ES420944A1 - Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates - Google Patents

Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Info

Publication number
ES420944A1
ES420944A1 ES420944A ES420944A ES420944A1 ES 420944 A1 ES420944 A1 ES 420944A1 ES 420944 A ES420944 A ES 420944A ES 420944 A ES420944 A ES 420944A ES 420944 A1 ES420944 A1 ES 420944A1
Authority
ES
Spain
Prior art keywords
bands
area
metal oxide
coatings
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES420944A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington Automotive Ltd
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Publication of ES420944A1 publication Critical patent/ES420944A1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)

Abstract

A method and corresponding apparatus for depositing an electrically conductive, transparent metal oxide film on a non-conductive substrate by reactive sublimation from a cathode structure formed of substantially parallel metal bands, which is oscillated back and forth in a direction perpendicular to the length of the bands and substantially parallel to the area of the substrate capable of being coated with the film; characterized by the fact that the thickness of the deposited film is controlled over the area of the substrate by arranging the cathode bands in such a way that the effective width of the portions of the cathode band or bands that cross beyond any determined area of the substrate is varied according to the thickness of the film to be deposited on said area. (Machine-translation by Google Translate, not legally binding)
ES420944A 1972-11-29 1973-11-28 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates Expired ES420944A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5515672A GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Publications (1)

Publication Number Publication Date
ES420944A1 true ES420944A1 (en) 1976-04-16

Family

ID=10473126

Family Applications (1)

Application Number Title Priority Date Filing Date
ES420944A Expired ES420944A1 (en) 1972-11-29 1973-11-28 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Country Status (10)

Country Link
JP (1) JPS5413596B2 (en)
AT (1) AT337389B (en)
BE (1) BE807989A (en)
CA (1) CA1006845A (en)
DE (1) DE2359893C2 (en)
ES (1) ES420944A1 (en)
FR (2) FR2208005B1 (en)
GB (1) GB1446848A (en)
IT (1) IT1010536B (en)
SE (2) SE391328B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179296A (en) * 1974-12-28 1976-07-10 Citizen Watch Co Ltd Tomeidodenmakuno seizohoho
JPS51108294A (en) * 1975-03-19 1976-09-25 Sharp Kk SANKABUTSU HANDOTAIMAKUSEIZOSOCHI
JPS6010022Y2 (en) * 1981-03-24 1985-04-06 シャープ株式会社 Oxide semiconductor film manufacturing equipment
US4574733A (en) * 1982-09-16 1986-03-11 Energy Conversion Devices, Inc. Substrate shield for preventing the deposition of nonhomogeneous films
FR2550138B1 (en) * 1983-08-04 1985-10-11 Saint Gobain Vitrage LOW EMISSIVITY GLAZING, ESPECIALLY FOR VEHICLES
NL8401721A (en) * 1984-05-29 1985-12-16 Leer Koninklijke Emballage METHOD AND SYSTEM FOR PRODUCING A REACTIVELY SPLASHED CONDUCTIVE TRANSPARENT METAL OXIDE FILM ON A CONTINUOUS MATERIAL TRACK.
FR2581793B1 (en) * 1985-05-07 1988-04-29 Duruy Nicolas METHOD AND DEVICE FOR MANUFACTURING ELECTRONIC OR OPTOELECTRONIC COMPONENTS WITH VACUUM EVAPORATION DEPOSITION
FR2695117B1 (en) * 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Process for treating thin layers with electrical conduction and / or reflection properties in the infrared.
AT407324B (en) * 1996-10-14 2001-02-26 Nk Karl Niederleitner Ges M B SURFACE HEATING DEVICE WITH A MULTI-LAYER, PREFERRED TRANSPARENT, SURFACE ELEMENT AND METHOD FOR OPERATION

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2569773A (en) * 1948-11-20 1951-10-02 Pittsburgh Plate Glass Co Electroconductive article
US2877329A (en) * 1950-05-25 1959-03-10 Libbey Owens Ford Glass Co Transparent resistance heated panel and method of producing same
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
FR70004E (en) * 1956-05-18 1959-02-02 Pittsburgh Plate Glass Co Manufacturing process for electrically conductive objects
LU36582A1 (en) * 1957-11-13
CA934325A (en) * 1970-07-31 1973-09-25 Ppg Industries, Inc. Coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films

Also Published As

Publication number Publication date
IT1010536B (en) 1977-01-20
SE7606228L (en) 1976-06-03
FR2208005A1 (en) 1974-06-21
DE2359893C2 (en) 1984-03-29
JPS5413596B2 (en) 1979-05-31
AT337389B (en) 1977-06-27
GB1446848A (en) 1976-08-18
CA1006845A (en) 1977-03-15
JPS4995196A (en) 1974-09-10
SE391328B (en) 1977-02-14
DE2359893A1 (en) 1974-07-04
FR2208005B1 (en) 1978-03-10
FR2293405A1 (en) 1976-07-02
FR2293405B1 (en) 1983-04-22
BE807989A (en) 1974-05-29
ATA999073A (en) 1976-10-15

Similar Documents

Publication Publication Date Title
SE420914B (en) PROCEDURE FOR COATING AN INSULATIVE SUBSTRATE WITH AN OXID LAYER OF AT LEAST ONE METAL THROUGH REACTIVE ION DEPOSITION
ES333127A1 (en) A procedure for depositing by cathodized spraying on a substrate a thin metal layer. (Machine-translation by Google Translate, not legally binding)
AR202011A1 (en) PROCEDURE FOR PREPARING ELECTRODES BY COATING A METAL ARMOR WITH AN ELECTRONICALLY CONDUCTIVE OXIDIC SUBSTRATE AND OBTAINED ELECTRODES
ES420944A1 (en) Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates
ES8700977A1 (en) Method of depositing a highly conductive, highly transmissive film.
GB974667A (en) Improvements in and relating to the manufacture of multi-layer thin film electrical devices
GB1446849A (en) Articles comprising transparent electrically-conductive coatings on non-conducting substrates
GB1113686A (en) Improvements in or relating to tantalum thin film electrical components
GB1391842A (en) Apparatus for coating substrates by cathode sputtering and for cleaning by ion bombardment in the same vacuum vessel
GB1297661A (en)
GB1115911A (en) Method for depositing thin metal coatings
GB1147318A (en) Improvements in r.f. cathodic sputtering systems
EP0107357A3 (en) Apparatus and method for making large area photovoltaic devices incorporating back reflectors
ES368740A1 (en) Coating of glass in float glass method and apparatus
US3399129A (en) Sputer deposition of nickel-iron-manganese ferromagnetic films
GB718189A (en) Improvements in and relating to the production of electrically conductive films
GB1292544A (en) Improvements in or relating to the manufacture of electroluminescent devices
GB1300193A (en) Improvements in recording carriers
JPS5315755A (en) Manufacture of display panel electrode
GB1133402A (en) Improvements relating to stable nickel-chromium resistance films
JPS5399082A (en) High frequency sputtering apparatus
GB1447754A (en) Apparatus for and process of metal coating
GB802053A (en) Improvements in or relating to the deposition of nickel on dielectric surfaces
IT1069378B (en) Depositing metallic oxide coatings - partic transparent electrically conductive coatings on non-conductive substrates
JPS5336574A (en) Method of manufacturing thin plated material with layer of evaporated metal