WO2023054692A1 - ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法 - Google Patents

ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法 Download PDF

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Publication number
WO2023054692A1
WO2023054692A1 PCT/JP2022/036767 JP2022036767W WO2023054692A1 WO 2023054692 A1 WO2023054692 A1 WO 2023054692A1 JP 2022036767 W JP2022036767 W JP 2022036767W WO 2023054692 A1 WO2023054692 A1 WO 2023054692A1
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WO
WIPO (PCT)
Prior art keywords
region
sheet
vapor chamber
steam
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/036767
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
伸一郎 高橋
利彦 武田
貴之 太田
和範 小田
誠 山木
伸哉 木浦
崇之 寺内
直大 高橋
洋次 小鶴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2023513244A priority Critical patent/JP7315121B1/ja
Priority to KR1020247013919A priority patent/KR20240089099A/ko
Priority to CN202280063848.1A priority patent/CN117980684A/zh
Priority to US18/695,460 priority patent/US20250185214A1/en
Priority to CN202280075084.8A priority patent/CN118265887A/zh
Priority to KR1020247019112A priority patent/KR20240109609A/ko
Priority to JP2023559926A priority patent/JP7525076B2/ja
Priority to TW111143246A priority patent/TW202328621A/zh
Priority to PCT/JP2022/042105 priority patent/WO2023085401A1/ja
Priority to TW111146813A priority patent/TW202328622A/zh
Priority to KR1020247021958A priority patent/KR20240122797A/ko
Priority to PCT/JP2022/044874 priority patent/WO2023106285A1/ja
Priority to US18/717,091 priority patent/US20250048591A1/en
Priority to JP2023541845A priority patent/JP7344481B1/ja
Publication of WO2023054692A1 publication Critical patent/WO2023054692A1/ja
Priority to JP2023115429A priority patent/JP7473064B2/ja
Priority to JP2023142567A priority patent/JP7568017B2/ja
Priority to JP2023214064A priority patent/JP7709686B2/ja
Anticipated expiration legal-status Critical
Priority to JP2024111956A priority patent/JP2024133703A/ja
Priority to JP2024172796A priority patent/JP7800847B2/ja
Priority to JP2025107427A priority patent/JP2025148370A/ja
Priority to JP2025282471A priority patent/JP2026049011A/ja
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/73—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control for cooling by change of state

Definitions

  • the present disclosure relates to vapor chambers, electronic devices, and methods of manufacturing vapor chambers.
  • Electronic devices such as mobile terminals use electronic devices that generate heat. Examples of such electronic devices include central processing units (CPUs), light emitting diodes (LEDs) and power semiconductors. Examples of mobile terminals include mobile terminals and tablet terminals.
  • CPUs central processing units
  • LEDs light emitting diodes
  • power semiconductors Examples of mobile terminals include mobile terminals and tablet terminals.
  • Such electronic devices are cooled by heat dissipation devices such as heat pipes (see Patent Documents 1 and 2, for example).
  • heat dissipation devices such as heat pipes
  • Patent Documents 1 and 2 For example.
  • a heat dissipation device As a heat dissipation device, a vapor chamber that can be made thinner than a heat pipe is being developed. The vapor chamber efficiently cools the electronic device by absorbing the heat of the electronic device and diffusing it inside the enclosed working fluid.
  • the working fluid in the vapor chamber receives heat from the electronic device at a portion (evaporation portion) close to the electronic device.
  • the heated working fluid evaporates into working vapor.
  • the working vapor diffuses away from the evaporator within a vapor channel section formed within the vapor chamber.
  • the diffused working vapor is cooled and condensed into a working liquid.
  • a liquid flow path is provided as a capillary structure (wick).
  • the working liquid flows through the liquid flow path and is transported toward the evaporator.
  • the working fluid transported to the evaporating section is again heated by the evaporating section and evaporated.
  • the working fluid circulates in the vapor chamber while repeating phase changes, that is, evaporation and condensation, thereby diffusing the heat of the electronic device.
  • the heat dissipation efficiency of the vapor chamber is enhanced.
  • the vapor chamber may bend depending on the internal structure of the mounted electronic equipment.
  • the working fluid may stay in the curved portion of the steam flow path. For this reason, the flow of working steam in the steam flow path may be blocked.
  • An object of the present disclosure is to provide a vapor chamber, an electronic device, and a vapor chamber manufacturing method that can improve performance even when bent.
  • a first aspect of the present disclosure includes: A vapor chamber containing a working fluid, a body sheet including a first body surface and a second body surface opposite to the first body surface; a first sheet located on the first main body surface of the main body sheet; a space provided in the body sheet and covered with the first sheet,
  • the body sheet includes a plurality of first lands extending in a first direction and positioned within the space, the plurality of first lands spaced apart in a second direction perpendicular to the first direction.
  • the first sheet includes a first sheet outer surface located on the opposite side of the body sheet, the outer surface of the first sheet includes a first joint region overlapping the first land portion and a first space region overlapping the space portion; the vapor chamber includes a bending region bent along a bending line extending in a direction intersecting the first direction in plan view of the vapor chamber, When the maximum dimension defined between the first bonding region and the first space region and the maximum dimension in the thickness direction of the first sheet is defined as the first maximum dimension, The vapor chamber wherein the first maximum dimension in the bend region is greater than the first maximum dimension in regions other than the bend region when viewed along a direction parallel to the bend line.
  • a second aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above,
  • the first spatial region may be formed in a concave shape.
  • a third aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above,
  • the first spatial region in the bending region is formed in a concave shape,
  • the first spatial region in a region other than the bending region may be flattened in a direction along the bending line.
  • a fourth aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above, A portion of the first spatial region in the bending region may be formed in a concave shape, and the other portion may be formed flat in a direction along the bending line.
  • a fifth aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above,
  • the first sheet may include a plurality of first sheet recesses overlapping the first space region in plan view and entering the space.
  • a sixth aspect of the present disclosure provides, in the vapor chamber according to each of the above-described first to fifth aspects, In the bend region, the vapor chamber may be bent along a bend line extending in the second direction.
  • a seventh aspect of the present disclosure is the vapor chamber according to each of the above-described first to fifth aspects, wherein In the bend region, the vapor chamber may be bent along a bend line inclined in the first direction.
  • An eighth aspect of the present disclosure provides, in the vapor chamber according to each of the above-described first to seventh aspects, In the bending area, the first sheet may be positioned outside the main body sheet.
  • a ninth aspect of the present disclosure provides, in the vapor chamber according to each of the above-described first to seventh aspects, In the bending region, the first sheet may be positioned inside the main body sheet.
  • a tenth aspect of the present disclosure is a vapor chamber according to each of the above-described first to the above-described ninth aspects, comprising: a second sheet located on the second main body surface of the main body sheet; the space extends from the first body surface to the second body surface and is covered with the second sheet on the second body surface;
  • the second sheet includes a second sheet outer surface located on the opposite side of the body sheet,
  • the second sheet includes a second bonding area overlapping the first land portion and a second space area overlapping the space portion,
  • the second maximum dimension defined between the second bonding region and the second space region and the maximum dimension in the thickness direction of the second sheet is defined as the second maximum dimension
  • the second maximum dimension in the bending region may be larger than the second maximum dimension in a region other than the bending region when viewed along a direction parallel to the bending line.
  • An eleventh aspect of the present disclosure is the vapor chamber according to each of the above-described first to tenth aspects, wherein
  • the body sheet includes a plurality of second lands extending in the second direction,
  • the second land portion is located in a region other than the bending region,
  • the first land portion is located in the bent region,
  • the first land may be connected to the second land.
  • a twelfth aspect of the present disclosure comprises: a housing; an electronic device contained within the housing; and a vapor chamber according to any of the first to eleventh aspects above, in thermal contact with the electronic device.
  • a thirteenth aspect of the present disclosure comprises: A method for manufacturing a vapor chamber in which a working fluid is enclosed, a preparation step of preparing a main body sheet including a first main body surface and a second main body surface located opposite to the first main body surface, and a first sheet; a joining step of placing the first sheet on the first body surface of the body sheet and joining the first sheet and the body sheet, wherein the space covered by the first sheet is the body sheet; a bonding step formed in a bending step of bending the body sheet and the first sheet to form a bending region in which the body sheet and the first sheet are bent;
  • the body sheet includes a plurality of first lands extending in a first direction and positioned within the space, the plurality of first lands spaced apart in a second direction perpendicular to the first direction.
  • the first sheet includes a first sheet outer surface located on the opposite side of the body sheet, the outer surface of the first sheet includes a first joint region overlapping the first land portion and a first space region overlapping the space portion;
  • the vapor chamber is bent along a bending line extending in a direction intersecting the first direction in plan view,
  • the maximum dimension defined between the first bonding region and the first space region and the maximum dimension in the thickness direction of the first sheet is defined as the first maximum dimension
  • a method for manufacturing a vapor chamber wherein the first maximum dimension in the bending region is larger than the first maximum dimension in other regions other than the bending region when viewed along a direction parallel to the bending line. be.
  • a fourteenth aspect of the present disclosure comprises: A vapor chamber containing a working fluid, a plurality of vapor passages through which gas of the working fluid extends along a first direction; a liquid flow path portion communicating with the vapor passage through which the liquid of the working fluid passes; The vapor chamber is bent along a direction parallel to the first direction.
  • a fifteenth aspect of the present disclosure provides, in the vapor chamber according to the fourteenth aspect described above, It may be bent at a position where the steam passage is arranged.
  • a sixteenth aspect of the present disclosure provides, in the vapor chamber according to the fourteenth aspect described above, the liquid flow path portion is disposed between the steam passages and extends along the first direction; It may be bent at a position where the liquid flow path portion is arranged.
  • a seventeenth aspect of the present disclosure provides, in the vapor chamber according to the fourteenth aspect described above, a reinforcing portion in which the steam passage and the liquid flow passage are not arranged; It may be bent at a position where the reinforcing portion is arranged.
  • An eighteenth aspect of the present disclosure provides, in the vapor chamber according to the fourteenth aspect described above, comprising a space where the vapor passage and the liquid flow path are not arranged, You may bend at the position where the said space part is arrange
  • a nineteenth aspect of the present disclosure comprises: A vapor chamber containing a working fluid, a body sheet including a first body surface and a second body surface opposite to the first body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a plurality of vapor passages through which gas of the working fluid extends along a first direction; a liquid flow path portion communicating with the vapor passage through which the liquid of the working fluid passes;
  • the vapor chamber includes a bending region bent along a bending line parallel to the first direction, and a first region and a second region separated by the bending region, In the vapor chamber, a body surface concave portion is formed in the first body surface or the second body surface in the bending region.
  • a twentieth aspect of the present disclosure provides, in the vapor chamber according to the nineteenth aspect described above, A plurality of the main body surface concave portions are vapor chambers arranged along the bending line.
  • a twenty-first aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect and the above-described twentieth aspect, comprising: the body sheet includes a reinforcing portion where the steam passage and the liquid flow passage are not arranged; The body surface concave portion may be formed in the first body surface or the second body surface of the reinforcing portion.
  • a twenty-second aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect and the above-described twentieth aspect, comprising: the body sheet includes a land portion located between the two adjacent steam passages and extending along the first direction, the land portion being provided with the liquid flow path portion; The body surface concave portion may be formed at a position of the land portion where the liquid flow path portion is not provided.
  • a twenty-third aspect of the present disclosure comprises: a housing; a device contained within the housing; a vapor chamber according to any of the fourteenth to twenty-second aspects above, in thermal contact with the device.
  • a twenty-fourth aspect of the present disclosure provides, in the electronic device according to the twenty-third aspect described above, comprising a plurality of said devices; the plurality of devices includes a first device and a second device; The vapor chamber is divided into a first region and a second region via a bend, the first device is in thermal contact with the first region of the vapor chamber; The second device may be in thermal contact with the second region of the vapor chamber.
  • a twenty-fifth aspect of the present disclosure is the electronic device according to the twenty-third aspect described above,
  • the vapor chamber is divided into a first region and a second region via a bend,
  • the device may be in thermal contact with the first region of the vapor chamber.
  • a twenty-sixth aspect of the present disclosure comprises: a first sheet preparation step of preparing a first sheet; Preparing a main body sheet including a plurality of vapor passages through which gas of a working fluid passes and which extends along a first direction; process and a joining step of laminating and joining the first sheet and the main body sheet; a bending step of bending the first sheet and the body sheet along a direction parallel to the first direction after the joining step.
  • FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment.
  • FIG. FIG. 2 is a schematic diagram showing an example of the vapor chamber according to the first embodiment mounted on the electronic device shown in FIG. 1.
  • FIG. FIG. 3 is a schematic diagram showing another example of the vapor chamber according to the first embodiment mounted on the electronic device shown in FIG.
  • FIG. 4 is an external perspective view showing the vapor chamber according to the first embodiment.
  • 5 is a plan view of the vapor chamber shown in FIG. 2 before bending;
  • FIG. 6 is a cross-sectional view taken along the line AA of FIG. 5.
  • FIG. 7 is a plan view showing the inner surface of the first sheet shown in FIG. 6.
  • FIG. 8 is a plan view showing the inner surface of the second sheet shown in FIG. 6.
  • FIG. 9 is a plan view showing the first main body surface of the wick sheet shown in FIG. 6.
  • FIG. 10 is a plan view showing the second main body surface of the wick sheet shown in FIG. 6.
  • FIG. 11 is a partially enlarged cross-sectional view of FIG. 6, which is a cross-sectional view taken along the line BB of FIG. 13, which will be described later.
  • FIG. 12 is a partially enlarged view of the liquid flow path shown in FIG. 9.
  • FIG. 13 is a schematic diagram showing the outer surface of the seat in the bending region of the vapor chamber shown in FIG. 4;
  • FIG. 14 is a cross-sectional view taken along line CC of FIG. 13.
  • 15 is a cross-sectional view showing a modified example of the vapor chamber according to the first embodiment, and is a cross-sectional view at an end portion in the width direction of the vapor chamber.
  • 16 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 17 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 18 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 19 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 20 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 21 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 22 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 23 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 14.
  • FIG. 24 is a plan view showing a modified example of the vapor chamber according to the first embodiment, and is a plan view showing an enlarged liquid flow path portion.
  • 25 is a cross-sectional view of the first and second regions of the vapor chamber shown in FIG. 24.
  • FIG. 25 is a cross-sectional view of the bend region of the vapor chamber shown in FIG. 24; FIG. FIG.
  • FIG. 27 is a plan view showing a modified example of the vapor chamber according to the first embodiment, and is a plan view showing an enlarged second main body surface of the land portion.
  • 28 is a plan view showing another example of FIG. 27.
  • FIG. 29 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 13.
  • FIG. 30 is an external perspective view showing the vapor chamber according to the second embodiment.
  • 31 is a plan view showing the vapor passage in which the bend region in the vapor chamber shown in FIG. 30 is expanded.
  • 32 is a schematic cross-sectional view showing the steam passage along lines DD, EE, and FF of FIG. 31.
  • FIG. 33 is a plan view showing a modification of the vapor chamber shown in FIG. 30 before bending;
  • FIG. 34 is a plan view showing the contour of the vapor chamber before bending according to the third embodiment.
  • 35 is a plan view showing a modification of the vapor chamber shown in FIG. 34.
  • FIG. 36 is a plan view showing another modification of the vapor chamber shown in FIG. 34.
  • FIG. 37 is a plan view showing another modification of the vapor chamber shown in FIG. 24.
  • FIG. FIG. 38 is a perspective view showing a bent vapor chamber according to a fourth embodiment; 39 is a cross-sectional view taken along the line AA-AA of FIG. 38.
  • FIG. 40 is a diagram for explaining the vapor chamber of FIG. 38, and is a plan view showing the vapor chamber in an unbent state.
  • FIG. 41 is a cross-sectional view taken along line BB-BB of FIG.
  • FIG. 42 is a plan view showing the inner surface of the first sheet of FIG. 41.
  • FIG. 43 is a plan view showing the inner surface of the second sheet of FIG. 41.
  • FIG. 44 is a plan view showing the second body surface of the body sheet of FIG. 41.
  • FIG. 45 is a partially enlarged sectional view of FIG. 41.
  • FIG. 46 is a partially enlarged view of the liquid flow path shown in FIG. 45.
  • FIG. FIG. 47 is a diagram for explaining a material sheet preparation step in the vapor chamber manufacturing method according to the fourth embodiment.
  • FIG. 48 is a diagram for explaining an etching step in the vapor chamber manufacturing method according to the fourth embodiment.
  • FIG. 49 is a diagram for explaining a bonding step in the vapor chamber manufacturing method according to the fourth embodiment.
  • FIG. 50 is a diagram for explaining a bending step in the vapor chamber manufacturing method according to the fourth embodiment.
  • FIG. 51 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 45, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • FIG. 52 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 45, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • 53 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 45.
  • FIG. 54 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 45.
  • FIG. 55 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 45.
  • FIG. 56 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 45.
  • FIG. 57 is a plan view showing a modification of the vapor chamber shown in FIG. 44.
  • FIG. FIG. 58 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 57, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • FIG. 59 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 57, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • FIG. 60 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 57, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • FIG. 61 is a plan view showing a modified example of the vapor chamber shown in FIG. 57, and is a plan view showing an enlarged liquid flow path portion.
  • FIG. FIG. 62 is a cross-sectional view showing a modified example of the vapor chamber shown in FIG. 57, and is a cross-sectional view showing an enlarged liquid flow path portion.
  • 63 is a plan view showing a modification of the vapor chamber shown in FIG. 44.
  • FIG. 64 is a plan view showing a modification of the vapor chamber shown in FIG. 63.
  • FIG. 65 is a plan view showing a modification of the vapor chamber shown in FIG. 63.
  • FIG. 66 is a plan view showing a modification of the vapor chamber shown in FIG. 65.
  • FIG. 67 is a plan view showing a modified example of the vapor chamber shown in FIG. 65, and is a plan view showing an enlarged reinforcement portion.
  • FIG. 68 is a plan view showing another example of FIG. 67.
  • FIG. 69 is a plan view showing a modification of the vapor chamber shown in FIG. 65.
  • FIG. 70 is an enlarged plan view showing a modification of the vapor chamber shown in FIG. 65, and is an enlarged plan view showing the first main body surface of the land portion.
  • FIG. 71 is a plan view showing a modification of the vapor chamber shown in FIG. 63.
  • FIG. 72 is a plan view showing a modification of the vapor chamber shown in FIG. 44.
  • FIG. 73 is a plan view showing a modification of the vapor chamber shown in FIG.
  • FIG. 74 is a plan view showing a modification of the vapor chamber shown in FIG. 73.
  • FIG. 75 is a plan view showing a modification of the vapor chamber shown in FIG. 44.
  • FIG. 76 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 39.
  • FIG. 77 is a cross-sectional view at a bend of the vapor chamber shown in FIG. 76;
  • FIG. 78 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 76.
  • FIG. 79 is a cross-sectional view showing a modification of the vapor chamber shown in FIG. 41.
  • FIG. 80 is a sectional view showing another example of FIG. 79.
  • FIG. 79 is a sectional view showing another example of FIG. 79.
  • Geometric conditions, physical properties, terms specifying the degree of geometric conditions or physical properties, numerical values indicating geometric conditions or physical properties, etc. used in this specification are strictly You can interpret without being bound by the meaning. These geometric conditions, physical characteristics, terms, numerical values, and the like may be interpreted to include the extent to which similar functions can be expected. Examples of terms specifying geometric conditions include “length”, “angle”, “shape” and “disposition”. Examples of terms specifying geometric conditions include “parallel,” “orthogonal,” and “identical.” Furthermore, to clarify the drawings, the shapes of parts that can be expected to have similar functions are described regularly. However, without being bound by a strict meaning, the shapes of the portions may differ from each other within the range in which the functions can be expected. In the drawings, the boundary lines indicating the joint surfaces of the members are shown as simple straight lines for convenience, but they are not bound to be strictly straight lines, and within the range where the desired joint performance can be expected, The shape of the boundary line is arbitrary.
  • FIG. 1 A vapor chamber, an electronic device, and a vapor chamber manufacturing method according to a first embodiment of the present disclosure will be described with reference to FIGS. 1 to 29.
  • FIG. The vapor chamber 1 according to the present embodiment is housed in a housing H of an electronic device E together with an electronic device D that generates heat, and is a device for cooling the electronic device D.
  • Examples of the electronic device E include mobile terminals such as portable terminals and tablet terminals.
  • Examples of electronic devices D include central processing units (CPUs), light emitting diodes (LEDs), power semiconductors, and the like.
  • Electronic device D may also be referred to as a cooled device.
  • the electronic equipment E may include a housing H, an electronic device D housed within the housing H, and a vapor chamber 1 .
  • a touch panel display TD is provided on the front surface of the housing H.
  • the vapor chamber 1 is housed within the housing H and arranged to be in thermal contact with the electronic device D. As shown in FIG. The vapor chamber 1 receives heat generated by the electronic device D when the electronic equipment E is used.
  • the heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via working fluids 2a and 2b, which will be described later, and the electronic device D is effectively cooled. If the electronic device E is a tablet terminal, the electronic device D corresponds to a central processing unit or the like.
  • the vapor chamber 1 according to this embodiment is bent as shown in FIGS.
  • the vapor chamber 1 is bent according to the internal structure of the electronic equipment E. As shown in FIG. Depending on the positional relationship between the heat-generating electronic device E and the heat-dissipating housing member Ha, the vapor chamber 1 may be bent.
  • the housing member Ha is a member that constitutes the housing H. As shown in FIG.
  • FIG. 1 An example is the case where the electronic device D and the housing member Ha are arranged as shown in FIG. In this case, the vapor chamber 1 is bent at right angles so as to contact the electronic device D and the housing member Ha. Electronic device D is mounted on substrate S. As shown in FIG. Another example is the case where the electronic device D and the housing member Ha are arranged as shown in FIG. In this case, the vapor chamber 1 is bent 180 degrees so as to contact the electronic device D and the housing member Ha.
  • FIGS. 2 and 3 show an example of the vapor chamber 1 bent at one bend line 8 (see FIGS. 4 and 5), but this is not limiting. The vapor chamber 1 may be bent at two or more bend lines 8 at different positions.
  • the vapor chamber 1 that is bent at right angles along one bending line 8 will be described as an example.
  • the vapor chamber 1 shown in FIG. 4 is divided into a first region 5 , a second region 6 and a bend region 7 located between the first region 5 and the second region 6 .
  • the vapor chamber 1 is bent at right angles.
  • the first region 5 and the second region 6 are formed substantially flat.
  • the first region 5 may be in contact with the electronic device D, and the second region 6 may be in contact with the housing member Ha (see FIG. 2).
  • FIGS. 5 to 11 showing the vapor chamber 1 before being bent.
  • the vapor chamber 1 has a sealed space 3 filled with working fluids 2a and 2b.
  • working fluids 2a and 2b include pure water, ethanol, methanol, acetone, etc., and mixtures thereof.
  • the vapor chamber 1 includes a first sheet 10, a second sheet 20, a wick sheet 30, a vapor channel portion 50, and a first liquid channel portion 60. ing.
  • the second sheet 20 is provided on the side opposite to the first sheet 10 with respect to the wick sheet 30 .
  • the wick sheet 30 is an example of a main sheet and is interposed between the first sheet 10 and the second sheet 20 .
  • the first sheet 10, the wick sheet 30 and the second sheet 20 are stacked in this order.
  • an example in which one wick sheet 30 is stacked will be described, but two or more wick sheets 30 may be stacked.
  • the vapor chamber 1 shown in FIG. 5 is generally formed in the shape of a thin flat plate.
  • the vapor chamber 1 may have any planar shape before bending, it may have a rectangular shape as shown in FIG.
  • the planar shape of the vapor chamber 1 may be, for example, a rectangle with one side of 1 cm and the other side of 3 cm, or a square with one side of 15 cm.
  • the plane dimensions of the vapor chamber 1 before bending are arbitrary. In the present embodiment, an example will be described in which the planar shape of the vapor chamber 1 before bending is a rectangular shape whose longitudinal direction is the X direction, which will be described later.
  • the first sheet 10, the second sheet 20 and the wick sheet 30 may have the same planar shape as the vapor chamber 1, as shown in FIGS.
  • the planar shape of the vapor chamber 1 before bending is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.
  • the vapor chamber 1 has an evaporation area SR where the working fluid 2b evaporates and a condensation area CR where the working steam 2a condenses.
  • the working vapor 2a is a gaseous working fluid
  • the working liquid 2b is a liquid working fluid.
  • the evaporation region SR is a region that overlaps with the electronic device D in plan view, and is a region that contacts the electronic device D. Although the evaporation area SR is located within the first area 5, the location of the evaporation area SR is arbitrary. In the present embodiment, an evaporation region SR is formed on one side (left side in FIG. 5) of the vapor chamber 1 in the X direction. Heat from the electronic device D is transferred to the evaporation region SR, and the heat evaporates the working liquid 2b to generate the working vapor 2a. The heat from the electronic device D can be transmitted not only to the area overlapping the electronic device D in plan view, but also to the periphery of the area overlapping the electronic device D. Therefore, the evaporation region SR may include a region overlapping the electronic device D and a region therearound in plan view.
  • the condensation area CR is an area that does not overlap the electronic device D in plan view, and is an area where the working steam 2a mainly releases heat and condenses.
  • the condensation area CR may be located within the second area 6 .
  • the condensation region CR may be a region surrounding the evaporation region SR including the second region 6 . Heat is released from the working steam 2a in the condensation region CR.
  • the working steam 2a is cooled and condensed to produce a working fluid 2b.
  • planar view means a state in which the vapor chamber 1 is viewed from a direction orthogonal to the surface receiving heat from the electronic device D and the surface emitting the received heat.
  • the surface that receives heat corresponds to a second sheet outer surface 20b of the second sheet 20, which will be described later.
  • the surface that emits heat corresponds to a first sheet outer surface 10a of the first sheet 10, which will be described later.
  • FIG. 4 in the bent first region 5 of the vapor chamber 1, the state viewed in the direction indicated by the arrow V1 corresponds to a planar view. In the second region 6, the state viewed in the direction indicated by the arrow V2 corresponds to a planar view.
  • the vapor chamber 1 before bending corresponds to a plan view when the vapor chamber 1 is viewed from above or from below.
  • the first sheet 10 includes a first sheet outer surface 10a positioned opposite to the wick sheet 30 and a first sheet inner surface 10b facing the wick sheet 30. As shown in FIG. In the second region 6 described above, the housing member Ha described above contacts the first seat outer surface 10a. A first body surface 30a of the wick sheet 30, which will be described later, is in contact with the first sheet inner surface 10b. As shown in FIGS. 6 and 7, the first sheet 10 may be formed substantially flat. The first sheet 10 may have a substantially constant thickness.
  • alignment holes 12 may be formed in the four corners of the first sheet 10 .
  • FIG. 7 shows an example in which the planar shape of the alignment hole 12 is circular, it is not limited to this.
  • the alignment holes 12 may penetrate the first sheet 10 .
  • the second sheet 20 includes a second sheet inner surface 20 a facing the wick sheet 30 and a second sheet outer surface 20 b located on the opposite side of the wick sheet 30 .
  • the electronic device D described above contacts the second sheet outer surface 20b.
  • a later-described second body surface 30b of the wick sheet 30 is in contact with the second sheet inner surface 20a.
  • the second sheet 20 may be formed substantially flat.
  • the second sheet 20 may have a substantially constant thickness.
  • alignment holes 22 may be formed in the four corners of the second sheet 20 .
  • FIG. 8 shows an example in which the planar shape of the alignment hole 22 is circular, it is not limited to this.
  • the alignment holes 22 may pass through the second sheet 20 .
  • the wick sheet 30 has a first main body surface 30a and a second main body surface 30b opposite to the first main body surface 30a.
  • the first sheet inner surface 10b of the first sheet 10 is in contact with the first body surface 30a.
  • the second sheet inner surface 20a of the second sheet 20 is in contact with the second body surface 30b.
  • the first sheet inner surface 10b of the first sheet 10 and the first body surface 30a of the wick sheet 30 may be diffusion-bonded.
  • the first seat inner surface 10b and the first body surface 30a may be permanently joined together.
  • the second sheet inner surface 20a of the second sheet 20 and the second body surface 30b of the wick sheet 30 may be diffusion bonded.
  • the second seat inner surface 20a and the second body surface 30b may be permanently joined together.
  • the wick sheet 30 includes a frame portion 32 and a plurality of first lands 33.
  • the frame body portion 32 defines the steam channel portion 50 and is formed in a rectangular frame shape along the X direction and the Y direction in plan view.
  • the first land portion 33 is located inside the steam channel portion 50 and is located inside the frame portion 32 in plan view.
  • the frame portion 32 and the first land portion 33 are portions where the material of the wick sheet 30 remains without being etched in the etching process described later.
  • a first steam passage 51 which will be described later, through which the working steam 2a flows is formed.
  • a second steam passage 52 (to be described later) through which the working steam 2a flows is formed between the first land portions 33 adjacent to each other.
  • the first land portion 33 may extend in an elongated shape with the X direction as its longitudinal direction in plan view.
  • the planar shape of the first land portion 33 may be an elongated rectangular shape.
  • the X direction is an example of a first direction and corresponds to the horizontal direction in FIGS. 9 and 10.
  • FIG. also, the first land portions 33 may be arranged at regular intervals in the Y direction.
  • the Y direction is an example of a second direction, and is a direction orthogonal to the X direction in plan view.
  • the Y direction corresponds to the vertical direction in FIGS. 9 and 10.
  • Each first land portion 33 may be positioned parallel to each other.
  • a direction orthogonal to each of the X direction and the Y direction is defined as the Z direction.
  • the Z direction corresponds to the vertical direction in FIGS. 6 and 11, and corresponds to the thickness direction.
  • the width w1 of the first land portion 33 may be, for example, 100 ⁇ m to 1500 ⁇ m.
  • the width w1 of the first land portion 33 is the dimension of the first land portion 33 in the Y direction.
  • the width w1 means the dimension of the wick sheet 30 in the Z direction at the position where the through portion 34, which will be described later, exists.
  • the X direction in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG. 4 corresponds to the direction along the longitudinal direction of the first land portion 33 .
  • the X direction in the first region 5 corresponds to the vertical direction in FIG.
  • the Y direction in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG. 4 corresponds to the direction in which the first land portions 33 are arranged.
  • the Z direction corresponds to the direction orthogonal to the vapor chamber 1 in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG.
  • the Z direction in the second area 6 corresponds to the vertical direction in FIG.
  • the frame body part 32 and each first land part 33 are diffusion-bonded to the first sheet 10 and diffusion-bonded to the second sheet 20 . This improves the mechanical strength of the vapor chamber 1 .
  • a wall surface 53 a of the first steam flow channel recess 53 and a wall surface 54 a of the second steam flow channel recess 54 which will be described later, constitute side walls of the first land portion 33 .
  • the first main body surface 30a and the second main body surface 30b of the wick sheet 30 may be formed flat over the frame portion 32 and the respective first land portions 33 .
  • alignment holes 35 may be formed at the four corners of the wick sheet 30 .
  • 9 and 10 show an example in which the planar shape of the alignment hole 35 is circular, but it is not limited to this. Also, the alignment hole 35 may pass through the wick sheet 30 .
  • the steam channel portion 50 may be provided on the first body surface 30a of the wick sheet 30.
  • the steam channel portion 50 is an example of a space portion.
  • the steam channel portion 50 may be a channel through which the working steam 2a mainly passes.
  • the working fluid 2b may also pass through the vapor flow path portion 50 .
  • the steam channel portion 50 may extend from the first main body surface 30 a to the second main body surface 30 b or penetrate the wick sheet 30 .
  • the steam channel portion 50 may be covered with the first sheet 10 on the first main body surface 30a, and may be covered with the second sheet 20 on the second main body surface 30b.
  • the steam flow passage section 50 may include a first steam passage 51 and a plurality of second steam passages 52.
  • the first steam passage 51 is formed between the frame portion 32 and the first land portion 33 .
  • the first steam passage 51 is an example of a space periphery.
  • the first steam passage 51 is formed continuously inside the frame portion 32 and outside the first land portion 33 .
  • the planar shape of the first steam passage 51 may be a rectangular frame shape along the X direction and the Y direction.
  • the second steam passage 52 is formed between the first lands 33 adjacent to each other.
  • the planar shape of the second steam passage 52 may be an elongated rectangular shape.
  • the plurality of first lands 33 partition the steam flow path section 50 into a first steam passage 51 and a plurality of second steam passages 52 .
  • the first steam passage 51 and the second steam passage 52 may extend from the first body surface 30a of the wick sheet 30 to the second body surface 30b.
  • the first steam passage 51 and the second steam passage 52 are defined by a first steam passage recess 53 provided in the first main body surface 30a and a second steam passage recess 54 provided in the second main body surface 30b. contains.
  • the first steam channel recess 53 and the second steam channel recess 54 communicate with each other.
  • the first steam flow path concave portion 53 may be formed by etching from the first main body surface 30a of the wick sheet 30 in an etching process to be described later.
  • the first steam channel recess 53 is formed in a recessed shape on the first body surface 30a.
  • the first steam flow channel recess 53 may have a curved wall surface 53a.
  • FIG. 11 shows a cross section perpendicular to the X direction. This wall surface 53a defines the first steam flow path recess 53, and may be curved so as to approach the opposing wall surface 53a as it approaches the second body surface 30b.
  • the first steam passage concave portion 53 constitutes a portion of the first steam passage 51 relatively close to the first sheet 10 and a portion of the second steam passage 52 relatively close to the first sheet 10 .
  • the width w2 of the first steam channel recess 53 may be, for example, 100 ⁇ m to 5000 ⁇ m.
  • the width w2 of the first steam flow path recess 53 is the dimension in the Y direction, which is the dimension of the first steam flow path recess 53 on the first main body surface 30a.
  • the width w2 corresponds to the Y-direction dimension of the portion of the first steam passage 51 extending in the X direction and the Y-direction dimension of the second steam passage 52 .
  • the width w2 also corresponds to the X-direction dimension of the portion of the first steam passage 51 that extends in the Y-direction.
  • the second steam flow path concave portion 54 may be formed by etching from the second main body surface 30b of the wick sheet 30 in an etching process described later.
  • the second steam flow channel recessed portion 54 is formed in a recessed shape in the second main body surface 30b.
  • the second steam flow path concave portion 54 may have a curved wall surface 54a. This wall surface 54a defines the second steam flow path recess 54 and may curve toward the opposing wall surface 54a as it approaches the first body surface 30a.
  • the second steam passage concave portion 54 constitutes a portion of the first steam passage 51 relatively close to the second seat 20 and a portion of the second steam passage 52 relatively close to the second seat 20 .
  • the width w3 of the second steam channel recess 54 may be, for example, 100 ⁇ m to 5000 ⁇ m, similar to the width w2 of the first steam channel recess 53 described above.
  • the width w3 of the second steam flow channel recess 54 is the dimension in the Y direction, which is the dimension of the second steam flow channel recess 54 on the second main body surface 30b.
  • the width w3 corresponds to the Y-direction dimension of the portion of the first steam passage 51 extending in the X direction and the Y-direction dimension of the second steam passage 52 .
  • the width w3 also corresponds to the X-direction dimension of the portion of the first steam passage 51 that extends in the Y-direction.
  • the width w3 of the second steam channel recess 54 may be equal to or different from the width w2 of the first steam channel recess 53 .
  • the wall surface 53a of the first steam flow channel recess 53 and the wall surface 54a of the second steam flow channel recess 54 may be connected to form the through portion 34.
  • the planar shape of the penetrating portion 34 in the first steam passage 51 may be a rectangular frame shape.
  • the planar shape of the penetrating portion 34 in the second steam passage 52 may be an elongated rectangular shape.
  • the through portion 34 may be defined by a ridgeline where the wall surface 53a of the first steam flow path recess 53 and the wall surface 54a of the second steam flow path recess 54 merge.
  • the ridge line may be formed so as to protrude inside the steam passages 51 and 52 as shown in FIG. 11 .
  • the plane area of the first steam passage 51 in the penetration portion 34 may be the minimum, and the plane area of the second steam passage 52 in the penetration portion 34 may be the minimum.
  • the width w4 of the penetration portion 34 of each steam passage 51, 52 may be, for example, 400 ⁇ m to 5000 ⁇ m.
  • the width w4 of the penetrating portion 34 corresponds to the gap between the first land portions 33 adjacent to each other in the Y direction.
  • the position of the penetrating portion 34 in the Z direction may be an intermediate position between the first main body surface 30a and the second main body surface 30b.
  • the position of the penetrating portion 34 may be a position closer to the first seat 10 than the intermediate position, or a position closer to the second seat 20 than the intermediate position.
  • the position of the penetrating portion 34 in the Z direction is arbitrary.
  • the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 are formed so as to include the penetrating portion 34 defined by the ridgeline formed to protrude inward.
  • the cross-sectional shape of the first steam passage 51 and the cross-sectional shape of the second steam passage 52 may be trapezoidal, parallelogram-shaped, or barrel-shaped.
  • the steam passage portion 50 including the first steam passage 51 and the second steam passage 52 configured in this manner constitutes part of the sealed space 3 described above.
  • Each of the steam passages 51, 52 has a relatively large channel cross-sectional area through which the working steam 2a passes.
  • FIG. 11 shows the first steam passage 51 and the second steam passage 52 in an enlarged manner for clarity of the drawing.
  • the number and positions of the steam passages 51, 52, etc. are different from those in FIGS.
  • a plurality of support portions that support the first land portion 33 to the frame portion 32 may be provided in each of the steam passages 51 and 52 .
  • a support portion may be provided to support the first land portions 33 adjacent to each other. These support portions may be provided on both sides of the first land portion 33 in the X direction, or may be provided on both sides of the first land portion 33 in the Y direction.
  • the support portion is preferably formed so as not to block the flow of the working steam 2a that diffuses through the steam channel portion 50. As shown in FIG. For example, the support portion is positioned near one of the first main body surface 30a and the second main body surface 30b of the wick sheet 30, and a space forming the steam channel portion 50 is formed at a position near the other. may be As a result, the thickness of the supporting portion can be made thinner than the thickness of the wick sheet 30, and the first steam passage 51 and the second steam passage 52 can be prevented from being divided in the X direction and the Y direction.
  • the vapor chamber 1 may include an injection part 4 for injecting the working fluid 2b into the sealed space 3.
  • the injection section 4 includes an injection passage 36 communicating with the first steam passage 51 .
  • the position of the injection part 4 is arbitrary.
  • the injection channel 36 may be recessed in the second body surface 30b.
  • the injection channel 36 may be recessed in the first body surface 30a.
  • the injection channel 36 may communicate with the first liquid channel portion 60 depending on the configuration of the first liquid channel portion 60 .
  • the first liquid flow path portion 60 may be formed between the first sheet 10 and the wick sheet 30. As shown in FIGS. In this embodiment, the first liquid flow path portion 60 is formed on the first body surface 30 a of the first land portion 33 .
  • the first liquid flow path portion 60 may be a flow path through which the working fluid 2b mainly passes.
  • the working steam 2 a described above may pass through the first liquid flow path portion 60 .
  • the first liquid channel portion 60 forms part of the sealed space 3 described above and communicates with the vapor channel portion 50 .
  • the first liquid flow path section 60 is configured as a capillary structure for transporting the working liquid 2b to the evaporation region SR.
  • the first liquid flow path section 60 may also be referred to as a wick.
  • the first liquid flow path portion 60 may be formed over the entire first body surface 30 a of each first land portion 33 . Although not shown in FIG. 9 and the like, the first liquid flow path portion 60 may be formed in the inner portion of the first main body surface 30a of the frame portion 32 . In the present embodiment, the first liquid flow path portion 60 is not formed on the second main body surface 30b of the first land portion 33 and the second main body surface 30b of the frame portion 32 .
  • the first liquid flow path portion 60 is an example of a first groove aggregate including a plurality of grooves. More specifically, the first liquid flow path portion 60 includes multiple mainstream grooves 61 and multiple communication grooves 65 .
  • the main groove 61 and the communication groove 65 are grooves through which the hydraulic fluid 2b passes.
  • the communication groove 65 communicates with the main groove 61 .
  • Each mainstream groove 61 extends in the X direction, as shown in FIG.
  • the main groove 61 mainly has a small flow cross-sectional area so that the working fluid 2b flows by capillary action.
  • the channel cross-sectional area of the main groove 61 is smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • the main groove 61 is configured to transport the working fluid 2b condensed from the working steam 2a to the evaporation region SR.
  • Each main groove 61 may be spaced apart at equal intervals along the Y direction orthogonal to the X direction.
  • Each mainstream groove 61 may be positioned parallel to each other.
  • the main groove 61 is formed by etching from the first main body surface 30a of the wick sheet 30 in an etching process to be described later. Accordingly, the main groove 61 may have a curved wall surface 62 as shown in FIG.
  • the wall surface 62 defines the mainstream groove 61 and may be curved in a shape that bulges toward the second body surface 30b.
  • the width w5 of the main groove 61 may be smaller than the width w2 of the first steam flow passage recess 53.
  • the width w ⁇ b>5 of the main groove 61 may be smaller than the width w ⁇ b>1 of the first land portion 33 .
  • the width w5 of the main groove 61 may be, for example, 5 ⁇ m to 400 ⁇ m.
  • the width w5 means the dimension of the main groove 61 on the first main body surface 30a. 11 and 12, the width w5 corresponds to the Y-direction dimension of the main groove 61.
  • the depth h1 of the main groove 61 may be, for example, 3 ⁇ m to 300 ⁇ m.
  • the depth h1 corresponds to the Z-direction dimension of the main groove 61 .
  • each communication groove 65 extends in a direction different from the X direction.
  • each communication groove 65 extends in the Y direction and is formed perpendicular to the main groove 61 .
  • Some communication grooves 65 communicate with adjacent main grooves 61 .
  • Another communication groove 65 communicates the first steam passage 51 or the second steam passage 52 with the main groove 61 . That is, the communication groove 65 extends from the side edge 33a of the first land portion 33 in the Y direction to the main groove 61 adjacent to the side edge 33a. In this manner, the first steam passage 51 communicates with the main groove 61 and the second steam passage 52 communicates with the main groove 61 .
  • the communication groove 65 has a small channel cross-sectional area so that the working fluid 2b mainly flows by capillary action.
  • the channel cross-sectional area of the communication groove 65 is smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • the communication grooves 65 are evenly spaced along the X direction. Each communication groove 65 may be positioned parallel to each other.
  • the communication groove 65 is also formed by etching, which will be described later, similarly to the main groove 61 . Accordingly, the communication groove 65 may have a curved wall surface (not shown) similar to that of the main groove 61 .
  • a width w ⁇ b>6 of the communication groove 65 may be smaller than a width w ⁇ b>2 of the first steam flow path concave portion 53 .
  • Width w ⁇ b>6 of communication groove 65 may be smaller than width w ⁇ b>1 of first land portion 33 .
  • the width w6 of the communication groove 65 may be equal to the width w5 of the main groove 61 . However, width w6 may be larger or smaller than width w5.
  • the width w6 means the dimension of the communication groove 65 in the first main body surface 30a. In FIG. 12, the width w6 corresponds to the dimension of the communication groove 65 in the X direction.
  • the depth of the communication groove 65 may be equal to the depth h1 of the main groove 61 . However, the depth of the communication groove 65 may be deeper or shallower than the depth h1.
  • the first liquid flow path section 60 has a row of protrusions 63 .
  • the row of protrusions 63 is provided on the first main body surface 30 a of the wick sheet 30 .
  • the row of protrusions 63 is provided between the main grooves 61 adjacent to each other.
  • Each projection row 63 includes a plurality of projections 64 arranged in the X direction.
  • the convex portion 64 is in contact with the first sheet 10 .
  • each convex portion 64 is formed in a rectangular shape so that the X direction is the longitudinal direction in plan view.
  • Main grooves 61 are interposed between protrusions 64 adjacent to each other in the Y direction.
  • a communication groove 65 is interposed between the protrusions 64 adjacent to each other in the X direction.
  • the convex portion 64 is a portion where the material of the wick sheet 30 remains without being etched in the etching process described later.
  • the planar shape of the convex portion 64 is rectangular. More specifically, the planar shape of the convex portion 64 corresponds to the planar shape at the position of the first main body surface 30a.
  • the protrusions 64 are arranged in a zigzag pattern. More specifically, the convex portions 64 of the convex portion rows 63 adjacent to each other in the Y direction are positioned at positions shifted from each other in the X direction. This shift amount may be half the arrangement pitch of the protrusions 64 in the X direction.
  • the width w7 of the protrusion 64 may be, for example, 5 ⁇ m to 500 ⁇ m.
  • the width w7 means the dimension of the projection 64 on the first main body surface 30a. In FIG. 12, the width w7 corresponds to the Y-direction dimension of the projection 64.
  • the positions of the protrusions 64 are not limited to being staggered, and may be arranged in parallel. In this case, the convex portions 64 of the convex portion rows 63 adjacent to each other in the Y direction are positioned at the same position in the X direction.
  • each sheet 10, 20, 30 may be composed of a metallic material.
  • each sheet 10, 20, 30 may comprise copper or a copper alloy. Copper and copper alloys have good thermal conductivity and corrosion resistance when using pure water as the working fluid. Examples of copper include pure copper and oxygen-free copper (C1020). Examples of copper alloys include copper alloys containing tin, copper alloys containing titanium (such as C1990), and Corson copper alloys (such as C7025), which are copper alloys containing nickel, silicon and magnesium.
  • a copper alloy containing tin is, for example, phosphor bronze (C5210 or the like).
  • the materials forming the first sheet 10, the second sheet 20 and the wick sheet 30 are not particularly limited as long as they have good thermal conductivity.
  • Each sheet 10, 20, 30 may comprise copper or a copper alloy, for example.
  • the thermal conductivity of each sheet 10, 20, 30 can be increased, and the heat dissipation efficiency of the vapor chamber 1 can be increased.
  • corrosion can be prevented.
  • These sheets 10, 20, 30 may be made of other metal materials such as aluminum or titanium, or other metal alloy materials such as stainless steel, as long as the desired heat radiation efficiency can be obtained and corrosion can be prevented.
  • the thickness t1 of the vapor chamber 1 shown in FIG. 5 may be, for example, 100 ⁇ m to 500 ⁇ m.
  • the thickness t1 of the vapor chamber 1 may be, for example, 100 ⁇ m to 500 ⁇ m.
  • the vapor passage portion 50 can be properly secured. Therefore, the vapor chamber 1 can function properly.
  • the thickness t1 to 500 ⁇ m or less it is possible to suppress the thickness t1 of the vapor chamber 1 from increasing. Therefore, the vapor chamber 1 can be made thin.
  • the thickness of the wick sheet 30 may be thicker than the thickness of the first sheet 10 .
  • the thickness of the wick sheet 30 may be thicker than the thickness of the second sheet 20 .
  • This embodiment shows an example in which the thickness of the first sheet 10 and the thickness of the second sheet 20 are equal. However, it is not limited to this, and the thickness of the first sheet 10 and the thickness of the second sheet 20 may be different.
  • the thickness t2 of the first sheet 10 may be, for example, 6 ⁇ m to 100 ⁇ m. By setting the thickness t2 of the first sheet 10 to 6 ⁇ m or more, the mechanical strength and long-term reliability of the first sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the first sheet 10 to 100 ⁇ m or less, it is possible to suppress the thickness t1 of the vapor chamber 1 from increasing.
  • the thickness t3 of the second sheet 20 may be set similarly to the thickness t2 of the first sheet 10 .
  • the thickness t4 of the wick sheet 30 may be, for example, 50 ⁇ m to 400 ⁇ m. By setting the thickness t4 of the wick sheet 30 to 50 ⁇ m or more, the vapor passage portion 50 can be appropriately secured. Therefore, the vapor chamber 1 can function properly. On the other hand, by setting the thickness to 400 ⁇ m or less, it is possible to suppress the thickness t1 of the vapor chamber 1 from increasing. Therefore, the vapor chamber 1 can be made thin.
  • the thickness t4 of the wick sheet 30 may be the distance between the first main body surface 30a and the second main body surface 30b.
  • the vapor chamber 1 is divided into the first region 5, the second region 6, and the bending region 7.
  • the vapor chamber 1 bends along a bending line 8 extending in a direction crossing the X direction in plan view.
  • the bending line 8 extends in the Y direction in plan view.
  • the Y direction is a direction orthogonal to the X direction in plan view.
  • the bending line 8 crosses the frame portion 32 , the first land portion 33 , the first steam passage 51 and the second steam passage 52 .
  • first sheet 10 can be prevented from being deformed into the steam passages 51 and 52
  • second sheet 20 can be prevented from being deformed into the steam passages 51 and 52 .
  • the passage cross-sectional areas of the first steam passage 51 and the second steam passage 52 can be secured.
  • the first area 5 , the second area 6 and the bending area 7 may be separated by a boundary line along the bending line 8 .
  • the regions 5, 6, and 7 may be separated by boundary lines extending in the Y direction in plan view.
  • the bending area 7 is an area having a certain width including the bending line 8 .
  • the bending region 7 is constituted by a portion where the vapor chamber 1 is deformed by bending.
  • the first area 5 and the second area 6 correspond to areas other than the bending area 7 . That is, the first region 5 and the second region 6 are regions that are not bent.
  • the first region 5 and the second region 6 may be regions extending on the XY plane without bending.
  • the first region 5 and the second region 6 may consist of portions of the curved vapor chamber 1 where no deformation has occurred.
  • the first region 5 and the second region 6 may be two regions separated by the bending region 7.
  • the first region 5 may be a region located on one side (left side in FIG. 5) of the bending region 7 in the direction perpendicular to the bending line 8 (the X direction in the illustrated example).
  • the first region 5 may be a region adjacent to the bending region 7 on one side of the bending region 7 .
  • the second region 6 may be a region located on the other side (right side in FIG. 5) of the bending region 7 in the direction orthogonal to the bending line 8 .
  • the second region 6 may be a region adjacent to the bending region 7 on the other side of the bending region 7 .
  • the first region 5 extends from the boundary line with the bending region 7 to the end of the vapor chamber 1 on one side in the X direction (the left side in FIG. 5), and the second region 6 is It spreads from the boundary line with the bending region 7 to the end of the vapor chamber 1 on the other side in the X direction (the right side in FIG. 5), but is not limited to this.
  • the first region 5 may not extend to one end of the vapor chamber 1 in the X direction
  • the second region 6 may not extend to the other end of the vapor chamber 1 in the X direction.
  • the vapor chamber 1 is bent as shown in FIG. In the bending region 7 , the first sheet 10 is positioned outside the wick sheet 30 with respect to the center O of bending.
  • the second sheet 20 is located inside the wick sheet 30 with respect to the center O of bending.
  • Each steam passage 51, 52 may include a passage bend 57 located in the bend region 7, as shown in FIG.
