GB1212114A - Negative-temperature-coefficient resistors - Google Patents

Negative-temperature-coefficient resistors

Info

Publication number
GB1212114A
GB1212114A GB37463/68A GB3746368A GB1212114A GB 1212114 A GB1212114 A GB 1212114A GB 37463/68 A GB37463/68 A GB 37463/68A GB 3746368 A GB3746368 A GB 3746368A GB 1212114 A GB1212114 A GB 1212114A
Authority
GB
United Kingdom
Prior art keywords
cathode
ring
anode
aluminium
protective ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB37463/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1212114A publication Critical patent/GB1212114A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
    • H01C7/041—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient formed as one or more layers or coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49085—Thermally variable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Adjustable Resistors (AREA)
  • Thermistors And Varistors (AREA)

Abstract

1,212,114. Semiconductor devices. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 6 Aug., 1968 [9 Aug., 1967], No. 37463/68. Heading H1K. [Also in Division C7] An N.T.C. resistor is made as a thin film of aluminium-doped silicon nitride on a substrate. The film may be shaped by etching or sandblasting to obtain the desired resistance value and may then be given superimposed Ni/Cr and Au films as electrodes. The resistor may be formed by reactive sputtering using a cathode which includes aluminium. Several masked substrates (of e.g. glass, ceramic, or mica) are placed on a rotatable anode (41) opposite a silicon-aluminium-faced cathode of the same size (a small cathode may be used if the rotational axis of the anode is offset). The cathode is liquid-cooled and is surrounded by an earthed protective ring (30). The chamber is provided with transparent loading windows (24) and is evacuated by floor ducts, the argon-nitrogen mixture for sputtering being fed into the space between the cathode and the protective ring. Cathode construction is as shown. The cathode of,Fig; 3 has a grid of Al wires 52 over a silicon surface 51 of mono or polycrystalline material as one piece or as many platelets-discharge to the Al ring 53 is prevented by the proximity of the earthed protective ring (30). The cathode of Fig. 4 has provision for varying the exposed area of Al. Al ring 65 with its attached Al sectors 62 may be rotationally disposed with respect to the other Al ring 64 and sectors 63 to vary the relative exposed area of Si 61 and Al. In a modification the anode may be modified so' that resistance monitoring of the deposited nitride may be used to control the thickness of the deposit.
GB37463/68A 1967-08-09 1968-08-06 Negative-temperature-coefficient resistors Expired GB1212114A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR117409A FR1543297A (en) 1967-08-09 1967-08-09 Negative temperature coefficient thin film resistors and method of manufacture

Publications (1)

Publication Number Publication Date
GB1212114A true GB1212114A (en) 1970-11-11

Family

ID=8636643

Family Applications (1)

Application Number Title Priority Date Filing Date
GB37463/68A Expired GB1212114A (en) 1967-08-09 1968-08-06 Negative-temperature-coefficient resistors

Country Status (7)

Country Link
US (1) US3622901A (en)
AT (1) AT283512B (en)
BE (1) BE719309A (en)
DE (1) DE1765914A1 (en)
FR (1) FR1543297A (en)
GB (1) GB1212114A (en)
NL (1) NL6811250A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241932A2 (en) * 1986-04-17 1987-10-21 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Temperature detector

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276535A (en) * 1977-08-23 1981-06-30 Matsushita Electric Industrial Co., Ltd. Thermistor
US4392992A (en) * 1981-06-30 1983-07-12 Motorola, Inc. Chromium-silicon-nitrogen resistor material
US4510178A (en) * 1981-06-30 1985-04-09 Motorola, Inc. Thin film resistor material and method
US4531110A (en) * 1981-09-14 1985-07-23 At&T Bell Laboratories Negative temperature coefficient thermistors
US4491822A (en) * 1981-11-02 1985-01-01 Xco International, Inc. Heat sensitive cable
US4540972A (en) * 1981-11-02 1985-09-10 Xco International, Inc. Heat sensitive cable
US4614024A (en) * 1981-11-02 1986-09-30 Xco International, Inc. Method of manufacturing heat sensitive cable
US4647710A (en) * 1982-02-26 1987-03-03 Xco International, Inc. Heat sensitive cable and method of making same
US4638107A (en) * 1983-10-14 1987-01-20 Xco International, Inc. Heat sensitive tape and method of making same
FR2571538A1 (en) * 1984-10-09 1986-04-11 Thomson Csf METHOD OF MAKING THIN FILM RESISTOR, AND RESISTANCE OBTAINED THEREBY
DE3709201A1 (en) * 1987-03-20 1988-09-29 Bosch Gmbh Robert HEAT RADIATION SENSOR
CN1127750C (en) 1996-12-27 2003-11-12 佳能株式会社 Charge-reducing film, image forming apparatus and method of manufacturing the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2860219A (en) * 1954-09-07 1958-11-11 Gen Electric Silicon current controlling devices
US3395089A (en) * 1964-12-14 1968-07-30 Bell Telephone Labor Inc Method of depositing films of controlled specific resistivity and temperature coefficient of resistance using cathode sputtering
US3435399A (en) * 1966-04-19 1969-03-25 Gen Electric Thermistor device and method of producing said device
US3472074A (en) * 1966-12-29 1969-10-14 Ibm Maximum thermometer for surface temperature measurements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241932A2 (en) * 1986-04-17 1987-10-21 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Temperature detector
EP0241932A3 (en) * 1986-04-17 1989-06-07 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Temperature detector

Also Published As

Publication number Publication date
FR1543297A (en) 1968-10-25
US3622901A (en) 1971-11-23
AT283512B (en) 1970-08-10
DE1765914A1 (en) 1971-10-28
NL6811250A (en) 1969-02-11
BE719309A (en) 1969-02-10

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees