CH606502A5
(xx)
*
|
1974-11-15 |
1978-10-31 |
Oxy Metal Industries Corp |
|
US4207149A
(en)
*
|
1974-12-04 |
1980-06-10 |
Engelhard Minerals & Chemicals Corporation |
Gold electroplating solutions and processes
|
CH626410A5
(en)
*
|
1977-09-07 |
1981-11-13 |
Metaux Precieux Sa |
Bath for the electrolytic deposition of gold or gold alloys and use of this bath
|
DE2800817C2
(de)
*
|
1978-01-10 |
1982-11-04 |
Oxy Metal Industries Corp., 48089 Warren, Mich. |
Aldehydfreies wässriges Bad für die galvanische Abscheidung von Gold und dessen Legierungen sowie ein Verfahren zur Herstellung von Gold- und Goldlegierungsabscheidungen unter Verwendung dieses Bades
|
DE3020765A1
(de)
*
|
1980-05-31 |
1981-12-10 |
Degussa Ag, 6000 Frankfurt |
Alkalisches bad zum galvanischen abscheiden niederkaraetiger rosa- bis gelbfarbener goldlegierungsschichten
|
US5024733A
(en)
*
|
1989-08-29 |
1991-06-18 |
At&T Bell Laboratories |
Palladium alloy electroplating process
|
US6752584B2
(en)
*
|
1996-07-15 |
2004-06-22 |
Semitool, Inc. |
Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
|
US6921467B2
(en)
*
|
1996-07-15 |
2005-07-26 |
Semitool, Inc. |
Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
|
US7244677B2
(en)
*
|
1998-02-04 |
2007-07-17 |
Semitool. Inc. |
Method for filling recessed micro-structures with metallization in the production of a microelectronic device
|
US6632292B1
(en)
*
|
1998-03-13 |
2003-10-14 |
Semitool, Inc. |
Selective treatment of microelectronic workpiece surfaces
|
US6197181B1
(en)
*
|
1998-03-20 |
2001-03-06 |
Semitool, Inc. |
Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece
|
US6565729B2
(en)
*
|
1998-03-20 |
2003-05-20 |
Semitool, Inc. |
Method for electrochemically depositing metal on a semiconductor workpiece
|
TWI223678B
(en)
|
1998-03-20 |
2004-11-11 |
Semitool Inc |
Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper
|
US6365033B1
(en)
|
1999-05-03 |
2002-04-02 |
Semitoof, Inc. |
Methods for controlling and/or measuring additive concentration in an electroplating bath
|
US6899805B2
(en)
*
|
1998-05-01 |
2005-05-31 |
Semitool, Inc. |
Automated chemical management system executing improved electrolyte analysis method
|
USRE38931E1
(en)
*
|
1998-05-01 |
2006-01-10 |
Semitool, Inc. |
Methods for controlling and/or measuring additive concentration in an electroplating bath
|
US6814855B2
(en)
*
|
1998-05-01 |
2004-11-09 |
Semitool, Inc. |
Automated chemical management system having improved analysis unit
|
JP2003517190A
(ja)
|
1998-06-30 |
2003-05-20 |
セミトウール・インコーポレーテツド |
ミクロ電子工学の適用のための金属被覆構造物及びその構造物の形成法
|
US6497801B1
(en)
*
|
1998-07-10 |
2002-12-24 |
Semitool Inc |
Electroplating apparatus with segmented anode array
|
TW483950B
(en)
|
1998-12-31 |
2002-04-21 |
Semitool Inc |
Method, chemistry, and apparatus for high deposition rate solder electroplating on a microelectronic workpiece
|
US7189318B2
(en)
*
|
1999-04-13 |
2007-03-13 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US7020537B2
(en)
|
1999-04-13 |
2006-03-28 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US6368475B1
(en)
*
|
2000-03-21 |
2002-04-09 |
Semitool, Inc. |
Apparatus for electrochemically processing a microelectronic workpiece
|
US7264698B2
(en)
|
1999-04-13 |
2007-09-04 |
Semitool, Inc. |
Apparatus and methods for electrochemical processing of microelectronic workpieces
|
US7351315B2
(en)
|
2003-12-05 |
2008-04-01 |
Semitool, Inc. |
Chambers, systems, and methods for electrochemically processing microfeature workpieces
