
Prior art date
Application number
AT92172A
Other languages
English (en)
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Application granted granted Critical
Publication of AT324606B publication Critical patent/AT324606B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0063—Reactive sputtering characterised by means for introducing or removing gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
AT92172A 1971-02-05 1972-02-04 Verfahren und vorrichtung zum abscheiden eines lichtdurchlässigen elektrisch leitenden metalloxydfilms auf einer werkstückfläche AT324606B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB423471A GB1365492A (en) 1971-02-05 1971-02-05 Metal oxide films

Publications (1)

Publication Number Publication Date
AT324606B true AT324606B (de) 1975-09-10

Family

ID=9773271

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92172A AT324606B (de) 1971-02-05 1972-02-04 Verfahren und vorrichtung zum abscheiden eines lichtdurchlässigen elektrisch leitenden metalloxydfilms auf einer werkstückfläche

Country Status (21)

Country Link
US (1) US4006070A (de)
JP (1) JPS5218729B1 (de)
AT (1) AT324606B (de)
AU (1) AU463425B2 (de)
BE (1) BE778996A (de)
CA (1) CA977306A (de)
CH (1) CH580684A5 (de)
DE (1) DE2204652C3 (de)
ES (2) ES399507A1 (de)
FR (1) FR2125075A5 (de)
GB (1) GB1365492A (de)
IE (1) IE36063B1 (de)
IL (1) IL38624A (de)
IT (1) IT949407B (de)
LU (1) LU64721A1 (de)
NL (1) NL161816C (de)
SE (1) SE384233B (de)
SU (2) SU743574A3 (de)
TR (1) TR17189A (de)
YU (1) YU23572A (de)
ZA (1) ZA72751B (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1446848A (en) * 1972-11-29 1976-08-18 Triplex Safety Glass Co Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates
US4102768A (en) * 1972-11-29 1978-07-25 Triplex Safety Glass Company Limited Metal oxide coatings
FR2320565A1 (fr) * 1973-04-12 1977-03-04 Radiotechnique Compelec Plaque a transparence selective et son procede de fabrication
DE2441862B2 (de) * 1974-08-31 1979-06-28 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung einer transparenten, wärmereflektierenden Schicht aus dotiertem Indiumoxid auf Flachglas
US3976555A (en) * 1975-03-20 1976-08-24 Coulter Information Systems, Inc. Method and apparatus for supplying background gas in a sputtering chamber
US4252595A (en) * 1976-01-29 1981-02-24 Tokyo Shibaura Electric Co., Ltd. Etching apparatus using a plasma
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
US4349425A (en) * 1977-09-09 1982-09-14 Hitachi, Ltd. Transparent conductive films and methods of producing same
US4113599A (en) * 1977-09-26 1978-09-12 Ppg Industries, Inc. Sputtering technique for the deposition of indium oxide
JPS55129347A (en) * 1979-03-28 1980-10-07 Chiyou Lsi Gijutsu Kenkyu Kumiai Photomask
DE2950997C2 (de) * 1979-12-18 1986-10-09 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Vorrichtung zum Beschichten
US4336118A (en) * 1980-03-21 1982-06-22 Battelle Memorial Institute Methods for making deposited films with improved microstructures
GB2085482B (en) * 1980-10-06 1985-03-06 Optical Coating Laboratory Inc Forming thin film oxide layers using reactive evaporation techniques
CA1163231A (en) * 1981-07-24 1984-03-06 Don E. Brodie Reactive plating method and product
FR2514033B1 (fr) * 1981-10-02 1985-09-27 Henaff Louis Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
CH662755A5 (de) 1984-09-11 1987-10-30 Praezisions Werkzeuge Ag Elektrodenanordnung fuer eine beschichtungsanlage.
US5851642A (en) * 1985-01-22 1998-12-22 Saint-Gobain Vitrage Product produced by coating a substrate with an electrically conductive layer
NO168762C (no) * 1985-12-20 1992-04-01 Glaverbel Belagt, flatt glass.
JPH0645484B2 (ja) * 1987-03-20 1994-06-15 セントラル硝子株式会社 複写機用ガラスおよびその製造方法
US4970376A (en) * 1987-12-22 1990-11-13 Gte Products Corporation Glass transparent heater
US5147688A (en) * 1990-04-24 1992-09-15 Cvd, Inc. MOCVD of indium oxide and indium/tin oxide films on substrates
DE4106771A1 (de) * 1991-03-04 1992-09-10 Leybold Ag Vorrichtung zum beschichten eines substrats, vorzugsweise zum beschichten von flachglas, mit einer indium-zinn-oxid-schicht
DE4111384C2 (de) * 1991-04-09 1999-11-04 Leybold Ag Vorrichtung zur Beschichtung von Substraten
DE4140862A1 (de) * 1991-12-11 1993-06-17 Leybold Ag Kathodenzerstaeubungsanlage
US5798029A (en) * 1994-04-22 1998-08-25 Applied Materials, Inc. Target for sputtering equipment
DE19543375A1 (de) * 1995-11-21 1997-05-22 Leybold Ag Vorrichtung zum Beschichten von Substraten mittels Magnetronzerstäuben
GB0108782D0 (en) * 2001-04-07 2001-05-30 Trikon Holdings Ltd Methods and apparatus for forming precursors
US7378356B2 (en) * 2002-03-16 2008-05-27 Springworks, Llc Biased pulse DC reactive sputtering of oxide films
US7238628B2 (en) * 2003-05-23 2007-07-03 Symmorphix, Inc. Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
US8728285B2 (en) * 2003-05-23 2014-05-20 Demaray, Llc Transparent conductive oxides
JP2005048260A (ja) * 2003-07-31 2005-02-24 Canon Inc 反応性スパッタリング方法
JP5095412B2 (ja) * 2004-12-08 2012-12-12 シモーフィックス，インコーポレーテッド ＬｉＣｏＯ２の堆積
US7959769B2 (en) * 2004-12-08 2011-06-14 Infinite Power Solutions, Inc. Deposition of LiCoO2
US7838133B2 (en) * 2005-09-02 2010-11-23 Springworks, Llc Deposition of perovskite and other compound ceramic films for dielectric applications
RU2661166C2 (ru) * 2016-12-20 2018-07-12 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" Способ создания прозрачных проводящих композитных нанопокрытий (варианты)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU45647A1 (de) * 1964-03-12 1965-09-13
DE1765850A1 (de) * 1967-11-10 1971-10-28 Euratom Verfahren und Vorrichtung zum Aufbringen von duennen Schichten
DE1690692A1 (de) 1968-02-12 1971-06-16 Siemens Ag Verfahren zum Aufbringen einer Schicht aus anorganischem festem Material auf einer Unterlage durch Kathodenzerstaeubung
GB1147318A (en) 1968-02-22 1969-04-02 Standard Telephones Cables Ltd Improvements in r.f. cathodic sputtering systems
US3630873A (en) * 1969-12-05 1971-12-28 Ppg Industries Inc Sputtering of transparent conductive oxide films
US3907660A (en) * 1970-07-31 1975-09-23 Ppg Industries Inc Apparatus for coating glass

