GB1299976A - Improvements relating to the deposition of gold layers - Google Patents

Improvements relating to the deposition of gold layers

Info

Publication number
GB1299976A
GB1299976A GB3411470A GB3411470A GB1299976A GB 1299976 A GB1299976 A GB 1299976A GB 3411470 A GB3411470 A GB 3411470A GB 3411470 A GB3411470 A GB 3411470A GB 1299976 A GB1299976 A GB 1299976A
Authority
GB
United Kingdom
Prior art keywords
gold
deposition
july
glass
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3411470A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1299976A publication Critical patent/GB1299976A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

1299976 Coating with gold PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 14 July 1970 [17 July 1969] 34114/70 Heading C7F An adherent layer of gold is deposited by cathode sputtering, the target being of a goldbismuth alloy. The target may contain 90 to 98% of gold and 10 to 2% of bismuth, and a sputtering gas containing N 2 and O 2 , e.g. air, is used, whereby a first intermediate layer of bismuth oxide is formed on the substrate which may be of glass, ceramic, quartz, or a ferrite, and this layer is then covered with pure gold. Layers up to 100Š may be provided on glass to give window panes transparent to visible radiation but opaque to infrared.
GB3411470A 1969-07-17 1970-07-14 Improvements relating to the deposition of gold layers Expired GB1299976A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6924341A FR2054496B1 (en) 1969-07-17 1969-07-17

Publications (1)

Publication Number Publication Date
GB1299976A true GB1299976A (en) 1972-12-13

Family

ID=9037589

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3411470A Expired GB1299976A (en) 1969-07-17 1970-07-14 Improvements relating to the deposition of gold layers

Country Status (6)

Country Link
JP (1) JPS491134B1 (en)
BE (1) BE753520A (en)
DE (1) DE2032639C3 (en)
FR (1) FR2054496B1 (en)
GB (1) GB1299976A (en)
NL (1) NL7010303A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2299729A1 (en) * 1975-01-30 1976-08-27 Radiotechnique Compelec Light-emitting diode - having metal oxide insulating layer and gold conductive layer
JPS53162691U (en) * 1977-05-25 1978-12-20
JPS55170036U (en) * 1979-05-26 1980-12-06
DE3142541C2 (en) * 1981-10-27 1986-07-31 Demetron Gesellschaft für Elektronik-Werkstoffe mbH, 6540 Hanau Multi-component alloy for targets in cathode sputtering systems

Also Published As

Publication number Publication date
FR2054496B1 (en) 1973-06-08
DE2032639A1 (en) 1971-02-11
NL7010303A (en) 1971-01-19
JPS491134B1 (en) 1974-01-11
DE2032639C3 (en) 1979-12-06
BE753520A (en) 1971-01-15
FR2054496A1 (en) 1971-04-23
DE2032639B2 (en) 1979-04-12

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee