GB1446848A - Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates - Google Patents

Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Info

Publication number
GB1446848A
GB1446848A GB5515672A GB5515672A GB1446848A GB 1446848 A GB1446848 A GB 1446848A GB 5515672 A GB5515672 A GB 5515672A GB 5515672 A GB5515672 A GB 5515672A GB 1446848 A GB1446848 A GB 1446848A
Authority
GB
United Kingdom
Prior art keywords
substrate
metal oxide
coatings
cathodes
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5515672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington Automotive Ltd
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Priority to GB5515672A priority Critical patent/GB1446848A/en
Priority to CA186,587A priority patent/CA1006845A/en
Priority to SE7315984A priority patent/SE391328B/en
Priority to IT12955/73A priority patent/IT1010536B/en
Priority to DE2359893A priority patent/DE2359893C2/en
Priority to ES420944A priority patent/ES420944A1/en
Priority to AT999073A priority patent/AT337389B/en
Priority to JP13313573A priority patent/JPS5413596B2/ja
Priority to FR7342484A priority patent/FR2208005B1/fr
Priority to BE138323A priority patent/BE807989A/en
Priority to CA243,849A priority patent/CA1006847A/en
Priority to FR7607305A priority patent/FR2293405A1/en
Priority to SE7606228A priority patent/SE7606228L/en
Publication of GB1446848A publication Critical patent/GB1446848A/en
Priority to US05/845,771 priority patent/US4102768A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

1446848 Sputtering apparatus TRIPLEX SAFETY GLASS CO Ltd 28 Nov 1973 [29 Nov 1972] 55156/72 Heading C7F In a process for reactively sputtering a metal oxide film using parallel spaced, hollow strips 271 of e.g. In-Sn alloy which are moved relatively to the substrate 31 by cables 48, as described in Specification 1365492, the thickness of the film over different parts of the substrate is controlled by varying the effective width of the cathodes, either by masks 26, Fig. 4, which may also be in the form of adjustable sections Fig. 5 (not shown) or by making each strip of different width from one . end to the other. The substrate and cathodes may be correspondingly curved. The substrate may be heated (240 to 400‹C) by a radiant heater 54, and the temperature may be controlled automatically. The spaces between the strip cathodes allows free circulation of the sputtering gas, e.g. oxygen-argon mixture.
GB5515672A 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates Expired GB1446848A (en)

Priority Applications (14)

Application Number Priority Date Filing Date Title
GB5515672A GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates
CA186,587A CA1006845A (en) 1972-11-29 1973-11-23 Metal oxide coatings
SE7315984A SE391328B (en) 1972-11-29 1973-11-26 PROCEDURE AND APPARATUS FOR DEPOSITING A TRANSPARENT, ELECTRICALLY CONDUCTIVE METAL OXIDE FILM ON A NON-CONDUCTIVE SURFACE
IT12955/73A IT1010536B (en) 1972-11-29 1973-11-27 METHOD AND APPARATUS FOR EDITING AN ELECTRICALLY CONDUCTIVE FILM OF A METAL OXIDE ON A NON-CONDUCTIVE SUBSTRATE BY MEANS OF REACTIVE CATHODIC PULVERIZATION
DE2359893A DE2359893C2 (en) 1972-11-29 1973-11-28 Method and apparatus for depositing a transparent electrically conductive metal oxide layer
ES420944A ES420944A1 (en) 1972-11-29 1973-11-28 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates
AT999073A AT337389B (en) 1972-11-29 1973-11-28 METHOD AND DEVICE FOR DEPOSITING A TRANSPARENT ELECTRICALLY CONDUCTIVE METAL OXYDE FILM ON A NON-CONDUCTIVE OBJECT
JP13313573A JPS5413596B2 (en) 1972-11-29 1973-11-29
FR7342484A FR2208005B1 (en) 1972-11-29 1973-11-29
BE138323A BE807989A (en) 1972-11-29 1973-11-29 METHOD AND APPARATUS FOR THE APPLICATION OF METAL OXIDE COATINGS
CA243,849A CA1006847A (en) 1972-11-29 1976-01-20 Metal oxide coatings
FR7607305A FR2293405A1 (en) 1972-11-29 1976-03-15 ARTICLES, IN PARTICULAR WINDSHIELDS, WITH NON-CONDUCTIVE SUBSTRATE EQUIPPED WITH A TRANSPARENT AND ELECTRICALLY CONDUCTIVE METAL OXIDE LAYER
SE7606228A SE7606228L (en) 1972-11-29 1976-06-02 PROCEDURE AND APPLIANCE FOR METAL OXIDY COATING
US05/845,771 US4102768A (en) 1972-11-29 1977-10-26 Metal oxide coatings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5515672A GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Publications (1)