Also Published As

Publication number Publication date
DE2204652C3 (de) 1980-04-17
YU23572A (en) 1982-02-28
CH580684A5 (de) 1976-10-15
BE778996A (fr) 1972-08-04
NL161816C (nl) 1980-03-17
ES399507A1 (es) 1975-01-16
AU3846472A (en) 1973-08-02
ZA72751B (en) 1972-10-25
LU64721A1 (de) 1972-06-30
AU463425B2 (en) 1975-07-10
SE384233B (sv) 1976-04-26
FR2125075A5 (de) 1972-09-22
JPS5218729B1 (de) 1977-05-24
IL38624A (en) 1975-05-22
DE2204652B2 (de) 1979-08-09
IT949407B (it) 1973-06-11
NL7201410A (de) 1972-08-08
CA977306A (en) 1975-11-04
ES399506A1 (es) 1975-07-01
IE36063L (en) 1972-08-05
DE2204652A1 (de) 1972-09-14
US4006070A (en) 1977-02-01
GB1365492A (en) 1974-09-04
SU743574A3 (ru) 1980-06-25
IE36063B1 (en) 1976-08-04
NL161816B (nl) 1979-10-15
TR17189A (tr) 1974-04-25
IL38624A0 (en) 1972-03-28
SU740157A3 (ru) 1980-06-05

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee