YU46405B - Integrabilni hall elemenat - Google Patents
Integrabilni hall elemenatInfo
- Publication number
- YU46405B YU46405B YU86286A YU86286A YU46405B YU 46405 B YU46405 B YU 46405B YU 86286 A YU86286 A YU 86286A YU 86286 A YU86286 A YU 86286A YU 46405 B YU46405 B YU 46405B
- Authority
- YU
- Yugoslavia
- Prior art keywords
- hall element
- active zone
- connection contacts
- semiconductor material
- sensor
- Prior art date
Links
- 239000000463 material Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 4
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/101—Semiconductor Hall-effect devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
Landscapes
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Electronic Switches (AREA)
- Control Of Eletrric Generators (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
INTEGRABILNI HALL ELEMENAT sa dva senzorska priključka (S1.S") i sa najmanje dva strujna priključka (C1, C2 odnosno C1, C', 2,C"2) koji su najvećim delom smešteni na površini Hall elementa (1) i preko senzorskih odnosno strujnih priključnih kontakata (5, 6, 2, 3, odnosno 5, 6, 2, 3, 4) od poluprovodničkog materijala prvog tipa provodljivosti (N odnosno P) povezani sa aktivnom zonom (7) istoga tipa provodljivosti (N odnosno P) Hall elementa (1), aktivna zona (7) je okružena sa pokrivnom pločom (9) i sa prstenom (8) koji ima priključak (R) prstena, a oba se sastoje od poluprovodničkog materijala drugog tipa provodljivosti (P odnosno N), naznačen time, što je u kutiji (11) na osnovnu ploču (10) od poluprovodničkog materijala drugog tipa (P odnosno N) postavljen bočni prsten (8) sa kojim je spojena pokrivna ploča (9) od poluprovodničkog materijala drugoga tipa provodljivosti (P odnosno N) pri čemu je kutijom (11) potpuno obuhvaćena aktivna zona (7) Hall elementa (1), i pri čemu su sa aktivnom zonom (7) povezani senzorski priključni kontakti (5,6) kao i strujni priključni kontakti (2, 3,4), i što su senzorski priključni kontakti (5,6) i strujni priključni kontakti (2, 3, 4) postavljeni prohodno kroz pokrivnu ploču (9) sve do električnog kontakta sa aktivnom zonom (7).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH2176/85A CH668147A5 (de) | 1985-05-22 | 1985-05-22 | Einrichtung mit einem hallelement in integrierter halbleitertechnologie. |
Publications (2)
Publication Number | Publication Date |
---|---|
YU86286A YU86286A (en) | 1989-12-31 |
YU46405B true YU46405B (sh) | 1993-10-20 |
Family
ID=4227667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
YU86286A YU46405B (sh) | 1985-05-22 | 1986-05-22 | Integrabilni hall elemenat |
Country Status (19)
Country | Link |
---|---|
US (1) | US4673964A (sh) |
EP (1) | EP0202508B1 (sh) |
JP (1) | JPH0728058B2 (sh) |
KR (1) | KR940001299B1 (sh) |
CN (1) | CN86103480B (sh) |
AT (1) | ATE40023T1 (sh) |
CA (1) | CA1249667A (sh) |
CH (1) | CH668147A5 (sh) |
CS (1) | CS274590B2 (sh) |
DE (1) | DE3661788D1 (sh) |
DK (1) | DK164617C (sh) |
ES (1) | ES8707822A1 (sh) |
HU (1) | HU202679B (sh) |
IN (1) | IN166917B (sh) |
MX (1) | MX168024B (sh) |
NZ (1) | NZ216151A (sh) |
RO (1) | RO96966B (sh) |
WO (1) | WO1986007196A1 (sh) |