Publication Number Publication Date
GB1446848A true GB1446848A (en) 1976-08-18

Family

ID=10473126

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5515672A Expired GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Country Status (10)

Country Link
JP (1) JPS5413596B2 (en)
AT (1) AT337389B (en)
BE (1) BE807989A (en)
CA (1) CA1006845A (en)
DE (1) DE2359893C2 (en)
ES (1) ES420944A1 (en)
FR (2) FR2208005B1 (en)
GB (1) GB1446848A (en)
IT (1) IT1010536B (en)
SE (2) SE391328B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179296A (en) * 1974-12-28 1976-07-10 Citizen Watch Co Ltd Tomeidodenmakuno seizohoho
JPS51108294A (en) * 1975-03-19 1976-09-25 Sharp Kk SANKABUTSU HANDOTAIMAKUSEIZOSOCHI
JPS6010022Y2 (en) * 1981-03-24 1985-04-06 シャープ株式会社 Oxide semiconductor film manufacturing equipment
US4574733A (en) * 1982-09-16 1986-03-11 Energy Conversion Devices, Inc. Substrate shield for preventing the deposition of nonhomogeneous films
FR2550138B1 (en) * 1983-08-04 1985-10-11 Saint Gobain Vitrage LOW EMISSIVITY GLAZING, ESPECIALLY FOR VEHICLES
NL8401721A (en) * 1984-05-29 1985-12-16 Leer Koninklijke Emballage METHOD AND SYSTEM FOR PRODUCING A REACTIVELY SPLASHED CONDUCTIVE TRANSPARENT METAL OXIDE FILM ON A CONTINUOUS MATERIAL TRACK.
FR2581793B1 (en) * 1985-05-07 1988-04-29 Duruy Nicolas METHOD AND DEVICE FOR MANUFACTURING ELECTRONIC OR OPTOELECTRONIC COMPONENTS WITH VACUUM EVAPORATION DEPOSITION
FR2695117B1 (en) * 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Process for treating thin layers with electrical conduction and / or reflection properties in the infrared.
AT407324B (en) * 1996-10-14 2001-02-26 Nk Karl Niederleitner Ges M B SURFACE HEATING DEVICE WITH A MULTI-LAYER, PREFERRED TRANSPARENT, SURFACE ELEMENT AND METHOD FOR OPERATION

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2569773A (en) * 1948-11-20 1951-10-02 Pittsburgh Plate Glass Co Electroconductive article
US2877329A (en) * 1950-05-25 1959-03-10 Libbey Owens Ford Glass Co Transparent resistance heated panel and method of producing same
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
FR70004E (en) * 1956-05-18 1959-02-02 Pittsburgh Plate Glass Co Manufacturing process for electrically conductive objects
LU36582A1 (en) * 1957-11-13
CA934325A (en) * 1970-07-31 1973-09-25 Ppg Industries, Inc. Coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films

Also Published As

Publication number Publication date
IT1010536B (en) 1977-01-20
SE7606228L (en) 1976-06-03
FR2208005A1 (en) 1974-06-21
DE2359893C2 (en) 1984-03-29
JPS5413596B2 (en) 1979-05-31
ES420944A1 (en) 1976-04-16
AT337389B (en) 1977-06-27
CA1006845A (en) 1977-03-15
JPS4995196A (en) 1974-09-10
SE391328B (en) 1977-02-14
DE2359893A1 (en) 1974-07-04
FR2208005B1 (en) 1978-03-10
FR2293405A1 (en) 1976-07-02
FR2293405B1 (en) 1983-04-22
BE807989A (en) 1974-05-29
ATA999073A (en) 1976-10-15

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee