WO2024043192A1 - ホーンチップ及び超音波接合装置 - Google Patents

ホーンチップ及び超音波接合装置 Download PDF

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Publication number
WO2024043192A1
WO2024043192A1 PCT/JP2023/029882 JP2023029882W WO2024043192A1 WO 2024043192 A1 WO2024043192 A1 WO 2024043192A1 JP 2023029882 W JP2023029882 W JP 2023029882W WO 2024043192 A1 WO2024043192 A1 WO 2024043192A1
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WIPO (PCT)
Prior art keywords
horn
tip
ultrasonic
bottom plate
plate portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/029882
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English (en)
French (fr)
Japanese (ja)
Inventor
裕一郎 佐藤
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Link Us
Link Us Co Ltd
Original Assignee
Link Us
Link Us Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Link Us, Link Us Co Ltd filed Critical Link Us
Priority to US18/874,889 priority Critical patent/US20250360576A1/en
Priority to EP23855844.9A priority patent/EP4523829A1/en
Priority to KR1020247041424A priority patent/KR20250008943A/ko
Priority to CN202380046666.8A priority patent/CN119365290A/zh
Publication of WO2024043192A1 publication Critical patent/WO2024043192A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/106—Features related to sonotrodes

Definitions

  • the present invention relates to a horn tip used for ultrasonic bonding, and an ultrasonic bonding device to which the horn tip is attached and used.
  • the chip member is detachable from the ultrasonic horn for a wide chip.
  • the tip member When attaching the tip member to the horn, insert the tapered part and guide part of the tip member from the lower side of the horn into the first hole part and the second hole part of the tip member attachment hole, and insert the screw member from the upper side of the horn.
  • the tip member is inserted into the third hole of the tip member attachment hole, and the screw member is tightened from above the horn (see Patent Document 1).
  • the length from the root to the tip of the tip member is related to the natural frequency of the tip member.
  • the chip member and the ultrasonic horn are displaced in opposite directions, which causes the problem that the bottom surface of the chip member rises from the mounting portion during bonding, which affects bonding accuracy.
  • the present invention has been made in view of the above circumstances, and an object thereof is to provide a horn tip that can be easily and reliably attached to an ultrasonic bonding device and that provides stable bonding.
  • a first invention provides a horn tip used for joining workpieces by ultrasonic welding, which includes a bottom plate portion provided with a plurality of through holes through which screws pass, and a tip extending vertically from the bottom plate portion. comprising a protruding joint;
  • the ratio h/w of the length h of the joint portion from the top surface side of the bottom plate portion to the thickness w of the joint portion is 1.5 or less.
  • the horn tip of the present invention is attached to the ultrasonic horn with screws using the plurality of through holes in the bottom plate, it can be securely fixed.
  • a joining part protruding vertically from the bottom plate part is used for joining the workpieces.
  • the ratio h/w of the length h of the bonded portion from the top surface side of the bottom plate portion of the bonded portion to the thickness w of the bonded portion of the horn chip is preferably 1.5 or less.
  • the joint portion protrudes in the vertical direction from one edge extending in the longitudinal direction of the bottom plate portion.
  • the horn chip (approximately L-shaped columnar shape) in which the joint part protrudes vertically from the edge of the bottom plate part is relatively easy to process, and the bottom plate part can be made larger than the joint part. Therefore, the number of through holes and the degree of freedom in arrangement of the through holes can be increased.
  • the horn tip of the first invention includes a thick portion whose thickness gradually increases from the bottom plate portion toward the base end portion continuous to the joint portion.
  • the joint part does not wobble when joining the workpieces, and the workpieces can be joined stably.
  • a groove portion is provided on the lower surface side of the bottom plate portion that comes into contact with the surface of the ultrasonic horn.
  • the ultrasonic bonding device of the second invention includes a bottom plate portion provided with a plurality of through holes through which screws pass, and a bonding portion protruding from the bottom plate portion in a vertical direction, and an upper surface of the bottom plate portion of the bonding portion.
  • a horn chip whose length from the side is less than half of the resonating length, and an ultrasonic horn to which the horn chip can be attached,
  • a screw hole corresponding to the through hole of the horn tip is provided on at least one side surface of the tip of the ultrasonic horn.
  • the ultrasonic bonding device of the present invention has a tip corresponding to the same horn tip as the first invention.
  • the tip portion is provided with a number of screw holes corresponding to the through holes of the horn tip at the same intervals, so that they can be used in combination.
  • the tip portion has a quadrangular prism shape.
  • the bonding portion protrudes perpendicularly from one edge extending in the longitudinal direction of the bottom plate portion, and the bonding portion between the end face of the tip portion and the horn tip. It is preferable that the end face of
  • the horn tip is attached so that the end surface of the tip of the ultrasonic horn and the end of the bonding surface of the substantially L-shaped horn tip are flush with each other. This makes it possible to easily position the horn tip and the workpiece during bonding.
  • the screw hole is provided at a position where the stress is lower than the center portion of the tip portion in the axial direction.
  • This stress is a force generated when the ultrasonic horn expands and contracts due to ultrasonic vibrations, and the central part of the ultrasonic horn has high stress and a large amount of expansion and contraction. In other words, the deformation of the screw hole also increases. In this respect, the screw hole provided at a position where the stress is lower than the central part is less likely to expand, contract, or deform due to ultrasonic vibration. Therefore, the screw that fixes the horn tip does not loosen, making it possible to securely fix the horn tip.
  • a surface of the tip portion to which the horn tip is attached is provided with a convex portion that prevents the horn tip from shifting with respect to the tip portion.
  • the horn tip is prevented from shifting by the convex portion provided at the tip of the ultrasonic horn, so that it is possible to prevent the position of the horn tip from shifting during welding workpieces and a decrease in bonding accuracy. I can do it.
  • the screw hole provided at a position not interfering with the horn tip is capable of attaching and detaching a vibration adjustment member.
  • the vibration adjustment member can be attached to a screw hole at a position that does not interfere with the horn tip.
  • FIG. 1 is a diagram illustrating the overall configuration of an ultrasonic bonding apparatus according to an embodiment of the present invention. It is a perspective view of an ultrasonic LT horn.
  • FIG. 3 is a perspective view (top side) of the horn tip. It is a perspective view (lower surface side) of a horn tip. It is a perspective view of a horn tip (with a notch). It is a perspective view of a horn tip (with a thick part). It is a perspective view of a horn tip (T-shaped). It is a side view when a horn tip (T-shaped) is attached to an ultrasonic LT horn.
  • FIG. 3 is a perspective view (top side) of the horn chip (three through holes).
  • FIG. 3 is a perspective view (bottom side) of the horn chip (three through holes). It is a perspective view of a horn tip (modified T-shape). It is a side view when a horn tip (modified T-shape) is attached to an ultrasonic LT horn.
  • FIG. 2 is a perspective view of a horn tip (with ribs and protrusions). It is a side view when a horn chip is attached to an ultrasonic LT horn. It is a figure explaining the length of the joint part of a horn tip. (a) It is a figure which shows the horn tip of length L (resonance length). (b) A diagram showing a horn tip with a length of L/2 to L.
  • FIG. 14B is a diagram illustrating details of the tip of the ultrasonic LT horn in FIG. 14A. It is a side view when a horn tip is attached to an ultrasonic LT horn (tip part: modified form).
  • FIG. 15A is a diagram illustrating details of the tip of the ultrasonic LT horn in FIG. 15A.
  • FIG. 2 is a diagram illustrating an ultrasonic bonding apparatus in which a balancer is attached to the tip of an ultrasonic LT horn.
  • the ultrasonic welding apparatus 1 is an apparatus that welds objects to be welded (workpieces) such as metal plates using ultrasonic complex vibrations, which will be described later.
  • the ultrasonic bonding apparatus 1 is mainly used for bonding electrodes of lithium ion batteries or semiconductor devices, and metals of the same or different types.
  • the ultrasonic bonding apparatus 1 is composed of an ultrasonic vibrator (Langevin type) 2, an ultrasonic expansion horn 3, an ultrasonic LT horn 4, a horn tip 6, and an anvil 7. Further, the oscillation device 8, the pressure device 10, the sensor 12, the control device 13, and the display device 14 are also part of the ultrasonic bonding device 1.
  • a voltage signal is transmitted to the + and - electrodes of the ultrasonic vibrator 2, causing the ultrasonic vibrator 2 to vibrate and generate ultrasonic vibrations (approximately 20 KHz). occurs.
  • the ultrasonic vibrations generated by the ultrasonic vibrator 2 are transmitted to a cylindrical ultrasonic amplifying horn 3 attached to one end of the ultrasonic vibrator 2, and the vibration amplitude is expanded. Further, the ultrasonic vibrations are transmitted to a cylindrical ultrasonic LT horn 4 attached to one end of the ultrasonic amplifying horn 3 (the end on the side other than the ultrasonic vibrator 2).
  • the ultrasonic vibrations generated by the ultrasonic transducer 2 are transmitted in the longitudinal direction of the ultrasonic amplifying horn 3 and the ultrasonic LT horn 4 (vertical ultrasonic vibration), but
  • the slit S generates a vibration component that is converted from longitudinal vibration to transverse vibration.
  • the ultrasonic vibration (complex vibration) is then transmitted to a horn tip 6 screwed to one end of the ultrasonic LT horn 4 (the end on the side other than the ultrasonic amplifying horn 3).
  • the horn tip 6 has a tip portion that comes into contact with the uppermost one of the plurality of workpieces W (for example, a plurality of flat workpieces stacked in the thickness direction) when joining the plurality of workpieces W. ing.
  • the control device 13 adjusts the phase and amplitude of the longitudinal vibration and torsional vibration of the ultrasonic vibration, so that a complex vibration (for example, elliptical vibration) is generated at one end of the ultrasonic LT horn 4, and the horn tip
  • the tip of 6 vibrates on the surface of the upper workpiece W in an elliptical orbit.
  • the horn tip 6 can be replaced depending on the type of workpiece W, but in this case, it has a substantially L-shaped plate shape or a substantially L-shaped column shape as shown in FIG. uses a substantially rectangular horn tip.
  • a highly rigid pressurizing block (not shown) is in contact with the flange portion 3a of the ultrasonic amplifying horn 3. Therefore, the pressure device 10 can be controlled by the control device 13, and the ultrasonic bonding device 1 can be moved in the vertical direction via the pressure block that moves up and down.
  • the joint part 6b of the horn tip 6 comes into contact with the upper workpiece W, and static pressure from the joint part 6b (200 to 800[during the time of joining] N/m2]) is applied to the workpiece W.
  • a sensor 12 that detects the displacement of the pressurizing block, and the control device 13 acquires the amount of pushing (sinking amount) of the work W by the horn tip 6.
  • the sensor 12 transmits the coordinate change in the vertical direction of the horn tip 6 during welding to the control device 13, and the control device 13 feedback-controls the pushing amount of the workpiece W by the horn tip 6 based on the coordinate change.
  • the amount of pushing is kept constant. For this reason, it is preferable that the pressurizing device 10 uses an actuator that has a fast response speed to the feedback control signal transmitted from the control device 13.
  • the target value or time change mode of the amount of pushing of the workpiece W by the horn tip 6 may be set in advance by the operator of the ultrasonic bonding apparatus 1 from the display device 14. In this way, when joining workpieces, applying compound vibration while adjusting the pushing amount and/or static pressure reliably promotes joining (solid phase joining).
  • the surface of metal atoms is covered with oil and/or oxide film, which prevents the atoms from coming close to each other.
  • ultrasonic bonding ultrasonic vibrations are applied to metal to generate strong frictional force on the metal surface.
  • oxide films and the like on the metal surface are removed, and clean and activated metal atoms appear on the bonding surface.
  • the ultrasonic LT horn 4 shown in FIG. 2 consists of a cylindrical portion 4a including a diagonal slit S, and a rectangular prism-shaped tip portion 4b.