YU (1) | YU46405B (sh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH668146A5 (de) * | 1985-05-22 | 1988-11-30 | Landis & Gyr Ag | Einrichtung mit einem hallelement in integrierter halbleitertechnologie. |
CH669068A5 (de) * | 1986-04-29 | 1989-02-15 | Landis & Gyr Ag | Integrierbares hallelement. |
JP2754599B2 (ja) * | 1988-10-05 | 1998-05-20 | 株式会社デンソー | 半導体装置 |
US5119166A (en) * | 1990-02-06 | 1992-06-02 | Honeywell Inc. | Hall effect element aligned to reduce package-induced offsets |
DE4118255A1 (de) * | 1991-06-04 | 1992-12-10 | Itt Ind Gmbh Deutsche | Monolithisch integrierter sensorschaltkreis in cmos-technik |
JP3583458B2 (ja) * | 1994-03-09 | 2004-11-04 | 株式会社東芝 | ホール素子 |
DE19857275A1 (de) * | 1998-12-11 | 2000-06-15 | Johannes V Kluge | Integrierbarer Magnetfeldsensor aus Halbleitermaterial |
DE10125425A1 (de) * | 2001-05-25 | 2002-12-05 | Bosch Gmbh Robert | Vorrichtung zur Messung einer B-Komponente eines Magnetfeldes, Magnetfeldsensor und Strommesser |
DE10240239A1 (de) * | 2002-08-31 | 2004-03-11 | Robert Bosch Gmbh | Hochgenauer Hall-Sensor mit mehreren Kontaktpaaren |
DE10240404A1 (de) * | 2002-09-02 | 2004-03-18 | Austriamicrosystems Ag | Hall-Sensor und Verfahren zu dessen Betrieb |
JP2006210731A (ja) * | 2005-01-28 | 2006-08-10 | Denso Corp | ホール素子およびその製造方法 |
US8174014B2 (en) * | 2006-02-16 | 2012-05-08 | California Institute Of Technology | Apparatus and method of manufacture for depositing a composite anti-reflection layer on a silicon surface |
US8089070B2 (en) * | 2006-02-16 | 2012-01-03 | California Institute Of Technology | Apparatus and method of manufacture for an imager equipped with a cross-talk barrier |
US7626377B2 (en) * | 2008-02-18 | 2009-12-01 | Honeywell International Inc. | Hall-effect device with merged and/or non-merged complementary structure |
CH699933A1 (de) * | 2008-11-28 | 2010-05-31 | Melexis Technologies Sa | Vertikaler Hallsensor. |
US20100145660A1 (en) * | 2008-12-08 | 2010-06-10 | Robert Bosch Gmbh | Mems sensor with built-in self-test |
US8114684B2 (en) * | 2009-03-02 | 2012-02-14 | Robert Bosch Gmbh | Vertical hall effect sensor with current focus |
DE102009038938B4 (de) * | 2009-08-26 | 2013-10-10 | Austriamicrosystems Ag | Verfahren zur Herstellung eines vertikalen Hall-Sensors |
CN103703565B (zh) * | 2011-09-28 | 2017-09-01 | 三菱电机株式会社 | 半导体装置 |
US9484525B2 (en) * | 2012-05-15 | 2016-11-01 | Infineon Technologies Ag | Hall effect device |
JP6865579B2 (ja) * | 2016-12-28 | 2021-04-28 | エイブリック株式会社 | 半導体装置 |
JP7133968B2 (ja) * | 2018-04-24 | 2022-09-09 | エイブリック株式会社 | 半導体装置 |
EP3794649A1 (en) * | 2018-05-18 | 2021-03-24 | LFoundry S.r.l. | Vertical hall elements having reduced offset and method of manufacturing thereof |
US10424616B1 (en) * | 2018-06-20 | 2019-09-24 | Globalfoundries Singapore Pte. Ltd. | Integrated circuit devices including vertical and lateral hall elements, and methods for fabricating the same |
EP4022325A1 (en) * | 2019-07-08 | 2022-07-06 | LFoundry S.r.l. | Hall integrated sensor and corresponding manufacturing process |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3372070A (en) * | 1965-07-30 | 1968-03-05 | Bell Telephone Labor Inc | Fabrication of semiconductor integrated devices with a pn junction running through the wafer |
