ZA200803616B - Process for production of silicon tetrafluoride, and apparatus for the process - Google Patents

Process for production of silicon tetrafluoride, and apparatus for the process

Info

Publication number
ZA200803616B
ZA200803616B ZA200803616A ZA200803616A ZA200803616B ZA 200803616 B ZA200803616 B ZA 200803616B ZA 200803616 A ZA200803616 A ZA 200803616A ZA 200803616 A ZA200803616 A ZA 200803616A ZA 200803616 B ZA200803616 B ZA 200803616B
Authority
ZA
South Africa
Prior art keywords
production
silicon tetrafluoride
tetrafluoride
silicon
Prior art date
Application number
ZA200803616A
Other languages
English (en)
Inventor
Nagano Mitsugu
Moriya Takehiko
Waki Masahide
Miyamoto Kazuhiro
Original Assignee
Stella Chemifa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stella Chemifa Corp filed Critical Stella Chemifa Corp
Publication of ZA200803616B publication Critical patent/ZA200803616B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/10Compounds containing silicon, fluorine, and other elements
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/10705Tetrafluoride
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14Fractional distillation or use of a fractionation or rectification column
    • B01D3/143Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
    • B01D3/146Multiple effect distillation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14Fractional distillation or use of a fractionation or rectification column
    • B01D3/143Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
    • B01D3/148Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step in combination with at least one evaporator
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
ZA200803616A 2005-10-03 2008-04-24 Process for production of silicon tetrafluoride, and apparatus for the process ZA200803616B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005289836A JP4576312B2 (ja) 2005-10-03 2005-10-03 四フッ化ケイ素の製造方法、及びそれに用いる製造装置

Publications (1)

Publication Number Publication Date
ZA200803616B true ZA200803616B (en) 2009-02-25

Family

ID=37906226

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200803616A ZA200803616B (en) 2005-10-03 2008-04-24 Process for production of silicon tetrafluoride, and apparatus for the process

Country Status (10)

Country Link
US (1) US20090274606A1 (ru)
EP (1) EP1947057A4 (ru)
JP (1) JP4576312B2 (ru)
KR (1) KR101269254B1 (ru)
CN (1) CN101291875B (ru)
AU (1) AU2006298109B2 (ru)
GE (1) GEP20104907B (ru)
RU (1) RU2393113C2 (ru)
WO (1) WO2007040185A1 (ru)
ZA (1) ZA200803616B (ru)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5341425B2 (ja) * 2008-08-08 2013-11-13 ステラケミファ株式会社 フッ化物ガスの製造方法
KR101168942B1 (ko) * 2010-04-27 2012-08-02 주식회사 케이씨씨 결정성 규사를 사용한 사불화규소의 제조방법
US20110305621A1 (en) * 2010-06-11 2011-12-15 Kyung Hoon Kang Method Of Continuously Producing Tetrafluorosilane By Using Various Fluorinated Materials, Amorphous Silica And Sulfuric Acid
KR101215490B1 (ko) * 2010-06-11 2012-12-26 주식회사 케이씨씨 다양한 플루오라이드 원료들과 비정질 실리카 및 황산을 이용한 사불화규소의 연속 제조방법
CN101863478B (zh) * 2010-06-22 2012-07-18 佛山市华特气体有限公司 高纯四氟化硅的制备方法
CN102134078A (zh) * 2011-01-14 2011-07-27 浙江中宁硅业有限公司 一种硫酸石英砂闭环生产四氟化硅的方法
KR20130015596A (ko) * 2011-08-04 2013-02-14 주식회사 케이씨씨 실리카와 불화수소를 이용한 사불화규소의 연속제조방법
DE102011111316B4 (de) * 2011-08-26 2017-10-19 Plinke Gmbh Verfahren zur Reinigung und Konzentrierung HF-haltiger Schwefelsäure
CN102351198A (zh) * 2011-09-20 2012-02-15 六九硅业有限公司 四氟化硅的制备方法
JP6370684B2 (ja) 2014-11-14 2018-08-08 エドワーズ株式会社 除害装置
CN108658081B (zh) * 2018-08-02 2023-08-22 浙江中宁硅业有限公司 利用氟硅酸钠作为原料生产四氟化硅的方法及其生产设备
MA56293A1 (fr) 2022-04-12 2023-10-31 Univ Mohammed Vi Polytechnique Silice purifiee a partir de sous-produit industriel et son utilisation comme composant d’anode pour batteries lithium-ion
US11891344B2 (en) 2022-04-20 2024-02-06 Chtem Limited Methods for graded utilization of fluorine and silicon resources in phosphate ores

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS451887Y1 (ru) * 1965-09-28 1970-01-27
JPS451887B1 (ru) * 1967-03-17 1970-01-22
US3615195A (en) * 1968-12-11 1971-10-26 Simplot Co J R Fluosilic acid recovery
US3969485A (en) * 1971-10-28 1976-07-13 Flemmert Goesta Lennart Process for converting silicon-and-fluorine-containing waste gases into silicon dioxide and hydrogen fluoride
US3856673A (en) * 1973-04-02 1974-12-24 Air Prod & Chem Purification of spent sulfuric acid
US4062930A (en) * 1973-05-31 1977-12-13 Bohdan Zawadzki Method of production of anhydrous hydrogen fluoride
US4163045A (en) * 1976-12-27 1979-07-31 Kemira Oy Process for producing hydrogen fluoride from an aqueous solution of hydrogen fluoride and sulfuric acid
JPS604127B2 (ja) * 1981-08-06 1985-02-01 セントラル硝子株式会社 四弗化珪素ガスの精製法
US4470959A (en) * 1983-06-20 1984-09-11 Allied Corporation Continuous production of silicon tetrafluoride gas in a vertical column
CN85102344A (zh) * 1985-04-01 1986-10-29 斯瓦罗夫斯基公司 生产四氟化硅的方法
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
JPH06293510A (ja) * 1993-04-08 1994-10-21 Nippon Sheet Glass Co Ltd ハイシリカケイフッ化水素酸の製造法
TW200512159A (en) * 2003-09-25 2005-04-01 Showa Denko Kk Method for producing tetrafluorosilane
JP4588396B2 (ja) * 2003-09-25 2010-12-01 昭和電工株式会社 テトラフルオロシランの製造方法

Also Published As

Publication number Publication date
GEP20104907B (en) 2010-02-25
JP2007099550A (ja) 2007-04-19
RU2393113C2 (ru) 2010-06-27
JP4576312B2 (ja) 2010-11-04
CN101291875B (zh) 2011-04-13
WO2007040185A1 (ja) 2007-04-12
RU2008117406A (ru) 2009-11-10
US20090274606A1 (en) 2009-11-05
AU2006298109B2 (en) 2011-03-17
KR101269254B1 (ko) 2013-05-29
AU2006298109A1 (en) 2007-04-12
EP1947057A4 (en) 2011-11-09
KR20080070813A (ko) 2008-07-31
EP1947057A1 (en) 2008-07-23
CN101291875A (zh) 2008-10-22

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