  • the tip portion 4b has a horizontally long rectangular shape when viewed from the front side, but may be formed in a square or octagonal shape.
  • the horizontally long surface (mounting surface M) of the tip 4b of the ultrasonic LT horn 4 has two screw holes 41 and 42 spaced apart from each other in the horizontal direction for attaching the horn tip 6. It is provided. Note that during processing by the ultrasonic bonding device 1, the mounting surface M faces vertically downward (in the direction of the anvil 7) (see FIG. 1).
  • the screw holes 41 and 42 of the tip 4b are female screw grooves, and are provided corresponding to the through holes 61 and 62 of the horn tip 6, which will be described later.
  • the horn tip 6 is prevented from rotating relative to the tip portion 4b when joining the workpieces W in contact with the horn tip 6. can do.
  • the tip portion 4b of the ultrasonic LT horn 4 is provided with a circular hole 4c when viewed from the front side, this is not an essential configuration.
  • the mounting surface M is sandblasted to prevent the horn tip 6 from slipping against the tip 4b.
  • the mounting surface M of the tip portion 4b of the ultrasonic LT horn 4 may be provided with three or more screw holes spaced apart from each other in the horizontal direction.
  • a convex portion 4d (see FIG. 10) may be provided to prevent the horn tip 6 from shifting with respect to the tip portion 4b.
  • the horn tip 6 having a substantially L-shaped plate shape or a substantially L-shaped column shape has two through holes 61 arranged spaced apart from each other in the longitudinal direction for attachment to the ultrasonic LT horn 4. 62, and a substantially rectangular plate-shaped joint portion 6b that protrudes in the vertical direction from one long edge of the bottom plate portion 6a.
  • the horn tip 6 is formed into a substantially L-shaped plate shape or a substantially L-shaped column shape with a substantially L-shaped cross section perpendicular to the longitudinal direction.
  • the L-shaped horn tip 6 is relatively easy to process, and of the two flat plates constituting it, the flat plate with a relatively large area is used as the bottom plate portion 6a. That is, since the area of the bottom plate portion 6a can be increased, the number of through holes 61 and 62 of the horn tip 6 and the degree of freedom in their arrangement can be increased.
  • the through holes 61 and 62 are holes in which no screw groove is formed, but they correspond to the interval between the screw holes 41 and 42 of the ultrasonic LT horn 4 (tip part 4b), and the diameter of the holes is the same as that of the screw hole 41. , 42.
  • the joint portion 6b has a rectangular plane as a contact surface with the upper workpiece W. The shape of this contact surface may be an ellipse or the like, and a large number of protrusions or recesses may be provided on the contact surface.
  • FIG. 3B shows the lower surface side (the side that contacts the ultrasonic LT horn 4) of the bottom plate portion 6a of the horn tip 6.
  • the lower surface side of the bottom plate portion 6a is a polished flat surface, and a groove portion 63 extending over the entire length in the transverse direction that does not come into contact with the surface of the ultrasonic LT horn 4 is provided in the center portion in the longitudinal direction. It is being
  • the groove portion 63 may be formed to extend in the longitudinal direction of the lower surface of the bottom plate portion 6a, or may be formed by a combination of continuous or independent grooves extending in the transverse direction and the longitudinal direction. It's okay.
  • the flat surface of the bottom plate portion 6a other than the groove portion 63 may be sandblasted to suppress slipping between the bottom plate portion 6a and the workpiece W when the workpieces W are joined. Moreover, when the flat surface is subjected to nitride film treatment, it is possible to prevent sticking to the ultrasonic LT horn 4 or the occurrence of rust. Furthermore, by rounding or chamfering the edges of the flat surface, it is possible to prevent the ultrasonic LT horn 4 and/or the horn tip 6 (bottom plate portion 6a) from being scraped.
  • both ends of the joint portion 16b may be a small rectangular plane contact surface with notches.
  • the bottom plate part 17a may be shaped like an exponential function with a positive power or a diagonal function from the midpoint in the transverse direction of the bottom plate part 17a toward the base end continuous to the joint part 17b.
  • a thick portion 17c may be provided that gradually becomes thicker in a quadratic manner.
  • through-holes 171 and 172 which are spaced apart from each other in the longitudinal direction in the bottom plate part 17a, are formed to penetrate through the thickness direction of the bottom plate part 17a so as to avoid the thick part 17c.
  • the thick portion 17c of the horn tip 17 is shaped like an exponential function with a positive exponent or a quadratic It is also a part that gradually becomes thicker functionally.
  • the thick portion 17c suppresses wobbling of the joint portion 17b to the bottom plate portion 17a when the workpieces W are joined, and the workpieces W can be joined while stably maintaining the state of the joint portion 17b to the workpiece W.
  • a groove portion 173 extending in the lateral direction is provided on the lower surface side.
  • the thick portion is not limited to the shape shown in FIG.
  • the thickness of the thick portion gradually decreases in thickness from the midpoint in the transverse direction of the bottom plate portion 17a toward the base end continuous to the joint portion 17b in a linear function or an exponential function with a negative exponent. It may be formed to increase.
  • the through holes 171 and 172 may be formed to at least partially penetrate the thick portion 17c of the bottom plate portion 17a in the thickness direction. Further, the thick portion 17c may be formed such that the bottom plate portion 17a gradually becomes thicker from the tip of the bottom plate portion 17a toward the tip of the joint portion 17b.
  • the shape of the horn tip is not limited to the L-shape.
  • a horn tip 18 having a substantially T-shaped plate shape or a substantially T-shaped column shape as shown in FIG. 6A may be used in the ultrasonic bonding apparatus 1.
  • the horn tip 18 has a joint portion 18b that projects vertically from approximately the center in the lateral direction of the bottom plate portion 18a, and through holes 181 to 184 are provided on both sides of the joint portion 18b.
  • FIG. 6B is a side view when the horn tip 18 is attached to the ultrasonic LT horn 4.
  • the horn tip 18 is fixed to the ultrasonic LT horn 4 by screws 30 on both sides of the joint 18b. Therefore, wobbling of the horn tip 18 with respect to the ultrasonic LT horn 4 during welding of the work W can be prevented, and the work W can be welded while the horn tip 18 is stably maintained in contact with the work W.
  • the horn tip 19 shown in FIG. 7A includes a substantially rectangular plate-shaped bottom plate portion 19a provided with three through holes 191, 192, and 193 spaced apart from each other in the horizontal or longitudinal direction, and a bottom plate portion 19a. and a joint portion 19b extending along the entire length of one long edge of the bottom plate portion 19a and protruding in a direction perpendicular to the bottom plate portion 19a.
  • the horn tip 19 can be attached to an ultrasonic LT horn having a tip provided with three screw holes. According to this aspect, since the horn tip 19 is firmly fixed to the ultrasonic LT horn 4, it is difficult to form a gap between the horn tip 19 and the ultrasonic LT horn (tip part), and the two penetrating The fixation to the ultrasonic LT horn 4 is more stable compared to a horn tip with holes.
  • the horn tip 19 moves the bottom plate part 19a exponentially or quadraticly from the midpoint in the lateral direction of the bottom plate part 19a toward the proximal end continuous to the joint part 19b. It is provided with a thick portion 19c that gradually becomes thicker. Therefore, it is possible to prevent the horn tip 19 from wobbling with respect to the ultrasonic LT horn 4 during welding of the workpieces W, and to join the workpieces W while stably maintaining the state of contact of the horn tip 19 with the workpiece W.
  • FIG. 7B shows the lower surface side (the side that contacts the ultrasonic LT horn) of the bottom plate portion 19a.
  • the lower surface side of the bottom plate portion 19a is a polished flat surface, and a groove portion 194 is provided in the center portion in the transverse direction that does not come into contact with the surface of the ultrasonic LT horn and extends over the entire length in the longitudinal direction. .
  • a groove portion 194 is provided in the center portion in the transverse direction that does not come into contact with the surface of the ultrasonic LT horn and extends over the entire length in the longitudinal direction.
  • a nitride film treatment may be applied to the flat surface. Further, a portion of the flat surface may be shaved to have the same height as the groove portion 194 to further reduce the contact area.
  • the horn tip 20 shown in FIG. 8A includes a substantially rectangular bottom plate portion 20a provided with three through holes 201, 202, and 203 spaced apart from each other in the horizontal direction, and a short side direction of the bottom plate portion 20a.
  • the joint part 20b extends over the entire length in the longitudinal direction at the center part of the base plate part 20a and protrudes vertically in the vertical direction with respect to the bottom plate part 20a (modified T-shape).
  • the bottom plate part 20a of the joint part 20b Above the bottom plate part 20a of the joint part 20b, the bottom plate part 20a is arranged in an exponential or quadratic manner from the midpoint in the short direction of the bottom plate part 20a toward the base end continuous to the joint part 20b.
  • a thick portion 20c is provided in which the thickness gradually increases.
  • the horn tip 20 is placed on the end of the ultrasonic LT horn 4 (tip part) and fixed to the ultrasonic LT horn 4 with screws 30 using through holes 201 to 206. be done. By fixing the horn tip 20 from two directions, it is possible to reliably prevent the contact surfaces between the lower surface side of the bottom plate portion 20a and the ultrasonic LT horn 4 from slipping.
  • the horn tip 21 shown in FIG. 9 has a bottom plate part 21a provided with two through holes 211 and 212 arranged apart from each other in the horizontal direction, and a longitudinal direction in the center part of the bottom plate part 21a in the transverse direction.
  • the joint part 21b extends over the entire length of the bottom plate part 21a and is placed on the end of the bottom plate part 21a.
  • the bottom plate portion 21a has ribs 21c at both ends in the transverse direction that rise toward the joint portion 21b.
  • the rib 21c is a thick portion whose thickness gradually increases in a linear function from the longitudinal edge of the bottom plate portion 21a toward the base end continuous to the joint portion 21b.
  • protrusions P are provided on the joint portion 21b.
  • the protrusions P are arranged at equal intervals on the joint portion 21b, and have a structure for pressing the work W from above to reliably join the work W.
  • the protrusion P may be provided on the above-mentioned horn tips 6, 16-20.
  • FIG. 10 is a side view of the above-mentioned horn chip 6 attached to the ultrasonic LT horn 4.
  • the horn tip 6 is attached so that the distal end surface of the joint portion 6b and the distal end surface of the distal end portion 4b of the ultrasonic LT horn 4 are flush with each other. Thereby, the positions of the horn tip 6 and the work W can be easily adjusted when the work W is joined. Note that the horn tip 6 may be attached to the rear end side of the ultrasonic LT horn 4 in the axial direction, but details will be described later.
  • the natural frequency (resonant frequency) of the horn tip 6 is adjusted to be approximately the same value as the natural frequency of the ultrasonic LT horn 4.
  • the tip 4b of the ultrasonic LT horn 4 is displaced to the right due to vibration.
  • the horn tip 6 joint portion 6b
  • anti-phase phenomenon There is a known phenomenon in which the horn tip 6 (joint portion 6b) is displaced in the opposite direction (anti-phase phenomenon).
  • a gap is created between the ultrasonic LT horn 4 and the horn tip 6, the vibration of the bonding portion 6b of the horn tip 6 becomes unstable, and the bonding accuracy of the work W is reduced.
  • FIG. 11 shows a joint 6b between the ultrasonic LT horn 4 and the horn tip 6.
  • the resonance length is L
  • the tip of the joint 6b of the horn tip 6 is Displaced in the direction.
  • the vibration is in the opposite phase between the point C in the figure and the tip of the ultrasonic LT horn 4. Therefore, the force acting on point C becomes large, and there is a possibility that a gap will be created between the ultrasonic LT horn 4 and the horn tip 6.
