FR2514033B1 - Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma - Google Patents

Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma

Info

Publication number
FR2514033B1
FR2514033B1 FR8118602A FR8118602A FR2514033B1 FR 2514033 B1 FR2514033 B1 FR 2514033B1 FR 8118602 A FR8118602 A FR 8118602A FR 8118602 A FR8118602 A FR 8118602A FR 2514033 B1 FR2514033 B1 FR 2514033B1
Authority
FR
France
Prior art keywords
vapor
thin film
film deposition
deposition system
plasma reactive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8118602A
Other languages
English (en)
Other versions
FR2514033A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8118602A priority Critical patent/FR2514033B1/fr
Priority to US06/421,434 priority patent/US4434742A/en
Priority to GB08227072A priority patent/GB2106939B/en
Priority to DE19823235868 priority patent/DE3235868A1/de
Priority to JP57171106A priority patent/JPS5870833A/ja
Publication of FR2514033A1 publication Critical patent/FR2514033A1/fr
Application granted granted Critical
Publication of FR2514033B1 publication Critical patent/FR2514033B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3322—Problems associated with coating
    • H01J2237/3325—Problems associated with coating large area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR8118602A 1981-10-02 1981-10-02 Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma Expired FR2514033B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8118602A FR2514033B1 (fr) 1981-10-02 1981-10-02 Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma
US06/421,434 US4434742A (en) 1981-10-02 1982-09-22 Installation for depositing thin layers in the reactive vapor phase
GB08227072A GB2106939B (en) 1981-10-02 1982-09-22 Installation for the deposition of thin layers in the reactive vapour phase by plasma
DE19823235868 DE3235868A1 (de) 1981-10-02 1982-09-28 Einrichtung zum aufbringen duenner schichten aus auf ein plasma reagierender dampfphase
JP57171106A JPS5870833A (ja) 1981-10-02 1982-10-01 反応蒸気相内で薄層を溶着させるための装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8118602A FR2514033B1 (fr) 1981-10-02 1981-10-02 Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma
US06/421,434 US4434742A (en) 1981-10-02 1982-09-22 Installation for depositing thin layers in the reactive vapor phase

Publications (2)

Publication Number Publication Date
FR2514033A1 FR2514033A1 (fr) 1983-04-08
FR2514033B1 true FR2514033B1 (fr) 1985-09-27

Family

ID=26222562

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8118602A Expired FR2514033B1 (fr) 1981-10-02 1981-10-02 Installation pour le depot de couches minces en grande surface en phase vapeur reactive par plasma

Country Status (5)

Country Link
US (1) US4434742A (fr)
JP (1) JPS5870833A (fr)
DE (1) DE3235868A1 (fr)
FR (1) FR2514033B1 (fr)
GB (1) GB2106939B (fr)

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US4515107A (en) * 1982-11-12 1985-05-07 Sovonics Solar Systems Apparatus for the manufacture of photovoltaic devices
US4690744A (en) * 1983-07-20 1987-09-01 Konishiroku Photo Industry Co., Ltd. Method of ion beam generation and an apparatus based on such method
EP0173715B1 (fr) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Procede et appareil pour le depot par jet de gaz de minces films solides conducteurs et dielectriques et produits fabriques de la sorte
US4563367A (en) * 1984-05-29 1986-01-07 Applied Materials, Inc. Apparatus and method for high rate deposition and etching
JPH0682642B2 (ja) * 1985-08-09 1994-10-19 株式会社日立製作所 表面処理装置
FR2590808B1 (fr) * 1985-12-04 1989-09-15 Canon Kk Dispositif de soufflage de particules fines
WO1987007310A1 (fr) * 1986-05-19 1987-12-03 Novellus Systems, Inc. Appareil de depot
US4838201A (en) * 1986-12-12 1989-06-13 Daido Sanso K. K. Apparatus and process for vacuum chemical epitaxy
US5221556A (en) * 1987-06-24 1993-06-22 Epsilon Technology, Inc. Gas injectors for reaction chambers in CVD systems
US4870030A (en) * 1987-09-24 1989-09-26 Research Triangle Institute, Inc. Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer
WO1989012703A1 (fr) * 1988-06-22 1989-12-28 Asm Epitaxy, Inc. Appareil d'injection de gaz pour reacteurs de deposition en phase gazeuse par procede chimique
JPH0225577A (ja) * 1988-07-15 1990-01-29 Mitsubishi Electric Corp 薄膜形成装置
DE3926023A1 (de) * 1988-09-06 1990-03-15 Schott Glaswerke Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens
JPH02114530A (ja) * 1988-10-25 1990-04-26 Mitsubishi Electric Corp 薄膜形成装置
US4979465A (en) * 1989-04-03 1990-12-25 Daidousanso Co., Ltd. Apparatus for producing semiconductors
KR100238627B1 (ko) 1993-01-12 2000-01-15 히가시 데쓰로 플라즈마 처리장치
US6136140A (en) * 1993-01-12 2000-10-24 Tokyo Electron Limited Plasma processing apparatus
USRE40963E1 (en) * 1993-01-12 2009-11-10 Tokyo Electron Limited Method for plasma processing by shaping an induced electric field
US5647911A (en) * 1993-12-14 1997-07-15 Sony Corporation Gas diffuser plate assembly and RF electrode
DE19847848C1 (de) * 1998-10-16 2000-05-11 R3 T Gmbh Rapid Reactive Radic Vorrichtung und Erzeugung angeregter/ionisierter Teilchen in einem Plasma
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
US20020129902A1 (en) * 1999-05-14 2002-09-19 Babayan Steven E. Low-temperature compatible wide-pressure-range plasma flow device
DE19963122A1 (de) * 1999-12-24 2001-06-28 Tetra Laval Holdings & Finance Anordnung zum Einkoppeln von Mikrowellenenergie in eine Behandlungskammer
DE10001936A1 (de) * 2000-01-19 2001-07-26 Tetra Laval Holdings & Finance Einkoppelanordnung für Mikrowellenenergie mit Impedanzanpassung
US7396415B2 (en) * 2005-06-02 2008-07-08 Asm America, Inc. Apparatus and methods for isolating chemical vapor reactions at a substrate surface
US8328982B1 (en) * 2005-09-16 2012-12-11 Surfx Technologies Llc Low-temperature, converging, reactive gas source and method of use
US8632651B1 (en) 2006-06-28 2014-01-21 Surfx Technologies Llc Plasma surface treatment of composites for bonding
US20100024729A1 (en) * 2008-08-04 2010-02-04 Xinmin Cao Methods and apparatuses for uniform plasma generation and uniform thin film deposition
US10800092B1 (en) 2013-12-18 2020-10-13 Surfx Technologies Llc Low temperature atmospheric pressure plasma for cleaning and activating metals
US9406485B1 (en) 2013-12-18 2016-08-02 Surfx Technologies Llc Argon and helium plasma apparatus and methods
US10032609B1 (en) 2013-12-18 2018-07-24 Surfx Technologies Llc Low temperature atmospheric pressure plasma applications
JP6240042B2 (ja) * 2014-08-05 2017-11-29 東芝メモリ株式会社 半導体製造装置および半導体装置の製造方法
JP6483546B2 (ja) * 2015-06-24 2019-03-13 トヨタ自動車株式会社 プラズマ化学気相成長装置
US10827601B1 (en) 2016-05-03 2020-11-03 Surfx Technologies Llc Handheld plasma device
CN108933074B (zh) * 2017-05-24 2020-06-19 北京北方华创微电子装备有限公司 进气装置和包括该进气装置的腔室

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US3282243A (en) * 1965-09-08 1966-11-01 Ethyl Corp Movable means comprising vapor-plating nozzle and exhaust
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films
FR2397067A1 (fr) * 1977-07-06 1979-02-02 Commissariat Energie Atomique Dispositif d'injection de gaz pour gravure ou depot reactifs sous decharge luminescente
JPS5591968A (en) * 1978-12-28 1980-07-11 Canon Inc Film forming method by glow discharge
US4292342A (en) * 1980-05-09 1981-09-29 Motorola, Inc. High pressure plasma deposition of silicon

Also Published As

Publication number Publication date
GB2106939B (en) 1985-02-06
FR2514033A1 (fr) 1983-04-08
JPS5870833A (ja) 1983-04-27
US4434742A (en) 1984-03-06
DE3235868A1 (de) 1983-04-21
GB2106939A (en) 1983-04-20

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse