YU46405B - Integrabilni hall elemenat - Google Patents

Integrabilni hall elemenat

Info

Publication number
YU46405B
YU46405B YU86286A YU86286A YU46405B YU 46405 B YU46405 B YU 46405B YU 86286 A YU86286 A YU 86286A YU 86286 A YU86286 A YU 86286A YU 46405 B YU46405 B YU 46405B
Authority
YU
Yugoslavia
Prior art keywords
hall element
active zone
connection contacts
semiconductor material
sensor
Prior art date
Application number
YU86286A
Other languages
English (en)
Other versions
YU86286A (en
Inventor
R. Popović
K. Solt
J-L. Berchier
Original Assignee
Lgz Landis & Gyr Zug Ag.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lgz Landis & Gyr Zug Ag. filed Critical Lgz Landis & Gyr Zug Ag.
Publication of YU86286A publication Critical patent/YU86286A/xx
Publication of YU46405B publication Critical patent/YU46405B/sh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00

Landscapes

  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Electronic Switches (AREA)
  • Control Of Eletrric Generators (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

INTEGRABILNI HALL ELEMENAT sa dva senzorska priključka (S1.S") i sa najmanje dva strujna priključka (C1, C2 odnosno C1, C', 2,C"2) koji su najvećim delom smešteni na površini Hall elementa (1) i preko senzorskih odnosno strujnih priključnih kontakata (5, 6, 2, 3, odnosno 5, 6, 2, 3, 4) od poluprovodničkog materijala prvog tipa provodljivosti (N odnosno P) povezani sa aktivnom zonom (7) istoga tipa provodljivosti (N odnosno P) Hall elementa (1), aktivna zona (7) je okružena sa pokrivnom pločom (9) i sa prstenom (8) koji ima priključak (R) prstena, a oba se sastoje od poluprovodničkog materijala drugog tipa provodljivosti (P odnosno N), naznačen time, što je u kutiji (11) na osnovnu ploču (10) od poluprovodničkog materijala drugog tipa (P odnosno N) postavljen bočni prsten (8) sa kojim je spojena pokrivna ploča (9) od poluprovodničkog materijala drugoga tipa provodljivosti (P odnosno N) pri čemu je kutijom (11) potpuno obuhvaćena aktivna zona (7) Hall elementa (1), i pri čemu su sa aktivnom zonom (7) povezani senzorski priključni kontakti (5,6) kao i strujni priključni kontakti (2, 3,4), i što su senzorski priključni kontakti (5,6) i strujni priključni kontakti (2, 3, 4) postavljeni prohodno kroz pokrivnu ploču (9) sve do električnog kontakta sa aktivnom zonom (7).
YU86286A 1985-05-22 1986-05-22 Integrabilni hall elemenat YU46405B (sh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2176/85A CH668147A5 (de) 1985-05-22 1985-05-22 Einrichtung mit einem hallelement in integrierter halbleitertechnologie.

Publications (2)

Publication Number Publication Date
YU86286A YU86286A (en) 1989-12-31
YU46405B true YU46405B (sh) 1993-10-20

Family

ID=4227667

Family Applications (1)

Application Number Title Priority Date Filing Date
YU86286A YU46405B (sh) 1985-05-22 1986-05-22 Integrabilni hall elemenat

Country Status (19)

Country Link
US (1) US4673964A (sh)
EP (1) EP0202508B1 (sh)
JP (1) JPH0728058B2 (sh)
KR (1) KR940001299B1 (sh)
CN (1) CN86103480B (sh)
AT (1) ATE40023T1 (sh)
CA (1) CA1249667A (sh)
CH (1) CH668147A5 (sh)
CS (1) CS274590B2 (sh)
DE (1) DE3661788D1 (sh)
DK (1) DK164617C (sh)
ES (1) ES8707822A1 (sh)
HU (1) HU202679B (sh)
IN (1) IN166917B (sh)
MX (1) MX168024B (sh)
NZ (1) NZ216151A (sh)
RO (1) RO96966B (sh)
WO (1) WO1986007196A1 (sh)
YU (1) YU46405B (sh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH668146A5 (de) * 1985-05-22 1988-11-30 Landis & Gyr Ag Einrichtung mit einem hallelement in integrierter halbleitertechnologie.
CH669068A5 (de) * 1986-04-29 1989-02-15 Landis & Gyr Ag Integrierbares hallelement.
JP2754599B2 (ja) * 1988-10-05 1998-05-20 株式会社デンソー 半導体装置
US5119166A (en) * 1990-02-06 1992-06-02 Honeywell Inc. Hall effect element aligned to reduce package-induced offsets
DE4118255A1 (de) * 1991-06-04 1992-12-10 Itt Ind Gmbh Deutsche Monolithisch integrierter sensorschaltkreis in cmos-technik
JP3583458B2 (ja) * 1994-03-09 2004-11-04 株式会社東芝 ホール素子
DE19857275A1 (de) * 1998-12-11 2000-06-15 Johannes V Kluge Integrierbarer Magnetfeldsensor aus Halbleitermaterial
DE10125425A1 (de) * 2001-05-25 2002-12-05 Bosch Gmbh Robert Vorrichtung zur Messung einer B-Komponente eines Magnetfeldes, Magnetfeldsensor und Strommesser
DE10240239A1 (de) * 2002-08-31 2004-03-11 Robert Bosch Gmbh Hochgenauer Hall-Sensor mit mehreren Kontaktpaaren
DE10240404A1 (de) * 2002-09-02 2004-03-18 Austriamicrosystems Ag Hall-Sensor und Verfahren zu dessen Betrieb
JP2006210731A (ja) * 2005-01-28 2006-08-10 Denso Corp ホール素子およびその製造方法
US8174014B2 (en) * 2006-02-16 2012-05-08 California Institute Of Technology Apparatus and method of manufacture for depositing a composite anti-reflection layer on a silicon surface
US8089070B2 (en) * 2006-02-16 2012-01-03 California Institute Of Technology Apparatus and method of manufacture for an imager equipped with a cross-talk barrier
US7626377B2 (en) * 2008-02-18 2009-12-01 Honeywell International Inc. Hall-effect device with merged and/or non-merged complementary structure
CH699933A1 (de) * 2008-11-28 2010-05-31 Melexis Technologies Sa Vertikaler Hallsensor.
US20100145660A1 (en) * 2008-12-08 2010-06-10 Robert Bosch Gmbh Mems sensor with built-in self-test
US8114684B2 (en) * 2009-03-02 2012-02-14 Robert Bosch Gmbh Vertical hall effect sensor with current focus
DE102009038938B4 (de) * 2009-08-26 2013-10-10 Austriamicrosystems Ag Verfahren zur Herstellung eines vertikalen Hall-Sensors
US9202940B2 (en) * 2011-09-28 2015-12-01 Mitsubishi Electric Corporation Semiconductor device
US9484525B2 (en) * 2012-05-15 2016-11-01 Infineon Technologies Ag Hall effect device
JP6865579B2 (ja) * 2016-12-28 2021-04-28 エイブリック株式会社 半導体装置
JP7133968B2 (ja) * 2018-04-24 2022-09-09 エイブリック株式会社 半導体装置
EP3794649A1 (en) * 2018-05-18 2021-03-24 LFoundry S.r.l. Vertical hall elements having reduced offset and method of manufacturing thereof
US10424616B1 (en) * 2018-06-20 2019-09-24 Globalfoundries Singapore Pte. Ltd. Integrated circuit devices including vertical and lateral hall elements, and methods for fabricating the same
EP4022325A1 (en) * 2019-07-08 2022-07-06 LFoundry S.r.l. Hall integrated sensor and corresponding manufacturing process

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3372070A (en) * 1965-07-30 1968-03-05 Bell Telephone Labor Inc Fabrication of semiconductor integrated devices with a pn junction running through the wafer
US3668439A (en) * 1969-09-11 1972-06-06 Mitsubishi Electric Corp Magnetically operated semiconductor device
US3852802A (en) * 1972-05-01 1974-12-03 Signetics Corp Integrated circuit hall effect device and method
JPS5257792A (en) * 1975-11-07 1977-05-12 Agency Of Ind Science & Technol Photoelectric converting element
US4141026A (en) * 1977-02-02 1979-02-20 Texas Instruments Incorporated Hall effect generator
US4129880A (en) * 1977-07-01 1978-12-12 International Business Machines Incorporated Channel depletion boundary modulation magnetic field sensor
US4253107A (en) * 1978-10-06 1981-02-24 Sprague Electric Company Integrated circuit with ion implanted hall-cell

Also Published As

Publication number Publication date
JPH0728058B2 (ja) 1995-03-29
CS343486A2 (en) 1991-02-12
KR880700477A (ko) 1988-03-15
RO96966A (ro) 1989-05-30
ES555166A0 (es) 1987-08-16
CA1249667A (en) 1989-01-31
DK36087A (da) 1987-01-22
KR940001299B1 (ko) 1994-02-18
AU589958B2 (en) 1989-10-26
CN86103480A (zh) 1986-11-19
EP0202508B1 (de) 1989-01-11
CN86103480B (zh) 1988-10-19
ATE40023T1 (de) 1989-01-15
YU86286A (en) 1989-12-31
CH668147A5 (de) 1988-11-30
WO1986007196A1 (en) 1986-12-04
IN166917B (sh) 1990-08-04
HUT44363A (en) 1988-02-29
DK164617C (da) 1992-12-07
JPS62502928A (ja) 1987-11-19
US4673964A (en) 1987-06-16
DK164617B (da) 1992-07-20
EP0202508A1 (de) 1986-11-26
RO96966B (ro) 1989-06-01
HU202679B (en) 1991-03-28
NZ216151A (en) 1989-08-29
DE3661788D1 (en) 1989-02-16
ES8707822A1 (es) 1987-08-16
CS274590B2 (en) 1991-08-13
DK36087D0 (da) 1987-01-22
MX168024B (es) 1993-04-28
AU5695186A (en) 1986-12-24

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