WO2022215551A1 - タングステン材料 - Google Patents

タングステン材料 Download PDF

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WO2022215551A1
WO2022215551A1 PCT/JP2022/014433 JP2022014433W WO2022215551A1 WO 2022215551 A1 WO2022215551 A1 WO 2022215551A1 JP 2022014433 W JP2022014433 W JP 2022014433W WO 2022215551 A1 WO2022215551 A1 WO 2022215551A1
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Prior art keywords
tungsten material
tungsten
less
temperature
crystal grain
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PCT/JP2022/014433
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English (en)
French (fr)
Japanese (ja)
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武志 飯倉
孝典 角倉
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ALMT Corp
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ALMT Corp
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Priority to CN202510391186.6A priority Critical patent/CN120210625A/zh
Priority to CN202510390529.7A priority patent/CN120210624A/zh
Priority to JP2022552608A priority patent/JP7241983B2/ja
Priority to US17/928,531 priority patent/US20230212726A1/en
Priority to KR1020227043213A priority patent/KR102830735B1/ko
Priority to CN202280005064.3A priority patent/CN115917025B/zh
Priority to EP22784536.9A priority patent/EP4144879A4/en
Publication of WO2022215551A1 publication Critical patent/WO2022215551A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/04—Alloys based on tungsten or molybdenum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/052—Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • B22F1/145—Chemical treatment, e.g. passivation or decarburisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/1003—Use of special medium during sintering, e.g. sintering aid
    • B22F3/1007—Atmosphere
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/045—Alloys based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/05—Mixtures of metal powder with non-metallic powder
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18—High-melting or refractory metals or alloys based thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Definitions

  • Patent Document 1 Japanese Patent Application Laid-Open No. 62-146235
  • the angle formed by the specific crystal orientation of the first crystal grain and the specific crystal orientation of the second crystal grain adjacent to the first crystal grain is 2 to 15 degrees.
  • the ratio is 50% or more.
  • FIG. 1 is a structural diagram of a tungsten material having multiple grains.
  • the tungsten member contains 0.003 to 0.05% by mass of K/Si, and has a secondary recrystallized grain range of 1 or less per 100 mm 2 . ing. Tungsten members can reduce grain boundaries that cause intergranular cracks in high-temperature structural materials such as furnace internals, and have excellent high-temperature creep strength.
  • Tungsten is one of the high-melting-point materials (melting point 3422°C), and can be used in high-temperature heating furnaces that can be used even with temperature loads exceeding 2000°C.
  • deformation and cracking occur during long-term use. As a result, stable operation of the furnace becomes difficult.
  • Tungsten materials that have been plastically worked by rolling or the like are used for furnace members, but generally recrystallization occurs when exposed to temperatures exceeding 1200°C, and grain growth occurs when the heat load temperature exceeds 1800°C. As a result, deformation and cracking are more likely to occur.
  • Tungsten material has a high melting point and is used as a high-temperature furnace member. Tungsten materials that are used at high temperatures have coarsened crystal grains due to long-term use at high temperatures and have high-temperature creep characteristics. On the other hand, it has a weak side against thermal shocks that are repeated in a short period.
  • Furnace components used in high-temperature atmospheres are made of materials such as tungsten to ensure high-temperature deformation resistance.
  • Tungsten which is difficult to deform at high temperatures, has large grains and a high Young's modulus. Therefore, it is susceptible to thermal shock in a short period, such as abrupt cutoff of power supply, and is vulnerable to heat shock.
  • Tungsten materials with a crystal grain size exceeding 200 ⁇ m may be cracked by heat shock due to sudden temperature rise or power off when used at temperatures exceeding 2000 ° C, and the stable operation of the furnace cannot be continued. there were.
  • novel processing conditions are employed to obtain a tungsten material in which grain boundary properties and lattice strain of a rolled material are controlled, thereby improving heat shock resistance properties.
  • the tungsten material of the present disclosure increases crack resistance against sudden temperature changes (including repetition) by controlling the crystal grain size of recrystallized grains under a temperature load of 2000 ° C. to 200 ⁇ m or less, and has a long furnace life. can contribute to
  • the tungsten material of the present disclosure is used in high-temperature heat load members such as heaters and reflectors used in high-temperature heating furnaces, members that receive electron beam irradiation such as fixed anodes or rotating targets of X-ray generators, and nuclear fusion reactors. It can be used for members such as divertors and inner wall materials that face high-temperature plasma or are exposed to neutrons.
  • the angle formed by the specific crystal orientation of the first crystal grain and the specific crystal orientation of the second crystal grain adjacent to the first crystal grain is 2 to It relates to a tungsten material having a proportion of 15° (low angle grain boundary) of 50% or more.
  • this ratio is less than 50%, a heat load of 2000°C will cause grain growth beyond 200 ⁇ m where deformation and cracking are likely to occur. More preferably, this percentage is 55% or more.
  • the term “low angle grain boundary” means that the angle formed by the specific crystal orientation of the first crystal grain and the specific crystal orientation of the second crystal grain adjacent to the first crystal grain is 2 to 15°. This low angle grain boundary is more preferably 80% or less. It is difficult to increase the ratio to more than 80%, and it is not suitable for mass production because cracks may occur due to processing and precise control of conditions is required.
  • Fig. 1 is a structural diagram of a tungsten material having a plurality of crystal grains.
  • the tungsten material 1 has a plurality of grains 11,12,13. Boundaries of the plurality of crystal grains 11, 12, 13 are crystal grain boundaries 21, 22.
  • FIG. A specific crystallographic orientation (eg, ⁇ 100>) in grain 12 is indicated by arrow 32 .
  • the crystal orientation in grain 13 is indicated by arrow 33 and is the same as the crystal orientation of arrow 32 .
  • the proportion of low-angle grain boundaries where the angle ⁇ formed by the two arrows 32 and 33 is 2 to 15° is 50% or more.
  • the proportion of low-angle grain boundaries is 25% or less when the tungsten material is heat-treated at 1500°C for 1 hour. More preferably, it is 10% or less.
  • the method for measuring the low-angle grain boundaries is as follows. An arbitrary surface of the tungsten material was used as the measurement surface. After subjecting the surface to be measured to mechanical polishing, a cross-section was processed using a cross-section polisher at an acceleration voltage of 6 kV and an irradiation current of 130 ⁇ A, and then measured. The field of view of the measurement plane was 200 ⁇ m ⁇ 600 ⁇ m, and the crystal grains were included as shown in FIG. Grain 12 contacts grains 11 and 13 . An angle ⁇ A formed by specific crystal orientations of crystal grains 11 and 12 was measured. The angle formed by the specific orientations of the crystal grains 12 and 13 is defined as ⁇ B.
  • the angles formed between adjacent crystal grains centered on the crystal grain 12 included in the field of view were measured.
  • the measurement was performed centering on the crystal grain 12 .
  • the angles formed between adjacent and different crystal grains are measured 200 while moving the range of the field of view of 200 ⁇ m ⁇ 600 ⁇ m as necessary, and the 200 measurement results are used to measure 2 to 2
  • the proportion of low-angle grain boundaries of 15° or less was calculated.
  • the grain boundary characteristics in the measurement field were measured using an EBSD attached to an SEM (Gemini 450 manufactured by ZEISS).
  • the SEM conditions were an acceleration voltage of 30 kV, an irradiation current of 25 nA, and the EBSD conditions were a WD of 13 mm and a 0.5 ⁇ m step.
  • the average (100) lattice strain is less than or equal to 0.25% in any ten fields of view of the tungsten material. Even if it exceeds 0.25%, cracking due to thermal shock at high temperature did not occur, but if it is 0.25% or less, deformation at high temperature does not occur and it shows superiority in applications such as furnace members. I found out. More preferably, it is 0.20% or less.
  • a method for measuring the lattice strain is as follows. Let any surface of the tungsten material be the measurement surface. After subjecting the measurement surface to mechanical polishing, it was subjected to DC electropolishing at 10 V using a 1 N KOH solution at a liquid temperature of 22° C., and a hardened layer of 20 ⁇ m removed by mechanical polishing was used as the measurement surface.
  • the lattice strain was measured using an X-ray diffractometer (Empyrean, DY1204 manufactured by Malvern Panalytical). Measurement conditions were as follows: Cu tube, voltage of 45 kV, current of 40 mA, slit of 10 mm, scan speed of 0.11°/s, and measurement from 2 ⁇ : 35 to 135°. High score plus was used for the analysis of the measured data, and the (100) lattice strain was calculated based on the Rietveld method. An average value of lattice strain in 10 fields of view was obtained.
  • the purity of the tungsten material is preferably 99.9% by mass or more.
  • the purity of tungsten material is defined as follows. The purity analysis method is performed according to JIS H1402 (2001) and JIS H1403 (2001). , and Si are assumed to exist as oxides (Al 2 O 3 , CaO, MgO, SiO 2 ) and converted to oxides. The purity of tungsten was obtained by subtracting Mo, Fe, Al 2 O 3 , CaO, MgO, and SiO 2 in terms of oxides from 100.
  • tungsten alloys containing elements other than tungsten can also be used.
  • the above tungsten alloy not only has a crystal grain size of 200 ⁇ m or less even under a temperature load exceeding 2000° C., but is also expected to have high strength due to solid solution/dispersion strengthening of additive elements.
  • the tungsten alloy is selected from the group consisting of Re (rhenium), Ta (tantalum), Cr (chromium), K (potassium), Mo (molybdenum), Ti (titanium), and Zr (zirconium) in addition to tungsten. 20% by mass or less in total of at least one element.
  • Re rhenium
  • Ta tantalum
  • Cr chromium
  • K potassium
  • Mo molecular molybdenum
  • Ti titanium
  • Zr zirconium
  • the form of the additive may be not only pure metal but also oxide, hydride and carbide.
  • the crystal grain size after heat-treating the tungsten material at a temperature of 2000° C. for 1 hour is preferably 200 ⁇ m or less. If it exceeds 200 ⁇ m, there is a risk of cracking or deformation due to thermal shock. More preferably, it is 100 ⁇ m or less.
  • Tungsten material is not only a simple shape, but it can also be machined to make holes or be bent to achieve the same effect. Furthermore, the same effect can be obtained by bonding with a material other than tungsten such as stainless steel, copper, or a copper alloy by brazing or pressure welding.
  • the thickness of the tungsten material was measured at arbitrary 10 points with a micrometer, and the average value was used.
  • Example 1 Production of Tungsten Material (1-1) Production Process of Tungsten Sintered Body A pure W powder was obtained as a raw material by reducing W oxide.
  • the pure W powder has an FSSS average particle size of 2.5 ⁇ m according to the Fisher method.
  • Pure W powder if necessary, Re powder with FSSS average particle size of 4.0 ⁇ m, Ta and Cr powder with 20 ⁇ m, Mo powder with FSSS average particle size of 4.2 ⁇ m, TiH2 powder with 20 ⁇ m, FSSS average particle size of 3.
  • a ZrC powder of 0 ⁇ m was prepared, added to a pure W powder in a certain amount, and mixed using a mortar to obtain a mixed powder.
  • K was reduced by spraying a KOH aqueous solution onto W oxide to obtain a K-containing W powder.
  • powders of sample numbers 1 to 24, 31 to 54 and 61 to 80 shown in Tables 1 to 3 were obtained.
  • Sample numbers 61 to 80 are pure W powders.
  • a press molding was produced from this powder by die pressing using a pressing machine.
  • This press molded body was sintered in a hydrogen atmosphere at 2200° C. for 30 hours using a sintering furnace to obtain a W sintered body.
  • the size of the sintered body at this time was 100 mm ⁇ 100 mm ⁇ 100 mm in thickness.
  • the density after sintering was 18.2 g/cm 3 .
  • the W powder preferably has an FSSS average particle size of 1 ⁇ m or more and 10 ⁇ m or less. If the FSSS average particle size exceeds 10 ⁇ m, the density may not be high enough to withstand rolling. If the FSSS average particle size is less than 1 ⁇ m, there is a risk that density variations will occur in the sintered body.
  • an inert atmosphere such as an argon atmosphere and a vacuum atmosphere can be selected. If the density after sintering is 17.5 g/cm 3 or more, it is possible to combine multiple sintering atmospheres (for example, a hydrogen atmosphere up to 1200° C., a vacuum atmosphere from 1200 to 2000° C., etc.), and the sintering temperature, The sintering time can also be arbitrarily selected.
  • the heating atmosphere during rolling may be nitrogen atmosphere, argon atmosphere, or hydrogen atmosphere.
  • the heating temperature during rolling is preferably 1800° C. or higher and 2000° C. or lower. If the temperature exceeds 2000° C., the life of the heating furnace is shortened, resulting in poor productivity. If the temperature is less than 1800° C., it is difficult to control grain boundary characteristics and lattice strain.
  • the reduction ratio of warm rolling is preferably 5% or more and 15% or less. If it is less than 5% or more than 15%, it is difficult to control grain boundary properties and lattice strain.
  • the heating temperature was set to 1600°C, and the material with a thickness of about 10 mm produced in the previous rolling process was heated and rolled while sampling to a thickness of 0.5 mm while repeating rolling and heating.
  • the heating atmosphere during rolling may be nitrogen atmosphere, argon atmosphere, or hydrogen atmosphere.
  • the heating temperature during rolling is preferably 1600°C or higher and 1800°C or lower. This is because crystal grains tend to grow as processing progresses, and if the temperature is less than 1600° C., it is difficult to control grain boundary characteristics and lattice strain, and if the temperature exceeds 1800° C., crystal grains tend to grow.
  • each sample was examined for cracks and deformation.
  • the evaluation was A, and 1 and 2 cracks were observed, and each crack remained only on the surface, the evaluation was B. and When three or more cracks or cracks were observed to the inside, the evaluation was made C.
  • Thermal deformation test Place the 10 mm ⁇ 100 mm surface of each sample (heater after test) after evaluation in (2-6) on a flat base plate and use a clearance gauge to measure the amount of warpage ( The gap between each sample and the base plate) was measured. Evaluation was made A when the gap was 3 mm or less. The evaluation was B when the gap exceeded 3 mm and up to 10 mm. A material with a gap of 10 mm or more or a crack was evaluated as C.
  • Example 2 Using pure W powder, sample numbers 81 to 87 in Table 4 were obtained according to "(1) Production of tungsten material" in Example 1 above.

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PCT/JP2022/014433 2021-04-06 2022-03-25 タングステン材料 Ceased WO2022215551A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN202510391186.6A CN120210625A (zh) 2021-04-06 2022-03-25 钨材料
CN202510390529.7A CN120210624A (zh) 2021-04-06 2022-03-25 钨材料
JP2022552608A JP7241983B2 (ja) 2021-04-06 2022-03-25 タングステン材料
US17/928,531 US20230212726A1 (en) 2021-04-06 2022-03-25 Tungsten material
KR1020227043213A KR102830735B1 (ko) 2021-04-06 2022-03-25 텅스텐 재료
CN202280005064.3A CN115917025B (zh) 2021-04-06 2022-03-25 钨材料
EP22784536.9A EP4144879A4 (en) 2021-04-06 2022-03-25 TUNGSTEN MATERIAL

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JP2021064811 2021-04-06
JP2021-064811 2021-04-06

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US (1) US20230212726A1 (https=)
EP (1) EP4144879A4 (https=)
JP (1) JP7241983B2 (https=)
KR (1) KR102830735B1 (https=)
CN (3) CN115917025B (https=)
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025205023A1 (ja) 2024-03-25 2025-10-02 株式会社アライドマテリアル タングステン材料およびプラズマ対向材料

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133356A (ja) * 1982-02-04 1983-08-09 Tokyo Tungsten Co Ltd タングステン材料及びその製造方法
JPS62146235A (ja) 1985-12-19 1987-06-30 Toshiba Corp タングステン部材とその製造方法
JPH029786A (ja) * 1988-06-29 1990-01-12 Natl Res Inst For Metals タングステン又はモリブデン多重層結晶及びその製造方法
JPH06116077A (ja) * 1992-10-08 1994-04-26 Tokyo Tungsten Co Ltd 高融点金属単結晶及びその製造方法
WO2005073418A1 (ja) * 2004-01-30 2005-08-11 Nippon Tungsten Co., Ltd. タングステン系焼結体およびその製造方法
WO2012097393A1 (de) * 2011-01-19 2012-07-26 Plansee Se Röntgendrehanode
CN102796977A (zh) * 2012-08-25 2012-11-28 安泰科技股份有限公司 一种高性能变形态钨板的制备方法
CN111136264A (zh) * 2020-01-14 2020-05-12 西安瑞福莱钨钼有限公司 一种钨棒墩粗生产超厚钨板的方法
JP2021064811A (ja) 2021-01-19 2021-04-22 株式会社東京精密 ワーク分割装置及びワーク分割方法

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Publication number Priority date Publication date Assignee Title
DE102015218408A1 (de) * 2015-09-24 2017-03-30 Siemens Aktiengesellschaft Bauteil und/oder Oberfläche aus einem Refraktärmetall oder einer Refraktärmetalllegierung für thermozyklische Belastungen und Herstellungsverfahren dazu
CN110181050B (zh) * 2019-06-04 2021-01-15 合肥工业大学 一种WRe/TZM/石墨的SPS烧结连接方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133356A (ja) * 1982-02-04 1983-08-09 Tokyo Tungsten Co Ltd タングステン材料及びその製造方法
JPS62146235A (ja) 1985-12-19 1987-06-30 Toshiba Corp タングステン部材とその製造方法
JPH029786A (ja) * 1988-06-29 1990-01-12 Natl Res Inst For Metals タングステン又はモリブデン多重層結晶及びその製造方法
JPH06116077A (ja) * 1992-10-08 1994-04-26 Tokyo Tungsten Co Ltd 高融点金属単結晶及びその製造方法
WO2005073418A1 (ja) * 2004-01-30 2005-08-11 Nippon Tungsten Co., Ltd. タングステン系焼結体およびその製造方法
WO2012097393A1 (de) * 2011-01-19 2012-07-26 Plansee Se Röntgendrehanode
CN102796977A (zh) * 2012-08-25 2012-11-28 安泰科技股份有限公司 一种高性能变形态钨板的制备方法
CN111136264A (zh) * 2020-01-14 2020-05-12 西安瑞福莱钨钼有限公司 一种钨棒墩粗生产超厚钨板的方法
JP2021064811A (ja) 2021-01-19 2021-04-22 株式会社東京精密 ワーク分割装置及びワーク分割方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025205023A1 (ja) 2024-03-25 2025-10-02 株式会社アライドマテリアル タングステン材料およびプラズマ対向材料

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