SE391328B - PROCEDURE AND APPARATUS FOR DEPOSITING A TRANSPARENT, ELECTRICALLY CONDUCTIVE METAL OXIDE FILM ON A NON-CONDUCTIVE SURFACE - Google Patents

PROCEDURE AND APPARATUS FOR DEPOSITING A TRANSPARENT, ELECTRICALLY CONDUCTIVE METAL OXIDE FILM ON A NON-CONDUCTIVE SURFACE

Info

Publication number
SE391328B
SE391328B SE7315984A SE7315984A SE391328B SE 391328 B SE391328 B SE 391328B SE 7315984 A SE7315984 A SE 7315984A SE 7315984 A SE7315984 A SE 7315984A SE 391328 B SE391328 B SE 391328B
Authority
SE
Sweden
Prior art keywords
depositing
transparent
procedure
oxide film
metal oxide
Prior art date
Application number
SE7315984A
Other languages
Swedish (sv)
Inventor
M J Kearin
R Hiscutt
P Molineux
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Publication of SE391328B publication Critical patent/SE391328B/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/84—Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
SE7315984A 1972-11-29 1973-11-26 PROCEDURE AND APPARATUS FOR DEPOSITING A TRANSPARENT, ELECTRICALLY CONDUCTIVE METAL OXIDE FILM ON A NON-CONDUCTIVE SURFACE SE391328B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5515672A GB1446848A (en) 1972-11-29 1972-11-29 Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Publications (1)

Publication Number Publication Date
SE391328B true SE391328B (en) 1977-02-14

Family

ID=10473126

Family Applications (2)

Application Number Title Priority Date Filing Date
SE7315984A SE391328B (en) 1972-11-29 1973-11-26 PROCEDURE AND APPARATUS FOR DEPOSITING A TRANSPARENT, ELECTRICALLY CONDUCTIVE METAL OXIDE FILM ON A NON-CONDUCTIVE SURFACE
SE7606228A SE7606228L (en) 1972-11-29 1976-06-02 PROCEDURE AND APPLIANCE FOR METAL OXIDY COATING

Family Applications After (1)

Application Number Title Priority Date Filing Date
SE7606228A SE7606228L (en) 1972-11-29 1976-06-02 PROCEDURE AND APPLIANCE FOR METAL OXIDY COATING

Country Status (10)

Country Link
JP (1) JPS5413596B2 (en)
AT (1) AT337389B (en)
BE (1) BE807989A (en)
CA (1) CA1006845A (en)
DE (1) DE2359893C2 (en)
ES (1) ES420944A1 (en)
FR (2) FR2208005B1 (en)
GB (1) GB1446848A (en)
IT (1) IT1010536B (en)
SE (2) SE391328B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179296A (en) * 1974-12-28 1976-07-10 Citizen Watch Co Ltd Tomeidodenmakuno seizohoho
JPS51108294A (en) * 1975-03-19 1976-09-25 Sharp Kk SANKABUTSU HANDOTAIMAKUSEIZOSOCHI
JPS6010022Y2 (en) * 1981-03-24 1985-04-06 シャープ株式会社 Oxide semiconductor film manufacturing equipment
US4574733A (en) * 1982-09-16 1986-03-11 Energy Conversion Devices, Inc. Substrate shield for preventing the deposition of nonhomogeneous films
FR2550138B1 (en) * 1983-08-04 1985-10-11 Saint Gobain Vitrage LOW EMISSIVITY GLAZING, ESPECIALLY FOR VEHICLES
NL8401721A (en) * 1984-05-29 1985-12-16 Leer Koninklijke Emballage METHOD AND SYSTEM FOR PRODUCING A REACTIVELY SPLASHED CONDUCTIVE TRANSPARENT METAL OXIDE FILM ON A CONTINUOUS MATERIAL TRACK.
FR2581793B1 (en) * 1985-05-07 1988-04-29 Duruy Nicolas METHOD AND DEVICE FOR MANUFACTURING ELECTRONIC OR OPTOELECTRONIC COMPONENTS WITH VACUUM EVAPORATION DEPOSITION
FR2695117B1 (en) * 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Process for treating thin layers with electrical conduction and / or reflection properties in the infrared.
AT407324B (en) * 1996-10-14 2001-02-26 Nk Karl Niederleitner Ges M B SURFACE HEATING DEVICE WITH A MULTI-LAYER, PREFERRED TRANSPARENT, SURFACE ELEMENT AND METHOD FOR OPERATION

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2569773A (en) * 1948-11-20 1951-10-02 Pittsburgh Plate Glass Co Electroconductive article
US2877329A (en) * 1950-05-25 1959-03-10 Libbey Owens Ford Glass Co Transparent resistance heated panel and method of producing same
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
FR70004E (en) * 1956-05-18 1959-02-02 Pittsburgh Plate Glass Co Manufacturing process for electrically conductive objects
LU36582A1 (en) * 1957-11-13
CA934325A (en) * 1970-07-31 1973-09-25 Ppg Industries, Inc. Coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films

Also Published As

Publication number Publication date
IT1010536B (en) 1977-01-20
SE7606228L (en) 1976-06-03
FR2208005A1 (en) 1974-06-21
DE2359893C2 (en) 1984-03-29
JPS5413596B2 (en) 1979-05-31
ES420944A1 (en) 1976-04-16
AT337389B (en) 1977-06-27
GB1446848A (en) 1976-08-18
CA1006845A (en) 1977-03-15
JPS4995196A (en) 1974-09-10
DE2359893A1 (en) 1974-07-04
FR2208005B1 (en) 1978-03-10
FR2293405A1 (en) 1976-07-02
FR2293405B1 (en) 1983-04-22
BE807989A (en) 1974-05-29
ATA999073A (en) 1976-10-15

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