  • FIG. 13 shows an example of the passage bend 57.
  • the shape of the curved passage portion 57 when viewed in the Y direction is a quarter arc, but the shape is not limited to this.
  • the passage bent portion 57 may include the first steam flow path recess 53 and the second steam flow path recess 54 described above.
  • the first sheet outer surface 10a of the first sheet 10 described above may include a plurality of first bonding regions 13 and first steam channel regions 14. good.
  • Each of the first joint regions 13 is a region that overlaps the corresponding first land portion 33 in plan view.
  • the first joint region 13 is a portion of the wick sheet 30 joined to the first land portion 33 .
  • the first steam channel region 14 is an example of a first spatial region.
  • the first steam channel region 14 is a region that overlaps with the steam channel portion 50 in plan view.
  • the first steam channel region 14 is a portion that is not joined to the wick sheet 30 .
  • a flow channel cross-section of the first steam flow channel region 14 may be formed in a concave shape so as to be recessed inward toward the steam flow channel portion 50 .
  • the first steam flow path region 14 may be curved.
  • the first steam flow path region 14 of the first sheet outer surface 10a may be formed in a concave shape in each of the first region 5, the second region 6 and the bending region 7. More specifically, in each of the first region 5 and the second region 6, as shown in FIG. 11, the first steam flow path region 14 may be formed in a concave shape. 11 is a cross-sectional view taken along the line BB of FIG. 13. FIG. In the bent region 7, as shown in FIG. 14, the first steam flow path region 14 may be formed in a concave shape. 14 is a cross-sectional view taken along line CC of FIG. 13. FIG. The first steam flow path region 14 may be formed in a concave shape over the entire first sheet outer surface 10a.
  • the first sheet 10 may include a first sheet recessed portion 15 overlapping the first steam flow path region 14 in plan view.
  • the first seat recess 15 enters the first steam channel recess 53 .
  • the portion of the first joint region 13 of the first sheet 10 is joined to the first land portion 33 , so that portion deforms along the first land portion 33 .
  • the portion of the first steam channel region 14 of the first sheet 10 covers the steam passages 51 and 52 of the steam channel portion 50 , and thus is less stretchable than the portion of the first joint region 13 . Therefore, the extension of the portion of the first steam flow path region 14 is small.
  • the first seat recess 15 is displaced inward and enters the first steam flow path recess 53 .
  • the recess dimension of the first steam flow path region 14 in the bent region 7 is larger than the recess dimension of the first steam flow channel region 14 in the first region 5 and the second region 6 .
  • the maximum dimension d2 in the bending region 7 is larger than the maximum dimension d1 in the first region 5 and the second region 6 when viewed along the direction parallel to the bending line 8 .
  • the maximum dimension d1 is the dimension defined between the first joining region 13 and the first steam channel region 14 in the first region 5 and the second region 6, and is the dimension in the thickness direction of the first sheet 10. is.
  • the thickness direction of the first sheet 10 corresponds to the Z direction.
  • the maximum dimension d2 is the dimension defined between the first bonding region 13 and the first steam channel region 14 in the bending region 7 and is the dimension in the thickness direction of the first sheet 10 .
  • FIG. 13 is a view in a direction parallel to the bending line 8, in other words along the Y direction.
  • the maximum dimensions d1 and d2 in the thickness direction of the first sheet 10 defined between the first bonding region 13 and the first steam channel region 14 are defined as the first maximum dimension d3. , d4.
  • the maximum dimension d2 in the bending region 7 is larger than the maximum dimension d1 in the first region 5 and the second region 6, it means that the maximum dimension d2 at one position where the bending region 7 is located is the first region 5 and the second region 6, and the maximum dimension d2 at all positions of the bending region 7 is greater than the maximum dimension d1 at all positions of the first region 5 and the second region 6. is not required.
  • the first steam flow path area 14 is recessed in each of the first area 5 and the second area 6 .
  • the first bonding region 13 is formed flat in each of the X direction and the Y direction.
  • the dimension d1 mentioned above may be the depth dimension of the recess.
  • the dimension d1 is the distance between the most recessed position in the first steam flow path region 14 and a straight line on the first joint region 13 that overlaps the position and extends in the Y direction when viewed in the normal direction of the position.
  • the dimension d1 may be the distance in the Z direction between the most recessed position of the first steam flow path region 14 and the position of the flat portion of the first bonding region 13 .
  • Dimension d1 may be obtained from each of first region 5 and second region 6 .
  • the dimension d1 in the first region 5 and the dimension d1 in the second region 6 may be equal or different.
  • FIG. 14 shows a cross section of the vapor chamber 1 perpendicular to the X direction in the bending region 7.
  • the first steam flow path region 14 in the bent region 7 is recessed.
  • the first bonding region 13 in the bending region 7 is formed flat in the Y direction.
  • the dimension d2 mentioned above may be the depth dimension of the recess.
  • the dimension d2 is the distance between the most recessed position in the first steam flow path region 14 and a straight line on the first joint region 13 that overlaps the position and extends in the Y direction when viewed in the normal direction of the position.
  • FIG. 14 is a cross-sectional view taken along line CC of FIG. 13, and is a cross-sectional view at a position where the first steam flow path region 14 is most recessed.
  • FIG. 14 shows a cross section at a position rotationally displaced by 45° from the boundary between the first region 5 and the bending region 7 with respect to the center O of bending.
  • the position where the first steam flow path region 14 is most recessed is not limited to this.
  • the first steam channel region 14 shown in FIG. 14 is recessed more than the first steam channel region 14 shown in FIG. Therefore, the dimension d2 is larger than the dimension d1.
  • the first sheet recesses 15 in the bent region 7 penetrate into the first steam channel recesses 53 deeper than the first sheet recesses 15 in the first region 5 and the second region 6 .
  • flow path corners 55 that form a part of the cross section of the steam flow path by the first sheet inner surface 10 b of the first sheet recess 15 and the wall surface 53 a of the first steam flow path recess 53 . is defined.
  • the channel corner portion 55 may be formed in a wedge shape.
  • the angle between the first sheet inner surface 10b and the wall surface 53a may be ⁇ 1.
  • ⁇ 1 may be an acute angle.
  • the angle ⁇ 1 may be defined by a tangent to the first seat inner surface 10b and a tangent to the wall surface 53a at the intersection of the first seat inner surface 10b and the wall surface 53a.
  • the angle between the first sheet inner surface 10b and the wall surface 53a may be ⁇ 2.
  • ⁇ 2 may be defined similarly to ⁇ 1.
  • the angle ⁇ 2 shown in FIG. 14 may be smaller than the angle ⁇ 1 shown in FIG. This is because the first steam channel region 14 shown in FIG. 14 is recessed more than the first steam channel region 14 shown in FIG. 11 . In this case, the capillary action of the channel corner portion 55 shown in FIG. 14 may be stronger than the capillary action of the channel corner portion 55 shown in FIG.
  • the first steam flow path region 14 may extend in the X direction in each of the first region 5, the second region 6, and the curved region 7, like the first land portion 33.
  • the first sheet concave portion 15 and the channel corner portion 55 may similarly extend in the X direction.
  • the second sheet outer surface 20b of the second sheet 20 described above may include a plurality of second bonding regions 23 and second steam channel regions 24. good.
  • Each of the second joint regions 23 is a region that overlaps the corresponding first land portion 33 in plan view.
  • the second joint region 23 is a portion of the wick sheet 30 joined to the first land portion 33 .
  • the second steam flow path region 24 is an example of a second spatial region.
  • the second steam channel region 24 is a region that overlaps with the steam channel portion 50 in plan view.
  • the second steam channel region 24 is a portion that is not joined to the wick sheet 30 .
  • the channel cross section of the second steam channel region 24 may be formed in a concave shape so as to be recessed inward toward the steam channel portion 50 .
  • the second steam flow path region 24 may be curved.
  • the second steam flow path area 24 of the second sheet outer surface 20b may be formed in a concave shape in each of the first area 5, the second area 6 and the bending area 7. More specifically, in each of the first region 5 and the second region 6, as shown in FIG. 11, the second steam flow path region 24 may be formed in a concave shape. In the bent region 7, as shown in FIG. 14, the second steam flow path region 24 may be formed in a concave shape. The second steam flow path region 24 may be formed in a concave shape over the entire second seat outer surface 20b.
  • the second sheet 20 may include a second sheet recess 25 overlapping the second steam flow path region 24 in plan view.
  • the second seat recess 25 enters the second steam channel recess 54 .
  • the portion of the second joint region 23 of the second sheet 20 is joined to the first land portion 33 , so that portion deforms along the first land portion 33 .
  • the portion of the second steam flow path region 24 covers the steam passages 51 and 52 of the steam flow path portion 50, it tends to shrink. Since the second sheet 20 is positioned inside, a jig (not shown) contacts the second sheet outer surface 20b of the second sheet 20 . Therefore, the inward displacement of the second steam flow path region 24 is restricted. As shown in FIG. 13 , the second seat recess 25 is displaced outward and enters the second steam flow path recess 54 .
  • the dimension of the recess of the second steam flow path region 24 in the bent region 7 is larger than the dimension of the recess of the second steam flow channel region 24 in the first region 5 and the second region 6 .
  • the maximum dimension d4 in the bending region 7 is larger than the maximum dimension d3 in the first region 5 and the second region 6 when viewed along the direction parallel to the bending line 8 .
  • a maximum dimension d3 is a dimension defined between the second joint region 23 and the second steam channel region 24 in the first region 5 and the second region 6, and is a dimension in the thickness direction of the second sheet 20. is.
  • the thickness direction of the second sheet 20 corresponds to the Z direction.
  • a maximum dimension d4 is a dimension defined between the second bonding region 23 and the second steam channel region 24 in the bending region 7 and is a dimension in the thickness direction of the second sheet 20 .
  • the maximum dimensions d3 and d4 in the thickness direction of the second sheet 20 defined between the second joint region 23 and the second steam channel region 24 are defined as the second maximum dimension d3 , d4.
  • the maximum dimension d4 in the bending region 7 is larger than the maximum dimension d3 in the first region 5 and the second region 6, it means that the maximum dimension d4 at one position where the bending region 7 is located is the first region 5 and the second region 6, and the maximum dimension d4 at all positions of the bending region 7 is greater than the maximum dimension d3 at all positions of the first region 5 and the second region 6. is not required.
  • the second steam flow path area 24 is recessed in each of the first area 5 and the second area 6 .
  • the second bonding region 23 is formed flat in each of the X direction and the Y direction.
  • the dimension d3 mentioned above may be the depth dimension of the recess.
  • the dimension d3 is the distance between the most recessed position in the second steam flow path region 24 and a straight line on the second joint region 23 that overlaps the position and extends in the Y direction when viewed in the normal direction of the position. It may be the distance between That is, the dimension d3 may be the distance in the Z direction between the most recessed position of the second steam flow path region 24 and the flat portion of the second bonding region 23 .
  • Dimension d3 may be obtained from each of first region 5 and second region 6 .
  • the dimension d3 in the first region 5 and the dimension d3 in the second region 6 may be equal or different.
  • the second steam flow path area 24 in the bending area 7 is recessed.
  • the second bonding region 23 in the bending region 7 is formed flat in the Y direction.
  • the dimension d4 mentioned above may be the depth dimension of the recess.
  • the dimension d4 is the distance between the most recessed position in the second steam flow path region 24 and a straight line on the second joint region 23 that overlaps the position and extends in the Y direction when viewed in the normal direction of the position. It may be the distance between That is, the dimension d4 may be the distance in the Z direction between the most recessed position of the second steam channel region 24 and the flat portion of the second bonding region 23 .
  • FIG. 14 is a cross-sectional view of the position where the second steam flow path region 24 is most recessed. never limited.
  • the second steam channel region 24 shown in FIG. 14 is recessed more than the second steam channel region 24 shown in FIG. Therefore, the dimension d4 is larger than the dimension d3.
  • the second sheet recesses 25 in the bent region 7 penetrate into the second steam channel recesses 54 deeper than the second sheet recesses 25 in the first region 5 and the second region 6 .
  • flow path corners 56 that form a part of the cross section of the steam flow path by the second sheet inner surface 20 a of the second sheet recess 25 and the wall surface 54 a of the second steam flow path recess 54 . is defined.
  • the channel corner portion 56 may be formed in a wedge shape.
  • the angle between the second seat inner surface 20a and the wall surface 54a may be ⁇ 1.
  • ⁇ 1 may be an acute angle.
  • Angle ⁇ 1 may be defined by a line tangent to second inner seat surface 20a and a tangent to wall surface 54a at the intersection of second inner seat surface 20a and wall surface 54a.
  • the angle between the second seat inner surface 20a and the wall surface 53a may be ⁇ 2.
  • ⁇ 2 may be defined similarly to ⁇ 1.
  • the angle ⁇ 2 shown in FIG. 14 may be smaller than the angle ⁇ 1 shown in FIG. This is because the second steam channel region 24 shown in FIG. 14 is recessed more than the second steam channel region 24 shown in FIG. 11 . In this case, the capillary action of the channel corner portion 56 shown in FIG. 14 may be stronger than the capillary action of the channel corner portion 56 shown in FIG.
  • the second steam flow path area 24 may extend in the X direction in each of the first area 5, the second area 6, and the curved area 7, like the first land portion 33.
  • the second sheet concave portion 25 and the channel corner portion 56 may similarly extend in the X direction.
  • the first sheet 10 and the second sheet 20 may be thinner than the wick sheet 30.
  • the strain can be left by applying stress to the portion of the first sheet 10 that overlaps the steam channel portion 50, and the stress can be applied to the portion of the second sheet 20 that overlaps the steam channel portion 50. Distortion can be left by Due to such distortion, the first steam channel region 14 and the second steam channel region 24 can be formed concavely in the first region 5, the second region 6 and the curved region 7 even before the bending.
  • the first sheet 10 and the second sheet 20 are more likely to retain strain by applying stress while being heated and softened, or more likely to be strained by applying stress after being heated and softened. Easy to leave.
  • first steam channel region 14 and the second steam channel region 24 can be formed in a concave shape.
  • first steam flow path region 14 before bending may be formed flat in the first region 5 , the second region 6 and the bending region 7 .
  • second steam flow path region 24 before bending may be formed flat in the first region 5, the second region 6 and the bending region 7.
  • the first sheet 10, the second sheet 20 and the wick sheet 30 are prepared.
  • the preparation step may include an etching step of forming the wick sheet 30 by etching.
  • the wick sheet 30 may be formed by etching using a patterned resist film (not shown) by photolithography.
  • the first sheet 10, the wick sheet 30 and the second sheet 20 are temporarily fixed.
  • each sheet 10, 20, 30 may be tacked by spot welding or laser welding.
  • the sheets 10, 20, 30 may be aligned using the alignment holes 12, 22, 35 described above.
  • the first sheet 10, the wick sheet 30, and the second sheet 20 are permanently bonded.
  • Each sheet 10, 20, 30 may be bonded by diffusion bonding.
  • the sealed space 3 is evacuated and the working fluid 2b is injected into the sealed space 3 from the injection part 4 (see FIG. 5).
  • the above injection flow path 36 is sealed as a sealing process.
  • communication between the sealed space 3 and the outside is cut off, and the sealed space 3 is sealed.
  • a sealed space 3 in which the hydraulic fluid 2b is enclosed is obtained, and the hydraulic fluid 2b in the sealed space 3 is prevented from leaking to the outside.
  • the first sheet 10, the second sheet 20 and the wick sheet 30 may be bent as a bending process.
  • each sheet 10, 20, 30 is bent along a bending line 8 extending in the Y direction as shown in FIG.
  • a jig (not shown) is brought into contact with the second sheet outer surface 20b of the second sheet 20 on the inner side of the bend. Both ends in the X direction of each sheet 10, 20, 30 in the X direction are gripped, and each sheet 10, 20, 30 is bent at a desired angle. This results in the bent vapor chamber 1 shown in FIG.
  • the bending process may be performed between the bonding process and the injection process.
  • the vapor chamber 1 according to the present embodiment is obtained.
  • the vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like.
  • the first sheet outer surface 10a of the first sheet 10 contacts the housing member Ha.
  • a second sheet outer surface 20b of the second sheet 20 contacts the electronic device D in the second region 6 .
  • the hydraulic fluid 2b in the sealed space 3 adheres to the walls of the sealed space 3 due to its surface tension. More specifically, the working fluid 2b passes through the wall surface 53a of the first vapor flow channel recess 53, the wall surface 54a of the second steam flow channel recess 54, the wall surface 62 of the main groove 61 of the first liquid flow channel portion 60, and the communication groove. It adheres to the wall of 65.
  • the working fluid 2b may also adhere to the portion of the first sheet inner surface 10b of the first sheet 10 that is exposed to the first steam flow path concave portion 53 .
  • the hydraulic fluid 2b may also adhere to the portions of the second sheet inner surface 20a of the second sheet 20 that are exposed to the second steam flow path concave portion 54, the main groove 61, and the communication groove 65. As shown in FIG.
  • the working fluid 2b existing in the evaporation region SR receives heat from the electronic device D.
  • the received heat is absorbed as latent heat to evaporate the working fluid 2b and generate the working steam 2a.
  • the generated working steam 2a diffuses within the first steam passage 51 and the second steam passage 52 that form the sealed space 3 (see solid line arrows in FIG. 9). More specifically, in the portion of the first steam passage 51 of the steam passage portion 50 extending in the X direction and the second steam passage 52, the working steam 2a mainly diffuses in the X direction. In this case, part of the working steam 2 a diffuses through the passage bend 57 . On the other hand, in the portion of the first steam passage 51 extending in the Y direction, the working steam 2a mainly diffuses in the Y direction.
  • the working steam 2a in each of the steam passages 51, 52 leaves the evaporation area SR and is transported to the condensation area CR with a relatively low temperature.
  • the working steam 2a is mainly radiated to the first sheet 10 and cooled.
  • the heat received by the first seat 10 from the working steam 2a is transferred to the outside air via the housing member Ha (see FIG. 6).
  • the working steam 2a loses latent heat absorbed in the evaporation region SR by radiating heat to the first sheet 10 in the condensation region CR. Thereby, the working steam 2a is condensed and the working liquid 2b is produced.
  • the generated hydraulic fluid 2b adheres to the wall surfaces 53a and 54a of the respective vapor flow path recesses 53 and 54, the first sheet inner surface 10b of the first sheet 10, and the second sheet inner surface 20a of the second sheet 20. As shown in FIG. Here, the working fluid 2b continues to evaporate in the evaporation region SR.
  • each main flow groove 61 the working fluid 2b in the condensation area CR of the first fluid flow path portion 60 is transported toward the evaporation area SR by the capillary action of each main flow groove 61 (see the dashed arrow in FIG. 9).
  • the hydraulic fluid 2b adhering to the wall surfaces 53a, 54a, the first seat inner surface 10b, and the second seat inner surface 20a moves to the first fluid flow path portion 60, passes through the communication groove 65, and enters the main groove 61. enter.
  • each main groove 61 and each communication groove 65 are filled with the hydraulic fluid 2b.
  • the filled working fluid 2b obtains a driving force toward the evaporation area SR due to the capillary action of each main groove 61, and is smoothly transported toward the evaporation area SR. As shown in FIG. 4, even if the evaporation region SR is located in the upper part of the vapor chamber 1, the working liquid 2b is transported by capillary action.
  • each main groove 61 communicates with another adjacent main groove 61 via a corresponding communication groove 65 .
  • the hydraulic fluid 2b is prevented from flowing between the main grooves 61 adjacent to each other, and the occurrence of dryout in the main grooves 61 is suppressed. Therefore, a capillary action is imparted to the working fluid 2b in each main groove 61, and the working fluid 2b is smoothly transported toward the evaporation region SR.
  • the working fluid 2b that has reached the evaporation region SR receives heat from the electronic device D again and evaporates.
  • the working steam 2a evaporated from the working fluid 2b passes through the communication groove 65 in the evaporation region SR and moves to the first steam flow path recess 53 and the second steam flow path recess 54 having a large flow path cross-sectional area.
  • the working steam 2 a then diffuses within the respective steam passage recesses 53 and 54 , and a portion of the working steam 2 a can diffuse through the passage bends 57 .
  • the working fluids 2a and 2b circulate in the sealed space 3 while repeating phase changes, that is, evaporation and condensation.
  • the heat of the electronic device D is diffused and released.
  • the electronic device D is cooled.
  • the first steam flow path region 14 of the first sheet outer surface 10a is formed in a concave shape.
  • the channel corners 55 having capillary action are defined in the first steam channel recess 53 . Therefore, due to the presence of the channel corner portions 55, the working fluid 2b condensed in the steam channel portion 50 is transported toward the evaporation region SR.
  • the maximum dimension d2 (first maximum dimension d2) in the bending region 7 is the same as the first region 5 and the second It is larger than the maximum dimension d1 (first maximum dimension d1) in the region 6.
  • the capillary action of the flow channel corners 55 in the curved region 7 is stronger than the capillary action of the flow channel corners 55 in the first region 5 and the second region 6 .
  • the second steam flow path region 24 of the second sheet outer surface 20b is formed in a concave shape.
  • the aforementioned channel corners 56 having capillary action are defined within the second steam channel recesses 54 . Therefore, due to the presence of the channel corner portions 56, the working liquid 2b condensed in the vapor channel portion 50 is transported toward the evaporation region SR.
  • the maximum dimension d4 (second maximum dimension d4) in the bending region 7 is the maximum dimension d3 ( larger than the second maximum dimension d3).
  • the capillary action of the channel corners 56 in the curved region 7 is stronger than the capillary action of the channel corners 55 in the first region 5 and the second region 6 .
  • the working steam 2a is more likely to collide with the first seat inner surface 10b.
  • the impinging working steam 2a is condensed into working fluid 2b, which adheres to the first seat inner surface 10b.
  • a part of the adhering working fluid 2b is transported through the channel corners 55 toward the evaporation region SR by the capillary action of the channel corners 55 described above.
  • Another portion of the hydraulic fluid 2b adhering to the first seat inner surface 10b passes through the communication groove 65 of the first fluid flow path portion 60 and enters the main flow groove 61 .
  • the working fluid 2b is transported toward the evaporation region SR by the capillary action of each main groove 61 . In this manner, retention of the hydraulic fluid 2b adhering to the first sheet inner surface 10b in the bending region 7 is suppressed.
  • the flow of the working steam 2a can separate from the second sheet inner surface 20a. More specifically, a vortex is formed near the outlet of the passage bend 57, and the working steam 2a condenses and adheres to the second seat inner surface 20a.
  • the vicinity of the outlet of the curved passage portion 57 corresponds to a portion of the curved passage portion 57 relatively close to the second region 6 .
  • a part of the adhering working fluid 2b is transported through the channel corners 55 toward the evaporation region SR by the capillary action of the channel corners 56 described above. In this manner, retention of the hydraulic fluid 2b adhering to the second seat inner surface 20a in the bending region 7 is suppressed.
  • the plurality of first lands 33 of the wick sheet 30 are spaced apart in the Y direction orthogonal to the X direction, and cross the X direction in plan view in the bending region 7 .
  • the vapor chamber 1 is bent along a bending line 8 extending in the direction of .
  • the maximum dimension d2 (first maximum dimension d2) in the bending region 7 is the same as that of the other regions (the first region 5 and the second region 6) other than the bending region 7. is larger than the maximum dimension d1 (first maximum dimension d1) in .
  • the first sheet 10 can enter the first steam passage 51 and the second steam passage 52 in the bent region 7, and the respective steam passages 51 and 52 have flow passage corner portions with enhanced capillary action. 55 can be formed. Therefore, the working fluid 2b condensed from the working steam 2a in the curved region 7 can be transported to the evaporation region SR by the capillary action of the channel corners 55 . In addition, the condensed working fluid 2b can be efficiently moved to the first fluid flow path portion 60 communicating with each of the steam passages 51 and 52 . Therefore, it is possible to prevent the working fluid 2b from staying in the steam passages 51 and 52 in the curved region 7, and to prevent the flow of the working steam 2a from being obstructed by the working fluid 2b. As a result, even when bent, the heat radiation efficiency of the vapor chamber 1 can be improved.
  • the surface area of the first sheet 10 can be increased in the bending region 7 due to the large maximum dimension d2. Therefore, the heat radiation efficiency to the outside through the housing member Ha can be improved, and the cooling capacity of the vapor chamber 1 can be enhanced. Also, an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported. Further, by increasing the surface area of the first sheet 10, it is possible to increase the adhesion force with the housing member Ha via an adhesive tape or the like in the bending region 7. As shown in FIG. Therefore, the reliability of the vapor chamber 1 can be improved.
  • the first steam flow path region 14 of the first seat outer surface 10a is formed in a concave shape.
  • the first steam passage 51 and the second steam passage 52 can be formed with the channel corners 55 with enhanced capillary action. Therefore, the working liquid 2b condensed from the working steam 2a can be transported to the evaporation region SR by the capillary action of the channel corners 55. As shown in FIG.
  • the surface area of the first sheet 10 can be increased by forming the first steam flow path region 14 in a concave shape. Therefore, the heat radiation efficiency to the outside through the housing member Ha can be improved, and the cooling capacity of the vapor chamber 1 can be enhanced. Also, an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported. Further, by increasing the surface area of the first sheet 10, it is possible to increase the adhesion force with the housing member Ha via an adhesive tape or the like. Therefore, the reliability of the vapor chamber 1 can be improved.
  • the vapor chamber 1 in the bending region 7, is bent along the bending line 8 extending in the Y direction. Thereby, the vapor chamber 1 can be bent along the direction orthogonal to the X direction in which the first land portion 33 extends. Therefore, in the first region 5 , the second region 6 and the curved region 7 , it is possible to prevent the maximum dimension between the first bonding region 13 and the first steam flow path region 14 from becoming excessively large. As a result, the passage cross-sectional areas of the first steam passage 51 and the second steam passage 52 in the curved region 7 can be secured, and the obstruction of the flow of the working steam 2a in the curved region 7 can be suppressed.
  • the first liquid flow path portion 60 is formed on the first main body surface 30 a of the first land portion 33 .
  • the first sheet 10 is positioned outside the wick sheet 30 .
  • the working fluid 2b condensed by the collision of the working steam 2a flowing through the passage bending portion 57 with the first seat inner surface 10b can be easily guided to the first fluid flow path portion 60.
  • the working fluid 2b can be smoothly transported toward the evaporation region SR.
  • the maximum dimension d4 (second maximum dimension d4) in the bending region 7 is the same as the area other than the bending region (second It is larger than the maximum dimension d3 (second maximum dimension d3) in the first region 5 and the second region 6).
  • the second sheet 20 can be inserted into the first steam passage 51 and the second steam passage 52 in the bent region 7, and each steam passage 51, 52 has a channel corner portion with enhanced capillary action. 56 can be formed. Therefore, the working fluid 2b condensed from the working steam 2a in the bending region 7 can be transported to the evaporation region SR by the capillary action of the channel corners 56 .
  • the condensed working fluid 2b can be efficiently moved to the first fluid flow path portion 60 communicating with each of the steam passages 51 and 52 .
  • the working fluid 2b it is possible to prevent the working fluid 2b from staying in the steam passages 51 and 52 in the curved region 7, and to prevent the flow of the working steam 2a from being blocked.
  • the working fluid 2b tends to accumulate on the inside of the bend where the vapor pressure of the working steam 2a is low. Therefore, by efficiently moving the working liquid 2b to the first liquid flow path portion 60 inside the bend, it is possible to effectively suppress an increase in flow path resistance of the working steam 2a in the bend region 7 . Moreover, since the maximum dimension d4 is large, the direction of the working steam 2a flowing along the inner wall of the second sheet 20 can be easily bent along the curved shape. Therefore, the working steam 2a can be smoothly transported.
  • the invention is not limited to this.
  • the first steam channel region 14 of the first sheet outer surface 10a in one of the first region 5 and the second region 6 may be formed flat in the Y direction.
  • the first steam flow path region 14 of the first sheet outer surface 10a in both the first region 5 and the second region 6 may be formed flat in the Y direction.
  • the maximum dimension d1 mentioned above may be zero.
  • the heat radiation efficiency to the outside through the housing member Ha can be improved, and the cooling capacity of the vapor chamber 1 can be enhanced. Also, an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported. In addition, since the first steam flow path region 14 is formed flat, it is possible to suppress the formation of a gap with respect to the housing member Ha, and to sufficiently adhere to the housing member Ha. Therefore, the heat radiation efficiency to the outside through the housing member Ha can be improved.
  • the second steam flow path region 24 of the second sheet outer surface 20b in one of the first region 5 and the second region 6 may be formed flat in the Y direction.
  • the second steam flow path region 24 of the second sheet outer surface 20b in both the first region 5 and the second region 6 may be formed flat in the Y direction.
  • the maximum dimension d3 mentioned above may be zero.
  • the capillary force of the channel corner 56 shown in FIG. 11 and the capillary force of the channel corner 56 shown in FIG. You can increase the difference in power. Therefore, the capillary action of the flow path corner portion 56 in the bent region 7 can be relatively strengthened.
  • the surface area of the second sheet 20 in the bending region 7 can be relatively increased. Therefore, the heat radiation efficiency to the outside through the housing member Ha can be improved, and the cooling capacity of the vapor chamber 1 can be enhanced. Also, an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported. In addition, since the second vapor flow path region 24 is formed flat, it is possible to suppress the formation of a gap with respect to the electronic device D, so that the electronic device D can be sufficiently adhered. Therefore, the electronic device D can be efficiently cooled.
  • the recess amount of the second steam flow path region 24 of the second sheet 20 positioned on the inner side of the bending is the same as that of the first sheet 10 positioned on the outer side of the bending. It may be smaller than the recess amount of one steam flow path region 14 . That is, the maximum dimension d4 described above may be smaller than the maximum dimension d2 described above. In this case, it is possible to suppress a decrease in the channel cross-sectional area of the second steam channel concave portion 54, thereby suppressing an increase in the channel resistance of the working steam 2a. Therefore, the working steam 2a can be smoothly transported.
  • the recess amount of the first steam flow path region 14 of the first sheet 10 positioned on the outer side of the bending is the same as that of the second sheet 20 positioned on the inner side of the bending. It may be smaller than the recess amount of the second steam flow path region 24 . That is, the maximum dimension d2 described above may be smaller than the maximum dimension d4 described above. The maximum dimension d2 mentioned above may be zero. In this case, it is possible to suppress a decrease in the channel cross-sectional area of the first steam channel concave portion 53 and an increase in the channel resistance of the working steam 2a. Therefore, the working steam 2a can be smoothly transported.
  • the recess amount of the first steam flow path region 14 of the first sheet 10 on the side where the first liquid flow path portion 60 is located is It may be larger than the recess amount of the second steam flow path region 24 of the second sheet 20 on the side where the 60 is not located.
  • flow path corners 55 with enhanced capillary action can be formed between the steam passages 51 and 52 and the first liquid flow path section 60. Therefore, the working fluid 2b condensed from the working steam 2a in the bending region 7 can be moved to the first fluid flow path portion 60 efficiently.
  • the amount of recession of the steam channel regions 14 and 24 of the sheets 10 and 20 at the width direction end portions of the steam channel portion 50 is It may be smaller than the recessed amount of the steam flow path regions 14, 24 of the sheets 10, 20 at the central portion in the width direction.
  • the second vapor passage 52 in the central part of the vapor chamber 1 in the Y direction shown in FIG. 5 may have a maximum dimension d4 in the bending region 7; 5, the first sheet 10 has a maximum dimension d2′ in the bending region 7 and a second The sheet 20 may have a maximum dimension d4' in the bending region 7.
  • the maximum dimension d2' may be smaller than the maximum dimension d2.
  • the maximum dimension d4' may be smaller than the maximum dimension d4. In this case, it is possible to suppress an increase in flow path resistance of the working steam 2a at the width direction end portions of the steam flow path portion 50, and to smoothly transport the working steam 2a. In addition, since heat can be easily transferred at the width direction end portions of the steam flow path portion 50, the temperature difference between the width direction end portions and the width direction center portion of the steam flow path portion 50 can be reduced. The temperature of the chamber 1 can be equalized.
  • the amount of recession of the steam channel regions 14 and 24 of the sheets 10 and 20 at the width direction end portions of the steam channel portion 50 is It may be larger than the recessed amount of the steam flow path regions 14, 24 of the sheets 10, 20 at the central portion in the width direction.
  • the maximum dimension d2' mentioned above may be larger than the maximum dimension d2.
  • the maximum dimension d4' described above may be larger than the maximum dimension d4. In this case, it is possible to efficiently move the condensed working fluid 2 b to the first liquid flow path portion 60 at the width direction end portions of the steam flow path portion 50 .
  • the first liquid flow path portion 60 is formed on the first main body surface 30a of the first land portion 33, and the liquid flow path portion is formed on the second main body surface 30b of the first land portion 33. was not formed. However, it is not limited to this. For example, as shown in FIG. 16, the first body surface 30a of the first land portion 33 is not formed with the liquid flow path portion, and the second body surface 30b of the first land portion 33 is formed with the first liquid flow path portion 60. may be formed.
  • the first liquid flow path portion 60 is formed on the first main body surface 30a of the first land portion 33, and the liquid flow path portion is formed on the second main body surface 30b of the first land portion 33. was not formed. However, it is not limited to this.
  • a second liquid flow path portion 70 may be formed on the second body surface 30b of the first land portion 33 .
  • the second liquid flow path portion 70 formed in the second main body surface 30b is an example of a second groove assembly.
  • the second liquid flow path section 70 may include a plurality of mainstream grooves 61 and a plurality of communication grooves 65 in the same manner as the first liquid flow path section 60 described above.
  • the second sheet 20 is positioned inside the wick sheet 30 in the bending region 7 .
  • the flow of the working steam 2a can separate from the second sheet inner surface 20a. More specifically, a vortex is formed near the outlet of the passage bend 57, and the working steam 2a is condensed.
  • the condensed working liquid 2 b can be guided to the second liquid flow path section 70 . This allows the working fluid 2b to be transported towards the evaporation area SR. Therefore, it is possible to prevent the working fluid 2b from remaining in the steam passages 51 and 52 in the curved region 7, and to prevent the flow of the working steam 2a from being obstructed.
  • the second liquid flow path section 70 is configured in the same manner as the first liquid flow path section 60 .
  • the channel cross-sectional area of the main groove 61 of the second liquid channel portion 70 may be larger than the channel cross-sectional area of the main groove 61 of the first liquid channel portion 60 .
  • the channel cross-sectional area of the communication groove 65 of the second liquid channel portion 70 may be larger than the channel cross-sectional area of the communication groove 65 of the first liquid channel portion 60 .
  • the second liquid flow path section 70 shown in FIG. 18 is also called a liquid storage section.
  • the working liquid 2b is dispersed and stored not only in the first liquid flow path section 60 but also in the second liquid flow path section 70. can. Therefore, even if the working fluid 2b in the first fluid flow path portion 60 freezes and expands in an environment with a temperature lower than the freezing point of the working fluid 2b, the expansion force acting on the first sheet 10 is reduced. can. In this case, deformation of the first sheet 10 can be suppressed. Further, even if the hydraulic fluid 2b in the second fluid flow path portion 70 freezes and expands, the expansion force acting on the second seat 20 can be reduced. In this case, deformation of the second sheet 20 can be suppressed.
  • the working liquid 2b in the second liquid flow path portion 70 can evaporate by receiving heat from the electronic device D.
  • the second steam flow path regions 24 in the first regions 5, the second regions 6, and the curved regions 7 are formed in a concave shape.
  • the second steam flow path regions 24 in the first regions 5, the second regions 6, and the curved regions 7 may be formed flat in the Y direction.
  • the capillary action of the channel corners 55 can be enhanced, and the working fluid 2b adhering to the inner surface 10b of the first sheet can be transported.
  • the surface area of the first sheet 10 can be increased in the bending region 7 .
  • the heat radiation efficiency to the outside through the housing member Ha can be improved, and the cooling capacity of the vapor chamber 1 can be enhanced.
  • an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported.
  • the second vapor flow path region 24 is formed flat, it is possible to suppress the formation of a gap with respect to the electronic device D, so that the electronic device D can be sufficiently adhered. Therefore, the electronic device D can be efficiently cooled.
  • the first sheet 10 is positioned outside the wick sheet 30 in the bending region 7 .
  • the first sheet 10 may be positioned inside the wick sheet 30 .
  • the capillary action can be enhanced at the channel corners 55, and the working fluid 2b adhering to the first sheet inner surface 10b can be transported.
  • the second steam channel region 24 of the second sheet 20 located outside the wick sheet 30 is formed flat in the Y direction in the first region 5, the second region 6 and the curved region 7.
  • part of the first steam flow path region 14 in the bent region 7 may be formed in a concave shape, and the other part may be formed flat in the Y direction.
  • the capillary action of the recessed portion can be made stronger than the capillary action of the flat portion. Therefore, it is possible to control the flow of the hydraulic fluid 2b and to arbitrarily set the location where the capillary action is intentionally strengthened.
  • one first sheet concave portion 15 may be formed in a partial region in the width direction of the first steam channel region 14 .
  • the first steam flow path area 14 may be formed flat in the Y direction.
  • a part of the region in the steam flow direction may be formed in a concave shape, and the other region may be formed in a flat shape in the Y direction.
  • the second steam flow path region 24 may also be partly concave and partly flat in the Y direction.
  • the first sheet 10 includes one first sheet recessed portion 15 that overlaps the first steam flow path region 14 in plan view.
  • the first sheet 10 may include a plurality of first sheet recesses 15 overlapping the first steam flow path regions 14 in plan view.
  • a plurality of first sheet recesses 15 may be formed in the first steam channel region 14 .
  • the plurality of first sheet recesses 15 may be formed at different positions in the Y direction.
  • the plurality of first sheet recesses 15 may be formed at different positions in the X direction.
  • FIG. 21 shows an example in which two first sheet recesses 15 are formed in the first steam flow path region 14 and are aligned in the Y direction.
  • the second sheet 20 may also include a plurality of second sheet recesses 25 .
  • the first liquid flow path portion 60 when the first liquid flow path portion 60 is formed on the second main body surface 30b of the first land portion 33 as shown in FIG. may be smaller than the width w5 of the main groove 61 of the first liquid flow path portion 60 in the first region 5 and the second region 6 .
  • the width w6 of the communication groove 65 is also the same.
  • the second sheet 20 may be positioned inside the bend. In this case, the capillary action of the first liquid flow path portion 60 can be enhanced in the bent region 7 . Therefore, the condensed working fluid 2b can be efficiently moved from the vapor passages 51 and 52 to the first liquid flow path portion 60. As shown in FIG. Moreover, when the second sheet 20 is pressed from the outside, it is possible to suppress the crushing of the main groove 61 and the communication groove 65 of the first liquid flow path portion 60 .
  • the second sheet 20 may be recessed toward the first liquid flow path portion 60 in the bending region 7 .
  • the amount of depression of the second sheet 20 in the bending region 7 may be larger than the amount of depression of the second sheet 20 in the first region 5 and the second region 6 .
  • the recess amount of the second sheet 20 in the first area 5 and the second area 6 may be zero. That is, in the first region 5 and the second region 6 , the second sheet 20 does not have to be recessed toward the first liquid flow path section 60 . In this case, the angle formed by the second seat inner surface 20a and the wall surface 62 of the main groove 61 can be reduced in the bent region 7 .
  • the angle formed by the second seat inner surface 20a and the wall surface of the communication groove 65 can be reduced. As a result, the capillary action of the first liquid flow path portion 60 can be enhanced. Therefore, the condensed working fluid 2b can be smoothly transported toward the evaporation region SR.
  • the first liquid flow path portion 60 when the first liquid flow path portion 60 is formed on the first main body surface 30a of the first land portion 33 as shown in FIG. may be larger than the width w5 of the mainstream groove 61 of the first liquid flow path portion 60 in the first region 5 and the second region 6 .
  • the width w6 of the communication groove 65 is also the same.
  • the depth h1′ of the main groove 61 of the first liquid flow path portion 60 in the bending region 7 shown in FIG. It may be shallower than the depth h1. The same applies to the depth of the communication groove 65 .
  • the second sheet 20 may be positioned inside the bend.
  • the angle formed by the first sheet inner surface 10b and the wall surface 62 of the main groove 61 can be reduced in the bending region 7 .
  • the angle formed by the first seat inner surface 10b and the wall surface of the communication groove 65 can be reduced.
  • the capillary action of the first liquid flow path portion 60 can be enhanced. Therefore, the condensed working fluid 2b can be smoothly transported toward the evaporation region SR.
  • the first sheet 10 may be recessed toward the first liquid flow path portion 60 in the bending region 7 .
  • the amount of depression of the first sheet 10 in the bending region 7 may be larger than the amount of depression of the first sheet 10 in the first region 5 and the second region 6 .
  • the recess amount of the first sheet 10 in the first area 5 and the second area 6 may be zero. That is, in the first region 5 and the second region 6 , the first sheet 10 does not have to be recessed toward the first liquid flow path section 60 . In this case, the angle formed by the first sheet inner surface 10b and the wall surface 62 of the main groove 61 can be further reduced in the bending region 7 .
  • the angle formed by the first seat inner surface 10b and the wall surface of the communication groove 65 can be further reduced. As a result, the capillary action of the first liquid flow path portion 60 can be enhanced. Therefore, the condensed working fluid 2b can be more smoothly transported toward the evaporation region SR.
  • the channel cross-sectional area of the main groove 61 in the bent region 7 may be smaller than the channel cross-sectional area of the main groove 61 in the first region 5 and the second region 6. . Further, the channel cross-sectional area of the communication groove 65 in the bent region 7 may be smaller than the channel cross-sectional area of the communication groove 65 in the first region 5 and the second region 6 . In this case, the capillary action of the first liquid flow path portion 60 can be enhanced in the bent region 7 . Therefore, the condensed working fluid 2b can be smoothly transported toward the evaporation region SR.
  • the first liquid flow path portion 60 is formed on the first body surface 30a of the first land portion 33, and the first land portion 33 When the second liquid flow path portion 70 is formed on the second main body surface 30b of the .
  • the communication path 80 may extend straight in the Z direction and pass through the first land portion 33 .
  • the communication path 80 may be provided at any position on the first land portion 33 .
  • the communication path 80 may be provided at a position overlapping with the main groove 61 of the first liquid flow path section 60 and the main groove 61 of the second liquid flow path section 70 in plan view.
  • the communication path 80 may connect the main groove 61 of the first liquid flow path portion 60 and the main groove 61 of the second liquid flow path portion 70 . Further, as shown in FIG. 24, the communication path 80 may be provided at a position overlapping the communication groove 65 of the first liquid flow path section 60 and the communication groove 65 of the second liquid flow path section 70 in plan view. . In this case, the communication path 80 may connect the communication groove 65 of the first liquid flow path section 60 and the communication groove 65 of the second liquid flow path section 70 .
  • the hydraulic fluid 2b can pass through the communication passage 80 and flow through the other passage portion. Therefore, the working fluid 2b can be smoothly transported toward the evaporation region SR, and the cooling capacity of the vapor chamber 1 can be enhanced.
  • the length L2 of the communication path 80 in the bending region 7 shown in FIG. 26 may be smaller than the length L1 of the communication path 80 in the first region 5 and the second region 6 shown in FIG.
  • the lengths L1 and L2 of the communication path 80 mean distances along the communication path 80.
  • the communication path 80 extends straight in the Z direction as shown in FIGS. length.
  • the liquid flow resistance of the communicating passage 80 in the bent region 7 can be reduced. Therefore, it is possible to efficiently move the condensed working fluid 2b through the communication path 80 from the liquid flow path portion with high capillary action at the flow path angle to the liquid flow path section with low capillary action at the flow path angle. and the cooling capacity of the vapor chamber 1 can be enhanced.
  • the main body surface recessed portion 82 may be formed at a position of the first land portion 33 where the first liquid flow path portion 60 is not provided.
  • the main body surface concave portion 82 is formed on the second main body surface 30b of the first land portion 33, good.
  • the main body surface concave portion 82 is formed on the first main body surface 30a of the first land portion 33. good too.
  • the first liquid flow path portion 60 is formed on the first main body surface 30a of the first land portion 33
  • the second liquid flow path portion 70 is formed on the second main body surface 30b of the first land portion 33.
  • the main body surface recess 82 may be formed at an arbitrary position where the liquid flow path portions 60 and 70 are not formed on the first main body surface 30a or the second main body surface 30b of the first land portion 33 .
  • the main body surface recessed portion 82 is formed in the second main body surface 30 b of the first land portion 33 .
  • the main body surface recessed portion 82 may be formed in a concave shape on the second main body surface 30b of the first land portion 33 .
  • the body surface recess 82 may have any planar shape.
  • the body surface concave portion 82 may be formed in the shape of a pore having a circular (perfectly circular, elliptical, etc.) planar shape.
  • the body surface concave portion 82 may be formed in a groove shape extending in the Y direction.
  • a plurality of main body surface concave portions 82 may be arranged along the Y direction. As shown in FIGS.
  • the plurality of body surface recesses 82 overlap the bending lines 8 in plan view. That is, the plurality of main body surface concave portions 82 are arranged along the bending lines BL. In other words, each main body surface concave portion 82 is formed at a position overlapping the bending line 8 in plan view.
  • the main body surface concave portion 82 may be formed by etching the wick sheet 30 in the etching step of the manufacturing method of the vapor chamber 1 described above.
  • the main body surface recessed portion 82 can also be visually recognized from the outside through the first sheet 10 or the second sheet 20 .
  • the main body surface concave portion 82 functions as a mark of the bending position of the vapor chamber 1 in the bending step of the manufacturing method of the vapor chamber 1 described above. That is, in the bending step, the vapor chamber 1 bent along the bending line 8 can be obtained by bending the vapor chamber 1 along the main body surface concave portion 82 .
  • the main body surface concave portion 82 By forming the main body surface concave portion 82 in this manner, bending workability can be improved. Further, the vapor chamber 1 can be easily bent by forming the main body surface concave portion 82 in the shape of a pore or the shape of a groove. Therefore, manufacturing of the bent vapor chamber 1 can be facilitated.
  • the vapor chamber 1 is bent at right angles so that the first region 5 and the second region 6 are perpendicular to each other.
  • the vapor chamber 1 may be bent in a U shape so that the first region 5 and the second region 6 face each other.
  • the curved region 7 of the vapor chamber 1 is formed in a semicircular arc shape. In this case, the degree of freedom in arranging the vapor chamber 1 within the housing H can be improved. Therefore, for example, even when the electronic device E that generates heat is located away from the housing member Ha that emits heat, the heat of the electronic device E can be transferred to the housing member Ha through the vapor chamber 1 .
  • the first bonding region 13 and the first steam flow path region 14 in the bending region 7 may vary within the bending region 7 .
  • the end of the bending region 7 on the side of the first region 5 is the first bending end 7a
  • the end of the bending region 7 on the side of the second region 6 is the second bending end 7c
  • the end of the bending region 7 on the side of the second region 7c is referred to as an intermediate bent portion 7b.
  • this dimension may increase from the first bent end portion 7a toward the bent intermediate portion 7b.
  • This dimension may be the maximum dimension d2 at the intermediate bending portion 7b.
  • this dimension may decrease from the bending intermediate portion 7b toward the second bending end portion 7c.
  • the thickness direction of the second sheet 20 defined between the second bonding region 23 and the second steam channel region 24 in the bending region 7 when viewed along a direction parallel to the bending line 8. may vary within the bend region 7 .
  • this dimension may increase from the first bent end portion 7a toward the bent intermediate portion 7b.
  • This dimension may be the maximum dimension d4 at the intermediate bending portion 7b.
  • this dimension may decrease from the bending intermediate portion 7b toward the second bending end portion 7c.
  • the capillary action of the flow path corners 55 can be enhanced in the bend middle portion 7b of the bend region 7, which has a particularly large bend, and the condensed working fluid 2b can be transferred to the evaporation region SR. It can be transported smoothly.
  • the surface area of the first sheet 10 and the second sheet 20 can be increased in the bending region 7, and the heat radiation efficiency of the vapor chamber 1 can be improved.
  • an increase in the vapor pressure of the working steam 2a in the curved region 7 can be suppressed, and the difference in vapor pressure of the working steam 2a between the curved region 7 and the first region 5 and the second region 6 can be reduced. Therefore, the working steam 2a can be smoothly transported even in the bent intermediate portion 7b, which has a particularly large bend.
  • the bending line 8 the dimension in the thickness direction of the first sheet 10 defined between the first bonding region 13 and the first steam channel region 14 in the bending region 7 is the bending It may vary within region 7 .
  • this dimension may increase from the first bent end portion 7a toward the bent intermediate portion 7b.
  • This dimension may have a maximum dimension d2 at the mid-bend.
  • this dimension may decrease from the bending intermediate portion 7b toward the second bending end portion 7c.
  • the thickness direction of the second sheet 20 defined between the second bonding region 23 and the second steam channel region 24 in the bending region 7 when viewed along a direction parallel to the bending line 8. may vary within the bend region 7 .
  • this dimension may increase from the first bent end portion 7a toward the bent intermediate portion 7b.
  • This dimension may be the maximum dimension d4 at the intermediate bending portion 7b.
  • this dimension may decrease from the bending intermediate portion 7b toward the second bending end portion 7c. Also in this case, the same effect as the modification shown in FIG. 29 can be obtained.
  • FIG. 30 (Second embodiment) Next, a vapor chamber, an electronic device, and a vapor chamber manufacturing method according to a second embodiment of the present disclosure will be described with reference to FIGS. 30 to 33.
  • FIG. 30 (Second embodiment)
  • the main difference from the second embodiment shown in FIGS. 30 to 33 is that the vapor chamber is bent along a bending line inclined in the first direction.
  • Other configurations are substantially the same as those of the first embodiment shown in FIGS. 30 to 33, the same parts as those in the first embodiment shown in FIGS. 1 to 29 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the vapor chamber 1 according to the present embodiment is bent along a bending line 8 inclined in the X direction in plan view.
  • the bending line 8 shown in FIG. 30 is inclined in the X direction and also in the Y direction.
  • the bending line 8 shown in FIG. 30 also extends in a direction crossing the X direction in plan view.
  • the first region 5, the second region 6, and the bending region 7 may be separated by a boundary line along the bending line 8 that is inclined in the X direction in plan view.
  • FIG. 31 is a plan view showing the steam passages 51 and 52 in which the bent region 7 is developed on a plane.
  • FIG. 32 is a schematic cross-sectional view showing steam passages 51 and 52 along lines DD, EE and FF of FIG. 31, respectively. Line DD, line EE and line FF are defined at different positions in the Y direction.
  • the first steam channel region 14 and the second steam channel region 24 are most recessed at position P1 on line DD.
  • the first steam passage area 14 and the second steam passage area 24 are most recessed.
  • the first steam channel region 14 and the second steam channel region 24 are most recessed.
  • the positions P1, P2, and P3 overlap the bending line 8 in plan view, and are different positions in the X direction in which the steam passages 51 and 52 extend.
  • the positions P1, P2, and P3 of the steam passages 51 and 52 where the cross-sectional area of the steam passages 51 and 52 is the smallest can be shifted in the X direction. Therefore, the positions where the flow path resistance of the working steam 2a is high can be distributed in the flow direction of the working steam 2a, and the obstruction of the flow of the working steam 2a at the passage bent portion 57 can be suppressed.
  • the vapor chamber 1 is bent along the bending line 8 inclined in the X direction. As a result, it is possible to prevent the flow of the working steam 2a in the bending region 7 from being obstructed. Therefore, even when bent, the heat dissipation efficiency of the vapor chamber 1 can be improved.
  • the frame body portion 32 is formed in a rectangular frame shape along the X direction and the Y direction.
  • the frame portion 32 may be inclined with respect to the first land portion 33 extending in the X direction.
  • the frame body portion 32 is formed in a rectangular frame shape that is slanted in the X direction and slanted in the Y direction.
  • the bending line 8 extends along the frame portion 32 .
  • the bending line 8 extends vertically in FIG. Even in this case, the bending line 8 extends in a direction crossing the X direction in plan view.
  • FIG. 33 in the same way as the examples shown in FIGS. can. Therefore, obstruction of the flow of the working steam 2a in the bending region 7 can be suppressed.
  • FIG. 34 (Third Embodiment) Next, a vapor chamber, an electronic device, and a vapor chamber manufacturing method according to a third embodiment of the present disclosure will be described with reference to FIGS. 34 to 37.
  • FIG. 34 (Third Embodiment)
  • the main sheet includes a plurality of second lands extending in the second direction, and the second lands are located in regions other than the bending region.
  • the main difference is that Other configurations are substantially the same as those of the first embodiment shown in FIGS. 34 to 37, the same parts as in the first embodiment shown in FIGS. 1 to 29 are assigned the same reference numerals, and detailed description thereof will be omitted.
  • the wick sheet 30 includes a plurality of second lands 37 extending in the Y direction.
  • a second land portion 37 is located in each of the first region 5 and the second region 6 .
  • a plurality of second land portions 37 may be positioned in each of the first region 5 and the second region 6 .
  • the second land portion 37 can be configured similarly to the first land portion 33 .
  • the first land portion 33 is located in the bending area 7 .
  • the first land portion 33 may be formed from the first region 5 to the second region 6 via the bent region 7 .
  • Each of the first land portions 33 is connected to a second land portion 37 located in the first region 5 .
  • multiple first land portions 33 are connected to one second land portion 37 located in the first region 5 .
  • Each first land portion 33 is connected to a second land portion 37 located in the second region 6 .
  • each first land portion 33 is connected to the corresponding second land portion 37 .
  • one second land portion 37 located in the second region 6 is connected to one first land portion 33 .
  • the steam passage section 50 may include a third steam passage 58, as shown in FIG.
  • the third steam passage 58 is formed between the second lands 37 located in the first region 5 .
  • the third steam passage 58 extends in the Y direction.
  • a third steam passage 58 extending in the Y direction is also formed between the second land portions 37 positioned in the second region 6 .
  • the third steam passage 58 located in the second region 6 communicates with the second steam passage 52 located between the first lands 33 .
  • a third steam passage 58 extending in the Y direction is also formed in the curved region 7 .
  • the third steam passage 58 can be configured similarly to the second steam passage 52 .
  • the first steam passage 51 is formed continuously inside the frame portion 32 and outside the first land portion 33 and the second land portion 37 .
  • the first liquid flow path portion 60 includes a first land liquid flow path portion 71 formed on the first main body surface 30a of the first land portion 33 and a first main body portion of the second land portion 37. and a second land liquid flow path portion 72 formed in the surface 30a.
  • the first land liquid flow path portion 71 and the second land liquid flow path portion 72 each include a plurality of main grooves 61 and a plurality of communication grooves 65 .
  • the main groove 61 of the first land liquid flow path portion 71 extends in the X direction.
  • the communication groove 65 of the first land liquid flow path portion 71 may extend in the Y direction.
  • the main groove 61 of the second land liquid flow path portion 72 extends in the Y direction.
  • the communication groove 65 of the second land liquid flow path portion 72 may extend in the X direction.
  • the first land liquid flow path portion 71 and the second land liquid flow path portion 72 communicate with each other so that the working liquid 2b can come and go. In this manner, the hydraulic fluid 2b can travel between the first region 5 and the second region 6. As shown in FIG.
  • the evaporation regions SR that overlap the electronic device D are located in the first region 5 and the second region 6 respectively.
  • a condensation region CR is located in the first region 5 .
  • a bent region 7 is formed between the first region 5 and the second region 6 .
  • the bending line 8 extends in a direction crossing the X direction in plan view. In FIG. 34, the bend line 8 extends in the Y direction.
  • the working steam 2a can pass through the first steam passage 51, the second steam passage 52, and the third steam passage 58, and between the first region 5 and the second region 6, the working steam 2a can come and go.
  • the bend line 8 overlaps with the third steam passage 58 located in the bend region 7 and extending in the Y direction in plan view.
  • the working steam 2a is transported from the evaporation region SR located in the first region 5 to the condensation region CR, and also transported from the evaporation region SR located in the second region 6 through the curved region 7 to the condensation region CR. .
  • a portion of the working fluid 2b condensed in the condensation region CR is transported toward the evaporation region SR by the capillary action of the second land liquid channel portion 72 located in the first region 5 .
  • Another portion of the working fluid 2b flows from the second land liquid flow path portion 72 located in the first area 5 to the first land liquid flow path portion 71 and the second land liquid flow path portion located in the second area 6. 72 to the evaporation zone SR located in the second zone 6 .
  • the electronic device D is arranged in the first area 5 and the electronic device D is arranged in the second area 6 .
  • heat transfer between the electronic device D in the first region 5 and the electronic device D in the second region 6 can be suppressed. Therefore, it is possible to prevent the other electronic device D from being thermally damaged due to the heat generated by one electronic device D.
  • each of the first land portions 33 is connected to the second land portion 37 . More specifically, each first land portion 33 is connected to the second land portion 37 in the first region 5 and is connected to the second land portion 37 in the second region 6 . This allows the hydraulic fluid 2b to flow between the first region 5 and the second region 6. As shown in FIG. Also, evaporation regions SR on which electronic devices D overlap can be positioned in each of the first region 5 and the second region 6 . As a result, heat generated by a plurality of electronic devices D can be dissipated in one vapor chamber 1 .
  • the bending line 8 may overlap the second land portion 37 located in the bending region 7 in plan view.
  • it may overlap the frame portion 32 .
  • the frame portion 32 includes an inner projecting portion 32a extending in the Y direction. The bending line 8 may overlap with the inner projecting portion 32a.
  • the bending line 8 may overlap a slit 73 formed between the first region 5 and the second region 6, as shown in FIG.
  • the slit 73 is located between the first region 5 and the second region 6, and may be a space where the first sheet 10, the second sheet 20 and the wick sheet 30 do not exist.
  • the electronic device E may include multiple devices D.
  • multiple devices D may include a first device D1 and a second device D2.
  • the first device D1 may be in thermal contact with a first region RR1 of the vapor chamber 101, described below
  • the second device D2 may be in thermal contact with a second region RR2 of the vapor chamber 101, described below. (see FIGS. 38-40).
  • the vapor chamber 101 according to this embodiment will be described.
  • the vapor chamber 101 has a sealed space 103 in which working fluids 102a and 102b are enclosed, and the working fluids 102a and 102b in the sealed space 103 repeatedly undergo phase changes to operate the device D of the electronic device E described above. Designed for effective cooling.
  • the working fluids 102a, 102b include pure water, ethanol, methanol, acetone, etc., and mixtures thereof.
  • the vapor chamber 101 is a curved vapor chamber 101.
  • a vapor chamber 101 can be produced, for example, by bending a thin plate-like vapor chamber 101 as shown in FIG. 40 along a bending line BL.
  • the curved vapor chamber 101 comprises a curved portion BP, a first region RR1 and a second region RR2.
  • “bending” has the same meaning as “bending”, and for example, bending the vapor chamber 101 means bending the vapor chamber 101 .
  • the bent portion BP is a portion where the first sheet 110, the second sheet 120, and the body sheet 130, which constitute the vapor chamber 101 and which will be described later, are bent. Bending portion BP is formed by bending vapor chamber 101 along bending line BL.
  • the bent portion BP is a region having a certain width including the bent line BL.
  • the bending angle at the bent portion BP is arbitrary. In the illustrated example, the bending angle is 90° (right angle). Therefore, as shown in FIG. 39, the cross-sectional shape of the vapor chamber 101 is substantially L-shaped.
  • the present invention is not limited to this.
  • the vapor chamber 101 may be bent so that the cross-sectional shape of the vapor chamber 101 is U-shaped.
  • the vapor chamber 101 may be bent a plurality of times so that the cross-sectional shape of the vapor chamber 101 is U-shaped or the like.
  • the first region RR1 and the second region RR2 are regions separated by the bent portion BP.
  • the first region RR1 is a region on the vapor chamber 101 located on the Y-direction positive side (the front side in FIG. 38) of the bending portion BP
  • the second region RR2 is the bending portion. This is an area on the vapor chamber 101 located on the Z-direction positive side (upper side in FIG. 38) of BP.
  • the first region RR1 extends on the XY plane and the second region RR2 extends on the XZ plane.
  • a plane formed by the first region RR1 and a plane formed by the second region RR2 are orthogonal to each other.
  • the X direction indicates the direction along the longitudinal direction of the vapor chamber 101 in an unbent state as shown in FIG. 40
  • the Y direction indicates the direction along the lateral direction of the vapor chamber 101
  • the Z direction indicates the direction along the thickness direction of the vapor chamber 101 .
  • the X, Y and Z directions are orthogonal to each other.
  • FIGS. 40 to 46 which are views of the vapor chamber 101 in an unbent state, will be used.
  • first region RR1 the region on vapor chamber 101 that becomes first region RR1 described above when bent
  • second region RR1 the region on vapor chamber 101 that becomes RR2
  • a region on the vapor chamber 101 that becomes RR2 is similarly referred to as a second region RR2.
  • the vapor chamber 101 includes a first sheet 110, a second sheet 120, and a main sheet 130 (wick sheet) interposed between the first sheet 110 and the second sheet 120. and have.
  • first sheet 110, body sheet 130 and second sheet 120 are laminated in this order.
  • a vapor chamber 101 shown in FIG. 40 is formed in a thin flat plate shape.
  • the planar shape of the vapor chamber 101 is arbitrary, it may be rectangular as shown in FIG.
  • the planar shape of the vapor chamber 101 may be, for example, a rectangle with one side of 10 mm or more and 200 mm or less and the other side of 50 mm or more and 600 mm or less, or a square with one side of 40 mm or more and 300 mm or less. Its planar dimensions are arbitrary.
  • the planar shape of this vapor chamber 101 is a rectangular shape having a longitudinal direction and a lateral direction. In this case, as shown in FIGS.
  • the first sheet 110, the second sheet 120 and the body sheet 130 in the unbent state also have the same planar shape as the vapor chamber 101 shown in FIG. may
  • the planar shape of the vapor chamber 101 is not limited to a rectangular shape, and may be any shape such as circular, elliptical, L-shaped, T-shaped, and U-shaped.
  • the vapor chamber 101 has evaporation regions SR1 and SR2 where the working fluids 102a and 102b evaporate and condensation regions CR1 and CR2 where the working fluids 102a and 102b condense.
  • first region RR1 of vapor chamber 101 is provided with first evaporation region SR1 and first condensation region CR1
  • second region RR2 of vapor chamber 101 is provided with second evaporation region SR2 and a second condensation region CR2.
  • the first evaporation region SR1 is a region that overlaps (in plan view) the first device D1 when viewed in the thickness direction (Z direction in FIG. 39) of the vapor chamber 101, and the first device D1 is attached. area.
  • the first evaporation region SR1 can be provided at any position in the first region RR1 of the vapor chamber 101.
  • FIG. In the illustrated example, a first evaporation region SR1 is formed on the X-direction positive side (right side in FIG. 40) of the first region RR1 of the vapor chamber 101 .
  • Heat from the first device D1 is transferred to the first evaporation region SR1, and the heat evaporates the liquid of the working fluid (suitably referred to as working liquid 102b) in the first evaporation region SR1.
  • Heat from the first device D1 can be transferred not only to the region overlapping the first device D1, but also to the periphery of the region.
  • the first evaporation region SR1 can include a region overlapping the first device D1 and a surrounding region.
  • the first condensation region CR1 is a region that does not overlap the first device D1 (in a plan view) when viewed in the thickness direction (the Z direction in FIG. 39) of the vapor chamber 101, and is mainly composed of the working fluid gas ( This is the region where the working steam 102a) releases heat and condenses.
  • the first condensation region CR1 can also be said to be the region surrounding the first evaporation region SR1 in the first region RR1.
  • the first condensation region CR1 is formed on the X-direction negative side (left side in FIG. 40) of the first region RR1 of the vapor chamber 101 .
  • the heat of the working steam 102a from the first evaporating region SR1 is released to the first sheet 110 in the first condensation region CR1, and the working steam 102a is cooled and condensed in the first condensation region CR1.
  • the second evaporation region SR2 is a region that overlaps (in plan view) the second device D2 when viewed in the thickness direction (Y direction in FIG. 39) of the vapor chamber 101, and the second device D2 is attached. area.
  • the second evaporation region SR2 can be provided at any position in the second region RR2 of the vapor chamber 101.
  • FIG. In the illustrated example, a second evaporation region SR2 is formed on the X-direction positive side (right side in FIG. 40) of the second region RR2 of the vapor chamber 101 .
  • Heat from the second device D2 is transferred to the second evaporation region SR2, and the heat causes the working liquid 102b to evaporate in the second evaporation region SR2.
  • Heat from the second device D2 can be transmitted not only to the region overlapping the second device D2, but also to the periphery of the region.
  • the second evaporation region SR2 can include the region overlapping the second device D2 and the surrounding region
  • the second condensation region CR2 is a region that does not overlap the second device D2 (in a plan view) when viewed in the thickness direction (Y direction in FIG. 39) of the vapor chamber 101, and is mainly composed of the working steam 102a. is the area where the is released and condensed.
  • the second condensation region CR2 can also be said to be the region around the second evaporation region SR2 in the second region RR2.
  • a second condensation region CR2 is formed on the X-direction negative side (left side in FIG. 40) of the second region RR2 of the vapor chamber 101 .
  • the heat of the working steam 102a from the second evaporation region SR2 is released to the first sheet 110 in the second condensation region CR2, and the working steam 2a is cooled and condensed in the second condensation region CR1.
  • planar view means a state in which the vapor chamber 101 is viewed from a direction orthogonal to the surface receiving heat from the electronic device D and the surface emitting the received heat. That is, it is a state seen from a direction orthogonal to a first sheet outer surface 110a (to be described later) of the first sheet 110 of the vapor chamber 101 and a second sheet outer surface 120b (to be described later) of the second sheet 120 of the vapor chamber 101 .
  • a state viewed from the Z direction corresponds to a planar view.
  • the state viewed from the Y direction corresponds to a planar view.
  • the first sheet 110 includes a first sheet outer surface 110a provided on the side opposite to the body sheet 130, and a first sheet outer surface 110a provided on the side opposite to the first sheet outer surface 110a (that is, on the side of the body sheet 130). and a first seat inner surface 110b.
  • the first sheet 110 may be formed flat overall, and the first sheet 110 may have a uniform thickness overall.
  • a housing member Ha forming a part of a housing H of a mobile terminal or the like is attached to the first sheet outer surface 110a (see FIGS. 38 and 39).
  • the entire first seat outer surface 110a may be covered with the housing member Ha.
  • alignment holes 112 may be provided at the four corners of the first sheet 110 .
  • the second seat 120 has a second seat inner surface 120a provided on the body sheet 130 side and a second seat outer surface 120b provided on the opposite side to the second seat inner surface 120a. have.
  • the second sheet 120 may be formed flat overall, and the second sheet 120 may have a uniform thickness overall. Attached to the second sheet outer surface 120b are the devices D1, D2 described above.
  • alignment holes 122 may be provided at the four corners of the second sheet 120 .
  • the housing member Ha is attached to the first sheet outer surface 110a of the first sheet 110, and the devices D1 and D2 are attached to the second sheet outer surface 120b of the second sheet 120.
  • the devices D1 and D2 may be attached to the first sheet outer surface 110a of the first sheet 110, and the housing member Ha may be attached to the second sheet outer surface 120b of the second sheet 120.
  • the housing member Ha and the devices D1 and D2 may be attached to the first sheet outer surface 110a of the first sheet 110, and the housing member Ha and the devices D1 and D2 may be attached to the second sheet outer surface 120b of the second sheet 120.
  • the body sheet 130 includes a sheet body 131 and a steam channel section 150 provided in the sheet body 131 .
  • the seat body 131 has a first body surface 131a and a second body surface 131b provided opposite to the first body surface 131a.
  • the first body surface 131a is provided on the first sheet 110 side
  • the second body surface 131b is provided on the second sheet 120 side.
  • the first sheet inner surface 110b of the first sheet 110 and the first body surface 131a of the sheet body 131 may be permanently joined together by thermocompression.
  • the second sheet inner surface 120a of the second sheet 120 and the second body surface 131b of the sheet body 131 may be permanently joined together by thermocompression bonding. Diffusion bonding can be given as an example of bonding by thermocompression bonding.
  • the first sheet 110, the second sheet 120 and the main body sheet 130 may be joined by other methods such as brazing instead of diffusion joining as long as they can be permanently joined.
  • the term “permanently joined” is not limited to a strict meaning, and the first sheet 110 and the main body sheet 130 are separated from each other to such an extent that the sealed space 103 can be kept sealed during the operation of the vapor chamber 101 . It is used as a term meaning that the second sheet 120 and the main body sheet 130 are joined to the extent that the joining can be maintained and the joining between the second sheet 120 and the main body sheet 130 can be maintained.
  • the seat body 131 has a frame body portion 132 and a plurality of land portions 133 provided within the frame body portion 132 .
  • the frame portion 132 and the land portion 133 are portions where the material of the main body sheet 130 remains without being etched in the etching process described later.
  • the frame body portion 132 is formed in a rectangular frame shape when viewed in the thickness direction of the main body sheet 130 (the Z direction in FIG. 44).
  • a steam channel portion 150 is provided inside the frame portion 132 .
  • the steam flow path section 150 contains the working fluids 102a, 102b.
  • Each land portion 133 is provided in the steam passage portion 150 so that the working steam 102 a flows around each land portion 133 . That is, the steam flow path portion 150 includes the plurality of land portions 133 described above, and steam passages 151 and 152, which are provided around the land portions 133 and are passages through which the working steam 102a flows. .
  • the land portion 133 extends in the X direction (horizontal direction in FIG. 44), and the planar shape of the land portion 133 is an elongated rectangular shape.
  • the land portions 133 are arranged parallel to each other while being spaced apart in the Y direction (vertical direction in FIG. 44).
  • the width ww1 (see FIG. 45) of the land portion 133 may be, for example, 100 ⁇ m to 3000 ⁇ m.
  • the width ww1 of the land portion 133 is the dimension of the land portion 133 in the Y direction, and means the dimension in the Z direction at the position where the through portion 134, which will be described later, exists.
  • the frame portion 132 and each land portion 133 are joined to the first sheet 110 and the second sheet 120 .
  • a wall surface 153 a of the first steam flow channel recess 153 and a wall surface 154 a of the second steam flow channel recess 154 which will be described later, form side walls of the land portion 133 .
  • the first body surface 131a and the second body surface 131b of the seat body 131 may be formed flat over the frame body portion 132 and each land portion 133 .
  • the steam channel portion 150 is mainly a channel through which the working steam 102a passes.
  • the working fluid 102b may also pass through the steam flow path portion 150 .
  • the steam channel portion 150 may penetrate from the first main body surface 131a to the second main body surface 131b. That is, it may penetrate through the sheet main body 131 of the main body sheet 130 .
  • the steam channel portion 150 may be covered with the first sheet 110 on the first body surface 131a, and may be covered with the second sheet 120 on the second body surface 131b.
  • the steam flow path section 150 has a first steam passage 151 and a plurality of second steam passages 152 .
  • the plurality of lands 133 partition the steam flow path section 150 into a first steam passage 151 and a plurality of second steam passages 152 .
  • the first steam passage 151 is formed between the frame portion 132 and the land portion 133 .
  • the first steam passage 151 is formed continuously inside the frame portion 132 and outside the land portion 133 .
  • the planar shape of the first steam passage 151 is a rectangular frame shape.
  • the second steam passage 152 is provided between land portions 133 adjacent to each other.
  • the second steam passage 152 includes a plurality of steam passages 152a extending in the first direction.
  • the first direction is the X direction. That is, each steam passage 152a extends in the X direction.
  • the planar shape of each steam passage 152a is an elongated rectangular shape. Each steam passage 152a is arranged in parallel.
  • the steam flow path section 150 has the first steam passage 151 in the present embodiment, the steam flow path section 150 does not have to have the first steam passage 151 . That is, the frame portion 132 and the land portion 133 may be arranged adjacent to each other, and no steam passage may be provided between the frame portion 132 and the land portion 133 .
  • the first steam passage 151 and the second steam passage 152 may penetrate from the first body surface 131a of the seat body 131 to the second body surface 131b. That is, it may penetrate through the sheet main body 131 of the main body sheet 130 .
  • the first steam passage 151 and the second steam passage 152 are formed by a first steam passage recess 153 provided in the first body surface 131a and a second steam passage recess 154 provided in the second body surface 131b, respectively. It is configured.
  • the first steam passage recess 153 and the second steam passage recess 154 communicate with each other, and the first steam passage 151 and the second steam passage 152 of the steam passage portion 150 extend from the first main body surface 131a to the second main body surface. 131b.
  • the first steam channel recess 153 is formed in a concave shape on the first main body surface 131a of the main body sheet 130 by etching the first main body surface 131a of the main body sheet 130 in an etching process to be described later.
  • the first steam flow passage recess 153 has a curved wall surface 153a, as shown in FIG.
  • This wall surface 153a defines the first steam flow passage concave portion 153, and in the cross section shown in FIG. 45, the wall surface 153a curves toward the opposing wall surface 153a as it proceeds toward the second main body surface 131b.
  • Such a first steam passage concave portion 153 constitutes part (lower half) of the first steam passage 151 and part (lower half) of the second steam passage 152 .
  • the second steam flow path concave portion 154 is formed in a concave shape on the second main body surface 131b of the main body sheet 130 by etching the second main body surface 131b in an etching process to be described later.
  • the second steam flow passage recess 154 has a curved wall surface 154a, as shown in FIG.
  • This wall surface 154a defines the second steam flow path concave portion 154, and in the cross section shown in FIG. 45, the wall surface 154a curves toward the opposing wall surface 154a as it proceeds toward the first main body surface 131a.
  • Such a second steam passage concave portion 154 constitutes part (upper half) of the first steam passage 151 and part (upper half) of the second steam passage 152 .
  • the wall surface 153a of the first steam flow channel recessed portion 153 and the wall surface 154a of the second steam flow channel recessed portion 154 are connected to form a through portion 134.
  • the wall surface 153a and the wall surface 154a are curved toward the through portion 134, respectively.
  • the planar shape of the penetrating portion 134 in the first steam passage 151 may be a rectangular frame like the first steam passage 151
  • the planar shape of the penetrating portion 134 in the second steam passage 152 may be the shape of the second steam passage. Like 152, it may have an elongated rectangular shape.
  • the penetrating portion 134 may be defined by a ridgeline formed so that the wall surface 153a of the first steam flow path recess 153 and the wall surface 154a of the second steam flow path recess 54 merge and protrude inward.
  • the plane area of the steam channel portion 150 is minimized at the through portion 134 .
  • Widths ww2, ww2' (see FIG. 45) of such penetrating portions 134 may be, for example, 100 ⁇ m to 3000 ⁇ m.
  • the width ww2 of the penetrating portion 134 corresponds to the gap between the land portions 133 adjacent to each other in the Y direction.
  • the width ww2' of the through portion 134 corresponds to the gap between the frame portion 132 and the land portion 133 in the Y direction (or the X direction).
  • the position of the penetrating portion 134 in the Z direction may be an intermediate position between the first main body surface 131a and the second main body surface 131b, or may be shifted downward or upward from the intermediate position. As long as the first steam channel recess 153 and the second steam channel recess 154 communicate with each other, the position of the penetrating portion 134 is arbitrary.
  • the cross-sectional shapes of the first steam passage 151 and the second steam passage 152 are formed so as to include a penetration portion 134 defined by a ridgeline formed to protrude inward.
  • the cross-sectional shape of the first steam passage 151 and the cross-sectional shape of the second steam passage 152 may be trapezoidal, rectangular, or barrel-shaped.
  • the steam flow path section 150 including the first steam path 151 and the second steam path 152 configured in this manner constitutes part of the sealed space 103 described above.
  • the first steam passage 151 and the second steam passage 152 mainly consist of the first seat 110, the second seat 120, the frame portion 132 and the land portion 133 of the seat body 131 described above, is defined by
  • Each steam passage 151, 152 has a relatively large flow cross-sectional area through which the working steam 102a passes.
  • FIG. 41 shows the first steam passage 151, the second steam passage 152, etc. in an enlarged manner for clarity of the drawing, and the number and arrangement of these steam passages 151, 152, etc. 38 to 40 and 44 are different.
