GB1133402A - Improvements relating to stable nickel-chromium resistance films - Google Patents
Improvements relating to stable nickel-chromium resistance filmsInfo
- Publication number
- GB1133402A GB1133402A GB12864/67A GB1286467A GB1133402A GB 1133402 A GB1133402 A GB 1133402A GB 12864/67 A GB12864/67 A GB 12864/67A GB 1286467 A GB1286467 A GB 1286467A GB 1133402 A GB1133402 A GB 1133402A
- Authority
- GB
- United Kingdom
- Prior art keywords
- resistance
- film
- deposition
- films
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910018487 Ni—Cr Inorganic materials 0.000 title 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 title 1
- 230000008021 deposition Effects 0.000 abstract 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
1,133,402. Resistance films. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 20 March, 1967 [23 March. 1966], No. 12864/67. Heading H1S. An insulating carrier 1 of, e.g. glass has deposited thereon an electrically resistive film 2 formed by evaporating a nickel-chromium alloy, e.g. 80% nickel, 20% chromium by weight, in an atmosphere of oxygen at a pressure in the range from 7 x 10<SP>-6</SP> to 3 x 10<SP>-5</SP> torr until the film has its desired resistance, and an insulating oxide film 3 deposited over the resistive film 2 by continuing evaporation of the nickelchromium alloy under an increased oxygen pressure in the range from 4À5 x 10<SP>-5</SP> to 1À5 x 10<SP>-4</SP> torr, deposition of the insulating layer being such as to have no substantial effect on the resistance of the resistive layer. Before deposition each glass plate is provided with metal contacts, e.g. silver by vapour deposition. During deposition one of a number of substrates is connected to external circuitry to monitor the resistance of the deposited film. The substrates are heated to approximately 300 C. during deposition. Resistance films so produced are said to be more stable under heat treatment than films of the prior art and have low temperature coefficients of the order of - 50 p.p.m. per C.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6603768A NL6603768A (en) | 1966-03-23 | 1966-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1133402A true GB1133402A (en) | 1968-11-13 |
Family
ID=19796062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB12864/67A Expired GB1133402A (en) | 1966-03-23 | 1967-03-20 | Improvements relating to stable nickel-chromium resistance films |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3472691A (en) |
| AT (1) | AT274966B (en) |
| CH (1) | CH464644A (en) |
| DE (1) | DE1665236A1 (en) |
| FR (1) | FR1515479A (en) |
| GB (1) | GB1133402A (en) |
| NL (1) | NL6603768A (en) |
| SE (1) | SE305994B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3607384A (en) * | 1968-07-11 | 1971-09-21 | Western Electric Co | Thin-film resistors having positive resistivity profiles |
| US3637421A (en) * | 1969-08-27 | 1972-01-25 | Joseph Paul Gimigliano | Vacuum vapor coating with metals of high vapor pressure |
| US3833410A (en) * | 1971-12-30 | 1974-09-03 | Trw Inc | High stability thin film alloy resistors |
| DE2902244C2 (en) * | 1979-01-20 | 1982-11-11 | W.C. Heraeus Gmbh, 6450 Hanau | Stretch marks with a metal alloy measuring grid applied in a vacuum to an adhesive plastic carrier |
| DE3429607A1 (en) * | 1984-08-09 | 1986-02-20 | Klaus 1000 Berlin Oppermann | MEASURING VALUE FOR ELECTRICAL MEASUREMENT OF FORCES, PRESSURES AND TENSIONS |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2586752A (en) * | 1946-09-26 | 1952-02-19 | Polytechnic Inst Brooklyn | Alloy resistance element and method for manufacturing same |
| US2882377A (en) * | 1951-10-24 | 1959-04-14 | Pittsburgh Plate Glass Co | Electrical resistor metal coatings on refractory materials |
| US3059197A (en) * | 1952-06-07 | 1962-10-16 | John G Ruckelshaus | Potentiometer |
| US2962393A (en) * | 1953-04-21 | 1960-11-29 | John G Ruckelshaus | Method of preparing electrical resistors |
| US2981611A (en) * | 1956-03-14 | 1961-04-25 | Metropolitanvickers Electrical | Manufacture of printed electrical circuits or components |
-
1966
- 1966-03-23 NL NL6603768A patent/NL6603768A/xx unknown
-
1967
- 1967-03-17 US US623924A patent/US3472691A/en not_active Expired - Lifetime
- 1967-03-20 CH CH398367A patent/CH464644A/en unknown
- 1967-03-20 AT AT263967A patent/AT274966B/en active
- 1967-03-20 SE SE3839/67A patent/SE305994B/xx unknown
- 1967-03-20 GB GB12864/67A patent/GB1133402A/en not_active Expired
- 1967-03-20 DE DE19671665236 patent/DE1665236A1/en active Pending
- 1967-03-22 FR FR99791A patent/FR1515479A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH464644A (en) | 1968-10-31 |
| DE1665236A1 (en) | 1971-01-21 |
| SE305994B (en) | 1968-11-11 |
| FR1515479A (en) | 1968-03-01 |
| NL6603768A (en) | 1967-09-25 |
| US3472691A (en) | 1969-10-14 |
| AT274966B (en) | 1969-10-10 |
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