WO2022137894A1 - 板ガラス加工装置及び板ガラスの製造方法 - Google Patents

板ガラス加工装置及び板ガラスの製造方法 Download PDF

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Publication number
WO2022137894A1
WO2022137894A1 PCT/JP2021/042101 JP2021042101W WO2022137894A1 WO 2022137894 A1 WO2022137894 A1 WO 2022137894A1 JP 2021042101 W JP2021042101 W JP 2021042101W WO 2022137894 A1 WO2022137894 A1 WO 2022137894A1
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WIPO (PCT)
Prior art keywords
plate glass
linear motor
processing
processing tool
processing apparatus
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Application number
PCT/JP2021/042101
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English (en)
French (fr)
Japanese (ja)
Inventor
愛信 星野
和宏 大野
宏佳 進藤
Original Assignee
日本電気硝子株式会社
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Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020237003381A priority Critical patent/KR20230125165A/ko
Priority to JP2022571962A priority patent/JPWO2022137894A1/ja
Priority to CN202180064940.5A priority patent/CN116261502A/zh
Publication of WO2022137894A1 publication Critical patent/WO2022137894A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces
    • B24B41/053—Grinding heads for working on plane surfaces for grinding or polishing glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Definitions

  • the present invention relates to a flat glass processing apparatus for processing the end face of flat glass and a method for manufacturing flat glass.
  • Patent Document 1 discloses a constant pressure type plate glass processing apparatus that processes an end face of a plate glass by relatively moving the plate glass and the processing tool with respect to the feeding direction.
  • the plate glass processing device includes an arm member that rotatably supports the processing tool, a support shaft portion that rotatably supports the arm member, and a servo mechanism that causes the arm member to generate a force that the processing tool presses on the end face of the plate glass. To prepare for.
  • the servo mechanism of the flat glass processing device has a rotation shaft, a servomotor that rotatably drives the arm member around the support shaft member, and a link mechanism that connects the rotation shaft of the servomotor and the arm member. To prepare for.
  • the servo mechanism can adjust the pressing force of the processing tool against the flat glass by transmitting the power of the servo motor to the arm member via the link mechanism.
  • the servo mechanism can accurately process the end face of the flat glass by its feedback control.
  • the conventional flat glass processing device uses an arm member and a link mechanism, the width dimension of the flat glass processing device in the feed direction becomes large. For this reason, for example, when a plurality of processing tools are arranged side by side and the flat glass is processed one by one by these plurality of processing tools, it is difficult to shorten the processing time (tact time).
  • the present invention has been made in view of the above circumstances, and it is a technical subject to reduce the width dimension of the flat glass processing apparatus.
  • the present invention is for solving the above-mentioned problems, and is a plate glass processing apparatus for processing the end face of the plate glass by relatively moving the plate glass and the processing tool, wherein the processing tool is used for the plate glass.
  • a servo mechanism for moving the end face in a pressing direction is provided, and the servo mechanism is characterized by including a coreless linear motor.
  • the servo mechanism can be moved in the direction of pressing the end face of the flat glass without using a rotating member (arm member) or a link mechanism as in the conventional case. .. Since the coreless linear motor is configured without winding a coil around the iron core (core), the dimensions of the flat glass processing device can be reduced as compared with the case where a rotating member or a link mechanism is used. Therefore, the width dimension of the plate glass processing apparatus in the feed direction can be made as small as possible, and the plate glass can be efficiently processed.
  • the servo mechanism may move the processing tool linearly along a cutting direction intersecting the feed direction, which is a direction along the end surface of the plate glass. ..
  • the width dimension of the flat glass processing device in the feed direction can be made smaller.
  • the servo mechanism includes a support member that supports the processing tool and is driven by the coreless linear motor, and a guide mechanism that linearly guides the support member.
  • the coreless linear motor and the guide mechanism may be arranged so as to overlap each other in the feed direction.
  • the coreless linear motor may be arranged below the support member.
  • the center of gravity of the flat glass processing apparatus can be set to a lower position as much as possible. Therefore, the flat glass processing apparatus can support the processing tool in a stable posture.
  • the method for manufacturing a plate glass according to the present invention is characterized by comprising a step of processing the end face of the plate glass by the above-mentioned plate glass processing apparatus.
  • the present invention it is possible to reduce the width dimension of the plate glass processing apparatus in the feed direction of the plate glass.
  • the plate glass A to be processed by the plate glass processing apparatus has a rectangular plate shape.
  • the plate thickness of the plate glass A is, for example, 0.05 mm to 10 mm.
  • the present invention is not limited to this.
  • the present invention can also be applied to the processing of a plate glass A having a shape other than a rectangle (for example, a polygon or a circle) and the processing of a plate glass A having a plate thickness other than 0.05 mm to 10 mm.
  • the end face of the plate glass A is processed by the processing tool B.
  • Examples of the end face processing of the plate glass A by the processing tool B include chamfering (grinding processing) of the end surface of the plate glass A. Further, the end face processing of the plate glass A by the processing tool B may also be a polishing process for making the unevenness of the end surface uniform after the chamfering process.
  • the processing tool B is, for example, a grindstone that is rotationally driven around a rotation axis, and the end face of the plate glass A is ground or polished while the grindstone rotates.
  • the processing tool B for grinding for example, a so-called electrodeposition grindstone in which diamond grindstones, which are high-rigidity grindstones, are hardened with an electrodeposition bond, or a so-called metal grindstone in which the grindstones are hardened with a metallic binder are preferable. Can be used.
  • the plate glass A and the processing tool B move relatively.
  • the direction in which the plate glass A and the processing tool B move relatively along the end surface of the plate glass A is referred to as a “feeding direction”.
  • processing can be performed with the processing tool B fixed to the plate glass A moving along the feeding direction C.
  • the fixed plate glass A may be processed while the processing tool B moves along the feed direction C.
  • the processing tool B is configured to be able to approach and separate from the end face of the plate glass A in a direction intersecting the feed direction C (for example, in a direction orthogonal to each other). Thereby, the processing tool B can adjust the processing amount (cutting amount) of the end face of the plate glass A.
  • the direction in which the processing tool B approaches and separates from the end face of the plate glass A is referred to as a “cutting direction”.
  • the direction in which the processing tool B approaches the end face of the plate glass A is referred to as "forward in the cutting direction”
  • the direction in which the processing tool B separates from the end surface of the plate glass A is referred to as "rear in the cutting direction”.
  • the plate glass processing device 1 includes a rotation drive device 2 for driving the processing tool B, a servo mechanism 3 for moving the processing tool B in a direction of pressing the end face of the plate glass A, and a rotation drive.
  • a control device 4 for executing control of the device 2 and the servo mechanism 3 is provided.
  • the rotation drive device 2 is an electric motor that rotates the grindstone as the processing tool B around the rotation axis.
  • the electric motor a synchronous motor, an induction motor, a servo motor, or the like can be used, but the electric motor is not limited thereto.
  • the rotation drive device 2 is connected to the control device 4, and its start, stop, rotation speed, and the like can be controlled.
  • the servo mechanism 3 includes a support member 5 that supports the processing tool B and the rotary drive device 2, and a guide mechanism 6a that linearly guides the support member 5 along the cutting direction D. 6b, a coreless linear motor 7 that drives the support member 5, a detector 8 that detects the position of the processing tool B, a control unit 9 (servo amplifier, driver) that executes control of the coreless linear motor 7, and a guide mechanism. 6a, 6b and a base 10 for supporting the coreless linear motor 7 are provided. The servo mechanism 3 executes feedback control of the coreless linear motor 7 by the detector 8 and the control unit 9.
  • the support member 5 is composed of a long plate member, but is not limited to this shape, and may be composed of a block shape or other various shapes. It can be said that the support member 5 is arranged below the processing tool B.
  • the support member 5 supports the rotation drive device 2 and the detector 8 on the upper surface thereof. Further, the support member 5 supports a part of the coreless linear motor 7 on the lower surface thereof.
  • the lower surface of the support member 5 is fixed to the guide mechanisms 6a and 6b. By being supported by the guide mechanisms 6a and 6b, the support member 5 can move linearly along the cutting direction D.
  • the guide mechanisms 6a and 6b are arranged below the support member 5.
  • the guide mechanisms 6a and 6b are linear guide mechanisms configured by, for example, a cross roller guide.
  • the guide mechanisms 6a and 6b include a first guide mechanism 6a and a second guide mechanism 6b.
  • the first guide mechanism 6a and the second guide mechanism 6b are arranged at intervals in the feed direction C. As shown in FIGS. 1 and 2, the distance S1 between the first guide mechanism 6a and the second guide mechanism 6b in the feed direction C is set to be equal to or larger than the width dimension W1 of the coreless linear motor 7 in the feed direction C.
  • Each guide mechanism 6a, 6b includes a movable portion 11 and a base portion 12 that movably supports the movable portion 11.
  • the movable portion 11 is fixed to the lower surface of the support member 5.
  • the base 12 is fixed to the base 10.
  • the base portion 12 movably supports the movable portion 11 along the cutting direction D via a cross roller (not shown).
  • the coreless linear motor 7 is arranged below the support member 5.
  • the coreless linear motor 7 is arranged in the rear DB in the cutting direction from the guide mechanisms 6a and 6b. This makes it possible to prevent the liquid from adhering to the coreless linear motor 7 even when the liquid for cooling or cleaning is used for the processing tool B. Further, the coreless linear motor 7 is located between the first guide mechanism 6a and the second guide mechanism 6b in the feed direction C or in the front view (see FIG. 2).
  • the coreless linear motor 7 includes a stator 13 and a mover 14.
  • the stator 13 is fixed to the base 10.
  • the stator 13 includes a plurality of magnets 15 and a mounting seat 16 that supports the magnets 15.
  • the mounting seat 16 includes a pair of support portions 16a and 16b arranged at intervals in the vertical direction, and a connecting portion 16c connecting the first support portion 16a and the second support portion 16b.
  • the pair of support portions 16a and 16b project in the same direction from the connecting portion 16c along the horizontal direction.
  • the pair of support portions 16a and 16b each support a plurality of magnets 15.
  • the connecting portion 16c supports the pair of supporting portions 16a and 16b in a state of being separated in the vertical direction.
  • the pair of support portions 16a and 16b includes a first support portion 16a located above and a second support portion 16b located below.
  • a groove into which the mover 14 is inserted is formed between the first support portion 16a and the second support portion 16b.
  • the groove portion opens in the horizontal direction and extends along the notch direction D.
  • the first support portion 16a is located below the support member 5 without contacting the support member 5.
  • the second support portion 16b is fixed to the base 10.
  • Each of the support portions 16a and 16b supports a plurality of magnets 15 so that the polarities of the adjacent magnets 15 are different from each other in the cutting direction D. That is, the plurality of magnets 15 supported by the support portions 16a and 16b are arranged so that the N-pole magnet 15 and the S-pole magnet 15 are alternately arranged in the cutting direction D.
  • the magnet 15 supported by the first support portion 16a and the magnet 15 supported by the second support portion 16b face each other in the vertical direction.
  • Each of the support portions 16a and 16b supports a plurality of magnets 15 so that the polarities of the magnets 15 facing each other in the vertical direction are different. That is, for example, the N-pole magnet 15 supported by the first support portion 16a faces the S-pole magnet 15 supported by the second support portion 16b.
  • the movable element 14 includes an armature winding 14a inserted into the groove portion of the stator 13 and a holding portion 14b for holding the armature winding 14a.
  • the armature winding 14a has a plurality of coils and is covered with a mold resin.
  • the holding portion 14b holds one end of the armature winding 14a on the outside of the groove in a state where the armature winding 14a is inserted into the groove of the stator 13.
  • the upper end of the holding portion 14b is fixed to the lower surface of the support member 5.
  • the detector 8 is composed of, for example, a linear encoder.
  • a magnetic linear encoder is exemplified as the detector 8, but an optical linear encoder or the like may be used.
  • the detector 8 includes a magnetic sensor 17 fixed to the upper surface of the support member 5, a magnetic scale 18 fixed to a structure arranged in the vicinity of the support member 5. To prepare for. The detector 8 can detect the position of the processing tool B in the cutting direction D by reading the position of the magnetic sensor 17 with respect to the magnetic scale 18 as the support member 5 moves.
  • the control unit 9 is connected to the detector 8 and the control device 4, and can transmit a signal from the detector 8 to the control device 4. As shown in FIG. 4, the control unit 9 includes a speed pressing / position control unit 19 and a power conversion unit 20.
  • the speed pressing force / position control unit 19 executes control for maintaining the moving speed (hereinafter, simply referred to as “speed”) and / or the pressing force of the processing tool B in the cutting direction D to be constant. That is, in the speed pressing force / position control unit 19, a target value (reference value) for keeping the speed and pressing force of the processing tool B detected by the detector 8 and the power conversion unit 20 constant is set. , Feedback control (hereinafter referred to as "speed pressing control mode") for maintaining this target value is executed.
  • the target value of the speed in this embodiment is set to 0. Further, the pressing force is obtained by calculation from the speed at which the processing tool B moves along the feed direction C, the processing allowance of the processing tool B with respect to the plate glass A, the rotation speed of the processing tool B, and the like.
  • This speed pressing force control mode is executed in a complex manner while properly using both the speed control and the pressing force control of the machining tool B. Further, in the speed pressing force control mode, the speed control of the machining tool B (hereinafter referred to as “speed control mode”) is executed at the start of control, and then the pressing force control of the machining tool B (hereinafter referred to as “pressing pressure control mode”) is performed. ) Is also included.
  • the speed pressing / position control unit 19 can execute only the speed control mode for maintaining the speed of the machining tool B at a constant level, or can execute only the pressing force control mode for maintaining the pressing force of the machining tool B at a constant level. ..
  • the speed pressing force / position control unit 19 can also execute control for keeping the position of the machining tool B constant. That is, the speed pressing force / position control unit 19 sets a target value (reference value) for maintaining a constant value of the position (position of the support member 5) of the processing tool B detected by the detector 8. Feedback control (hereinafter referred to as "position control mode”) can be executed so as to maintain this target value.
  • the power conversion unit 20 converts the values related to the speed, the pressing force, and the position input from the speed pressing / position control unit 19 into a signal for driving the coreless linear motor 7.
  • the base 10 is composed of a long plate member, but is not limited to this configuration.
  • the base 10 has a support surface 10a that supports the base 12 of the guide mechanisms 6a and 6b and the stator 13 of the coreless linear motor 7.
  • the control device 4 includes, for example, a computer (for example, a PC) that implements various hardware such as a CPU, ROM, RAM, HDD, monitor, and input / output interface.
  • the control device 4 executes start, stop, and control of the rotation speed of the machining tool B by the rotation drive device 2.
  • the control device 4 Based on the signal from the control unit 9 of the servo mechanism 3, the control device 4 has a cutting position of the processing tool B, a moving speed of the processing tool B in the cutting direction D, a pressing force of the processing tool B against the end face of the plate glass A, and the like. To control.
  • a large flat glass E is molded by a known molding method such as a float method, a rollout method, a downdraw method, or a redraw method. Then, by cutting the plate glass E to a predetermined size, the plate glass A to be processed by the plate glass processing apparatus 1 is obtained. The cutting of the plate glass E is performed by, for example, scribe cutting.
  • the scribe wheel F is driven along the planned cutting line CL of the large flat glass E.
  • a scribe line having a predetermined depth is formed on the flat glass E along the planned cutting line CL.
  • a bending moment is applied around the scribe line to break the flat glass E along the scribe line.
  • a plurality of flat glass A are obtained by this folding.
  • the plate glass processing apparatus 1 performs grinding processing (chamfering processing) on the end faces of each side of the plate glass A.
  • 6 (a) to 6 (e) show the process of grinding the plate glass A by the plate glass processing apparatus 1.
  • FIG. 6A shows the state of the processing tool B immediately before the start of processing.
  • the machining tool B is positioned at the initial position by a stopper (not shown) under the control of the control device 4.
  • the control mode of the speed pressing / position control unit 19 is switched to the speed pressing control mode.
  • control device 4 drives the coreless linear motor 7 of the servo mechanism 3 and applies a force to the DF forward in the cutting direction to the processing tool B via the support member 5. Further, the control device 4 drives the rotation drive device 2 to rotate the processing tool B.
  • FIG. 6B shows a state when the processing tool B comes into contact with the flat glass A.
  • FIG. 7 shows the behavior of the processing tool B after it comes into contact with the plate glass A until it relatively moves a predetermined distance (hereinafter referred to as “initial processing distance”) L.
  • the end surface of the plate glass A is shown as a flat surface (straight line in a plan view) in order to clearly display the behavior of the processing tool B.
  • the processing tool B collides with the start end portion A1 of the plate glass A at the set pressing force. As a result, the processing tool B tends to move away from the flat glass A. That is, the processing tool B moves to the rear DB in the cutting direction.
  • the detector 8 and the power conversion unit 20 input signals related to speed, position, and pressing force to the speed pressing force / position control unit 19, and the speed pressing force control mode is executed based on this signal. To.
  • the ratio of speed control and pressing force control is changed according to the change in speed (position).
  • the degree of switching of the ratio can be changed by setting the gain.
  • the speed pressing force control mode when the speed (position) changes drastically at the start of machining, the speed control ratio becomes large, and a force is generated on the plate glass A in the front DF in the cutting direction.