  • a plurality of support portions that support the land portion 133 on the frame portion 132 may be provided in the steam flow path portion 150 .
  • a support portion may be provided to support the land portions 133 adjacent to each other. These support portions may be provided on both sides of the land portion 133 in the X direction, or may be provided on both sides of the land portion 133 in the Y direction.
  • the support portion may be formed so as not to block the flow of the working steam 102 a that diffuses through the steam flow path portion 150 .
  • the main body sheet 130 is arranged on one side of the first main body surface 131a and the second main body surface 131b of the sheet body 131, and the other side is formed with a space forming a recessed portion of the steam flow path.
  • the thickness of the support portion can be made thinner than the thickness of the sheet body 131, and the first steam passage 151 and the second steam passage 152 can be prevented from being divided in the X direction and the Y direction. can be done.
  • the second body surface 131b of the sheet body 131 of the body sheet 130 is provided with a liquid flow path portion 160 through which the hydraulic fluid 102b mainly passes. More specifically, the liquid flow path portion 160 is provided on the second main body surface 131 b of each land portion 133 of the main body sheet 130 .
  • the working steam 102 a may also pass through the liquid flow path portion 160 .
  • the liquid channel portion 160 forms part of the above-described sealed space 103 and communicates with the vapor channel portion 150 .
  • the liquid flow path section 160 is configured as a capillary structure (wick) for transporting the working liquid 102b to the evaporation regions SR1 and SR2.
  • the liquid flow path portion 160 may be formed over the entire second body surface 131 b of each land portion 133 .
  • the liquid flow path portion 160 is arranged to extend in the first direction, that is, the X direction.
  • the first body surface 131a of each land portion 133 of the sheet body 131 is not provided with the liquid flow path portion 160, but the second body surface 131b of the land portion 133 of the sheet body 131 is provided with the liquid flow path portion 160.
  • a liquid flow path portion 160 may be provided.
  • the liquid flow path section 160 is composed of a plurality of grooves provided on the second main body surface 131b. More specifically, the liquid flow path section 160 has a plurality of main liquid flow path grooves 161 through which the working fluid 102b passes, and a plurality of liquid flow path communication grooves 165 communicating with the main liquid flow path grooves 161. ing.
  • Each liquid flow channel main groove 161 is formed to extend in the X direction, as shown in FIG.
  • the liquid flow channel main groove 161 has a channel cross-sectional area smaller than that of the first steam channel 151 or the second steam channel 152 of the steam channel portion 150 so that the working fluid 102b mainly flows by capillary action.
  • the main liquid flow channel groove 161 is configured to transport the working liquid 102b condensed from the working steam 102a to the evaporation regions SR1 and SR2.
  • Each liquid flow channel main groove 161 may be spaced apart in the Y direction.
  • the main liquid flow channel groove 161 is formed by etching from the second main body surface 131b of the sheet main body 131 of the main body sheet 130 in an etching process to be described later. As a result, the main liquid flow channel groove 161 has a curved wall surface 162 as shown in FIG. The wall surface 162 defines the main liquid flow channel groove 161 and curves concavely toward the first main body surface 131a.
  • the width ww3 (dimension in the Y direction) of the main liquid flow channel groove 161 shown in FIGS. 45 and 46 may be, for example, 5 ⁇ m to 150 ⁇ m.
  • the width ww3 of the main liquid flow channel groove 161 means the dimension on the second body surface 131b.
  • the depth hh1 (dimension in the Z direction) of the main liquid flow channel groove 161 shown in FIG. 45 may be, for example, 3 ⁇ m to 150 ⁇ m.
  • each liquid channel communication groove 165 extends in a direction different from the X direction.
  • each liquid flow channel communication groove 165 is formed to extend in the Y direction and is formed perpendicular to the main liquid flow channel groove 161 .
  • Some of the liquid flow channel communication grooves 165 are arranged so as to communicate the liquid flow channel main grooves 161 adjacent to each other.
  • Another liquid channel communication groove 165 is arranged so as to communicate the steam channel portion 150 (the first steam passage 151 or the second steam channel 152 ) and the liquid channel main groove 161 . That is, the liquid flow channel connecting groove 165 extends from the edge of the land portion 133 in the Y direction to the main liquid flow channel groove 161 adjacent to the edge. In this manner, the first steam passage 151 or the second steam passage 152 of the steam passage portion 150 and the liquid passage main groove 161 communicate with each other.
  • the liquid channel connecting groove 165 has a channel cross-sectional area smaller than that of the first steam channel 151 or the second steam channel 152 of the steam channel portion 150 so that the working fluid 102b mainly flows by capillary action. .
  • Each liquid channel communication groove 165 may be spaced apart in the X direction.
  • the liquid flow path communication groove 165 is also formed by etching similarly to the liquid flow path main groove 161 and has a curved wall surface (not shown) similar to the liquid flow path main groove 161 .
  • the depth of the liquid channel communication groove 165 may be equal to the depth hh1 of the liquid channel main groove 161, but may be deeper or shallower than the depth hh1.
  • the liquid flow path portion 160 has a liquid flow path projection row 163 provided on the second body surface 131b of the sheet body 131. As shown in FIG. The liquid flow path protrusion row 163 is provided between the liquid flow path main grooves 161 adjacent to each other. Each liquid flow path projection row 163 includes a plurality of liquid flow path projections 164 arranged in the X direction. The liquid flow path convex portion 164 is provided inside the liquid flow path portion 160 and is in contact with the second sheet 120 . Each liquid flow path protrusion 164 is formed in a rectangular shape in plan view so that the X direction is the longitudinal direction.
  • a liquid channel main groove 161 is interposed between the liquid channel convex portions 164 adjacent to each other in the Y direction, and a liquid channel communication groove 165 is interposed between the liquid channel convex portions 164 adjacent to each other in the X direction. It is The liquid channel communication groove 165 is formed to extend in the Y direction, and communicates the liquid channel main grooves 161 adjacent to each other in the Y direction. As a result, the working fluid 102b can flow between the main grooves 161 of the liquid flow path.
  • the liquid flow path protrusions 164 are portions where the material of the main body sheet 130 remains without being etched in the etching process described later.
  • the planar shape of the liquid flow path convex portion 164 (the shape at the position of the second body surface 131b of the sheet body 131 of the body sheet 130) is rectangular.
  • the liquid flow path protrusions 164 are arranged in a zigzag pattern. More specifically, the liquid flow path projections 164 of the liquid flow path projection rows 163 that are adjacent to each other in the Y direction are arranged to be offset from each other in the X direction. This shift amount may be half the arrangement pitch of the liquid flow path protrusions 164 in the X direction.
  • the width ww5 (dimension in the Y direction) of the liquid flow path convex portion 164 may be, for example, 5 ⁇ m to 500 ⁇ m. It should be noted that the width ww5 of the liquid flow path convex portion 164 means the dimension on the second main body surface 131b.
  • the arrangement of the liquid flow path protrusions 164 is not limited to the zigzag pattern, and may be arranged in parallel. In this case, the liquid flow path projections 164 of the liquid flow path projection rows 163 adjacent to each other in the Y direction are also aligned in the X direction.
  • the liquid flow path main groove 161 includes a liquid flow path crossing portion 166 that communicates with the liquid flow path communication groove 165 .
  • the liquid flow path main groove 161 and the liquid flow path connecting groove 165 communicate with each other in a T-shape.
  • the other side For example, it is possible to prevent the fluid channel connecting groove 165 on the lower side in FIG. 46 from communicating with the fluid channel main groove 161 .
  • alignment holes 135 may be provided at the four corners of the sheet body 131 of the body sheet 130 .
  • the planar shape of the alignment hole 135 is circular, but it is not limited to this.
  • the alignment holes 135 may pass through the sheet body 131 of the body sheet 130 .
  • the vapor chamber 101 includes an injection portion 104 for injecting a hydraulic fluid 102b into the sealed space 103, provided at the edge on the negative side in the X direction (left side in FIG. 40).
  • the injection part 104 is arranged on the side of the condensation regions CR1 and CR2.
  • the injection section 104 may have an injection channel 137 formed in the body sheet 130 . After the working fluid 102b is injected, the injection channel 137 may be sealed.
  • the vapor chamber 101 is bent along the bending line BL (see FIGS. 38 and 39).
  • This bending line BL extends in a direction parallel to the first direction in which the steam passage 152a extends. Therefore, vapor chamber 101 is bent along a direction parallel to the first direction.
  • the first direction is the X direction.
  • the vapor chamber 101 may be bent such that the first sheet 110 is positioned on the outside of the bend and the second sheet 120 is positioned on the inside of the bend.
  • the vapor chamber 101 may be bent at the position where the vapor passage 152a is arranged. That is, the vapor chamber 101 may be curved along the vapor passage 152a.
  • the cross-sectional area of the steam passage 152a can be narrowed.
  • contact between the first sheet inner surface 110b of the first sheet 110 and the second sheet inner surface 120a of the second sheet 120 at the bent portion BP reduces the cross-sectional area of the steam passage 152a. can be narrow. This suppresses movement of the working steam 102a between the first region RR1 and the second region RR2.
  • the first sheet 110 When the vapor chamber 101 is bent, the first sheet 110 receives tensile stress at the bent portion BP and is deformed so as to be depressed inward (toward the second sheet 120 side). Further, the second sheet 120 receives compressive stress at the bent portion BP and is deformed so as to be depressed toward the inside (the side of the first sheet 110). As a result, when the vapor chamber 1 is bent, the first sheet inner surface 110b of the first sheet 110 and the second sheet inner surface 120a of the second sheet 120 come into contact with each other as shown in FIG. can be narrowed.
  • the first sheet inner surface 110b of the first sheet 110 and the second sheet inner surface 120a of the second sheet 120 are in contact with each other.
  • the first sheet inner surface 110b of the first sheet 110 and the second sheet inner surface 120a of the second sheet 120 do not contact each other, and a gap is provided between the first sheet inner surface 110b and the second sheet inner surface 120a. good too.
  • the cross-sectional area of the steam passage 152a is narrowed at the bent portion BP, the movement of the working steam 102a between the first region RR1 and the second region RR2 is suppressed.
  • the materials forming the first sheet 110, the second sheet 120 and the body sheet 130 are not particularly limited as long as they have good thermal conductivity. may comprise, for example, copper or copper alloys.
  • the thermal conductivity of each sheet 110, 120, 130 can be increased, and the heat radiation efficiency of the vapor chamber 101 can be increased.
  • these sheets 110, 120, and 130 may be made of other metal materials such as aluminum and titanium, or other metal alloy materials such as stainless steel, as long as the desired heat radiation efficiency can be obtained and corrosion can be prevented. can also
  • a thickness tt1 of the vapor chamber 101 shown in FIG. 41 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • the thickness tt1 of the vapor chamber 101 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • the vapor flow path portion 150 can be properly secured, and the vapor chamber 101 can function properly.
  • the thickness tt1 of the vapor chamber 101 to 1000 ⁇ m or less, thickening of the vapor chamber 101 can be suppressed.
  • the thickness tt2 of the first sheet 110 shown in FIG. 41 may be, for example, 6 ⁇ m to 100 ⁇ m. By setting the thickness tt2 of the first sheet 110 to 6 ⁇ m or more, the mechanical strength of the first sheet 110 can be ensured. On the other hand, by setting the thickness tt2 of the first sheet 110 to 100 ⁇ m or less, it is possible to suppress the thickness tt1 of the vapor chamber 101 from increasing. Similarly, the thickness tt3 of the second sheet 120 shown in FIG. 41 may be set to be the same as the thickness tt2 of the first sheet 110. The thickness tt3 of the second sheet 120 and the thickness tt2 of the first sheet 110 may be different.
  • the thickness tt4 of the body sheet 130 shown in FIG. 41 may be, for example, 50 ⁇ m to 400 ⁇ m.
  • the thickness tt4 of the body sheet 130 By setting the thickness tt4 of the body sheet 130 to 50 ⁇ m or more, the vapor flow path portion 150 can be properly secured, and the vapor chamber 101 can be properly operated.
  • the thickness tt4 of the body sheet 130 by setting the thickness tt4 of the body sheet 130 to 400 ⁇ m or less, it is possible to suppress the thickness tt1 of the vapor chamber 101 from increasing.
  • FIG. 47 a method of manufacturing the vapor chamber 101 having such a configuration will be described with reference to FIGS. 47 to 50.
  • the sheet preparation process includes a first sheet preparation process of preparing the first sheet 110, a second sheet preparation process of preparing the second sheet 120, and a main body sheet preparation process of preparing the main body sheet 130. .
  • a first sheet base material having a desired thickness is prepared.
  • the first sheet base material may be a rolled material.
  • the first sheet 110 having a desired planar shape is formed.
  • the first sheet 110 having a desired planar shape may be formed by pressing the first sheet base material. In this way, the first sheet 110 having the outer contour shape as shown in FIG. 42 can be prepared.
  • a second sheet base material having a desired thickness is prepared.
  • the second sheet base material may be a rolled material.
  • the second sheet 120 having a desired planar shape is formed.
  • the second sheet 120 having a desired planar shape may be formed by pressing the second sheet base material. In this manner, a second sheet 120 having an outer contour shape as shown in FIG. 43 can be prepared.
  • the main body sheet preparation process includes a material sheet preparation process for preparing the metal material sheet M and an etching process for etching the metal material sheet M.
  • a flat metal material sheet M including a first material surface Ma and a second material surface Mb is prepared.
  • the metal material sheet M may be a rolled material having a desired thickness.
  • the metal material sheet M is etched from the first material surface Ma and the second material surface Mb to form the vapor channel portion 150 and the liquid channel portion 160. .
  • a patterned resist film (not shown) is formed on the first material surface Ma and the second material surface Mb of the metal material sheet M by photolithography.
  • the pattern of this resist film includes the patterns of the vapor channel portion 150 and the liquid channel portion 160 described above.
  • the first material surface Ma and the second material surface Mb of the metal material sheet M are etched through the openings of the patterned resist film.
  • the first material surface Ma and the second material surface Mb of the metal material sheet M are pattern-etched to form the vapor channel portion 150 and the liquid channel portion 160 as shown in FIG.
  • an iron chloride-based etchant such as an aqueous ferric chloride solution or a copper chloride-based etchant such as an aqueous copper chloride solution may be used.
  • the first material surface Ma and the second material surface Mb of the metal material sheet M may be etched simultaneously. However, it is not limited to this, and the etching of the first material surface Ma and the second material surface Mb may be performed as separate steps. Also, the vapor channel portion 150 and the liquid channel portion 160 may be formed by etching at the same time, or may be formed by separate steps.
  • a predetermined contour shape as shown in FIG. 44 can be obtained. That is, it is possible to obtain a main body sheet 130 having an outer peripheral edge as shown in FIG.
  • the body sheet 130 as shown in FIG. 44 can be prepared.
  • the first sheet 110, the second sheet 120 and the main body sheet 130 are bonded as shown in FIG.
  • the first sheet 110, the second sheet 120 and the body sheet 130 are laminated in this order.
  • the first body surface 131a of the body sheet 130 is superimposed on the first sheet inner surface 110b of the first sheet 110
  • the second sheet inner surface 120a of the second sheet 120 is superimposed on the second body surface 131b of the main body sheet 130.
  • the sheets 110, 120, and 130 may be aligned using the alignment hole 112 of the first sheet 110, the alignment hole 135 of the body sheet 130, and the alignment hole 122 of the second sheet 120. .
  • the first sheet 110, the second sheet 120 and the main body sheet 130 are temporarily fixed.
  • these sheets 110, 120, 130 may be temporarily fixed by spot resistance welding, or by laser welding these sheets 110, 120, 130 may be temporarily fixed.
  • first sheet 110, the second sheet 120 and the body sheet 130 are permanently joined by thermocompression. These sheets 110, 120, 130 may be permanently joined, for example, by diffusion bonding. As a result, a sealed space 103 having a vapor channel portion 150 and a liquid channel portion 160 is formed between the first sheet 110 and the second sheet 120 . At this stage, the sealed space 103 communicates with the outside through the injection channel 137 without sealing the injection channel 137 .
  • the working fluid 102b is injected into the sealed space 103 from the injection channel 137 of the injection part 104 as an injection process.
  • the injection channel 137 is sealed as a sealing process.
  • communication between the sealed space 103 and the outside is cut off, and the sealed space 103 is sealed. Therefore, the sealed space 103 in which the hydraulic fluid 102b is enclosed can be obtained, and the hydraulic fluid 102b in the sealed space 103 can be prevented from leaking to the outside.
  • first sheet 110, second sheet 120 and main body sheet 130 are bent along bending line BL, that is, in the direction in which steam passage 152a extends. Bend along a direction parallel to the direction.
  • the vapor chamber 101 is formed with a first region RR1 and a second region RR2 separated by the bent portion BP.
  • the vapor chamber 101 is bent at the position where the vapor passage 152a is arranged.
  • the first sheet 110 receives tensile stress at the bent portion BP and is deformed so as to be depressed inward
  • the second sheet 120 receives compressive stress at the bent portion BP.
  • the first sheet inner surface 110b of the first sheet 110 and the second sheet inner surface 120a of the second sheet 120 come into contact with each other at the bent portion BP, and the cross-sectional area of the second steam passage 152 is narrowed. As a result, the movement of the working steam 102a between the first region RR1 and the second region RR2 is suppressed.
  • the curved vapor chamber 101 as shown in FIGS. 38 and 39 can be obtained.
  • the vapor chamber 101 obtained as described above is installed in a housing H of a mobile terminal or the like.
  • the first sheet outer surface 110a of the first sheet 110 is covered with the housing member Ha, and the devices D1 and D2 such as a CPU, which are devices to be cooled, are attached to the second sheet outer surface 120b of the second sheet 120.
  • FIG. A first device D1 is mounted in the first region RR1 of the vapor chamber 101 and a second device D2 is mounted in the second region RR2 of the vapor chamber 101 .
  • the working fluid 102b in the sealed space 103 moves against the wall surfaces of the sealed space 103, that is, the wall surface 153a of the first steam flow channel recess 153, the wall surface 154a of the second steam flow channel recess 154, and the liquid flow channel portion 160 due to its surface tension. adheres to the wall surface 162 of the liquid flow channel main groove 161 and the wall surface of the liquid flow channel connecting groove 165 .
  • the working fluid 102b may also adhere to the portion of the first sheet inner surface 110b of the first sheet 110 that is exposed to the first steam channel recess 153 .
  • the working fluid 102b may also adhere to the portions of the second sheet inner surface 120a of the second sheet 120 exposed to the second vapor channel recess 154, the liquid channel main groove 161, and the liquid channel communication groove 165.
  • the working fluid 102b existing in the first evaporation region SR1 receives heat from the first device D1.
  • the received heat is absorbed as latent heat and the working liquid 102b evaporates (vaporizes) to generate the working vapor 102a.
  • Most of the generated working steam 102a diffuses within the first steam flow channel recess 153 and the second steam flow channel recess 154 that form the sealed space 103 (see solid line arrows in FIG. 44).
  • the working steam 102a in each of the steam flow path recesses 153, 154 is separated from the first evaporation region SR1, and most of the working steam 102a is in the relatively low temperature first condensation region CR1 (left part in FIG. 44). transported to In the first condensation region CR1, the working steam 102a is mainly radiated to the first sheet 110 to be cooled. The heat received by the first seat 110 from the working steam 102a is transferred to the outside air via the housing member Ha (see FIG. 39).
  • the working steam 102a By radiating heat to the first sheet 110 in the first condensation region CR1, the working steam 102a loses the latent heat absorbed in the first evaporation region SR1 and condenses to produce a working fluid 102b.
  • the generated hydraulic fluid 102b adheres to the wall surfaces 153a, 154a of the respective steam flow passage recesses 153, 154, the first sheet inner surface 110b of the first sheet 110, and the second sheet inner surface 120a of the second sheet 120.
  • the working fluid 102b continues to evaporate in the first evaporation region SR1, the working fluid 102b in the first condensation region CR1 moves through the first evaporation region due to the capillary action of each liquid flow channel main groove 161.
  • each liquid flow path main groove 161 and each liquid flow path communication groove 165 are filled with the working fluid 102b. Therefore, the filled working fluid 102b obtains a driving force toward the first evaporation region SR1 due to the capillary action of each liquid flow channel main groove 161, and is smoothly transported toward the first evaporation region SR1. be.
  • each liquid channel main groove 161 communicates with another adjacent liquid channel main groove 161 via the corresponding liquid channel communication groove 165 .
  • the working fluid 102b is prevented from flowing between the main liquid flow channel grooves 161 adjacent to each other, and the occurrence of dryout in the main liquid flow channel grooves 161 is suppressed. Therefore, the working liquid 102b in each liquid flow path main groove 161 is imparted with a capillary action, and the working liquid 102b is smoothly transported toward the first evaporation region SR1.
  • the working fluid 102b that has reached the first evaporation region SR1 receives heat from the first device D1 again and evaporates.
  • the working steam 102a evaporated from the working fluid 102b passes through the liquid flow channel communication groove 165 in the first evaporation region SR1, and flows into the first steam flow channel recess 153 and the second steam flow channel recess 154 having a large flow channel cross-sectional area. , and diffuse in each vapor channel recess 153 , 154 .
  • the working fluids 102a and 102b circulate in the sealed space 103 while repeating phase changes, ie, evaporation and condensation, to transport and release the heat of the first device D1.
  • the first device D1 is cooled.
  • the working fluid 102b present in the second evaporation region SR2 receives heat from the second device D2.
  • the received heat is absorbed as latent heat and the working liquid 102b evaporates (vaporizes) to generate the working vapor 102a.
  • Most of the generated working steam 102a diffuses within the first steam flow channel recess 153 and the second steam flow channel recess 154 that form the sealed space 103 (see solid line arrows in FIG. 44).
  • the working steam 102a in each steam flow passage recess 153, 154 is separated from the second evaporation region SR2, and most of the working steam 102a is in the relatively low temperature second condensation region CR2 (left part in FIG.
  • the working steam 102a transported to In the first condensation region CR2, the working steam 102a is mainly radiated to the first sheet 110 and cooled. The heat received by the first seat 110 from the working steam 102a is transferred to the outside air via the housing member Ha (see FIG. 39).
  • the working steam 102a By radiating heat to the first sheet 110 in the second condensation region CR2, the working steam 102a loses the latent heat absorbed in the second evaporation region SR2 and condenses to produce a working fluid 102b.
  • the generated hydraulic fluid 102b adheres to the wall surfaces 153a, 154a of the respective steam flow passage recesses 153, 154, the first sheet inner surface 110b of the first sheet 110, and the second sheet inner surface 120a of the second sheet 120.
  • the working fluid 102b continues to evaporate in the second evaporation region SR2, the working fluid 102b in the second condensation region CR2 flows through the second evaporation region due to the capillary action of each liquid flow channel main groove 161.
  • each liquid flow path main groove 161 and each liquid flow path communication groove 165 are filled with the working fluid 102b. Therefore, the filled working fluid 102b obtains a driving force toward the second evaporation region SR2 due to the capillary action of each liquid flow channel main groove 161, and is smoothly transported toward the second evaporation region SR2. be.
  • each liquid channel main groove 161 communicates with another adjacent liquid channel main groove 161 via the corresponding liquid channel communication groove 165 .
  • the working fluid 102b is prevented from flowing between the main liquid flow channel grooves 161 adjacent to each other, and the occurrence of dryout in the main liquid flow channel grooves 161 is suppressed. Therefore, a capillary action is imparted to the working fluid 102b in each liquid flow channel main groove 161, and the working fluid 102b is smoothly transported toward the second evaporation region SR2.
  • the working fluid 102b that has reached the second evaporation region SR2 is again heated by the second device D2 and evaporated.
  • the working steam 102a evaporated from the working fluid 102b passes through the liquid flow channel communication groove 165 in the second evaporation region SR2, and flows through the first steam flow channel recess 153 and the second steam flow channel recess 154 having a large flow channel cross-sectional area. , and diffuse in each vapor channel recess 153 , 154 .
  • the working fluids 102a and 102b circulate in the sealed space 103 while repeating phase changes, namely evaporation and condensation, to transport and release the heat of the second device D2.
  • the second device D2 is cooled.
  • vapor chamber 101 is bent along a direction parallel to the first direction, which is the direction in which vapor passage 152a extends.
  • traffic of the working steam 102a between the first region RR1 and the second region RR2 is suppressed. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be suppressed.
  • one vapor chamber 101 can function as a plurality of vapor chambers (two vapor chambers in this embodiment).
  • the working steam 102a receiving heat from the first device D1 It is possible to suppress heat transfer from the region RR1 to the second region RR2 and transfer to the second device D2. Further, for example, when the heat generation amount of the first device D1 is large and the heat generation amount of the second device D2 is small, the working steam 102a that has received heat from the first device D1 moves from the first region RR1 to the second region. It can be suppressed from moving to RR2 and transferring heat to the second device D2.
  • the device D has different heat resistance temperatures depending on its type. Therefore, for example, when the heat resistant temperature of the second device D2 is lower than the heat resistant temperature of the first device D1, the heat of the first device D1 is transferred to the second device D2, D2 can be prevented from being thermally damaged.
  • the vapor chamber 101 is bent along the direction parallel to the first direction. As a result, it is possible to suppress traffic of the working steam 102a between the first region RR1 and the second region RR2 in the bent portion BP. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be suppressed.
  • one vapor chamber 101 can have the functions of a plurality of vapor chambers 101 . Therefore, the manufacturing cost of the vapor chamber 101 can be reduced as compared with the case of manufacturing a plurality of vapor chambers 101 .
  • the vapor chamber 101 is bent along the direction parallel to the first direction, so that the bent portion BP can be prevented from intersecting the steam passage 152a.
  • the vapor chamber 101 is bent along the direction parallel to the first direction, so that the bent portion BP can be prevented from intersecting the steam passage 152a.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged. This can increase the pressure loss of the working steam 102a in the steam passage 152a at the bend BP. Therefore, in the bent portion BP, it is possible to further suppress traffic of the working steam 102a between the first region RR1 and the second region RR2. As a result, heat transfer via the bent portion BP can be further suppressed.
  • the vapor chamber 101 is bent at the position where the vapor passage 152a is arranged, so that the vapor chamber 101 can be easily bent in the step of bending the vapor chamber 101. . Therefore, manufacturing of the curved vapor chamber 101 can be facilitated.
  • the liquid flow path portion 160 is provided on the second body surface 131b of the land portion 133, and the liquid flow path portion 160 is provided on the first body surface 131a of the land portion 133.
  • the present invention is not limited to this, and as shown in FIG. A path portion 160 may be provided.
  • the liquid flow path portion 160 is provided on the second body surface 131b of the land portion 133, and the liquid flow path portion 160 is also provided on the first body surface 131a of the land portion 133. good too.
  • the liquid flow path portion 160 provided on the first body surface 131a and the liquid flow path portion 160 provided on the second body surface 131b may be configured in the same manner, but may be configured differently.
  • the channel cross-sectional area of the liquid channel portion 160 provided on the first body surface 131a is larger than the channel cross-sectional area of the liquid channel portion 160 provided on the second body surface 131b. can also be large.
  • the liquid flow path section 160 provided on the first main body surface 131a may function as a liquid storage section while the electronic device D stops generating heat.
  • the height hh2 of the steam passage 152a may be smaller than the width ww1 of the land portion 133 at the bent portion BP, as shown in FIG.
  • the height hh2 of the steam passage 152a means the minimum dimension of the steam passage 152a in the Z direction, and corresponds to the minimum distance between the first seat inner surface 110b and the second seat inner surface 120a in the Z direction.
  • the width ww1 of the land portion 133 is the dimension of the land portion 133 in the Y direction and means the dimension at the position where the through portion 134 exists in the Z direction.
  • the gap between the first seat inner surface 110b and the second seat inner surface 120a can be made smaller at the bending portion BP, and the vapor passage
  • the channel cross-sectional area of 152a can be made narrower. This can further increase the pressure loss of the working steam 102a in the steam passage 152a at the bend BP. Therefore, in the bent portion BP, the movement of the working steam 102a between the first region RR1 and the second region RR2 can be further suppressed, and heat transfer via the bent portion BP can be further suppressed. can be done.
  • the width ww2a of the steam passage 152a where the bending line BL is positioned may be greater than the width ww2b of the steam passage 152a where the bending line BL is not positioned.
  • the widths ww2a and ww2b of the steam passage 152a are the dimensions of the steam passage 152a in the Y direction, and mean the dimensions in the Z direction at the position where the through portion 134 exists. Widths ww2a and ww2b of the steam passage 152a correspond to gaps between the land portions 133 adjacent to each other in the Y direction.
  • the gap between the first sheet inner surface 110b and the second sheet inner surface 120a can be made smaller at the bent portion BP, and the vapor The cross-sectional area of passage 152a can be made narrower. This can further increase the pressure loss of the working steam 102a in the steam passage 152a at the bend BP. Therefore, in the bent portion BP, the movement of the working steam 102a between the first region RR1 and the second region RR2 can be further suppressed, and heat transfer via the bent portion BP can be further suppressed. can be done.
  • the steam passage 152a where the bending line BL is located and the steam passage 152a where the bending line BL is located are located on the land portion 133 adjacent to the steam passage 152a where the bending line BL is located.
  • a communication groove 136 may be provided to communicate with the non-located steam passage 152a.
  • the working steam 102a can be diffused from the non-bent steam passage 152a to the bent steam passage 152a, and the bent steam passage 152a can be effectively used as a steam passage.
  • the communication groove 136 can store the working fluid 102b by capillary force.
  • the communication grooves 136 may be provided continuously in the X direction, or may be provided in discrete portions in the X direction. In this case, it is possible to obtain the above effects while suppressing a decrease in the mechanical strength of the vapor chamber 101 .
  • the width ww6a of the opening of the steam passage 152a where the bending line BL is located is greater than the width ww6b of the steam passage 152a where the bending line BL is not located. It can be big.
  • the widths ww6a and ww6b of the opening of the steam passage 152a are the dimensions of the opening of the steam passage 152a in the Y direction, and mean the dimensions of the first main body surface 131a or the second main body surface 131b. As shown in FIG.
  • the width ww6a of the opening of the first steam passage recess 153 of the steam passage 152a where the bending line BL is positioned is equal to the width ww6a of the first steam passage recess 153 of the steam passage 152a where the bending line BL is not positioned. It may be larger than the width ww6b of the opening.
  • the width of the opening of the second steam passage recess 154 of the steam passage 152a where the bending line BL is located is the same as the width of the opening of the second steam passage recess 154 of the steam passage 152a where the bending line BL is not located.
  • the cross-sectional area of the steam passage 152a at the bent portion BP can be ensured, and an increase in the pressure loss of the working steam 102a in the steam passage 152a can be suppressed. can be suppressed. Therefore, deterioration of the heat transport capability of the vapor chamber 101 can be suppressed.
  • the present invention is not limited to this, and as shown in FIG. 57, the vapor chamber 101 may be bent at the position where the liquid flow path section 160 is arranged.
  • the bending line BL overlaps one land portion 133 out of the plurality of land portions 133 . Therefore, the vapor chamber 101 is bent at the position where the liquid flow path section 160 is arranged.
  • the liquid channel portion 160 provided in the land portion 133 may be crushed at the bent portion BP, and the channel cross-sectional area of the liquid channel portion 160 may be narrowed. This suppresses movement of the hydraulic fluid 102b between the first region RR1 and the second region RR2.
  • the vapor chamber 101 is bent at the position where the liquid flow path section 160 is arranged.
  • the capillary force of the liquid flow path portion 160 can be increased at the bent portion BP.
  • portions that are thinner or have a smaller cross-sectional area than other portions that are not bent occur, so the capillary force can be increased in these portions. . Therefore, the working fluid 102b condensed at the bent portion BP can be quickly recovered.
  • the bent liquid flow path portion 160 is more likely to collect the working fluid 102b than other portions that are not bent. Therefore, the hydraulic fluid 102b can be distributed to regions where the hydraulic fluid 102b tends to be insufficient via the curved fluid flow path portion 160 . As a result, uneven distribution of the hydraulic fluid 102b in each of the regions RR1 and RR2 can be suppressed. Therefore, the temperature of the vapor chamber 101 can be equalized in each of the regions RR1 and RR2.
  • the vapor chamber 101 is bent at the position where the liquid flow path portion 160 is arranged, thereby suppressing an increase in the pressure loss of the working steam 102a in the steam passage 152a. be able to. Therefore, while suppressing heat transfer via the bent portion BP, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 as a whole. It is important for the vapor chamber 101 to arrange more flow paths in a limited space.
  • the steam passage 152a is a passage through which the working steam 102a flows, that is, it is a passage for transporting heat, it is desirable to arrange as many steam passages 152a as possible.
  • more steam passages 152a can be secured in a limited space. Also, the area of the vapor chamber 101 can be effectively utilized, and the space of the vapor chamber 101 can be saved.
  • the width ww3a of the liquid flow path main groove 161 provided in the land portion 133 where the bending line BL is located is equal to the width ww3a of the land portion 133 where the bending line BL is not located. It may be smaller than the width ww3b of the provided liquid flow channel main groove 161 .
  • the width ww3a of the main liquid flow channel groove 161 in the bent portion BP may be smaller than the width ww3b of the main liquid flow channel groove 161 in the first region RR1 and the second region RR2.
  • the capillary force of the liquid flow path portion 160 can be increased at the bent portion BP. Therefore, the condensed working fluid 102b can be efficiently moved from the steam passage 152a to the liquid flow path portion 160.
  • the second sheet 120 is pressed from the outside, it is possible to prevent the liquid flow path main groove 161 and the liquid flow path connecting groove 165 from being crushed.
  • the second sheet 120 may be recessed toward the liquid flow path portion 160 at the bent portion BP.
  • the amount of depression of the second sheet 120 at the bent portion BP may be larger than the amount of depression of the second sheet 120 at the first region RR1 and the second region RR2.
  • the recess amount of the second sheet 120 in the first region RR1 and the second region RR2 may be zero. That is, in the first region RR1 and the second region RR2, the second sheet 120 does not have to be recessed toward the liquid flow path portion 160.
  • the angle formed by the second sheet inner surface 120a and the wall surface 162 of the main liquid flow channel 161 can be reduced at the bent portion BP.
  • the angle formed by the inner surface 120a of the second sheet and the wall surface of the liquid channel communication groove 165 can be reduced.
  • the capillary force of the liquid flow path section 160 can be increased. Therefore, the condensed working fluid 102b can be smoothly transported toward the evaporation region SR.
  • the liquid flow path portion 160 may be provided on the side of the first sheet 110 located outside the bend. That is, the liquid flow path portion 160 may be provided on the first main body surface 131 a of the land portion 133 .
  • the width ww3c of the liquid flow path main groove 161 provided in the land portion 133 where the bending line BL is located is equal to the width ww3c of the liquid flow path provided in the land portion 133 where the bending line BL is not located. It may be larger than the width ww3d of the main channel groove 161 .
  • the width ww3c of the liquid flow main groove 161 in the bent portion BP may be larger than the width ww3d of the liquid flow main groove 161 in the first region RR1 and the second region RR2. The same applies to the width of the liquid channel connecting groove 165 .
  • the depth hh3c of the main liquid flow channel groove 161 provided in the land portion 133 where the bending line BL is located is the depth hh3d of the main liquid flow channel groove 161 provided in the land portion 133 where the bending line BL is not located.
  • the depth hh3c of the liquid flow main groove 161 in the bent portion BP may be larger than the depth hh3d of the liquid flow main groove 161 in the first region RR1 and the second region RR2.
  • the angle formed by the first sheet inner surface 110b and the wall surface 162 of the main liquid flow channel 161 can be reduced at the bent portion BP.
  • the angle formed by the inner surface 110b of the first sheet and the wall surface of the liquid channel communication groove 165 can be reduced.
  • the capillary force of the liquid flow path portion 160 can be increased. Therefore, the condensed working fluid 102b can be smoothly transported toward the evaporation region SR.
  • the first sheet 110 may be recessed toward the liquid flow path portion 160 at the bent portion BP.
  • the amount of depression of the first sheet 110 in the bent portion BP may be larger than the amount of depression of the first sheet 110 in the first region RR1 and the second region RR2.
  • the recess amount of first sheet 110 in first region RR1 and second region RR2 may be zero. That is, in the first region RR1 and the second region RR2, the first sheet 110 does not have to be recessed toward the liquid flow path portion 160.
  • the angle formed by the first sheet inner surface 110b and the wall surface 162 of the main liquid flow channel 161 can be reduced at the bent portion BP.
  • the angle formed by the inner surface 110b of the first sheet and the wall surface of the liquid channel communication groove 165 can be reduced.
  • the capillary force of the liquid flow path portion 160 can be increased. Therefore, the condensed working fluid 102b can be smoothly transported toward the evaporation region SR.
  • the width ww3a of the main liquid flow channel groove 161 may be smaller than the width ww3b of the main liquid flow channel groove 161, as in the example shown in FIG. The same applies to the width of the liquid channel connecting groove 165 .
  • the second sheet 120 may be recessed toward the liquid flow path portion 160 at the bent portion BP.
  • the width ww3c of the liquid flow path main groove 161 may be larger than the width ww3d of the liquid flow path main groove 161 . The same applies to the width of the liquid channel connecting groove 165 .
  • the depth hh3c of the main liquid flow channel groove 161 may be shallower than the depth hh3d of the main liquid flow channel groove 161 .
  • the first sheet 110 may be recessed toward the liquid flow path portion 160 at the bent portion BP. In this case, both the effect of the example shown in FIG. 58 and the effect of the example shown in FIG. 59 can be obtained.
  • the flow channel cross-sectional area of the liquid flow channel portion 160 provided on the first body surface 131a is larger than the flow channel cross-sectional area of the liquid flow channel portion 160 provided on the second body surface 131b. can also be large.
  • the liquid flow path section 160 provided on the first main body surface 131a may function as a liquid storage section while the electronic device D stops generating heat. In this case, since the capillary force of the liquid flow path portion 160 is increased, the working liquid 102b can be easily drawn into the liquid flow path portion 160 provided on the first main body surface 131a serving as the liquid storage portion.
  • the liquid flow path portion 160 is provided on the second body surface 131b of the land portion 133, and the liquid flow path portion 160 is provided on the first body surface 131a of the land portion 133.
  • a communication path 180 may be provided that communicates the liquid flow path portion 160 provided on the second main body surface 131b with the liquid flow path portion 160 provided on the second main body surface 131b.
  • the communication path 180 may extend straight in the Z direction and pass through the land portion 133 .
  • the communication path 180 may be provided at any position on the land portion 133 .
  • the communication path 180 may be provided at a position that overlaps the main liquid flow channel groove 161 in plan view.
  • the communication path 180 may connect the main liquid flow channel groove 161 of the second main body surface 131b and the main liquid flow channel groove 161 of the second main body surface 131b. Moreover, although not shown, the communication path 180 may be provided at a position overlapping the liquid flow path communication groove 165 in plan view. The communication path 180 may connect the liquid flow path communication groove 165 of the second body surface 131b and the liquid flow path communication groove 165 of the second body surface 131b. Since the communication path 180 is provided, for example, even if the hydraulic fluid 102b becomes difficult to flow at a position other than the bending line BL of one of the liquid flow path portions 160, the hydraulic fluid 102b can flow through the communication path 180. It can flow through the other liquid flow path portion 160 .
  • the working fluid 102b can be smoothly transported toward the evaporation region SR.
  • planar shape of the vapor chamber 101 is rectangular (see FIGS. 40 and 44).
  • the planar shape of the vapor chamber 101 is not limited to this and is arbitrary.
  • the planar shape of the vapor chamber 101 may be a shape combining two rectangular shapes.
  • the vapor chamber 101 has a first portion 101a and a second portion 101b each having a rectangular shape.
  • the planar area of the second portion 101b is smaller than the planar area of the first portion 101a.
  • the second portion 101b is provided so as to protrude from a portion (right half) of the first portion 101a on the positive side in the X direction (right side in FIG. 63) toward the positive side in the Y direction (upper side in FIG. 63).
  • the frame body portion 132 is provided on the periphery of the region composed of the first portion 101a and the second portion 101b.
  • a plurality of land portions 133 are provided in the frame portion 132 .
  • the plurality of land portions 133 includes a plurality of first land portions 133a, a plurality of second land portions 133b, and a plurality of third land portions 133c.
  • Each first land portion 133a is located on the first portion 101a.
  • the first lands 133a extend in the X direction, are spaced apart in the Y direction, and are arranged parallel to each other. In the example shown in FIG. 63, five first lands 133a are provided.
  • Each second land portion 133b is located on the second portion 101b.
  • Each second land portion 133b extends in the X direction, is spaced apart in the Y direction, and is arranged parallel to each other.
  • three second land portions 133b are provided.
  • the dimension of the second land portion 133b in the X direction is smaller than the dimension of the first land portion 133a in the X direction. Also, as shown in FIG. 63, the dimensions of the second land portions 133b in the X direction may be different from each other.
  • Each third land portion 133c connects the first land portion 133a and the second land portion 133b.
  • Each third land portion 133c extends in the Y direction, is spaced apart in the X direction, and is arranged parallel to each other.
  • three third land portions 133c are provided.
  • each third land portion 133c may be connected to the edge of the corresponding second land portion 133b on the X direction negative side (left side in FIG. 63).
  • each third land portion 133c may be connected to the first land portion 133a located on the most positive side in the Y direction (upper side in FIG. 63) among the plurality of first land portions 133a.
  • a liquid flow path portion 160 is provided in each of the first land portion 133a, the second land portion 133b, and the third land portion 133c.
  • the liquid channel portion 160 of the first land portion 133a communicates with the liquid channel portion 160 of the third land portion 133c, and the liquid channel portion 160 of the third land portion 133c communicates with the second land portion 133b. is communicated with the liquid flow path portion 160 of the .
  • the second steam passage 152 includes a steam passage 152a extending in a first direction and a steam passage 152b extending in a second direction orthogonal to the first direction.
  • the first direction is the X direction. That is, the steam passage 152a extends in the X direction, and the steam passage 152b extends in the Y direction.
  • the steam passages 152a are provided between the first lands 133a, between the second lands 133b, and between the first lands 133a and the second lands 133b.
  • the steam passage 152b is provided between each third land portion 133c.
  • the bending line BL is provided at the boundary between the first portion 101a and the second portion 101b of the vapor chamber 101.
  • the first region RR1 is located in the first portion 101a of the vapor chamber 101
  • the second region RR2 is located in the second portion 101b of the vapor chamber 101.
  • the first evaporation region SR1 is provided in the first region RR1 of the vapor chamber 101
  • the second evaporation region SR2 is provided in the second region RR2 of the vapor chamber 101.
  • a first evaporation region SR1 is formed on the X-direction positive side (right side in FIG. 63) of the first region RR1 of the vapor chamber 101 . That is, the first device D1 is attached to the positive side of the first region RR1 in the X direction.
  • a second evaporation region SR2 is formed on the positive side of the second region RR2 of the vapor chamber 101 in the X direction.
  • the second device D2 is attached to the positive side of the second region RR2 in the X direction.
  • a first condensation region CR1 is formed on the X-direction negative side (left side in FIG. 63) of the first region RR1 of the vapor chamber 101 .
  • a second condensation region CR2 is formed on the negative side of the second region RR2 of the vapor chamber 101 in the X direction.
  • the bending line BL extends in a direction parallel to the first direction, which is the direction in which the steam passage 152a extends. Therefore, vapor chamber 101 is bent along a direction parallel to the first direction.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged. That is, the vapor chamber 101 is bent along the vapor passage 152a.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged. This can increase the pressure loss of the working steam 102a in the steam passage 152a at the bend BP. As a result, it is possible to suppress traffic of the working steam 102a between the first region RR1 and the second region RR2 in the bent portion BP. Therefore, heat transfer via the bent portion BP can be further suppressed.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged.
  • the invention is not limited to this, and as shown in FIG. 64, the vapor chamber 101 may be bent at the position where the liquid flow path section 160 is arranged.
  • one land portion 133 out of the plurality of land portions 133 is provided at the boundary between the first portion 101a and the second portion 101b.
  • This land portion 133 is located on the bending line BL. Therefore, the vapor chamber 101 is bent at the position where the liquid flow path section 160 is arranged.
  • the liquid channel portion 160 provided in the land portion 133 may be crushed at the bent portion BP, and the channel cross-sectional area of the liquid channel portion 160 may be narrowed. This suppresses movement of the hydraulic fluid 102b between the first region RR1 and the second region RR2.
  • the vapor chamber 101 is bent at the position where the liquid flow path section 160 is arranged.
  • the capillary force of the liquid flow path portion 160 can be increased at the bent portion BP.
  • the deformation of the cross section produces portions that are thinner or have a smaller cross-sectional area than other portions that are not bent, so the capillary force can be increased in these portions. Therefore, the working fluid 102b condensed at the bent portion BP can be quickly recovered.
  • the bent liquid flow path portion 160 is more likely to collect the working fluid 102b than other portions that are not bent. Therefore, the hydraulic fluid 102b can be distributed to regions where the hydraulic fluid 102b tends to be insufficient via the curved fluid flow path portion 160 . As a result, uneven distribution of the hydraulic fluid 102b in each of the regions RR1 and RR2 can be suppressed. Therefore, the temperature of the vapor chamber 101 can be equalized in each of the regions RR1 and RR2.
  • the vapor chamber 101 is bent at the position where the liquid flow path portion 160 is arranged, thereby suppressing an increase in the pressure loss of the working steam 102a in the steam passage 152a. be able to. Therefore, while suppressing heat transfer via the bent portion BP, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 as a whole. It is important for the vapor chamber 101 to arrange more flow paths in a limited space.
  • the steam passage 152a is a passage through which the working steam 102a flows, that is, it is a passage for transporting heat, it is desirable to arrange as many steam passages 152a as possible.
  • more steam passages 152a can be secured in a limited space. Also, the area of the vapor chamber 101 can be effectively utilized, and the space of the vapor chamber 101 can be saved.
  • the present invention is not limited to this, and as shown in FIG. 65, the vapor chamber 101 may be bent at the position where the reinforcing portion 138 is arranged.
  • the main body sheet 130 has reinforcing portions 138 extending inwardly from the frame portion 132 . Neither the vapor channel portion 150 nor the liquid channel portion 160 is arranged in the reinforcing portion 138 .
  • the reinforcing portion 138 is a portion where the material of the body sheet 130 remains without being etched in the etching process.
  • the frame portion 132 and the reinforcing portion 138 may be formed continuously.
  • the first body surface 131a of the frame portion 132 of the body sheet 130 and the first body surface 131a of the reinforcing portion 138 of the body sheet 130 may be positioned on the same plane.
  • the second main body surface 131b of the frame body portion 132 of the main body sheet 130 and the second main body surface 131b of the reinforcing portion 138 of the main body sheet 130 may be positioned on the same plane.
  • the planar shape of the reinforcing portion 138 may be an elongated rectangular shape extending in the X direction.
  • the reinforcing portion 138 may be provided so as to protrude from the portion positioned on the positive side in the X direction (right side in FIG. 65) of the frame portion 132 toward the negative side in the X direction (left side in FIG. 65). Further, the reinforcing portion 138 may be provided between the above-described first land portion 133a and the above-described second land portion 133b.
  • the bending line BL overlaps the reinforcing portion 138 . Therefore, the vapor chamber 101 is bent at the position where the reinforcing portion 138 is arranged.
  • the vapor chamber 101 is bent at the position where the reinforcing portion 138 is arranged.
  • Heat transfer in the reinforcing portion 138 is performed by heat transfer of the material of the body sheet 130 .
  • the main body sheet 130 is made of copper, its thermal conductivity is about 400 W/(m ⁇ K), and the equivalent thermal conductivity of the vapor chamber 101 can be expected to be 10 times or more.
  • the thermal conductivity of is relatively small. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be further suppressed.
  • the presence of the reinforcing portion 138 can improve the mechanical strength of the vapor chamber 101 at the bent portion BP.
  • the interior of the vapor chamber 101 is hollow, the presence of the reinforcing portion 138 allows a large bulk portion to remain in the interior of the vapor chamber 101, thereby improving the mechanical strength of the vapor chamber 101. can be done.
  • the vapor chamber 101 is bent at the position where the reinforcement portion 138 is arranged, so that the deformation of the vapor passage 152a and the liquid flow passage portion 160 can be suppressed. . Therefore, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 while suppressing heat transfer via the bent portion BP.
  • the planar shape of the vapor chamber 101 is a combination of two rectangular shapes.
  • the planar shape of the vapor chamber 101 is not limited to this and is arbitrary.
  • the planar shape of the vapor chamber 101 may be rectangular.
  • the main sheet 130 may have a reinforcing portion 138, and the bending line BL may overlap the reinforcing portion 138.
  • the vapor chamber 101 may be bent at the position where the reinforcing portion 138 is arranged.
  • the reinforcing portion 138 is positioned between the first region RR1 and the second region RR2.
  • the planar shape of the reinforcing portion 138 may be an elongated rectangular shape extending in the X direction.
  • the reinforcing portion 138 may extend from a portion located on the X direction positive side (right side in FIG. 65) of the frame body portion 132 to a portion located on the X direction negative side (left side in FIG. 65).
  • the first region RR1 and the second region RR2 are separated by the reinforcing portion 138.
  • each region RR1, RR2 can function like an independent vapor chamber.
  • a main body surface recess 182 may be formed in the first main body surface 131a or the second main body surface 131b of the reinforcing portion 138 in the bent portion BP.
  • the main body surface recess 182 is formed in the second main body surface 131b of the reinforcing portion 138.
  • FIGS. 67 and 68 the main body surface recess 182 is formed in the second main body surface 131b of the reinforcing portion 138.
  • the main body surface recessed portion 182 may be formed in a concave shape on the second main body surface 131b of the reinforcing portion 138 .
  • the body surface recess 182 may have any planar shape.
  • the main body surface concave portion 182 may be formed in the shape of a pore having a circular (perfectly circular, elliptical, etc.) planar shape.
  • the body surface concave portion 182 may be formed in a groove shape extending in the X direction.
  • a plurality of body surface concave portions 182 may be arranged along the X direction. As shown in FIGS.
  • the plurality of main body surface concave portions 182 overlap the bending lines BL in plan view. That is, the plurality of main body surface concave portions 182 are arranged along the bending lines BL. In other words, each body surface concave portion 182 is formed at a position overlapping the bending line BL in plan view.
  • the main body surface concave portion 182 may be formed by etching the main body sheet 130 in the etching step of the manufacturing method of the vapor chamber 101 described above.
  • the main body surface recessed portion 182 is also visible from the outside through the first sheet 110 or the second sheet 120 when the vapor chamber 101 is viewed from above. Therefore, the main body surface concave portion 182 functions as a mark of the bending position of the vapor chamber 101 in the bending step of the manufacturing method of the vapor chamber 101 described above. That is, in the bending step, by bending the vapor chamber 101 along the main body surface concave portion 182, the vapor chamber 101 bent along the bending line BL can be obtained.