|
US6916412B2
(en)
*
|
1999-04-13 |
2005-07-12 |
Semitool, Inc. |
Adaptable electrochemical processing chamber
|
US7351314B2
(en)
|
2003-12-05 |
2008-04-01 |
Semitool, Inc. |
Chambers, systems, and methods for electrochemically processing microfeature workpieces
|
US7438788B2
(en)
|
1999-04-13 |
2008-10-21 |
Semitool, Inc. |
Apparatus and methods for electrochemical processing of microelectronic workpieces
|
JP4288010B2
(ja)
|
1999-04-13 |
2009-07-01 |
セミトゥール・インコーポレイテッド |
処理流体の流れ具合を向上させる処理チャンバを備えた加工物処理装置
|
US7585398B2
(en)
*
|
1999-04-13 |
2009-09-08 |
Semitool, Inc. |
Chambers, systems, and methods for electrochemically processing microfeature workpieces
|
US7160421B2
(en)
*
|
1999-04-13 |
2007-01-09 |
Semitool, Inc. |
Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
AU2001259504A1
(en)
*
|
2000-05-24 |
2001-12-03 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US7102763B2
(en)
*
|
2000-07-08 |
2006-09-05 |
Semitool, Inc. |
Methods and apparatus for processing microelectronic workpieces using metrology
|
US6592736B2
(en)
|
2001-07-09 |
2003-07-15 |
Semitool, Inc. |
Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bath
|
FR2828889B1
(fr)
*
|
2001-08-24 |
2004-05-07 |
Engelhard Clal Sas |
Bain electrolytique pour le depot electrochimique de l'or et de ses alliages
|
AU2002343330A1
(en)
|
2001-08-31 |
2003-03-10 |
Semitool, Inc. |
Apparatus and methods for electrochemical processing of microelectronic workpieces
|
US6991710B2
(en)
*
|
2002-02-22 |
2006-01-31 |
Semitool, Inc. |
Apparatus for manually and automatically processing microelectronic workpieces
|
US6893505B2
(en)
*
|
2002-05-08 |
2005-05-17 |
Semitool, Inc. |
Apparatus and method for regulating fluid flows, such as flows of electrochemical processing fluids
|
US7025866B2
(en)
*
|
2002-08-21 |
2006-04-11 |
Micron Technology, Inc. |
Microelectronic workpiece for electrochemical deposition processing and methods of manufacturing and using such microelectronic workpieces
|
US20050092611A1
(en)
*
|
2003-11-03 |
2005-05-05 |
Semitool, Inc. |
Bath and method for high rate copper deposition
|
US20050230262A1
(en)
*
|
2004-04-20 |
2005-10-20 |
Semitool, Inc. |
Electrochemical methods for the formation of protective features on metallized features
|
CH714243B1
(fr)
*
|
2006-10-03 |
2019-04-15 |
Swatch Group Res & Dev Ltd |
Procédé d'électroformage et pièce ou couche obtenue par ce procédé.
|
US20080264774A1
(en)
*
|
2007-04-25 |
2008-10-30 |
Semitool, Inc. |
Method for electrochemically depositing metal onto a microelectronic workpiece
|
CH710184B1
(fr)
*
|
2007-09-21 |
2016-03-31 |
Aliprandini Laboratoires G |
Procédé d'obtention d'un dépôt d'alliage d'or jaune par galvanoplastie sans utilisation de métaux ou métalloïdes toxiques.
|
EP2312021B1
(fr)
|
2009-10-15 |
2020-03-18 |
The Swatch Group Research and Development Ltd. |
Procédé d'obtention d'un dépôt d'alliage d'or jaune par galvanoplastie sans utilisation de métaux toxiques
|
JP5707912B2
(ja)
*
|
2010-12-08 |
2015-04-30 |
東ソー株式会社 |
N−(ジヒドロキシアルキル)ジエチレントリアミン類の組成物、及びそれを用いた2−ヒドロキシ(アルキル)トリエチレンジアミン類の製造方
|
ITFI20120103A1
(it)
*
|
2012-06-01 |
2013-12-02 |
Bluclad Srl |
Bagni galvanici per l'ottenimento di una lega di oro a bassa caratura e processo galvanico che utilizza detti bagni.
|
JP5687667B2
(ja)
*
|
2012-08-21 |
2015-03-18 |
日本エレクトロプレイテイング・エンジニヤース株式会社 |
シアン系金−パラジウム合金めっき液及びめっき方法
|
US11618951B2
(en)
|
2020-05-27 |
2023-04-04 |
Global Circuit Innovations Incorporated |
Chemical evaporation control system
|