  • the support member 5 generates a force (pushing pressure) for suppressing the processing tool B from moving away from the plate glass A by this force. As a result, the processing tool B can continue grinding while maintaining contact with the plate glass A.
  • the processing tool B can process the end face in a state where the processing allowance G is secured without being separated from the end face of the plate glass A while moving the initial processing distance L.
  • the bouncing phenomenon in which the machining tool B repeatedly separates from the end face of the plate glass A and contacts the end face is prevented.
  • the above-mentioned speed pressing force control mode may be maintained, or the grinding process may be performed by switching to the pressing force control mode. You may go.
  • the control unit 9 of the servo mechanism 3 switches the control mode to the position control mode when the processing tool B approaches the end portion A2 of the plate glass A.
  • the control device 4 transmits a trigger signal necessary for this switching to the control unit 9.
  • the plate glass processing apparatus 1 grinds the end face in the position control mode in the range from the middle portion of one side of the plate glass A to the end portion A2 of the plate glass A. conduct.
  • a target value (reference value) for maintaining a constant position (position of the support member 5) of the processing tool B detected by the detector 8 is set, and feedback for maintaining this target value is set. Control is executed.
  • the position control mode is continuously executed until the processing tool B passes through the end portion A2 of the plate glass A. Therefore, even when the processing tool B reaches the end portion A2 of the plate glass A and tries to separate from the end portion A2, the end portion A2 is not excessively scraped off.
  • the end faces of each side of the plate glass A are polished.
  • This polishing process is performed by a plate glass processing device 1 provided with a processing tool B (grinding stone) for polishing.
  • a processing tool B grinding stone
  • the corner portion of the plate glass A is subjected to a cornering process. This cornering process may be performed before or at the same time as the grinding process by the plate glass processing apparatus 1.
  • the servo mechanism 3 is configured by a linear motion mechanism using a coreless linear motor 7 and thus rotates as in the conventional case.
  • the processing tool B can be moved in the direction of pressing the end face of the plate glass A without using an arm member which is a member or a link mechanism for operating the arm member.
  • the coreless linear motor 7 is configured without winding a coil around the iron core (core)
  • the dimensions of the flat glass processing device 1 can be reduced as compared with the case where a rotating member or a link mechanism is used. Therefore, the width dimension of the plate glass processing apparatus 1 in the feed direction C can be made as small as possible, and the plate glass A can be efficiently processed.
  • the positional relationship between the guide mechanism and the coreless linear motor is different from that of the first embodiment. That is, the distance S2 between the first guide mechanism 6a and the second guide mechanism 6b of the flat glass processing device 1 is smaller than the distance S1 between the first guide mechanism 6a and the second guide mechanism 6b in the first embodiment.
  • a part of the coreless linear motor 7 and a part of the guide mechanisms 6a and 6b are arranged so as to overlap each other in the feed direction C or in the front view (see FIG. 9).
  • the first guide mechanism 6a and the second guide mechanism 6b are overlapped with the coreless linear motor 7 in the feed direction C so that the distance S2 between the first guide mechanism 6a and the second guide mechanism 6b becomes smaller. There is. In this way, by reducing the distance S2 between the first guide mechanism 6a and the second guide mechanism 6b, the width dimension of the support member 5 and the base 10 in the feed direction C can be made as small as possible. The overall width of the flat glass processing apparatus 1 can also be reduced.
  • FIGS. 10 and 11 show a third embodiment of the flat glass processing apparatus.
  • the configuration of the coreless linear motor of the servo mechanism in the flat glass processing apparatus is different from that of the first embodiment.
  • the stator 13 of the coreless linear motor 7 has a groove portion that opens upward.
  • the mounting seat 16 of the stator 13 has a pair of support portions 16a and 16b arranged at intervals in the feed direction C, and a connecting portion 16c connecting the pair of support portions 16a and 16b. Be prepared.
  • the pair of support portions 16a and 16b are erected upward from the connecting portion 16c.
  • the connecting portion 16c is fixed to the support surface 10a of the base 10.
  • the magnet 15 supported by the first support portion 16a and the magnet 15 supported by the second support portion 16b face each other in the horizontal direction (feed direction C).
  • the mover 14 of the coreless linear motor 7 includes an armature winding 14a arranged along the vertical direction and a holding portion 14b for holding the armature winding 14a.
  • the armature winding 14a is arranged along the horizontal direction, but in the present embodiment, by arranging the armature winding 14a along the vertical direction, the armature winding 14a is arranged in the feed direction C.