  • FIG. 12(b) shows a case where the length h of the joint portion 6b is set to L/2 to L. Although the vibration is in an opposite phase, the vibration at the tip of the joint 6b is smaller than that at the resonance length L. At this time, the ratio h/w is 2.00 because, for example, the length h is 14 (mm) while the thickness w of the joint portion 6b is 7 (mm).
  • FIG. 12(c) shows a case where the length h of the joint portion 6b of the horn tip 6 is further shortened and the length h is set to L/2.
  • the point C becomes a vibration node (a node where the amplitude is zero), and the antiphase between the point C of the ultrasonic LT horn 4 and the tip of the joint 6b of the horn tip 6 is eliminated. Therefore, it is possible to weld the works W by the ultrasonic welding apparatus 1 under these conditions.
  • vibrations with different amplitudes occur between point C and the tip of the joint 6b.
  • the length h of the joint 6b of the horn tip 6 is the same as that of the ultrasonic LT horn 4.
  • the resonance length L at which the horn tip 6 resonates is preferably half (1/2) or less, more preferably 1/3 to 1/2.
  • the ratio h/w of the thickness w to the length h of the joint portion 6b is preferably 1.5 or less (0 ⁇ h/w ⁇ 1.5), and under this condition, the ultrasonic LT horn 4 and the horn tip 6 The generation of the gap between the two can be suppressed.
  • the resonance length L becomes longer.
  • the horn tip 6 is attached at a position where the end surface of the joint portion 6b and the end surface of the tip portion 4b of the ultrasonic LT horn 4 are flush with each other.
  • the horn tip 6 is attached to a position where stress is large, the screw holes 41 and 42 in the tip portion 4b will expand slightly when the ultrasonic LT horn 4 is displaced in the extension direction.
  • the bonding surface between the cylindrical portion 4a and the tip portion 4b of the ultrasonic LT horn 4 and the end surface of the bonding portion 6b are at the antinode of vibration where the amount of displacement during vibration is large, and the stress is small. Therefore, it is preferable that the screw 30 for fixing the horn tip 6 be located at a position where the stress of the ultrasonic LT horn 4 is relatively small. For example, it is more preferable to set the stress at the screw 30 portion to 30% or less of the maximum value.
  • the screw holes 41 and 42 of the ultrasonic LT horn 4 are prevented from widening, so that the phenomenon of screw loosening does not occur.
  • the tip 4b of the ultrasonic LT horn 4 of this embodiment is provided with a circular hole 4c (see FIG. 14A), since the screw hole becomes short, the horn tip 6 is insufficiently fixed to the ultrasonic LT horn 4. become. Furthermore, since the wall thickness of the surface of the tip 4b having the screw hole becomes thinner, this may cause cracks to occur in the tip 4b. For example, when attaching the horn tip 6 having three through holes to the tip 4b of the ultrasonic LT horn 4, it is necessary to shorten the screw hole corresponding to the position of the screw 30b, so that the fastening force of the screw 30b is insufficient. may be sufficient (see Figure 14B).
  • the tip 4b of the ultrasonic LT horn 4 may have two circular holes 4c1 and 4c2 smaller in diameter than the circular hole 4c (ultrasonic LT horn 4') (see FIG. 15A). ).
  • the shape of the tip 4b of the ultrasonic LT horn 4' also affects the vibration amplitude in the longitudinal and torsional directions. Generally, it is known that when the area and polar moment of inertia of the tip 4b of the ultrasonic LT horn 4' are reduced, the vibration amplitude becomes larger.
  • the amplitude in the longitudinal direction is determined by the cross-sectional area (A) of the part from the rear end of the ultrasonic LT horn 4' (the left end in FIG. 15A) to the center, and the part from the center to the rear end (the right end in FIG. 15A).
  • the polar moment of inertia of the cross section of the tip 4b of the ultrasonic LT horn 4' is (the polar moment of inertia of the rectangular part of the tip 4b) - (the polar moment of inertia of the cross section of the two circular holes in the tip 4b) moment). Further, the polar moment of inertia of the circular holes 4c1 and 4c2 becomes larger when the circular holes 4c1 and 4c2 are separated from the central axis of the tip portion 4b (because the arms are longer).