  • the vapor chamber 101 bent along the bending line BL can be obtained by bending the vapor chamber 101 along the body surface concave portion 182 .
  • bending workability can be improved.
  • the vapor chamber 1 can be easily bent by forming the main body surface concave portion 182 in the shape of a pore or the shape of a groove. Therefore, manufacturing of the curved vapor chamber 101 can be facilitated.
  • the main body surface recessed portion 182 is formed in the second main body surface 131b of the reinforcing portion 138, it becomes easier to bend the vapor chamber 101 so that the second sheet 120 is positioned on the inside of the bend.
  • the main body surface recessed portion 182 may be formed in the first main body surface 131a of the reinforcing portion 138 . In this case, it is facilitated to bend the vapor chamber 101 so that the first sheet 110 is positioned on the inside of the bend. Further, the main body surface recessed portion 182 may be formed on both the first main body surface 131a and the second main body surface 131b of the reinforcing portion 138. As shown in FIG. In this case, bending the vapor chamber 101 to either side is facilitated.
  • a main body surface concave portion 182 may be formed at a position of the land portion 133 where the liquid flow path portion 160 is not provided in the bent portion BP.
  • the body surface concave portion 182 may be formed on the first body surface 131a of the land portion 133.
  • the main body surface concave portion 182 may be formed on the second main body surface 131 b of the land portion 133 .
  • the liquid flow path portion 160 when the liquid flow path portion 160 is provided on both the first main body surface 131a and the second main body surface 131b of the land portion 133, the liquid on the first main body surface 131a or the second main body surface 131b of the land portion 133
  • the main body surface recessed portion 182 may be formed at an arbitrary position where the flow path portion 160 is not provided. Further, the main body surface recessed portion 182 may be formed on both the first main body surface 131 a and the second main body surface 131 b of the land portion 133 . As shown in FIG. 69 , a body surface recess 182 may be formed in the reinforcing portion 138 and a body surface recess 182 may also be formed in the land portion 133 .
  • the plurality of main body surface recessed portions 182 may be arranged along the X direction, and each main body surface recessed portion 182 may overlap the bending line BL in plan view.
  • the body surface concave portion 182 is also formed in the land portion 133, so that the bending workability can be further improved. Also, the vapor chamber 101 can be bent more easily. Therefore, it is possible to further facilitate manufacturing of the curved vapor chamber 101 .
  • the body surface recessed portion 182 may be formed in the land portion 133 .
  • the liquid flow path section 160 is located on the second main body surface 131 b of the land section 133 .
  • a main body surface recess 182 may be formed in the first main body surface 131a of the land portion 133 .
  • a plurality of body surface recesses 182 may be arranged along the X direction, and each body surface recess 182 may overlap the bending line BL in plan view.
  • the body surface concave portion 182 is formed in the land portion 133, so that the bending workability can be improved. Also, the vapor chamber 101 can be easily bent. Therefore, manufacturing of the curved vapor chamber 101 can be facilitated.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged.
  • the invention is not limited to this, and as shown in FIG. 71, the vapor chamber 101 may be bent at the position where the space 139 is arranged.
  • the body sheet 130 has a space 139 provided between the first region RR1 and the second region RR2. Neither the vapor channel portion 150 nor the liquid channel portion 160 is arranged in the space portion 139 .
  • the space 139 is continuous with the space outside the vapor chamber 101 and constitutes part of the space outside the vapor chamber 101 .
  • the planar shape of the space portion 139 may be an elongated rectangular shape extending in the X direction.
  • the space portion 139 may be provided between the above-described first land portion 133a and the above-described second land portion 133b.
  • the space portion 139 has a portion located on the X direction positive side (the right side in FIG. 71) of the frame portion 132 between the first land portion 133a and the second land portion 133b. It may be formed by recessing (on the left side in FIG. 71).
  • the bending line BL (or its extension line) overlaps the space 139 . Therefore, the vapor chamber 101 is bent at the position where the space 139 is arranged.
  • the vapor chamber 101 is bent at the position where the space 139 is arranged.
  • the presence of the space 139 in the bent portion BP can further suppress the movement of the working steam 102a and the working fluid 102b between the first region RR1 and the second region RR2. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be further suppressed.
  • the vapor chamber 101 is bent at the position where the space portion 139 is arranged, so that the vapor chamber 101 can be easily bent in the step of bending the vapor chamber 101. can be done. Therefore, manufacturing of the curved vapor chamber 101 can be facilitated.
  • the vapor chamber 101 is bent at the position where the space portion 139 is arranged, so that deformation of the vapor passage 152a and the liquid flow passage portion 160 can be suppressed. . Therefore, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 while suppressing heat transfer via the bent portion BP.
  • another member can be arranged in the space 139, and the area inside the housing H can be effectively utilized.
  • a projection for positioning the vapor chamber 101 can be arranged in the space 139 .
  • the positioning of the vapor chamber 101 in the housing H can be easily performed.
  • wiring of a device or the like can be passed through the space portion 139 . In this case, the length of the wiring can be shortened, and signal loss can be reduced.
  • the first evaporation region SR1 is provided in the first region RR1 of the vapor chamber 101
  • the second evaporation region SR2 is provided in the second region RR2 of the vapor chamber 101. Examples have been described (see FIGS. 40 and 44). However, the invention is not limited to this, and the evaporation region SR may be provided in either the first region RR1 or the second region RR2.
  • the evaporation area SR is provided in the first area RR1, and the evaporation area SR is not provided in the second area RR2. More specifically, the vaporization region SR is formed on the positive side in the X direction (right side in FIG. 72) of the first region RR1 of the vapor chamber 101 . That is, the device D is attached to the positive side of the first region RR1 in the X direction.
  • a condensation area CR is formed around the evaporation area SR. More specifically, a condensation region CR is formed on the X direction negative side (left side in FIG. 72) of the first region RR1 of the vapor chamber 101 . Also, a condensation region CR is formed in the second region RR2 of the vapor chamber 101 .
  • the evaporation area SR is provided in the first area RR1, and the evaporation area SR is not provided in the second area RR2. Even in such a case, it is possible to suppress traffic of the working steam 2a between the first region RR1 and the second region RR2 in the bent portion BP. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be suppressed.
  • the first evaporation region SR1 is provided in the first region RR1 of the vapor chamber 101
  • the second evaporation region SR2 is provided in the second region RR2 of the vapor chamber 101.
  • the invention is not limited to this, and the vaporization region SR may be provided in either the first region RR1 or the second region RR2, as in the modification shown in FIG.
  • the evaporation area SR is provided in the first area RR1, and the evaporation area SR is not provided in the second area RR2. More specifically, a vaporization region SR is formed on the X-direction negative side (left side in FIG. 73) of the first region RR1 of the vapor chamber 101 . That is, the device D is attached to the negative side of the first region RR1 in the X direction.
  • a condensation area CR is formed around the evaporation area SR. More specifically, a condensation region CR is formed on the positive side of the first region RR1 in the vapor chamber 101 in the X direction (right side in FIG. 73). Also, a condensation region CR is formed in the second region RR2 of the vapor chamber 101 .
  • the evaporation area SR is provided in the first area RR1, and the evaporation area SR is not provided in the second area RR2. Even in such a case, it is possible to suppress traffic of the working steam 102a between the first region RR1 and the second region RR2 in the bent portion BP. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be suppressed.
  • the plurality of land portions 133 includes a plurality of first land portions 133a and a plurality of second land portions 133b extending in the X direction, and a plurality of third land portions 133a and 133b extending in the Y direction.
  • An example including the land portion 133c has been described. However, it is not limited to this, and the form and arrangement of the plurality of lands 133 are arbitrary.
  • the plurality of land portions 133 may include a plurality of first land portions 133a extending in the X direction and a plurality of second land portions 133b extending in the Y direction. .
  • the plurality of land portions 133 includes a plurality of first land portions 133a and a plurality of second land portions 133b.
  • Each first land portion 133a is located on the first portion 101a. Each first land portion 133a extends in the X direction. Each first land portion 133a extends from the position on the X direction negative side (left side in FIG. 74) of the first portion 101a toward the X direction positive side (right side in FIG. 74). The first lands 133a are spaced apart in the Y direction and arranged parallel to each other. In the example shown in FIG. 74, five first lands 133a are provided. As shown in FIG. 74, the dimensions of each first land portion 133a in the X direction may be different from each other.
  • Each second land portion 133b is mainly located on the second portion 101b, but is also located so as to straddle the first portion 101a.
  • Each second land portion 133b extends in the Y direction.
  • Each second land portion 133b extends from a position on the positive side in the Y direction (upper side in FIG. 74) of the second portion 101b toward the negative side in the Y direction (lower side in FIG. 74).
  • the second lands 133b are arranged parallel to each other with a space in the X direction. In the example shown in FIG. 74, five second lands 133b are provided. As shown in FIG. 74, the dimensions of the second land portions 133b in the Y direction may differ from each other.
  • each second land portion 133b is connected to the corresponding first land portion 133a. More specifically, the edge of each second land portion 133b on the negative side in the Y direction (lower side in FIG. 74) is located on the positive side in the X direction (right side in FIG. 74) of the corresponding first land portion 133a. connected to the edge.
  • the land portion 133 having an L-shaped planar shape is formed by the first land portion 133a and the second land portion 133b.
  • a liquid flow path portion 160 is provided in each of the first land portion 133a and the second land portion 133b.
  • the liquid channel portion 160 of the first land portion 133a communicates with the liquid channel portion 160 of the second land portion 133b.
  • the second steam passage 152 includes a steam passage 152a extending in a first direction and a steam passage 152b extending in a second direction orthogonal to the first direction.
  • the first direction is the Y direction. That is, the steam passage 152a extends in the Y direction, and the steam passage 152b extends in the X direction.
  • the steam passage 152a is provided between each second land portion 133b.
  • the steam passage 152b is provided between each first land portion 133a.
  • the bending line BL is provided across the first portion 101a and the second portion 101b. Bending line BL extends in a direction parallel to the first direction in which steam passage 152a extends. Therefore, vapor chamber 101 is bent along a direction parallel to the first direction.
  • the bending line BL overlaps the steam passage 152a provided between the adjacent second land portions 133b. Therefore, the vapor chamber 101 is bent at the position where the vapor passage 152a is arranged. That is, the vapor chamber 101 is bent along the vapor passage 152a.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged, so that the pressure loss of the working steam 102a in the steam passage 152a at the bent portion BP can be increased. can.
  • the plurality of land portions 133 includes a plurality of first land portions 133a extending in the X direction, a plurality of second land portions 133b extending in the Y direction, and a plurality of radially extending land portions 133b. 3 land portions 133c.
  • the planar shape of the vapor chamber 101 is rectangular.
  • a first region RR1 is provided on the negative side of the vapor chamber 101 in the X direction (left side in FIG. 75), and a second region RR2 is provided on the positive side in the X direction of the vapor chamber 101 (right side in FIG. 75).
  • a vaporization region SR is provided in the first region RR1. More specifically, the evaporation region SR is formed on the Y-direction positive side (upper side in FIG. 75) of the first region RR1.
  • a condensation area CR is formed around the evaporation area SR. More specifically, a condensation region CR is formed on the X-direction negative side (lower side in FIG. 75) of the first region RR1 of the vapor chamber 101 . Also, a condensation region CR is formed in the second region RR2 of the vapor chamber 101 .
  • the plurality of land portions 133 includes a plurality of first land portions 133a, a plurality of second land portions 133b, and a plurality of third land portions 133c.
  • Each first land portion 133a is located on the positive side of the vapor chamber 101 in the Y direction (upper side in FIG. 75). Each first land portion 133a extends in the X direction. Each first land portion 133a extends from a position on the X-direction negative side (left side in FIG. 75) of the vapor chamber 101 toward the X-direction positive side (right side in FIG. 75). The first lands 133a are spaced apart in the Y direction and arranged parallel to each other. In the example shown in FIG. 75, four first lands 133a are provided. As shown in FIG. 75, the dimensions of each first land portion 133a in the X direction may be different from each other.
  • Each second land portion 133b is located on the Y-direction negative side of the vapor chamber 101 (lower side in FIG. 75). Each second land portion 133b extends in the Y direction. Each second land portion 133b extends to the negative side in the Y direction so as to branch off from the first land portion 133a located on the negative side in the Y direction. The second land portions 133b are arranged parallel to each other with a space in the Y direction. In the example shown in FIG. 75, four second land portions 133b are provided.
  • Each third land portion 133c is located on the positive side of the vapor chamber 101 in the X direction (right side in FIG. 75). Each third land portion 133c extends radially. Each third land portion 133c extends so as to spread from the edge of the corresponding first land portion 133a on the positive side in the X direction or from an arbitrary position. Each third land portion 133c is arranged such that the distance between each third land portion 133c increases as the distance from the evaporation region SR increases. In the example shown in FIG. 75, five third land portions 133c are provided.
  • a liquid flow path portion 160 is provided in each of the first land portion 133a, the second land portion 133b, and the third land portion 133c.
  • the liquid channel portion 160 of the first land portion 133a communicates with the liquid channel portion 160 of the second land portion 133b and the liquid channel portion 160 of the third land portion 133c.
  • the second steam passage 152 includes a steam passage 152a extending in a first direction, a steam passage 152b extending in a second direction orthogonal to the first direction, and a steam passage 152c radially extending.
  • the first direction is the Y direction. That is, the steam passage 152a extends in the Y direction, and the steam passage 152b extends in the X direction.
  • the steam passage 152c extends so that its width widens with distance from the evaporation region SR.
  • the steam passage 152a is provided between each second land portion 133b.
  • the steam passage 152b is provided between each first land portion 133a.
  • the steam passage 152c is provided between each third land portion 133c.
  • the bending line BL extends in a direction parallel to the first direction in which the steam passage 152a extends. Therefore, vapor chamber 101 is bent along a direction parallel to the first direction.
  • the bending line BL overlaps the steam passage 152a provided between the adjacent second land portions 133b. Therefore, the vapor chamber 101 is bent at the position where the vapor passage 152a is arranged. That is, the vapor chamber 101 is bent along the vapor passage 152a.
  • the vapor chamber 101 is bent at the position where the steam passage 152a is arranged, so that the pressure loss of the working steam 102a in the steam passage 152a at the bent portion BP can be increased. can.
  • the second steam passage 152 includes radially extending steam passages 152c.
  • the working steam 102a can be uniformly transported within the XY plane of the vapor chamber 101, and the heat can be spread uniformly. Therefore, the heat dissipation efficiency of the vapor chamber 101 can be improved.
  • the present invention is not limited to this.
  • the vapor chamber 101 may be bent in a U shape so that the first region RR1 and the second region RR2 face each other.
  • the bent portion BP of the vapor chamber 101 is formed in a semicircular arc shape. In this case, the degree of freedom in arranging the vapor chamber 101 within the housing H can be improved.
  • the first device D1 can be brought into thermal contact with the first region RR1 of the vapor chamber 101 even if the first device D1 and the second device D2 are located apart.
  • the second device D2 can be in thermal contact with the second region RR2 of the vapor chamber 101 . This makes it unnecessary to prepare a plurality of vapor chambers 101 . Therefore, the manufacturing cost of the vapor chamber 101 can be reduced as compared with the case of manufacturing a plurality of vapor chambers 101 .
  • the first sheet 110 may be recessed toward the steam passage 152a.
  • the amount of depression of the first sheet 110 in the bent portion BP may be larger than the amount of depression of the first sheet 110 in the first region RR1 and the second region RR2.
  • the recess amount of first sheet 110 in first region RR1 and second region RR2 may be zero. That is, in the first region RR1 and the second region RR2, the first sheet 110 does not have to be recessed toward the steam passage 152a.
  • channel corners with enhanced capillary action can be formed between the first sheet inner surface 110b and the wall surface 153a of the first steam channel recess 153 in the bent portion BP.
  • the working fluid 102b condensed at the bending portion BP can be quickly recovered. Therefore, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 while suppressing heat transfer via the bent portion BP.
  • the second sheet 120 may be recessed toward the steam passage 152a at the bent portion BP.
  • the amount of depression of the second sheet 120 at the bent portion BP may be larger than the amount of depression of the second sheet 120 at the first region RR1 and the second region RR2.
  • the recess amount of the second sheet 120 in the first region RR1 and the second region RR2 may be zero. That is, in the first region RR1 and the second region RR2, the second seat 120 does not have to be recessed toward the steam passage 152a.
  • channel corners with enhanced capillary action can be formed between the second sheet inner surface 120a and the wall surface 154a of the second steam channel recess 154 in the bent portion BP.
  • the working fluid 102b condensed at the bending portion BP can be quickly recovered. Therefore, it is possible to suppress a decrease in the heat transport capability of the vapor chamber 101 while suppressing heat transfer via the bent portion BP.
  • the height hh2a of the steam passage 152a at the bent portion BP is greater than the height hh2b of the liquid flow path main groove 161 at the first region RR1 and the second region RR2. It can be small.
  • the height hh2a, hh2b of the steam passage 152a means the minimum dimension of the steam passage 152a in the Z direction and corresponds to the minimum distance between the first seat inner surface 110b and the second seat inner surface 120a in the Z direction. .
  • the cross-sectional area of the steam passage 152a can be narrowed at the bent portion BP. Therefore, the flow path resistance of the working steam 2a can be increased at the bent portion BP, and heat transfer via the bent portion BP can be further suppressed.
  • the height hh2a of the steam passage 152a at the bent portion BP may be zero, but may not be zero. That is, a gap may be provided between the first seat inner surface 110b and the second seat inner surface 120a. In this case, the capillary force between the first seat inner surface 110b and the second seat inner surface 120a can be increased. As a result, the condensed working fluid 102b can be retained in the vapor passage 152a by capillary force. In this case, as shown in FIG. 77, a wall LW of condensed working fluid 102b may be formed in the steam passage 152a. As a result, the cross-sectional area of the steam passage 152a is narrowed at the bent portion BP, and the flow resistance of the working steam 2a can be increased. Therefore, heat transfer via the bent portion BP can be suppressed.
  • the height hh2a of each steam passage 152a in the bent portion BP may be different from each other.
  • the end of the bent portion BP on the side of the first region RR1 is the first bent end BE1
  • the end of the bent portion BP on the side of the second region RR2 is the second bent end BE2
  • An intermediate portion between the first bent end portion BE1 and the second bent end portion BE2 is referred to as an intermediate bent portion BM.
  • the height hh2a of the steam passage 152a located near the middle bend BM is the height hh2a of the steam passage 152a located near the first bend end BE1 and the second It may be smaller than the height hh2a of the steam passage 152a located near the bent end BE2. That is, within the bend BP, the height hh2a of each steam passage 152a decreases from the first bend end BE1 toward the bend intermediate portion BM, and increases from the bend intermediate portion BM toward the second bend end BE2. It may be.
  • the vapor chamber 101 is the modified example shown in FIG. may have the same configuration as That is, at the bent portion BP, the first sheet 110 may be recessed toward the steam passage 152a, and the second seat 120 may be recessed toward the steam passage 152a. Also, the height hh2a of the steam passage 152a in the bent portion BP may be smaller than the height hh2a of the liquid flow path main groove 161 in the first region RR1 and the second region RR2.
  • each steam passage 152a decreases from the first bent end BE1 toward the intermediate bent portion BM, and increases from the intermediate bent portion BM toward the second bent end BE2. It may be. Even in such a case, the same effect as the modification shown in FIG. 76 can be obtained.
  • the vapor chamber 101 is composed of the first sheet 110, the second sheet 120, and the body sheet 130 (see FIG. 41).
  • the vapor chamber 101 may be composed of the first sheet 110 and the body sheet 130 .
  • the vapor chamber 101 includes the first sheet 110 and the body sheet 130, but does not include the second sheet 120.
  • the main sheet 130 and the first sheet 110 are laminated in this order.
  • Device D may be attached to first sheet outer surface 110 a of first sheet 110 .
  • the housing member Ha may be attached to the second body surface 131 b of the body sheet 130 .
  • the heat of the working steam 102a is transferred from the body sheet 130 to the housing member Ha.
  • the steam channel portion 150 is provided on the first body surface 131a, but does not reach the second body surface 131b and does not penetrate the sheet body 131 of the body sheet 130. . That is, the first steam passage 151 and the second steam passage 152 of the steam passage portion 150 are configured by the first steam passage recess 153, and the body sheet 130 is not provided with the second steam passage recess 154. .
  • a thickness tt5 of the vapor chamber 101 shown in FIG. 79 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • a thickness tt6 of the first sheet 110 shown in FIG. 79 may be, for example, 6 ⁇ m to 200 ⁇ m.
  • a thickness tt7 of the body sheet 130 shown in FIG. 79 may be, for example, 50 ⁇ m to 800 ⁇ m.
  • a steam channel portion 150' may be provided on the first sheet inner surface 110b of the first sheet 110 as shown in FIG.
  • the steam channel portion 150 ′ of the first sheet 110 may be provided at a position facing the steam channel portion 150 of the body sheet 130 . That is, the steam passage portion 150′ of the first sheet 110 includes a first steam passage 151′ facing the first steam passage 151 of the body sheet 130, and a second steam passage 152 facing the second steam passage 152 of the body sheet 130. passageway 152' and .
  • Each dimension of the steam channel portion 150 ′ of the first sheet 110 may be approximately the same as each dimension of the steam channel portion 150 of the main body sheet 130 .
  • the thickness tt7' of the first sheet 110 shown in FIG. 80 may be approximately the same as the thickness tt7 of the main body sheet 130.
  • the first sheet 110 is not provided with the liquid flow path section 160, but the present invention is not limited to this, and the first sheet 110 is provided with the liquid flow path section 160. may have been
  • the vapor chamber 101 is composed of the first sheet 110 and the body sheet 130. As shown in FIG. Even in such a case, since the vapor chamber 101 is bent along the direction parallel to the first direction, there is a gap between the first region RR1 and the second region RR2 at the bent portion BP. Commuting of the working steam 102a can be suppressed. Therefore, in the bent vapor chamber 101, heat transfer via the bent portion BP can be suppressed.
  • the vapor chamber 101 is made up of the first sheet 110 and the body sheet 130, so that the vapor chamber 101 can be made even thinner.
  • the present invention is not limited to the above-described embodiments and modifications as they are, and can be embodied by modifying the constituent elements without departing from the gist of the invention at the implementation stage. Further, various inventions can be formed by appropriate combinations of the plurality of constituent elements disclosed in each of the above embodiments and modifications. Some components may be deleted from all the components shown in each of the above embodiments and modifications.

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  • Sustainable Development (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structure Of Printed Boards (AREA)
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  • Reciprocating Pumps (AREA)
PCT/JP2022/036767 2021-09-30 2022-09-30 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法 Ceased WO2023054692A1 (ja)

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JP2023513244A JP7315121B1 (ja) 2021-09-30 2022-09-30 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法
KR1020247013919A KR20240089099A (ko) 2021-09-30 2022-09-30 베이퍼 챔버, 전자 기기 및 베이퍼 챔버의 제조 방법
CN202280063848.1A CN117980684A (zh) 2021-09-30 2022-09-30 蒸发室、电子设备以及蒸发室的制造方法
US18/695,460 US20250185214A1 (en) 2021-09-30 2022-09-30 Vapor chamber, electronic apparatus, and method for manufacturing vapor chamber
CN202280075084.8A CN118265887A (zh) 2021-11-12 2022-11-11 蒸发室、电子设备以及蒸发室用的主体片材
KR1020247019112A KR20240109609A (ko) 2021-11-12 2022-11-11 베이퍼 챔버, 전자 기기 및 베이퍼 챔버용 본체 시트
JP2023559926A JP7525076B2 (ja) 2021-11-12 2022-11-11 ベーパーチャンバ、電子機器およびベーパーチャンバ用の本体シート
TW111143246A TW202328621A (zh) 2021-11-12 2022-11-11 蒸氣腔、電子機器及蒸氣腔用之本體片材
PCT/JP2022/042105 WO2023085401A1 (ja) 2021-11-12 2022-11-11 ベーパーチャンバ、電子機器およびベーパーチャンバ用の本体シート
KR1020247021958A KR20240122797A (ko) 2021-12-06 2022-12-06 베이퍼 챔버 및 전자 기기
JP2023541845A JP7344481B1 (ja) 2021-12-06 2022-12-06 ベーパーチャンバおよび電子機器
TW111146813A TW202328622A (zh) 2021-12-06 2022-12-06 蒸氣腔及電子機器
PCT/JP2022/044874 WO2023106285A1 (ja) 2021-12-06 2022-12-06 ベーパーチャンバおよび電子機器
US18/717,091 US20250048591A1 (en) 2021-12-06 2022-12-06 Vapor chamber and electronic apparatus
JP2023115429A JP7473064B2 (ja) 2021-09-30 2023-07-13 ベーパーチャンバおよび電子機器
JP2023142567A JP7568017B2 (ja) 2021-12-06 2023-09-01 ベーパーチャンバおよび電子機器
JP2023214064A JP7709686B2 (ja) 2021-09-30 2023-12-19 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法
JP2024111956A JP2024133703A (ja) 2021-11-12 2024-07-11 ベーパーチャンバ、電子機器およびベーパーチャンバ用の本体シート
JP2024172796A JP7800847B2 (ja) 2021-12-06 2024-10-01 ベーパーチャンバおよび電子機器
JP2025107427A JP2025148370A (ja) 2021-09-30 2025-06-25 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法
JP2025282471A JP2026049011A (ja) 2021-12-06 2025-12-25 ベーパーチャンバおよび電子機器

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