  • the width dimension W2 of the coreless linear motor 7 can be made smaller than the width dimension W1 of the coreless linear motor 7 according to the first embodiment.
  • FIGS. 12 and 13 show a fourth embodiment of the flat glass processing apparatus.
  • the positional relationship between the guide mechanism of the servo mechanism and the coreless linear motor in the flat glass processing apparatus is different from that of the third embodiment.
  • the distance S2 in the feed direction C between the first guide mechanism 6a and the second guide mechanism 6b of the plate glass processing apparatus 1 according to the present embodiment is the distance S1 between the first guide mechanism 6a and the second guide mechanism 6b in the third embodiment. Smaller than. That is, in the flat glass processing apparatus 1, a part of the first guide mechanism 6a and a part of the second guide mechanism 6b are part of the coreless linear motor 7 having the same configuration as that of the third embodiment, and the feed direction C or the front view. (See FIG. 13), they are arranged so as to overlap each other.
  • FIG. 14 and 15 show a fifth embodiment of the flat glass processing apparatus.
  • the positional relationship between the guide mechanism of the servo mechanism and the coreless linear motor is different from that of the second embodiment.
  • the coreless linear motor 7 overlaps with both the first guide mechanism 6a and the second guide mechanism 6b in the feed direction C or in front view, but the plate glass according to the present embodiment.
  • the coreless linear motor 7 overlaps only the first guide mechanism 6a and does not overlap with the second guide mechanism 6b.
  • the coreless linear motor 7 is closer to the first guide mechanism 6a with respect to the center line O1 drawn between the first guide mechanism 6a and the second guide mechanism 6b. They are misaligned.
  • the coreless linear motor 7 may be arranged so as to overlap only the second guide mechanism 6b. Further, the configuration of the plate glass processing apparatus 1 according to the present embodiment can also be applied to the plate glass processing apparatus of the fourth embodiment.
  • FIG. 16 and 17 show a sixth embodiment of the flat glass processing apparatus.
  • the flat glass processing apparatus of the first embodiment is turned upside down.
  • the servo mechanism 3 of the flat glass processing device 1 is located above the processing tool B.
  • the support member 5 of the servo mechanism 3 supports the rotation drive device 2 and the detector 8 (magnetic sensor 17) on the lower surface thereof.
  • the support member 5 supports the mover 14 of the coreless linear motor 7 on its upper surface.
  • the upper surface of the support member 5 is fixed to the guide mechanisms 6a and 6b.
  • the guide mechanisms 6a and 6b of the servo mechanism 3 are arranged above the support member 5.
  • the movable portion 11 of the guide mechanisms 6a and 6b is fixed to the upper surface of the support member 5.
  • the base 12 of the guide mechanisms 6a and 6b is fixed to the base 10 located above the support member 5.
  • the coreless linear motor 7 of the servo mechanism 3 is arranged above the support member 5.
  • the first support portion 16a is located below and the second support portion 16b is located above.
  • the mover 14 (holding portion 14b) of the coreless linear motor 7 projects upward from the upper surface of the support member 5.
  • the support surface 10a of the base 10 in the servo mechanism 3 faces downward, and supports the stator 13 (second support portion 16b) of the coreless linear motor 7.
  • the present invention is not limited to the configuration of the present embodiment, and the present invention may adopt a configuration in which the flat glass processing apparatus according to the second to fifth embodiments is turned upside down.
  • the present invention is not limited to the configuration of the above embodiment, and is not limited to the above-mentioned action and effect.
  • the present invention can be modified in various ways without departing from the gist of the present invention.

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WO2024111468A1 (ja) * 2022-11-21 2024-05-30 日本電気硝子株式会社 板ガラス加工装置及び板ガラスの製造方法
WO2024111467A1 (ja) * 2022-11-21 2024-05-30 日本電気硝子株式会社 板ガラスの製造方法

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JP2014200881A (ja) * 2013-04-04 2014-10-27 日本電気硝子株式会社 基板加工装置、基板加工方法、及び加工具
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JP2002028858A (ja) * 2000-07-14 2002-01-29 Toyoda Mach Works Ltd 工具台駆動用リニアモータのサーボ制御装置
JP2002034231A (ja) * 2000-07-19 2002-01-31 Yaskawa Electric Corp リニアスライダ
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WO2024111467A1 (ja) * 2022-11-21 2024-05-30 日本電気硝子株式会社 板ガラスの製造方法

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