  • the amplitude in the torsional direction is determined by the polar moment of inertia (C) of the area from the rear end of the ultrasonic LT horn 4' (the left end in FIG. 15A) to the center, and the moment of inertia (C) from the center to the rear end (the right end in The larger the ratio (C/D) of the polar moment of inertia (D) of the section up to section) becomes larger.
  • the amplitude in the torsional direction can be increased by arranging the circular holes 4c1 and 4c2 of the tip portion 4b a certain distance apart.
  • screw holes 43 and 44 are provided in the horizontally long surface N (opposite side of the mounting surface M of the horn tip 6) of the tip 4b of the ultrasonic LT horn 4, and
  • the mold balancer 35 (the "vibration adjustment member" of the present invention) may be configured to be detachable.
  • the amplitude may differ between the left and right ends of the horn tip 6. This is thought to be caused by strain deformation at the end caused by the superposition of different vibration modes. If the workpieces are joined in this state, the joining strength of the workpieces W may differ at each end of the horn tip 6.
  • a balancer 35 serving as a weight is attached to the side where the vibration amplitude is large.
  • the balancer 35 may have a screw and washer configuration. Further, in this case, the outer diameter of the washer is preferably larger than the diameter of the screw head.
  • the balancer 35 When the vibration amplitude at the left end ("L” in the figure) of the horn tip 6 is larger than the vibration amplitude at the right end ("R” in the figure), by attaching the balancer 35 to the left screw hole 43, the left and right The vibration amplitudes of the ends can be equalized. Further, when the vibration amplitude at the right end of the horn tip 6 is larger than the vibration amplitude at the left end, the balancer 35 may be attached to the screw hole 44 on the right side.
  • the balancer 35 is not limited to the surface N, but may be attached to the screw holes 45 and 46 on the side surface of the tip portion 4b of the ultrasonic LT horn 4, where it does not interfere with the horn tip 6. Further, a plurality of balancers 35 may be attached to the screw holes 43 to 46 for adjustment.
  • SYMBOLS 1 Ultrasonic bonding device, 2... Ultrasonic vibrator, 3... Ultrasonic expansion horn, 3a... Flange part, 4, 4'... Ultrasonic LT horn, 4a... Cylindrical part, 4b... Tip part, 4c... Circular hole , 4d...Convex portion, 6,16,17,18,19,20,21...Horn tip, 6a, 16a, 17a, 18a, 19a, 20a, 21a...Bottom plate portion, 6b, 16b, 17b, 18b, 19b, 20b, 21b... Joint portion, 7... Anvil, 8... Oscillator, 10... Pressure device, 12... Sensor, 13... Control device, 17c, 19c, 20c...
  • Thick part 21c... Rib, 30... Screw, 35 ...Balancer, 41-46...Screw hole, 61,62,161,162,171,172,181-184,191-193,201-212...Through hole, 63,173,194...Groove, P...Protrusion, S ...Diagonal slit, W...work.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
PCT/JP2023/029882 2022-08-22 2023-08-18 ホーンチップ及び超音波接合装置 Ceased WO2024043192A1 (ja)

Priority Applications (4)

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US18/874,889 US20250360576A1 (en) 2022-08-22 2023-08-18 Horn tip and ultrasonic bonding device
EP23855844.9A EP4523829A1 (en) 2022-08-22 2023-08-18 Horn tip and ultrasonic bonding device
KR1020247041424A KR20250008943A (ko) 2022-08-22 2023-08-18 혼 칩 및 초음파 접합장치
CN202380046666.8A CN119365290A (zh) 2022-08-22 2023-08-18 变幅杆焊嘴和超声波接合装置

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JP2022-131519 2022-08-22
JP2022131519A JP2024029322A (ja) 2022-08-22 2022-08-22 ホーンチップ及び超音波接合装置

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EP4523829A1 (en) 2025-03-19
CN119365290A (zh) 2025-01-24
JP2024029322A (ja) 2024-03-06
KR20250008943A (ko) 2025-01-16
TW202419181A (zh) 2024-05-16

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