AT274966B - Multi-layer metal resistor - Google Patents

Multi-layer metal resistor

Info

Publication number
AT274966B
AT274966B AT263967A AT263967A AT274966B AT 274966 B AT274966 B AT 274966B AT 263967 A AT263967 A AT 263967A AT 263967 A AT263967 A AT 263967A AT 274966 B AT274966 B AT 274966B
Authority
AT
Austria
Prior art keywords
layer metal
metal resistor
resistor
layer
metal
Prior art date
Application number
AT263967A
Other languages
German (de)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of AT274966B publication Critical patent/AT274966B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
AT263967A 1966-03-23 1967-03-20 Multi-layer metal resistor AT274966B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6603768A NL6603768A (en) 1966-03-23 1966-03-23

Publications (1)

Publication Number Publication Date
AT274966B true AT274966B (en) 1969-10-10

Family

ID=19796062

Family Applications (1)

Application Number Title Priority Date Filing Date
AT263967A AT274966B (en) 1966-03-23 1967-03-20 Multi-layer metal resistor

Country Status (8)

Country Link
US (1) US3472691A (en)
AT (1) AT274966B (en)
CH (1) CH464644A (en)
DE (1) DE1665236A1 (en)
FR (1) FR1515479A (en)
GB (1) GB1133402A (en)
NL (1) NL6603768A (en)
SE (1) SE305994B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607384A (en) * 1968-07-11 1971-09-21 Western Electric Co Thin-film resistors having positive resistivity profiles
US3637421A (en) * 1969-08-27 1972-01-25 Joseph Paul Gimigliano Vacuum vapor coating with metals of high vapor pressure
US3833410A (en) * 1971-12-30 1974-09-03 Trw Inc High stability thin film alloy resistors
DE2902244C2 (en) * 1979-01-20 1982-11-11 W.C. Heraeus Gmbh, 6450 Hanau Stretch marks with a metal alloy measuring grid applied in a vacuum to an adhesive plastic carrier
DE3429607A1 (en) * 1984-08-09 1986-02-20 Klaus 1000 Berlin Oppermann MEASURING VALUE FOR ELECTRICAL MEASUREMENT OF FORCES, PRESSURES AND TENSIONS

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2586752A (en) * 1946-09-26 1952-02-19 Polytechnic Inst Brooklyn Alloy resistance element and method for manufacturing same
US2882377A (en) * 1951-10-24 1959-04-14 Pittsburgh Plate Glass Co Electrical resistor metal coatings on refractory materials
US3059197A (en) * 1952-06-07 1962-10-16 John G Ruckelshaus Potentiometer
US2962393A (en) * 1953-04-21 1960-11-29 John G Ruckelshaus Method of preparing electrical resistors
US2981611A (en) * 1956-03-14 1961-04-25 Metropolitanvickers Electrical Manufacture of printed electrical circuits or components

Also Published As

Publication number Publication date
CH464644A (en) 1968-10-31
NL6603768A (en) 1967-09-25
FR1515479A (en) 1968-03-01
SE305994B (en) 1968-11-11
DE1665236A1 (en) 1971-01-21
GB1133402A (en) 1968-11-13
US3472691A (en) 1969-10-14

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