US3668439A (en) * | 1969-09-11 | 1972-06-06 | Mitsubishi Electric Corp | Magnetically operated semiconductor device |
US3852802A (en) * | 1972-05-01 | 1974-12-03 | Signetics Corp | Integrated circuit hall effect device and method |
JPS5257792A (en) * | 1975-11-07 | 1977-05-12 | Agency Of Ind Science & Technol | Photoelectric converting element |
US4141026A (en) * | 1977-02-02 | 1979-02-20 | Texas Instruments Incorporated | Hall effect generator |
US4129880A (en) * | 1977-07-01 | 1978-12-12 | International Business Machines Incorporated | Channel depletion boundary modulation magnetic field sensor |
US4253107A (en) * | 1978-10-06 | 1981-02-24 | Sprague Electric Company | Integrated circuit with ion implanted hall-cell |
-
1985
- 1985-05-22 CH CH2176/85A patent/CH668147A5/de not_active IP Right Cessation
- 1985-12-18 US US06/810,929 patent/US4673964A/en not_active Expired - Fee Related
-
1986
- 1986-04-25 JP JP61502211A patent/JPH0728058B2/ja not_active Expired - Lifetime
- 1986-04-25 WO PCT/CH1986/000056 patent/WO1986007196A1/de unknown
- 1986-04-25 HU HU862342A patent/HU202679B/hu not_active IP Right Cessation
- 1986-04-25 KR KR1019870700049A patent/KR940001299B1/ko active IP Right Grant
- 1986-04-26 DE DE8686105813T patent/DE3661788D1/de not_active Expired
- 1986-04-26 EP EP86105813A patent/EP0202508B1/de not_active Expired
- 1986-04-26 AT AT86105813T patent/ATE40023T1/de not_active IP Right Cessation
- 1986-05-12 CS CS343486A patent/CS274590B2/cs unknown
- 1986-05-13 NZ NZ216151A patent/NZ216151A/xx unknown
- 1986-05-15 IN IN437/DEL/86A patent/IN166917B/en unknown
- 1986-05-20 MX MX002560A patent/MX168024B/es unknown
- 1986-05-20 CA CA000509531A patent/CA1249667A/en not_active Expired
- 1986-05-21 ES ES555166A patent/ES8707822A1/es not_active Expired
- 1986-05-21 CN CN86103480A patent/CN86103480B/zh not_active Expired
- 1986-05-22 YU YU86286A patent/YU46405B/sh unknown
- 1986-12-29 RO RO126284A patent/RO96966B/ro unknown
-
1987
- 1987-01-22 DK DK036087A patent/DK164617C/da not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CS274590B2 (en) | 1991-08-13 |
KR940001299B1 (ko) | 1994-02-18 |
DK164617C (da) | 1992-12-07 |
NZ216151A (en) | 1989-08-29 |
KR880700477A (ko) | 1988-03-15 |
EP0202508A1 (de) | 1986-11-26 |
IN166917B (sh) | 1990-08-04 |
MX168024B (es) | 1993-04-28 |
CN86103480B (zh) | 1988-10-19 |
US4673964A (en) | 1987-06-16 |
YU86286A (en) | 1989-12-31 |
CH668147A5 (de) | 1988-11-30 |
ATE40023T1 (de) | 1989-01-15 |
JPH0728058B2 (ja) | 1995-03-29 |
AU5695186A (en) | 1986-12-24 |
DE3661788D1 (en) | 1989-02-16 |
HU202679B (en) | 1991-03-28 |
DK36087D0 (da) | 1987-01-22 |
CA1249667A (en) | 1989-01-31 |
DK164617B (da) | 1992-07-20 |
RO96966A (ro) | 1989-05-30 |
HUT44363A (en) | 1988-02-29 |
JPS62502928A (ja) | 1987-11-19 |
DK36087A (da) | 1987-01-22 |
ES555166A0 (es) | 1987-08-16 |
RO96966B (ro) | 1989-06-01 |
AU589958B2 (en) | 1989-10-26 |
CN86103480A (zh) | 1986-11-19 |
ES8707822A1 (es) | 1987-08-16 |
CS343486A2 (en) | 1991-02-12 |
WO1986007196A1 (en) | 1986-12-04 |
EP0202508B1 (de) | 1989-01-11 |
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